File: tingxu202206_DataLogs	Date: 2022-06-27 08:00:09
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 08:00:02 2022	Mon Jun 27 08:00:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4252	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.591	23.506	328085	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:59:58 2022	Mon Jun 27 08:00:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4251	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.683	-273.150	0.000	23.500	652089	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:59:53 2022	Mon Jun 27 07:59:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4250	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.587	23.493	652926	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:59:48 2022	Mon Jun 27 07:59:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4249	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.682	-273.150	28.590	23.493	626059	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:59:43 2022	Mon Jun 27 07:59:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4248	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.522	0.000	652843	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:59:38 2022	Mon Jun 27 07:59:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4247	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.579	23.515	645522	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:59:33 2022	Mon Jun 27 07:59:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4246	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.649	23.516	535898	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:59:29 2022	Mon Jun 27 07:59:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4245	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.533	23.513	652326	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B739_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:59:24 2022	Mon Jun 27 07:59:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4244	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.679	-273.150	28.576	23.510	654445	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:59:10 2022	Mon Jun 27 07:59:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1968	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.608	23.513	653719	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:59:06 2022	Mon Jun 27 07:59:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1967	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.598	23.502	652812	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:58:58 2022	Mon Jun 27 07:59:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1966	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	0.000	23.503	653048	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:58:54 2022	Mon Jun 27 07:58:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1965	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.677	-273.150	28.595	23.502	653129	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:58:48 2022	Mon Jun 27 07:58:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1964	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.623	23.507	592808	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:58:44 2022	Mon Jun 27 07:58:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1963	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.676	-273.150	28.626	23.525	665898	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:58:39 2022	Mon Jun 27 07:58:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1962	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.628	23.525	665932	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:58:34 2022	Mon Jun 27 07:58:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1961	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	-273.150	28.620	23.523	656993	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:58:29 2022	Mon Jun 27 07:58:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1960	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.570	23.519	656306	1	1	100000	tingxu20220626	13	102.33	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A738_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:58:24 2022	Mon Jun 27 07:58:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1959	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.600	23.521	610577	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:58:05 2022	Mon Jun 27 07:58:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2349	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.555	0.000	652500	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:58:00 2022	Mon Jun 27 07:58:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2348	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.582	23.515	644935	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:57:53 2022	Mon Jun 27 07:57:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2347	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.558	23.514	649229	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:57:49 2022	Mon Jun 27 07:57:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2346	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.511	23.513	645385	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:57:44 2022	Mon Jun 27 07:57:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2345	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.677	-273.150	28.593	23.506	653438	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:57:39 2022	Mon Jun 27 07:57:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2344	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.601	23.503	568457	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:57:35 2022	Mon Jun 27 07:57:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2343	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.554	23.509	650621	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:57:30 2022	Mon Jun 27 07:57:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2342	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.541	23.496	653678	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:57:25 2022	Mon Jun 27 07:57:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2341	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.567	23.501	654862	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C737_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:57:21 2022	Mon Jun 27 07:57:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2340	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.679	-273.150	0.000	23.502	652588	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:57:07 2022	Mon Jun 27 07:57:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4243	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.574	23.508	646060	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:57:02 2022	Mon Jun 27 07:57:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4242	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.608	23.509	651610	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:56:57 2022	Mon Jun 27 07:57:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4241	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	0.000	28.625	23.505	653587	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:56:53 2022	Mon Jun 27 07:56:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4240	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.540	23.506	638312	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:56:48 2022	Mon Jun 27 07:56:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4239	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.569	23.511	628783	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:56:43 2022	Mon Jun 27 07:56:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4238	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.588	23.512	654085	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:56:38 2022	Mon Jun 27 07:56:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4237	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.544	23.512	655347	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:56:34 2022	Mon Jun 27 07:56:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4236	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.570	23.508	651604	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:56:29 2022	Mon Jun 27 07:56:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4235	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.680	-273.150	28.565	23.515	655096	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B736_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:56:24 2022	Mon Jun 27 07:56:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4234	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.679	-273.150	28.594	23.514	655785	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:56:11 2022	Mon Jun 27 07:56:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1958	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.573	23.513	628308	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:56:06 2022	Mon Jun 27 07:56:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1957	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.677	0.000	28.585	23.513	653179	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:56:01 2022	Mon Jun 27 07:56:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1956	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.516	23.510	654919	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:55:56 2022	Mon Jun 27 07:55:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1955	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.553	23.506	651796	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:55:52 2022	Mon Jun 27 07:55:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1954	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.543	23.510	657278	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:55:46 2022	Mon Jun 27 07:55:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1953	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.569	23.510	667273	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:55:41 2022	Mon Jun 27 07:55:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1952	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.681	-273.150	28.600	23.510	656087	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:55:37 2022	Mon Jun 27 07:55:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1951	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.560	23.499	666804	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:55:32 2022	Mon Jun 27 07:55:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1950	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.561	23.491	657137	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A735_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:55:27 2022	Mon Jun 27 07:55:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1949	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	0.000	28.567	23.505	654833	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:55:08 2022	Mon Jun 27 07:55:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2339	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.624	23.511	657659	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:55:03 2022	Mon Jun 27 07:55:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2338	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.681	-273.150	28.561	23.506	656508	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:54:58 2022	Mon Jun 27 07:55:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2337	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.546	23.505	655335	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:54:53 2022	Mon Jun 27 07:54:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2336	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.645	23.502	656528	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:54:49 2022	Mon Jun 27 07:54:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2335	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.534	23.504	655609	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:54:44 2022	Mon Jun 27 07:54:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2334	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.604	23.505	655245	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:54:39 2022	Mon Jun 27 07:54:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2333	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.577	23.507	658428	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:54:34 2022	Mon Jun 27 07:54:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2332	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.555	23.508	653516	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:54:30 2022	Mon Jun 27 07:54:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2331	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.685	-273.150	28.634	23.513	656331	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C734_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:54:25 2022	Mon Jun 27 07:54:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2330	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.622	23.510	656085	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:54:08 2022	Mon Jun 27 07:54:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4233	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.704	23.502	658055	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:54:03 2022	Mon Jun 27 07:54:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4232	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.682	-273.150	28.648	23.508	654093	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:53:59 2022	Mon Jun 27 07:54:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4231	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.681	-273.150	28.633	23.508	653433	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:53:54 2022	Mon Jun 27 07:53:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4230	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.679	-273.150	28.618	23.504	653160	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:53:49 2022	Mon Jun 27 07:53:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4229	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.679	-273.150	28.588	0.000	657569	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:53:45 2022	Mon Jun 27 07:53:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4228	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.604	0.000	650653	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:53:38 2022	Mon Jun 27 07:53:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4227	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.576	23.499	654385	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:53:33 2022	Mon Jun 27 07:53:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4226	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	0.000	28.618	23.501	582827	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:53:29 2022	Mon Jun 27 07:53:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4225	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.596	23.504	652467	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B733_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:53:24 2022	Mon Jun 27 07:53:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4224	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.640	23.504	655981	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:53:10 2022	Mon Jun 27 07:53:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1948	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.677	-273.150	28.543	23.495	653405	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:53:04 2022	Mon Jun 27 07:53:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1947	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.677	-273.150	28.635	23.494	661662	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:52:59 2022	Mon Jun 27 07:53:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1946	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.677	-273.150	28.668	23.506	658972	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:52:55 2022	Mon Jun 27 07:52:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1945	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.595	23.509	684969	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:52:50 2022	Mon Jun 27 07:52:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1944	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.601	23.512	659667	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:52:45 2022	Mon Jun 27 07:52:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1943	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.598	0.000	657003	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:52:40 2022	Mon Jun 27 07:52:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1942	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.675	-273.150	28.638	23.501	656621	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:52:36 2022	Mon Jun 27 07:52:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1941	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.674	-273.150	28.598	23.494	657155	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:52:31 2022	Mon Jun 27 07:52:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1940	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.647	23.497	658167	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A732_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:52:26 2022	Mon Jun 27 07:52:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1939	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.597	23.506	657082	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:52:07 2022	Mon Jun 27 07:52:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2329	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.676	-273.150	28.628	23.500	652709	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:52:01 2022	Mon Jun 27 07:52:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2328	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.628	23.498	655811	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:51:57 2022	Mon Jun 27 07:51:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2327	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.606	0.000	650365	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:51:52 2022	Mon Jun 27 07:51:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2326	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.586	23.501	655281	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:51:47 2022	Mon Jun 27 07:51:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2325	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.631	23.502	657896	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:51:43 2022	Mon Jun 27 07:51:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2324	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.677	-273.150	28.583	23.502	652246	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:51:38 2022	Mon Jun 27 07:51:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2323	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.619	23.507	653651	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:51:33 2022	Mon Jun 27 07:51:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2322	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.591	0.000	612155	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:51:27 2022	Mon Jun 27 07:51:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2321	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.617	23.506	654077	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C731_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:51:22 2022	Mon Jun 27 07:51:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2320	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.524	23.506	655975	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:51:08 2022	Mon Jun 27 07:51:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4223	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	0.000	28.685	23.509	650405	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:51:04 2022	Mon Jun 27 07:51:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4222	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.627	23.506	653951	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:50:57 2022	Mon Jun 27 07:50:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4221	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.678	-273.150	28.657	0.000	654279	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:50:52 2022	Mon Jun 27 07:50:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4220	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.613	0.000	662111	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:50:47 2022	Mon Jun 27 07:50:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4219	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.642	23.503	655611	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:50:43 2022	Mon Jun 27 07:50:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4218	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.621	0.000	652381	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:50:38 2022	Mon Jun 27 07:50:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4217	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.597	23.505	651135	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:50:33 2022	Mon Jun 27 07:50:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4216	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.676	-273.150	28.620	23.493	597424	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:50:28 2022	Mon Jun 27 07:50:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4215	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.639	23.498	659157	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B730_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:50:22 2022	Mon Jun 27 07:50:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4214	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.655	23.497	656737	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:50:09 2022	Mon Jun 27 07:50:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1938	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.673	-273.150	28.633	23.515	656504	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:50:04 2022	Mon Jun 27 07:50:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1937	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.583	23.515	658573	1	1	100000	tingxu20220626	13	101.81	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:49:59 2022	Mon Jun 27 07:50:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1936	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	0.000	23.515	656235	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:49:50 2022	Mon Jun 27 07:49:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1935	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.672	-273.150	28.657	23.512	648905	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:49:46 2022	Mon Jun 27 07:49:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1934	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.649	23.507	656374	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:49:41 2022	Mon Jun 27 07:49:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1933	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.673	-273.150	28.593	23.509	654093	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:49:36 2022	Mon Jun 27 07:49:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1932	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.673	-273.150	28.592	23.510	656618	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:49:31 2022	Mon Jun 27 07:49:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1931	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.675	-273.150	28.648	23.511	659811	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:49:27 2022	Mon Jun 27 07:49:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1930	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.531	23.505	642871	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A729_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:49:22 2022	Mon Jun 27 07:49:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1929	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.605	23.500	657057	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:49:03 2022	Mon Jun 27 07:49:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2319	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.637	23.494	656695	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:48:58 2022	Mon Jun 27 07:49:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2318	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.563	23.504	648465	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:48:53 2022	Mon Jun 27 07:48:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2317	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.649	23.503	654355	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:48:46 2022	Mon Jun 27 07:48:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2316	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.604	23.509	657056	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:48:41 2022	Mon Jun 27 07:48:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2315	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.677	-273.150	28.596	23.492	656746	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:48:36 2022	Mon Jun 27 07:48:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2314	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.620	23.494	656771	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:48:32 2022	Mon Jun 27 07:48:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2313	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.578	23.496	650777	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:48:27 2022	Mon Jun 27 07:48:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2312	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.626	23.488	655137	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:48:22 2022	Mon Jun 27 07:48:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2311	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.620	23.485	655292	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C728_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:48:17 2022	Mon Jun 27 07:48:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2310	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.671	23.482	652554	1	1	100000	tingxu20220626	13	101.72	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:48:04 2022	Mon Jun 27 07:48:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4213	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.679	-273.150	28.625	23.495	653188	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:47:59 2022	Mon Jun 27 07:48:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4212	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.680	-273.150	28.588	0.000	654582	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:47:54 2022	Mon Jun 27 07:47:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4211	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.681	-273.150	28.624	23.499	658245	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:47:49 2022	Mon Jun 27 07:47:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4210	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.636	23.506	655913	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:47:42 2022	Mon Jun 27 07:47:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4209	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.681	-273.150	28.598	23.510	655479	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:47:37 2022	Mon Jun 27 07:47:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4208	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.573	23.512	655989	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:47:32 2022	Mon Jun 27 07:47:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4207	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.681	-273.150	28.557	23.511	655925	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:47:28 2022	Mon Jun 27 07:47:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4206	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.579	23.509	655639	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:47:23 2022	Mon Jun 27 07:47:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4205	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.550	23.508	656446	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B727_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:47:18 2022	Mon Jun 27 07:47:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4204	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.627	23.504	640511	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:47:05 2022	Mon Jun 27 07:47:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1928	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.594	23.509	656832	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:47:00 2022	Mon Jun 27 07:47:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1927	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.684	-273.150	28.602	23.506	656482	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:46:55 2022	Mon Jun 27 07:46:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1926	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.612	23.507	656292	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:46:50 2022	Mon Jun 27 07:46:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1925	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.563	23.506	654390	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:46:46 2022	Mon Jun 27 07:46:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1924	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.685	0.000	28.574	23.501	651591	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:46:37 2022	Mon Jun 27 07:46:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1923	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.552	23.501	657005	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:46:32 2022	Mon Jun 27 07:46:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1922	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.672	23.505	659819	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:46:28 2022	Mon Jun 27 07:46:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1921	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.624	23.511	662716	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:46:23 2022	Mon Jun 27 07:46:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1920	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.686	-273.150	28.576	23.510	657787	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A726_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:46:18 2022	Mon Jun 27 07:46:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1919	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.686	-273.150	28.591	23.504	653563	1	1	100000	tingxu20220626	13	101.67	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:45:59 2022	Mon Jun 27 07:46:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2309	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.647	23.509	654741	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:45:54 2022	Mon Jun 27 07:45:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2308	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.684	-273.150	28.618	0.000	658157	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:45:49 2022	Mon Jun 27 07:45:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2307	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	0.000	23.502	656607	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:45:44 2022	Mon Jun 27 07:45:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2306	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.630	23.508	658440	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:45:40 2022	Mon Jun 27 07:45:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2305	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.621	23.510	641576	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:45:35 2022	Mon Jun 27 07:45:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2304	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.622	23.507	651787	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:45:30 2022	Mon Jun 27 07:45:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2303	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.540	23.509	640373	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:45:26 2022	Mon Jun 27 07:45:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2302	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.610	23.507	655157	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:45:21 2022	Mon Jun 27 07:45:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2301	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.586	23.508	655381	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C725_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:45:16 2022	Mon Jun 27 07:45:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2300	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.599	23.500	655484	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:44:59 2022	Mon Jun 27 07:45:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4203	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.571	23.492	659162	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:44:54 2022	Mon Jun 27 07:44:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4202	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.540	23.500	566738	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:44:50 2022	Mon Jun 27 07:44:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4201	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.683	-273.150	28.610	23.508	656392	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:44:45 2022	Mon Jun 27 07:44:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4200	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.683	-273.150	28.567	23.498	656176	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:44:40 2022	Mon Jun 27 07:44:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4199	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.684	-273.150	28.574	23.501	659792	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:44:36 2022	Mon Jun 27 07:44:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4198	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.684	-273.150	28.557	23.505	656550	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:44:28 2022	Mon Jun 27 07:44:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4197	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.682	-273.150	28.598	23.507	649883	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:44:24 2022	Mon Jun 27 07:44:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4196	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	0.000	28.599	23.512	656934	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:44:19 2022	Mon Jun 27 07:44:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4195	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.602	23.511	652160	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B724_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:44:14 2022	Mon Jun 27 07:44:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4194	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.681	-273.150	28.610	23.505	658674	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:44:01 2022	Mon Jun 27 07:44:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1918	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.631	23.508	660623	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:43:55 2022	Mon Jun 27 07:43:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1917	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.569	23.504	652797	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:43:50 2022	Mon Jun 27 07:43:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1916	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.569	23.501	659031	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:43:45 2022	Mon Jun 27 07:43:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1915	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.679	-273.150	28.548	23.497	650915	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:43:41 2022	Mon Jun 27 07:43:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1914	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.591	23.503	652686	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:43:36 2022	Mon Jun 27 07:43:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1913	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.565	23.508	654388	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:43:31 2022	Mon Jun 27 07:43:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1912	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.576	23.510	656456	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:43:26 2022	Mon Jun 27 07:43:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1911	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.620	23.512	661127	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:43:22 2022	Mon Jun 27 07:43:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1910	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.680	0.000	28.640	23.499	661790	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A723_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:43:17 2022	Mon Jun 27 07:43:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1909	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.620	23.503	658682	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:42:58 2022	Mon Jun 27 07:43:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2299	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.681	-273.150	28.568	23.507	652724	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:42:53 2022	Mon Jun 27 07:42:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2298	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.680	-273.150	28.541	23.509	655498	1	1	100000	tingxu20220626	13	102.33	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:42:48 2022	Mon Jun 27 07:42:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2297	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.679	-273.150	28.579	23.508	658422	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:42:43 2022	Mon Jun 27 07:42:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2296	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.680	-273.150	28.616	23.505	659029	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:42:38 2022	Mon Jun 27 07:42:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2295	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.587	23.507	661674	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:42:33 2022	Mon Jun 27 07:42:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2294	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.679	-273.150	28.562	23.503	570780	1	1	100000	tingxu20220626	13	102.39	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:42:29 2022	Mon Jun 27 07:42:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2293	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.598	0.000	657918	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:42:24 2022	Mon Jun 27 07:42:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2292	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.677	-273.150	28.518	23.510	651906	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:42:18 2022	Mon Jun 27 07:42:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2291	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.676	-273.150	28.537	23.505	653155	1	1	100000	tingxu20220626	13	102.02	102.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C722_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:42:13 2022	Mon Jun 27 07:42:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2290	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.673	-273.150	28.638	23.500	653667	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:42:00 2022	Mon Jun 27 07:42:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4193	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	-273.150	28.632	23.505	657605	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:41:55 2022	Mon Jun 27 07:41:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4192	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.673	-273.150	28.586	23.510	656097	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:41:47 2022	Mon Jun 27 07:41:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4191	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.673	-273.150	28.593	23.503	653660	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:41:42 2022	Mon Jun 27 07:41:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4190	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.624	23.507	651629	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:41:37 2022	Mon Jun 27 07:41:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4189	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.565	23.509	656452	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:41:33 2022	Mon Jun 27 07:41:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4188	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.672	-273.150	28.569	23.503	656206	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:41:27 2022	Mon Jun 27 07:41:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4187	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.673	-273.150	28.546	23.505	897296	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:41:22 2022	Mon Jun 27 07:41:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4186	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.631	23.494	657195	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:41:17 2022	Mon Jun 27 07:41:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4185	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.673	-273.150	28.623	23.498	655626	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B721_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:41:09 2022	Mon Jun 27 07:41:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4184	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.561	0.000	584706	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:40:56 2022	Mon Jun 27 07:40:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1908	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.566	0.000	659920	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:40:50 2022	Mon Jun 27 07:40:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1907	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.565	23.503	884287	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:40:43 2022	Mon Jun 27 07:40:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1906	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	-273.150	28.603	23.502	657043	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:40:38 2022	Mon Jun 27 07:40:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1905	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.675	-273.150	28.634	23.509	656279	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:40:33 2022	Mon Jun 27 07:40:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1904	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	0.000	23.505	657050	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:40:28 2022	Mon Jun 27 07:40:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1903	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	0.000	23.504	654652	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:40:23 2022	Mon Jun 27 07:40:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1902	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.628	23.498	659356	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:40:18 2022	Mon Jun 27 07:40:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1901	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.555	23.502	529187	1	1	100000	tingxu20220626	13	101.97	102.40	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:40:12 2022	Mon Jun 27 07:40:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1900	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.604	23.505	661184	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A720_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:40:07 2022	Mon Jun 27 07:40:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1899	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	-273.150	28.592	23.488	658186	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:39:48 2022	Mon Jun 27 07:39:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2289	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	0.000	23.489	547988	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:39:39 2022	Mon Jun 27 07:39:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2288	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.676	-273.150	28.666	23.497	548968	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:39:35 2022	Mon Jun 27 07:39:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2287	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.674	-273.150	28.629	23.490	653749	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:39:30 2022	Mon Jun 27 07:39:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2286	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.565	23.501	654683	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:39:25 2022	Mon Jun 27 07:39:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2285	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.577	0.000	651935	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:39:21 2022	Mon Jun 27 07:39:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2284	00	25.00	24.99	25.00	24.98	25.000	25.000	25.000	27.674	-273.150	28.610	23.495	655309	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:39:16 2022	Mon Jun 27 07:39:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2283	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	0.000	28.555	23.497	654571	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:39:06 2022	Mon Jun 27 07:39:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2282	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.673	-273.150	28.590	23.496	638915	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:39:01 2022	Mon Jun 27 07:39:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2281	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.573	23.504	649097	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C719_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:38:56 2022	Mon Jun 27 07:38:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2280	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.541	23.510	655662	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:38:42 2022	Mon Jun 27 07:38:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4183	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.585	23.512	654069	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:38:34 2022	Mon Jun 27 07:38:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4182	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.536	0.000	652283	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:38:30 2022	Mon Jun 27 07:38:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4181	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.545	23.511	654429	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:38:25 2022	Mon Jun 27 07:38:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4180	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.527	23.506	659484	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:38:20 2022	Mon Jun 27 07:38:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4179	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.550	23.500	657776	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:38:15 2022	Mon Jun 27 07:38:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4178	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.514	0.000	653541	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:38:11 2022	Mon Jun 27 07:38:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4177	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.677	-273.150	28.580	23.491	654643	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:38:02 2022	Mon Jun 27 07:38:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4176	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.594	0.000	655124	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:37:57 2022	Mon Jun 27 07:38:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4175	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.542	23.505	647475	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B718_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:37:52 2022	Mon Jun 27 07:37:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4174	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.592	23.498	655216	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:37:39 2022	Mon Jun 27 07:37:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1898	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.677	-273.150	28.565	23.502	653288	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:37:30 2022	Mon Jun 27 07:37:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1897	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.678	-273.150	28.520	23.500	649609	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:37:25 2022	Mon Jun 27 07:37:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1896	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.678	-273.150	28.588	23.499	652565	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:37:20 2022	Mon Jun 27 07:37:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1895	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.678	-273.150	28.582	23.499	639330	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:37:16 2022	Mon Jun 27 07:37:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1894	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.678	-273.150	28.548	23.499	654448	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:37:10 2022	Mon Jun 27 07:37:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1893	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.608	23.497	660083	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:37:05 2022	Mon Jun 27 07:37:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1892	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.677	-273.150	28.636	23.504	648258	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:37:00 2022	Mon Jun 27 07:37:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1891	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.677	-273.150	28.572	23.507	655075	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:36:56 2022	Mon Jun 27 07:36:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1890	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.610	23.508	658806	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A717_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:36:51 2022	Mon Jun 27 07:36:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1889	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.522	23.499	658650	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:36:32 2022	Mon Jun 27 07:36:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2279	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.513	23.484	652346	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:36:25 2022	Mon Jun 27 07:36:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2278	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.561	23.496	652554	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:36:21 2022	Mon Jun 27 07:36:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2277	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.570	23.503	655554	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:36:16 2022	Mon Jun 27 07:36:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2276	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.517	23.496	651258	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:36:10 2022	Mon Jun 27 07:36:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2275	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.567	23.494	654147	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:36:06 2022	Mon Jun 27 07:36:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2274	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.674	-273.150	28.548	23.496	656602	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:36:01 2022	Mon Jun 27 07:36:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2273	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.674	-273.150	28.582	23.501	653638	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:35:56 2022	Mon Jun 27 07:35:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2272	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.675	-273.150	28.532	23.502	656422	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:35:52 2022	Mon Jun 27 07:35:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2271	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.676	-273.150	28.543	23.503	651798	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C716_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:35:47 2022	Mon Jun 27 07:35:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2270	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.675	-273.150	28.603	23.508	653226	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:35:33 2022	Mon Jun 27 07:35:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4173	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	-273.150	28.560	23.491	651115	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:35:28 2022	Mon Jun 27 07:35:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4172	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.674	-273.150	28.608	23.494	654596	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:35:23 2022	Mon Jun 27 07:35:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4171	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.542	23.508	653461	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:35:18 2022	Mon Jun 27 07:35:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4170	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.672	-273.150	28.620	23.507	638731	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:35:09 2022	Mon Jun 27 07:35:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4169	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.670	-273.150	28.579	23.505	652128	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:35:04 2022	Mon Jun 27 07:35:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4168	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.670	-273.150	28.535	23.508	638940	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:34:59 2022	Mon Jun 27 07:35:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4167	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.627	23.507	651595	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:34:54 2022	Mon Jun 27 07:34:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4166	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.540	23.509	547820	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:34:48 2022	Mon Jun 27 07:34:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4165	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.578	23.501	627434	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B715_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:34:43 2022	Mon Jun 27 07:34:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4164	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.666	0.000	28.604	23.501	654091	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:34:29 2022	Mon Jun 27 07:34:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1888	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	-273.150	28.584	23.506	817222	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:34:24 2022	Mon Jun 27 07:34:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1887	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.615	23.505	539713	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:34:20 2022	Mon Jun 27 07:34:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1886	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.620	0.000	667819	1	1	100000	tingxu20220626	13	101.85	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:34:15 2022	Mon Jun 27 07:34:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1885	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.591	23.506	647831	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:34:08 2022	Mon Jun 27 07:34:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1884	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.667	-273.150	28.633	23.506	656348	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:34:03 2022	Mon Jun 27 07:34:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1883	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.666	-273.150	28.547	23.507	653552	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:33:58 2022	Mon Jun 27 07:34:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1882	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.576	23.505	653175	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:33:53 2022	Mon Jun 27 07:33:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1881	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.595	23.505	651688	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:33:48 2022	Mon Jun 27 07:33:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1880	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.608	23.495	628133	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A714_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:33:43 2022	Mon Jun 27 07:33:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1879	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	0.000	23.499	653642	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:33:24 2022	Mon Jun 27 07:33:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2269	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.592	23.504	627523	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:33:19 2022	Mon Jun 27 07:33:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2268	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.588	23.505	655096	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:33:14 2022	Mon Jun 27 07:33:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2267	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.666	-273.150	0.000	0.000	654053	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:33:09 2022	Mon Jun 27 07:33:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2266	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.614	0.000	796136	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:33:04 2022	Mon Jun 27 07:33:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2265	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.665	-273.150	28.529	23.508	646465	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:33:00 2022	Mon Jun 27 07:33:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2264	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	-273.150	28.609	23.510	650522	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:32:55 2022	Mon Jun 27 07:32:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2263	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.495	23.513	654209	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:32:50 2022	Mon Jun 27 07:32:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2262	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	0.000	28.574	23.512	640947	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:32:46 2022	Mon Jun 27 07:32:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2261	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.541	23.507	651673	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C713_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:32:40 2022	Mon Jun 27 07:32:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2260	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	-273.150	28.588	23.509	653745	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:32:26 2022	Mon Jun 27 07:32:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4163	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.668	-273.150	28.604	0.000	655813	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:32:22 2022	Mon Jun 27 07:32:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4162	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.668	-273.150	28.512	23.509	654001	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:32:17 2022	Mon Jun 27 07:32:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4161	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	-273.150	28.627	23.509	644522	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:32:12 2022	Mon Jun 27 07:32:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4160	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.666	-273.150	28.541	23.502	639093	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:32:06 2022	Mon Jun 27 07:32:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4159	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.668	-273.150	28.558	23.501	651895	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:32:01 2022	Mon Jun 27 07:32:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4158	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	-273.150	28.571	0.000	658917	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:31:57 2022	Mon Jun 27 07:31:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4157	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.559	23.498	640811	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:31:52 2022	Mon Jun 27 07:31:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4156	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.617	23.503	645747	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:31:47 2022	Mon Jun 27 07:31:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4155	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.608	23.502	648479	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B712_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:31:43 2022	Mon Jun 27 07:31:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4154	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.516	23.499	650230	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:31:29 2022	Mon Jun 27 07:31:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1878	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.666	-273.150	28.578	23.494	650521	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:31:24 2022	Mon Jun 27 07:31:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1877	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.666	-273.150	28.573	23.491	543890	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:31:20 2022	Mon Jun 27 07:31:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1876	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.667	0.000	28.606	23.500	653343	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:31:15 2022	Mon Jun 27 07:31:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1875	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.567	23.500	656342	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:31:06 2022	Mon Jun 27 07:31:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1874	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	0.000	28.596	23.506	638024	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:31:02 2022	Mon Jun 27 07:31:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1873	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.664	-273.150	28.550	23.511	653932	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:30:57 2022	Mon Jun 27 07:30:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1872	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.617	23.510	650131	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:30:52 2022	Mon Jun 27 07:30:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1871	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.664	-273.150	28.582	0.000	656746	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:30:47 2022	Mon Jun 27 07:30:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1870	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.666	0.000	28.569	23.502	654995	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A711_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:30:43 2022	Mon Jun 27 07:30:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1869	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.665	-273.150	28.572	23.505	656586	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:30:24 2022	Mon Jun 27 07:30:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2259	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.666	-273.150	28.562	23.508	655734	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:30:19 2022	Mon Jun 27 07:30:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2258	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.598	23.507	647437	1	1	100000	tingxu20220626	13	101.75	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:30:14 2022	Mon Jun 27 07:30:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2257	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.588	23.506	645641	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:30:08 2022	Mon Jun 27 07:30:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2256	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.593	23.512	654227	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:30:00 2022	Mon Jun 27 07:30:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2255	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.665	-273.150	28.574	23.512	653086	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:29:56 2022	Mon Jun 27 07:29:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2254	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.587	23.508	650451	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:29:51 2022	Mon Jun 27 07:29:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2253	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.559	0.000	655629	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:29:46 2022	Mon Jun 27 07:29:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2252	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.581	23.503	652892	1	1	100000	tingxu20220626	13	101.86	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:29:42 2022	Mon Jun 27 07:29:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2251	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.549	23.507	646351	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C710_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:29:37 2022	Mon Jun 27 07:29:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2250	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.662	-273.150	28.632	23.510	655720	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:29:23 2022	Mon Jun 27 07:29:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4153	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.660	0.000	28.567	23.503	652685	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:29:18 2022	Mon Jun 27 07:29:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4152	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.659	-273.150	28.540	23.495	599330	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:29:13 2022	Mon Jun 27 07:29:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4151	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.659	-273.150	28.558	23.495	652874	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:29:09 2022	Mon Jun 27 07:29:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4150	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.566	23.489	649925	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:29:04 2022	Mon Jun 27 07:29:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4149	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.550	23.495	645423	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:28:59 2022	Mon Jun 27 07:29:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4148	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.568	23.503	651810	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:28:54 2022	Mon Jun 27 07:28:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4147	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.662	-273.150	28.543	23.500	565137	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:28:50 2022	Mon Jun 27 07:28:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4146	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.662	-273.150	28.548	23.491	652412	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:28:45 2022	Mon Jun 27 07:28:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4145	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.663	-273.150	28.572	23.492	649610	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B709_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:28:40 2022	Mon Jun 27 07:28:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4144	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.541	0.000	653896	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:28:24 2022	Mon Jun 27 07:28:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1868	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.582	23.500	571529	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:28:20 2022	Mon Jun 27 07:28:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1867	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.563	23.495	653844	1	1	100000	tingxu20220626	13	101.71	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:28:15 2022	Mon Jun 27 07:28:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1866	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.662	-273.150	28.577	23.496	656336	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:28:07 2022	Mon Jun 27 07:28:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1865	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.612	23.495	655926	1	1	100000	tingxu20220626	13	101.74	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:28:02 2022	Mon Jun 27 07:28:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1864	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.662	-273.150	28.590	23.495	649987	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:27:53 2022	Mon Jun 27 07:27:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1863	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.538	23.495	655432	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:27:48 2022	Mon Jun 27 07:27:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1862	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.580	23.492	654231	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:27:43 2022	Mon Jun 27 07:27:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1861	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.666	-273.150	28.574	0.000	649779	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:27:38 2022	Mon Jun 27 07:27:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1860	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.667	-273.150	28.566	23.491	654356	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A708_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:27:33 2022	Mon Jun 27 07:27:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1859	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.668	-273.150	28.609	23.484	621031	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:27:14 2022	Mon Jun 27 07:27:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2249	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	28.555	23.500	649812	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:27:09 2022	Mon Jun 27 07:27:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2248	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.667	-273.150	28.592	23.497	571022	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:27:05 2022	Mon Jun 27 07:27:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2247	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.665	-273.150	28.541	23.497	657483	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:27:00 2022	Mon Jun 27 07:27:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2246	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.665	0.000	28.500	23.503	653979	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:26:55 2022	Mon Jun 27 07:26:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2245	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	0.000	28.525	23.508	638008	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:26:50 2022	Mon Jun 27 07:26:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2244	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.529	23.500	654501	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:26:46 2022	Mon Jun 27 07:26:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2243	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.554	23.502	637777	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:26:41 2022	Mon Jun 27 07:26:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2242	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.544	23.505	652351	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:26:36 2022	Mon Jun 27 07:26:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2241	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.541	23.503	657662	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C707_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:26:32 2022	Mon Jun 27 07:26:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2240	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.493	23.505	658418	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:26:18 2022	Mon Jun 27 07:26:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4143	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.552	23.502	649797	1	1	100000	tingxu20220626	13	101.66	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:26:13 2022	Mon Jun 27 07:26:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4142	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.665	-273.150	28.574	23.499	657086	1	1	100000	tingxu20220626	13	101.67	101.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:26:09 2022	Mon Jun 27 07:26:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4141	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.571	23.502	652597	1	1	100000	tingxu20220626	13	101.69	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:26:04 2022	Mon Jun 27 07:26:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4140	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.665	-273.150	28.505	23.496	648943	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:25:59 2022	Mon Jun 27 07:26:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4139	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.536	23.490	650043	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:25:54 2022	Mon Jun 27 07:25:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4138	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.613	23.488	553500	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:25:50 2022	Mon Jun 27 07:25:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4137	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.487	23.498	653898	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:25:45 2022	Mon Jun 27 07:25:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4136	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.533	0.000	655776	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:25:40 2022	Mon Jun 27 07:25:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4135	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.563	23.499	653798	1	1	100000	tingxu20220626	13	101.78	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B706_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:25:35 2022	Mon Jun 27 07:25:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4134	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.577	23.497	653557	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:25:22 2022	Mon Jun 27 07:25:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1858	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.665	-273.150	28.508	23.502	656961	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:25:17 2022	Mon Jun 27 07:25:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1857	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.666	-273.150	0.000	23.508	674363	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:25:06 2022	Mon Jun 27 07:25:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1856	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.666	-273.150	28.527	23.504	656383	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:25:01 2022	Mon Jun 27 07:25:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1855	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.664	-273.150	28.578	23.501	657504	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:24:57 2022	Mon Jun 27 07:24:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1854	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.560	0.000	655037	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:24:52 2022	Mon Jun 27 07:24:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1853	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.547	23.495	654464	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:24:47 2022	Mon Jun 27 07:24:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1852	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.664	-273.150	28.588	23.488	655024	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:24:42 2022	Mon Jun 27 07:24:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1851	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.662	-273.150	28.547	23.489	658394	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:24:38 2022	Mon Jun 27 07:24:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1850	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.662	-273.150	28.543	23.489	655250	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A705_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:24:33 2022	Mon Jun 27 07:24:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1849	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.662	-273.150	28.599	23.494	669926	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:24:06 2022	Mon Jun 27 07:24:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2239	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.662	-273.150	28.565	23.501	651696	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:24:01 2022	Mon Jun 27 07:24:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2238	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.664	-273.150	28.570	23.495	652856	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:23:56 2022	Mon Jun 27 07:23:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2237	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.663	-273.150	28.580	23.492	640453	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:23:52 2022	Mon Jun 27 07:23:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2236	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.540	23.494	650739	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:23:47 2022	Mon Jun 27 07:23:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2235	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.663	-273.150	28.524	23.497	655951	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:23:42 2022	Mon Jun 27 07:23:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2234	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.664	0.000	28.520	23.498	670391	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:23:37 2022	Mon Jun 27 07:23:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2233	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.663	-273.150	28.549	23.502	656404	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:23:32 2022	Mon Jun 27 07:23:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2232	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.662	-273.150	28.558	23.504	656618	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:23:28 2022	Mon Jun 27 07:23:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2231	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.661	-273.150	28.518	23.505	653522	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C704_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:23:23 2022	Mon Jun 27 07:23:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2230	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.549	0.000	654002	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:23:09 2022	Mon Jun 27 07:23:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4133	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.574	23.499	657179	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:23:03 2022	Mon Jun 27 07:23:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4132	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.660	-273.150	28.520	23.500	607040	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:22:58 2022	Mon Jun 27 07:23:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4131	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.660	-273.150	28.543	23.503	657445	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:22:53 2022	Mon Jun 27 07:22:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4130	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.559	23.494	655027	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:22:48 2022	Mon Jun 27 07:22:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4129	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.534	23.497	656996	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:22:44 2022	Mon Jun 27 07:22:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4128	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.552	23.504	655705	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:22:39 2022	Mon Jun 27 07:22:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4127	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.659	-273.150	28.510	0.000	660040	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:22:31 2022	Mon Jun 27 07:22:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4126	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.545	23.505	658264	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:22:26 2022	Mon Jun 27 07:22:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4125	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.659	-273.150	28.480	23.496	659600	1	1	100000	tingxu20220626	13	102.40	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B703_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:22:21 2022	Mon Jun 27 07:22:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4124	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.660	-273.150	28.596	23.499	654269	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:22:08 2022	Mon Jun 27 07:22:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1848	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.659	-273.150	28.549	23.501	653821	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:21:59 2022	Mon Jun 27 07:22:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1847	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.524	23.499	655645	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:21:54 2022	Mon Jun 27 07:21:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1846	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.570	23.496	653219	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:21:49 2022	Mon Jun 27 07:21:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1845	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.556	23.496	657841	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:21:45 2022	Mon Jun 27 07:21:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1844	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.568	23.501	653814	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:21:40 2022	Mon Jun 27 07:21:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1843	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.660	-273.150	28.572	23.506	640366	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:21:35 2022	Mon Jun 27 07:21:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1842	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.573	23.502	855739	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:21:26 2022	Mon Jun 27 07:21:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1841	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.660	-273.150	28.600	23.506	669252	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:21:21 2022	Mon Jun 27 07:21:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1840	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.660	-273.150	28.598	23.506	657259	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A702_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:21:16 2022	Mon Jun 27 07:21:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1839	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.661	-273.150	28.606	23.508	641168	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:20:53 2022	Mon Jun 27 07:20:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2229	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.567	0.000	657894	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:20:48 2022	Mon Jun 27 07:20:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2228	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.616	23.500	546805	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:20:44 2022	Mon Jun 27 07:20:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2227	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.587	23.501	653728	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:20:39 2022	Mon Jun 27 07:20:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2226	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.570	23.496	668841	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:20:34 2022	Mon Jun 27 07:20:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2225	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.513	23.498	657255	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:20:29 2022	Mon Jun 27 07:20:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2224	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.584	23.505	660131	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:20:24 2022	Mon Jun 27 07:20:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2223	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.564	23.502	655690	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:20:20 2022	Mon Jun 27 07:20:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2222	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.599	23.503	657668	1	1	100000	tingxu20220626	13	101.95	102.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:20:15 2022	Mon Jun 27 07:20:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2221	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.562	23.504	652218	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C701_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:20:10 2022	Mon Jun 27 07:20:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2220	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.657	-273.150	28.596	23.500	658930	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:19:57 2022	Mon Jun 27 07:19:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4123	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.554	23.497	656658	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:19:51 2022	Mon Jun 27 07:19:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4122	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.543	23.498	650402	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:19:46 2022	Mon Jun 27 07:19:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4121	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	0.000	28.555	23.504	655904	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:19:41 2022	Mon Jun 27 07:19:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4120	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.627	23.501	654257	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:19:37 2022	Mon Jun 27 07:19:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4119	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	0.000	28.581	23.497	656957	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:19:32 2022	Mon Jun 27 07:19:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4118	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.659	-273.150	28.619	23.505	656597	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:19:27 2022	Mon Jun 27 07:19:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4117	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.660	-273.150	28.549	0.000	654686	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:19:22 2022	Mon Jun 27 07:19:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4116	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.660	-273.150	28.562	23.506	641463	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:19:16 2022	Mon Jun 27 07:19:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4115	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.660	-273.150	28.581	23.505	658803	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B700_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:19:12 2022	Mon Jun 27 07:19:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4114	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.660	-273.150	28.539	23.505	659814	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:18:58 2022	Mon Jun 27 07:19:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1838	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.657	-273.150	28.589	23.504	660557	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:18:53 2022	Mon Jun 27 07:18:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1837	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.575	23.501	657981	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:18:48 2022	Mon Jun 27 07:18:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1836	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.656	-273.150	28.592	23.504	685836	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:18:44 2022	Mon Jun 27 07:18:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1835	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.655	-273.150	28.554	23.497	650086	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:18:39 2022	Mon Jun 27 07:18:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1834	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.656	-273.150	28.580	23.489	656818	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:18:34 2022	Mon Jun 27 07:18:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1833	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.656	-273.150	28.592	0.000	663345	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:18:30 2022	Mon Jun 27 07:18:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1832	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.558	23.501	658285	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:18:25 2022	Mon Jun 27 07:18:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1831	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.629	23.500	657985	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:18:20 2022	Mon Jun 27 07:18:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1830	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.574	23.504	658038	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A699_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:18:15 2022	Mon Jun 27 07:18:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1829	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.628	23.489	653564	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:17:56 2022	Mon Jun 27 07:17:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2219	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.659	-273.150	28.550	23.499	658974	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:17:51 2022	Mon Jun 27 07:17:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2218	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.625	23.502	654283	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:17:46 2022	Mon Jun 27 07:17:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2217	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.612	0.000	658180	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:17:41 2022	Mon Jun 27 07:17:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2216	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.611	23.497	655227	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:17:36 2022	Mon Jun 27 07:17:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2215	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.636	0.000	654010	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:17:31 2022	Mon Jun 27 07:17:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2214	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.655	-273.150	28.597	23.502	668536	1	1	100000	tingxu20220626	13	102.06	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:17:26 2022	Mon Jun 27 07:17:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2213	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.655	-273.150	28.612	23.501	657152	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:17:22 2022	Mon Jun 27 07:17:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2212	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.568	23.493	656117	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:17:17 2022	Mon Jun 27 07:17:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2211	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.656	-273.150	28.620	23.492	652356	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C698_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:17:12 2022	Mon Jun 27 07:17:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2210	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.598	23.493	649349	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:16:59 2022	Mon Jun 27 07:17:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4113	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.553	23.491	659998	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:16:54 2022	Mon Jun 27 07:16:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4112	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.584	23.487	656684	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:16:49 2022	Mon Jun 27 07:16:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4111	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.643	23.493	654369	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:16:44 2022	Mon Jun 27 07:16:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4110	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.658	-273.150	28.605	0.000	657161	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:16:38 2022	Mon Jun 27 07:16:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4109	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.568	23.489	656591	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:16:32 2022	Mon Jun 27 07:16:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4108	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.658	-273.150	28.598	0.000	654995	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:16:28 2022	Mon Jun 27 07:16:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4107	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.659	-273.150	28.559	0.000	659358	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:16:23 2022	Mon Jun 27 07:16:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4106	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.586	23.480	658429	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:16:18 2022	Mon Jun 27 07:16:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4105	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.551	23.487	602670	1	1	100000	tingxu20220626	13	101.86	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B697_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:16:13 2022	Mon Jun 27 07:16:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4104	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.594	23.493	640537	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:16:00 2022	Mon Jun 27 07:16:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1828	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	0.000	23.484	657507	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:15:55 2022	Mon Jun 27 07:15:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1827	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.621	23.492	775440	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:15:50 2022	Mon Jun 27 07:15:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1826	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.614	23.495	656810	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:15:45 2022	Mon Jun 27 07:15:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1825	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.570	23.512	659380	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:15:41 2022	Mon Jun 27 07:15:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1824	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.595	23.510	657037	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:15:32 2022	Mon Jun 27 07:15:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1823	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.658	-273.150	28.599	23.504	662821	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:15:28 2022	Mon Jun 27 07:15:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1822	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.658	-273.150	28.557	23.494	650049	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:15:23 2022	Mon Jun 27 07:15:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1821	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.579	23.492	650475	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:15:18 2022	Mon Jun 27 07:15:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1820	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.657	-273.150	28.607	23.502	623126	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A696_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:15:13 2022	Mon Jun 27 07:15:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1819	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.655	-273.150	28.574	23.504	657522	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:14:54 2022	Mon Jun 27 07:14:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2209	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.656	-273.150	28.542	23.510	628724	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:14:49 2022	Mon Jun 27 07:14:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2208	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.656	-273.150	28.578	23.506	654986	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:14:45 2022	Mon Jun 27 07:14:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2207	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.656	-273.150	28.553	23.511	655693	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:14:40 2022	Mon Jun 27 07:14:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2206	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.657	-273.150	28.584	23.512	661610	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:14:35 2022	Mon Jun 27 07:14:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2205	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.657	-273.150	28.563	23.517	656198	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:14:31 2022	Mon Jun 27 07:14:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2204	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.657	0.000	28.605	23.511	658405	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:14:26 2022	Mon Jun 27 07:14:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2203	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.656	-273.150	28.594	23.511	661866	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:14:21 2022	Mon Jun 27 07:14:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2202	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.570	23.507	660863	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:14:16 2022	Mon Jun 27 07:14:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2201	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.654	0.000	28.624	23.511	651777	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C695_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:14:12 2022	Mon Jun 27 07:14:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2200	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.585	23.510	657830	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:13:58 2022	Mon Jun 27 07:14:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4103	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.655	-273.150	28.588	23.505	657773	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:13:53 2022	Mon Jun 27 07:13:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4102	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.655	-273.150	28.607	23.504	657644	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:13:48 2022	Mon Jun 27 07:13:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4101	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.655	-273.150	28.584	23.504	693877	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:13:44 2022	Mon Jun 27 07:13:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4100	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.653	-273.150	28.503	0.000	660402	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:13:39 2022	Mon Jun 27 07:13:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4099	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.585	23.503	655796	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:13:34 2022	Mon Jun 27 07:13:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4098	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.653	-273.150	28.555	23.509	657087	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:13:30 2022	Mon Jun 27 07:13:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4097	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.655	-273.150	28.495	23.503	656472	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:13:23 2022	Mon Jun 27 07:13:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4096	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.597	23.505	655978	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:13:18 2022	Mon Jun 27 07:13:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4095	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.654	-273.150	28.549	23.495	676002	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B694_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:13:14 2022	Mon Jun 27 07:13:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4094	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.654	-273.150	28.503	23.499	658334	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:13:00 2022	Mon Jun 27 07:13:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1818	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.654	-273.150	28.523	23.492	658992	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:12:55 2022	Mon Jun 27 07:12:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1817	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.654	-273.150	28.565	23.496	653894	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:12:51 2022	Mon Jun 27 07:12:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1816	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.569	23.504	656191	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:12:46 2022	Mon Jun 27 07:12:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1815	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.655	-273.150	28.617	23.505	660668	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:12:41 2022	Mon Jun 27 07:12:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1814	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.656	-273.150	28.582	23.505	658909	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:12:37 2022	Mon Jun 27 07:12:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1813	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.655	-273.150	28.560	23.503	656070	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:12:32 2022	Mon Jun 27 07:12:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1812	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.599	23.493	661352	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:12:27 2022	Mon Jun 27 07:12:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1811	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.654	-273.150	28.571	23.483	659622	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:12:22 2022	Mon Jun 27 07:12:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1810	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.653	-273.150	28.538	0.000	660133	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A693_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:12:18 2022	Mon Jun 27 07:12:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1809	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.653	0.000	28.561	23.482	655045	1	1	100000	tingxu20220626	13	101.77	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:11:58 2022	Mon Jun 27 07:12:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2199	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.654	-273.150	28.578	23.490	651968	1	1	100000	tingxu20220626	13	101.83	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:11:53 2022	Mon Jun 27 07:11:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2198	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.654	-273.150	28.568	23.500	657775	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:11:47 2022	Mon Jun 27 07:11:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2197	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.653	-273.150	28.564	23.504	657219	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:11:43 2022	Mon Jun 27 07:11:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2196	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.653	-273.150	28.623	23.507	657966	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:11:38 2022	Mon Jun 27 07:11:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2195	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.652	-273.150	28.620	23.507	654417	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:11:33 2022	Mon Jun 27 07:11:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2194	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.653	-273.150	0.000	23.508	657694	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:11:28 2022	Mon Jun 27 07:11:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2193	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.653	-273.150	28.566	23.502	657622	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:11:23 2022	Mon Jun 27 07:11:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2192	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.572	23.496	656818	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:11:18 2022	Mon Jun 27 07:11:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2191	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.651	-273.150	0.000	23.503	657757	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C692_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:11:13 2022	Mon Jun 27 07:11:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2190	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.615	23.509	650164	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:10:59 2022	Mon Jun 27 07:11:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4093	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.651	-273.150	28.629	0.000	670183	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:10:55 2022	Mon Jun 27 07:10:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4092	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.585	23.498	682675	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:10:50 2022	Mon Jun 27 07:10:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4091	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.650	-273.150	28.579	23.506	659470	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:10:43 2022	Mon Jun 27 07:10:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4090	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.557	0.000	641883	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:10:38 2022	Mon Jun 27 07:10:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4089	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.649	-273.150	28.562	23.503	658115	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:10:33 2022	Mon Jun 27 07:10:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4088	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.649	-273.150	28.569	23.497	660364	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:10:28 2022	Mon Jun 27 07:10:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4087	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.648	-273.150	28.601	0.000	658346	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:10:23 2022	Mon Jun 27 07:10:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4086	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.648	-273.150	28.572	23.503	655337	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:10:19 2022	Mon Jun 27 07:10:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4085	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.630	23.505	657991	1	1	100000	tingxu20220626	13	101.73	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B691_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:10:11 2022	Mon Jun 27 07:10:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4084	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.650	-273.150	28.566	23.498	655963	1	1	100000	tingxu20220626	13	101.75	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:09:57 2022	Mon Jun 27 07:10:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1808	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.531	23.506	657857	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:09:53 2022	Mon Jun 27 07:09:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1807	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.614	23.497	651462	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:09:48 2022	Mon Jun 27 07:09:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1806	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.523	23.502	659561	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:09:39 2022	Mon Jun 27 07:09:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1805	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.649	0.000	28.503	23.506	654463	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:09:34 2022	Mon Jun 27 07:09:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1804	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.650	-273.150	28.575	23.499	659081	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:09:29 2022	Mon Jun 27 07:09:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1803	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.551	23.499	657124	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:09:24 2022	Mon Jun 27 07:09:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1802	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.650	-273.150	28.593	23.486	555909	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:09:20 2022	Mon Jun 27 07:09:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1801	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.668	23.488	649777	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:09:15 2022	Mon Jun 27 07:09:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1800	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.651	-273.150	28.540	23.484	652216	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A690_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:09:10 2022	Mon Jun 27 07:09:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1799	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.566	23.498	660265	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:08:51 2022	Mon Jun 27 07:08:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2189	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.566	23.501	654445	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:08:46 2022	Mon Jun 27 07:08:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2188	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.578	23.498	659391	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:08:41 2022	Mon Jun 27 07:08:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2187	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.554	23.498	657198	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:08:37 2022	Mon Jun 27 07:08:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2186	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.649	-273.150	28.543	23.494	656655	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:08:32 2022	Mon Jun 27 07:08:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2185	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.649	-273.150	28.581	23.501	656063	1	1	100000	tingxu20220626	13	102.08	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:08:27 2022	Mon Jun 27 07:08:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2184	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.606	23.497	653474	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:08:22 2022	Mon Jun 27 07:08:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2183	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.650	-273.150	28.540	23.491	656630	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:08:17 2022	Mon Jun 27 07:08:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2182	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.613	23.497	649015	1	1	100000	tingxu20220626	13	101.69	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:08:13 2022	Mon Jun 27 07:08:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2181	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.634	23.496	645937	1	1	100000	tingxu20220626	13	101.70	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C689_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:08:01 2022	Mon Jun 27 07:08:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2180	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.615	23.500	652818	1	1	100000	tingxu20220626	13	101.74	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:07:47 2022	Mon Jun 27 07:07:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4083	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.650	-273.150	28.553	23.504	651283	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:07:42 2022	Mon Jun 27 07:07:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4082	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.534	23.499	656536	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:07:38 2022	Mon Jun 27 07:07:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4081	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.616	23.496	650200	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:07:33 2022	Mon Jun 27 07:07:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4080	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.650	-273.150	28.598	0.000	654648	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:07:28 2022	Mon Jun 27 07:07:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4079	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.650	-273.150	28.514	23.497	653137	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:07:23 2022	Mon Jun 27 07:07:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4078	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.651	0.000	28.525	23.508	655895	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:07:18 2022	Mon Jun 27 07:07:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4077	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.651	-273.150	28.567	23.510	538563	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:07:14 2022	Mon Jun 27 07:07:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4076	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.651	-273.150	28.574	23.507	656724	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:07:09 2022	Mon Jun 27 07:07:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4075	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.651	-273.150	28.561	23.501	655002	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B688_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:07:01 2022	Mon Jun 27 07:07:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4074	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.649	-273.150	28.541	23.504	661166	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:06:48 2022	Mon Jun 27 07:06:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1798	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.648	-273.150	28.583	23.510	652102	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:06:43 2022	Mon Jun 27 07:06:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1797	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.646	-273.150	28.615	23.510	653494	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:06:38 2022	Mon Jun 27 07:06:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1796	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.646	-273.150	28.568	23.501	659744	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:06:33 2022	Mon Jun 27 07:06:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1795	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.570	23.502	583688	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:06:27 2022	Mon Jun 27 07:06:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1794	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.646	-273.150	28.603	23.508	652162	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:06:22 2022	Mon Jun 27 07:06:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1793	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.646	-273.150	28.604	23.508	651414	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:06:17 2022	Mon Jun 27 07:06:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1792	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.647	-273.150	28.644	23.502	648831	1	1	100000	tingxu20220626	13	101.65	101.64	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:06:13 2022	Mon Jun 27 07:06:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1791	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.646	-273.150	28.566	23.497	654627	1	1	100000	tingxu20220626	13	101.66	101.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:06:08 2022	Mon Jun 27 07:06:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1790	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.645	-273.150	28.596	23.491	656633	1	1	100000	tingxu20220626	13	101.68	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A687_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:06:03 2022	Mon Jun 27 07:06:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1789	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.583	23.491	582897	1	1	100000	tingxu20220626	13	101.69	101.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:05:44 2022	Mon Jun 27 07:05:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2179	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	0.000	28.568	23.471	652370	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:05:39 2022	Mon Jun 27 07:05:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2178	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.644	-273.150	28.619	23.477	609827	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:05:35 2022	Mon Jun 27 07:05:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2177	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.520	23.508	653558	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:05:30 2022	Mon Jun 27 07:05:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2176	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.532	23.506	638078	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:05:23 2022	Mon Jun 27 07:05:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2175	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.645	-273.150	28.593	23.504	656756	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:05:18 2022	Mon Jun 27 07:05:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2174	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.644	-273.150	28.556	23.487	638128	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:05:13 2022	Mon Jun 27 07:05:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2173	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.596	23.478	655848	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:05:08 2022	Mon Jun 27 07:05:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2172	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.644	0.000	28.557	23.487	650208	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:05:02 2022	Mon Jun 27 07:05:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2171	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.544	23.488	656357	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C686_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:04:57 2022	Mon Jun 27 07:04:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2170	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.646	-273.150	28.612	23.494	653346	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:04:43 2022	Mon Jun 27 07:04:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4073	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.647	-273.150	28.566	23.497	652710	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:04:39 2022	Mon Jun 27 07:04:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4072	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.649	-273.150	28.573	23.504	654597	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:04:34 2022	Mon Jun 27 07:04:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4071	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.648	-273.150	28.535	23.500	652262	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:04:29 2022	Mon Jun 27 07:04:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4070	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.648	-273.150	28.627	23.502	648465	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:04:25 2022	Mon Jun 27 07:04:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4069	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.647	-273.150	28.605	23.500	653877	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:04:20 2022	Mon Jun 27 07:04:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4068	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.647	-273.150	28.562	23.505	651614	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:04:15 2022	Mon Jun 27 07:04:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4067	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.646	-273.150	28.640	23.502	647018	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:04:11 2022	Mon Jun 27 07:04:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4066	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.648	-273.150	28.603	23.501	647667	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:04:06 2022	Mon Jun 27 07:04:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4065	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.648	-273.150	28.556	23.499	651216	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B685_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:04:00 2022	Mon Jun 27 07:04:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4064	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.649	-273.150	28.618	23.498	651754	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:03:44 2022	Mon Jun 27 07:03:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1788	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.649	-273.150	28.620	23.493	647173	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:03:39 2022	Mon Jun 27 07:03:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1787	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.649	-273.150	28.598	23.503	712513	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:03:35 2022	Mon Jun 27 07:03:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1786	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.648	-273.150	28.547	23.499	647334	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:03:30 2022	Mon Jun 27 07:03:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1785	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.647	-273.150	28.517	23.498	653183	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:03:25 2022	Mon Jun 27 07:03:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1784	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.646	-273.150	28.583	23.502	656622	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:03:21 2022	Mon Jun 27 07:03:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1783	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.647	-273.150	28.582	23.501	655543	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:03:16 2022	Mon Jun 27 07:03:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1782	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.572	23.503	654899	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:03:11 2022	Mon Jun 27 07:03:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1781	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.542	23.504	647793	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:03:07 2022	Mon Jun 27 07:03:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1780	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.593	23.504	650654	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A684_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:03:02 2022	Mon Jun 27 07:03:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1779	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.566	23.501	657315	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 07:02:42 2022	Mon Jun 27 07:02:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2169	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.485	23.501	656103	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 07:02:37 2022	Mon Jun 27 07:02:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2168	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.643	-273.150	28.532	0.000	655725	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 07:02:33 2022	Mon Jun 27 07:02:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2167	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.572	23.493	656016	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 07:02:28 2022	Mon Jun 27 07:02:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2166	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.530	23.490	653309	1	1	100000	tingxu20220626	13	102.39	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 07:02:23 2022	Mon Jun 27 07:02:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2165	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.563	23.493	655109	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 07:02:18 2022	Mon Jun 27 07:02:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2164	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.538	23.490	540342	1	1	100000	tingxu20220626	13	101.99	102.41	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 07:02:14 2022	Mon Jun 27 07:02:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2163	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.593	23.496	650834	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 07:02:08 2022	Mon Jun 27 07:02:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2162	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.551	23.485	651525	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 07:02:03 2022	Mon Jun 27 07:02:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2161	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	0.000	28.546	23.486	600196	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C683_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 07:01:58 2022	Mon Jun 27 07:02:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2160	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.544	23.484	638234	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 07:01:45 2022	Mon Jun 27 07:01:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4063	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.645	-273.150	28.540	23.505	655267	1	1	100000	tingxu20220626	13	102.11	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 07:01:40 2022	Mon Jun 27 07:01:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4062	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.597	23.500	656751	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 07:01:35 2022	Mon Jun 27 07:01:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4061	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.643	-273.150	28.548	23.506	650605	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 07:01:31 2022	Mon Jun 27 07:01:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4060	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.644	-273.150	28.587	23.501	639245	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 07:01:26 2022	Mon Jun 27 07:01:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4059	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.642	-273.150	28.613	23.495	650643	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 07:01:22 2022	Mon Jun 27 07:01:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4058	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.565	23.500	654678	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 07:01:17 2022	Mon Jun 27 07:01:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4057	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.640	-273.150	28.575	23.491	639235	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 07:01:12 2022	Mon Jun 27 07:01:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4056	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.550	23.486	655524	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 07:01:07 2022	Mon Jun 27 07:01:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4055	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.640	-273.150	28.528	23.478	654802	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B682_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 07:01:03 2022	Mon Jun 27 07:01:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4054	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.640	-273.150	28.585	23.482	647115	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 07:00:49 2022	Mon Jun 27 07:00:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1778	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.642	-273.150	28.589	23.498	656290	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 07:00:44 2022	Mon Jun 27 07:00:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1777	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.642	-273.150	28.587	23.500	655012	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 07:00:40 2022	Mon Jun 27 07:00:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1776	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	0.000	23.499	668079	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 07:00:35 2022	Mon Jun 27 07:00:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1775	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.641	-273.150	28.529	23.502	651876	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 07:00:30 2022	Mon Jun 27 07:00:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1774	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.641	-273.150	28.613	23.498	654834	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 07:00:26 2022	Mon Jun 27 07:00:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1773	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.596	23.494	655550	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 07:00:21 2022	Mon Jun 27 07:00:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1772	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.640	-273.150	28.596	23.486	656168	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 07:00:16 2022	Mon Jun 27 07:00:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1771	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.608	23.479	650007	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 07:00:12 2022	Mon Jun 27 07:00:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1770	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.641	-273.150	28.612	23.478	656192	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A681_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 07:00:07 2022	Mon Jun 27 07:00:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1769	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.557	23.486	653739	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:59:48 2022	Mon Jun 27 06:59:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2159	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.642	-273.150	28.591	23.496	653315	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:59:43 2022	Mon Jun 27 06:59:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2158	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.575	23.492	654590	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:59:38 2022	Mon Jun 27 06:59:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2157	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.642	-273.150	28.562	23.495	651630	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:59:33 2022	Mon Jun 27 06:59:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2156	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.642	-273.150	28.603	23.504	542806	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:59:28 2022	Mon Jun 27 06:59:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2155	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.559	23.504	654544	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:59:23 2022	Mon Jun 27 06:59:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2154	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.539	23.501	654431	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:59:18 2022	Mon Jun 27 06:59:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2153	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.642	-273.150	28.561	23.497	654776	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:59:13 2022	Mon Jun 27 06:59:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2152	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.643	-273.150	28.525	23.502	651382	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:59:08 2022	Mon Jun 27 06:59:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2151	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.643	-273.150	28.507	23.506	655484	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C680_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:59:03 2022	Mon Jun 27 06:59:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2150	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.643	-273.150	28.587	23.507	653987	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:58:50 2022	Mon Jun 27 06:58:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4053	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.641	-273.150	28.601	23.505	650517	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:58:45 2022	Mon Jun 27 06:58:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4052	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.641	-273.150	28.523	23.503	655673	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:58:41 2022	Mon Jun 27 06:58:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4051	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.642	-273.150	28.575	23.500	640026	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:58:36 2022	Mon Jun 27 06:58:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4050	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.641	-273.150	28.558	23.504	658491	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:58:31 2022	Mon Jun 27 06:58:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4049	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.640	-273.150	28.558	23.498	707320	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:58:26 2022	Mon Jun 27 06:58:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4048	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.571	23.493	654544	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:58:22 2022	Mon Jun 27 06:58:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4047	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.573	23.501	657998	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:58:17 2022	Mon Jun 27 06:58:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4046	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.558	23.498	652214	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:58:12 2022	Mon Jun 27 06:58:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4045	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.638	0.000	28.557	23.488	648397	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B679_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:58:07 2022	Mon Jun 27 06:58:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4044	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.584	23.488	657567	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:57:54 2022	Mon Jun 27 06:57:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1768	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.535	0.000	655207	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:57:49 2022	Mon Jun 27 06:57:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1767	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.639	-273.150	28.595	23.497	667510	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:57:44 2022	Mon Jun 27 06:57:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1766	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.629	23.506	638523	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:57:40 2022	Mon Jun 27 06:57:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1765	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.640	-273.150	28.598	23.509	658129	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:57:35 2022	Mon Jun 27 06:57:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1764	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.575	23.505	663571	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:57:30 2022	Mon Jun 27 06:57:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1763	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.637	-273.150	28.581	23.502	652672	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:57:25 2022	Mon Jun 27 06:57:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1762	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.510	23.500	653406	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:57:19 2022	Mon Jun 27 06:57:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1761	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.637	-273.150	28.564	23.492	656667	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:57:15 2022	Mon Jun 27 06:57:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1760	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.555	23.486	649603	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A678_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:57:10 2022	Mon Jun 27 06:57:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1759	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.548	23.472	657121	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:56:47 2022	Mon Jun 27 06:56:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2149	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.574	23.492	657915	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:56:42 2022	Mon Jun 27 06:56:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2148	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.562	23.493	651993	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:56:38 2022	Mon Jun 27 06:56:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2147	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.606	23.491	653734	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:56:33 2022	Mon Jun 27 06:56:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2146	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.550	23.486	657680	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:56:28 2022	Mon Jun 27 06:56:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2145	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.614	23.474	658693	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:56:23 2022	Mon Jun 27 06:56:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2144	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.537	23.463	655543	1	1	100000	tingxu20220626	13	102.29	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:56:18 2022	Mon Jun 27 06:56:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2143	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.638	-273.150	28.603	23.489	597179	1	1	100000	tingxu20220626	13	101.88	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:56:13 2022	Mon Jun 27 06:56:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2142	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.639	-273.150	28.559	23.500	656249	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:56:08 2022	Mon Jun 27 06:56:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2141	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.639	-273.150	28.563	23.494	655866	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C677_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:56:03 2022	Mon Jun 27 06:56:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2140	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.640	-273.150	0.000	23.492	610564	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:55:49 2022	Mon Jun 27 06:55:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4043	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.640	0.000	28.572	23.487	655533	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:55:45 2022	Mon Jun 27 06:55:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4042	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.640	-273.150	28.573	23.503	652806	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:55:40 2022	Mon Jun 27 06:55:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4041	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.621	23.502	654258	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:55:35 2022	Mon Jun 27 06:55:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4040	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.632	23.507	656671	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:55:30 2022	Mon Jun 27 06:55:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4039	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.638	0.000	28.569	23.505	655378	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:55:26 2022	Mon Jun 27 06:55:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4038	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.589	23.503	654723	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:55:21 2022	Mon Jun 27 06:55:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4037	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.563	23.496	655858	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:55:12 2022	Mon Jun 27 06:55:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4036	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.638	0.000	28.534	23.502	646966	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:55:07 2022	Mon Jun 27 06:55:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4035	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.556	23.506	653675	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B676_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:55:02 2022	Mon Jun 27 06:55:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4034	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.639	-273.150	28.524	23.501	648175	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:54:49 2022	Mon Jun 27 06:54:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1758	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.638	-273.150	28.590	23.487	659861	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:54:44 2022	Mon Jun 27 06:54:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1757	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.636	-273.150	28.569	23.498	656134	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:54:38 2022	Mon Jun 27 06:54:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1756	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.590	23.500	657263	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:54:33 2022	Mon Jun 27 06:54:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1755	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	0.000	28.552	23.497	574371	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:54:28 2022	Mon Jun 27 06:54:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1754	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.636	0.000	28.570	23.489	640283	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:54:24 2022	Mon Jun 27 06:54:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1753	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.590	23.496	662133	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:54:18 2022	Mon Jun 27 06:54:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1752	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.589	23.492	895191	1	1	100000	tingxu20220626	13	101.83	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:54:13 2022	Mon Jun 27 06:54:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1751	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.636	-273.150	28.567	23.490	654193	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:54:09 2022	Mon Jun 27 06:54:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1750	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.636	-273.150	28.632	23.483	657239	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A675_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:54:04 2022	Mon Jun 27 06:54:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1749	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.636	0.000	28.612	23.490	653204	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:53:45 2022	Mon Jun 27 06:53:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2139	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.653	23.494	655246	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:53:40 2022	Mon Jun 27 06:53:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2138	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.632	0.000	655766	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:53:34 2022	Mon Jun 27 06:53:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2137	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.603	23.477	658379	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:53:29 2022	Mon Jun 27 06:53:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2136	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.581	23.485	656001	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:53:24 2022	Mon Jun 27 06:53:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2135	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.634	0.000	28.576	23.496	627068	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:53:20 2022	Mon Jun 27 06:53:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2134	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.560	23.493	657745	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:53:15 2022	Mon Jun 27 06:53:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2133	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.631	23.487	657078	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:53:10 2022	Mon Jun 27 06:53:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2132	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.599	23.498	652591	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:53:02 2022	Mon Jun 27 06:53:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2131	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.557	23.496	656432	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C674_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:52:54 2022	Mon Jun 27 06:52:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2130	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.633	-273.150	28.561	23.501	656429	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:52:40 2022	Mon Jun 27 06:52:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4033	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.557	23.492	658142	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:52:36 2022	Mon Jun 27 06:52:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4032	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.632	0.000	28.583	23.492	660151	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:52:30 2022	Mon Jun 27 06:52:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4031	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.560	23.494	657219	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:52:25 2022	Mon Jun 27 06:52:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4030	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.545	23.490	656821	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:52:21 2022	Mon Jun 27 06:52:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4029	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.569	23.483	656997	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:52:16 2022	Mon Jun 27 06:52:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4028	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.514	0.000	650840	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:52:11 2022	Mon Jun 27 06:52:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4027	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.579	23.482	656812	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:52:07 2022	Mon Jun 27 06:52:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4026	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.566	23.481	657111	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:52:00 2022	Mon Jun 27 06:52:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4025	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.560	23.485	654531	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B673_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:51:55 2022	Mon Jun 27 06:51:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4024	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.602	23.498	654481	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:51:41 2022	Mon Jun 27 06:51:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1748	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.580	23.491	656676	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:51:37 2022	Mon Jun 27 06:51:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1747	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.561	23.493	657952	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:51:32 2022	Mon Jun 27 06:51:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1746	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	0.000	28.581	23.495	686904	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:51:26 2022	Mon Jun 27 06:51:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1745	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.613	23.492	659444	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:51:21 2022	Mon Jun 27 06:51:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1744	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.522	23.493	653577	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:51:16 2022	Mon Jun 27 06:51:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1743	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.542	23.497	658354	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:51:12 2022	Mon Jun 27 06:51:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1742	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.574	23.496	644235	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:51:07 2022	Mon Jun 27 06:51:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1741	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.633	23.495	653110	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:50:53 2022	Mon Jun 27 06:50:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1740	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.515	23.498	659798	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A672_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:50:48 2022	Mon Jun 27 06:50:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1739	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.506	0.000	607055	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:50:29 2022	Mon Jun 27 06:50:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2129	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.563	23.494	659474	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:50:22 2022	Mon Jun 27 06:50:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2128	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.632	-273.150	28.613	0.000	660441	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:50:18 2022	Mon Jun 27 06:50:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2127	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.578	23.500	653866	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:50:13 2022	Mon Jun 27 06:50:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2126	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.617	23.491	657297	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:50:08 2022	Mon Jun 27 06:50:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2125	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.502	23.484	656807	1	1	100000	tingxu20220626	13	101.78	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:50:03 2022	Mon Jun 27 06:50:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2124	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.572	0.000	601234	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:49:58 2022	Mon Jun 27 06:50:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2123	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.635	-273.150	28.576	23.468	648387	1	1	100000	tingxu20220626	13	101.81	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:49:50 2022	Mon Jun 27 06:49:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2122	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.484	23.487	651857	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:49:45 2022	Mon Jun 27 06:49:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2121	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	0.000	28.570	23.497	657741	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C671_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:49:41 2022	Mon Jun 27 06:49:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2120	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.549	23.494	653883	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:49:27 2022	Mon Jun 27 06:49:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4023	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	0.000	28.513	23.496	657731	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:49:22 2022	Mon Jun 27 06:49:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4022	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.542	23.499	656301	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:49:16 2022	Mon Jun 27 06:49:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4021	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.548	23.501	656885	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:49:12 2022	Mon Jun 27 06:49:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4020	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.559	23.500	653846	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:49:07 2022	Mon Jun 27 06:49:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4019	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.535	23.505	656615	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:49:02 2022	Mon Jun 27 06:49:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4018	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	0.000	28.530	23.506	659113	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:48:57 2022	Mon Jun 27 06:49:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4017	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.502	23.513	653071	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:48:53 2022	Mon Jun 27 06:48:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4016	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.544	23.512	659276	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:48:48 2022	Mon Jun 27 06:48:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4015	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.591	23.509	654742	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B670_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:48:43 2022	Mon Jun 27 06:48:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4014	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.632	-273.150	28.493	23.503	657419	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:48:30 2022	Mon Jun 27 06:48:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1738	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.570	23.493	656185	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:48:25 2022	Mon Jun 27 06:48:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1737	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.578	23.478	661520	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:48:20 2022	Mon Jun 27 06:48:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1736	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.632	-273.150	28.557	23.488	663023	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:48:16 2022	Mon Jun 27 06:48:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1735	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.532	23.479	659027	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:48:11 2022	Mon Jun 27 06:48:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1734	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.564	23.480	667275	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:48:06 2022	Mon Jun 27 06:48:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1733	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.497	23.484	655882	1	1	100000	tingxu20220626	13	101.74	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:48:01 2022	Mon Jun 27 06:48:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1732	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.604	23.490	652675	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:47:57 2022	Mon Jun 27 06:47:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1731	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.636	-273.150	28.510	23.485	646976	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:47:50 2022	Mon Jun 27 06:47:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1730	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.636	-273.150	28.545	23.495	657257	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A669_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:47:46 2022	Mon Jun 27 06:47:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1729	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.558	23.485	661608	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:47:27 2022	Mon Jun 27 06:47:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2119	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.564	23.504	647957	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:47:22 2022	Mon Jun 27 06:47:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2118	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.524	23.503	660726	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:47:17 2022	Mon Jun 27 06:47:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2117	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.542	23.499	653789	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:47:12 2022	Mon Jun 27 06:47:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2116	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.545	23.494	793311	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:47:07 2022	Mon Jun 27 06:47:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2115	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.572	23.489	654487	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:47:02 2022	Mon Jun 27 06:47:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2114	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.524	23.487	669899	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:46:58 2022	Mon Jun 27 06:47:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2113	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.585	23.484	656756	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:46:53 2022	Mon Jun 27 06:46:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2112	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.525	23.482	655597	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:46:48 2022	Mon Jun 27 06:46:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2111	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.633	-273.150	28.603	23.475	599922	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C668_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:46:43 2022	Mon Jun 27 06:46:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2110	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.635	-273.150	28.655	23.493	655475	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:46:30 2022	Mon Jun 27 06:46:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4013	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.582	23.493	655101	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:46:25 2022	Mon Jun 27 06:46:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4012	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.591	23.490	660180	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:46:20 2022	Mon Jun 27 06:46:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4011	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.590	23.496	659737	1	1	100000	tingxu20220626	13	101.91	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:46:16 2022	Mon Jun 27 06:46:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4010	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.635	-273.150	28.599	0.000	653330	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:46:11 2022	Mon Jun 27 06:46:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4009	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.568	23.490	656422	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:46:06 2022	Mon Jun 27 06:46:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4008	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.635	-273.150	28.577	23.484	652266	1	1	100000	tingxu20220626	13	101.70	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:46:01 2022	Mon Jun 27 06:46:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4007	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.635	-273.150	28.542	23.488	650970	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:45:56 2022	Mon Jun 27 06:45:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4006	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.530	23.493	657847	1	1	100000	tingxu20220626	13	101.73	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:45:52 2022	Mon Jun 27 06:45:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4005	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.635	-273.150	28.559	0.000	649734	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B667_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:45:47 2022	Mon Jun 27 06:45:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4004	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.584	23.489	640696	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:45:34 2022	Mon Jun 27 06:45:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1728	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.583	23.499	677501	1	1	100000	tingxu20220626	13	101.80	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:45:29 2022	Mon Jun 27 06:45:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1727	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.637	-273.150	28.580	23.495	657737	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:45:24 2022	Mon Jun 27 06:45:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1726	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.547	23.493	657581	1	1	100000	tingxu20220626	13	101.83	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:45:19 2022	Mon Jun 27 06:45:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1725	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.636	-273.150	28.582	23.491	652741	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:45:15 2022	Mon Jun 27 06:45:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1724	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.518	23.485	652823	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:45:10 2022	Mon Jun 27 06:45:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1723	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.593	23.478	659616	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:45:05 2022	Mon Jun 27 06:45:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1722	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.636	0.000	28.567	23.480	657337	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:45:01 2022	Mon Jun 27 06:45:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1721	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.551	23.487	652750	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:44:56 2022	Mon Jun 27 06:44:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1720	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.534	23.484	655913	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A666_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:44:49 2022	Mon Jun 27 06:44:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1719	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.635	-273.150	28.553	23.484	686362	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:44:29 2022	Mon Jun 27 06:44:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2109	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.584	23.508	657159	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:44:25 2022	Mon Jun 27 06:44:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2108	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.561	23.509	675523	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:44:20 2022	Mon Jun 27 06:44:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2107	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.567	0.000	658531	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:44:15 2022	Mon Jun 27 06:44:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2106	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.529	23.501	652604	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:44:11 2022	Mon Jun 27 06:44:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2105	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.519	23.495	655205	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:44:06 2022	Mon Jun 27 06:44:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2104	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.592	23.492	661765	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:44:01 2022	Mon Jun 27 06:44:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2103	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.564	23.495	651302	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:43:57 2022	Mon Jun 27 06:43:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2102	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.527	23.491	643976	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:43:52 2022	Mon Jun 27 06:43:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2101	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.531	23.490	656861	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C665_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:43:47 2022	Mon Jun 27 06:43:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2100	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.525	23.498	658873	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:43:34 2022	Mon Jun 27 06:43:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4003	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.528	23.487	653926	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:43:29 2022	Mon Jun 27 06:43:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4002	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.544	23.489	660675	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:43:25 2022	Mon Jun 27 06:43:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4001	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.539	23.495	695231	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:43:20 2022	Mon Jun 27 06:43:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	4000	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.510	23.492	658374	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:43:15 2022	Mon Jun 27 06:43:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3999	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.586	23.498	660844	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:43:10 2022	Mon Jun 27 06:43:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3998	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	0.000	28.527	23.500	660150	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:43:06 2022	Mon Jun 27 06:43:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3997	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.543	23.506	656957	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:43:01 2022	Mon Jun 27 06:43:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3996	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.572	23.502	658883	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:42:56 2022	Mon Jun 27 06:42:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3995	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.544	23.507	662206	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B664_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:42:48 2022	Mon Jun 27 06:42:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3994	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.558	23.515	687451	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:42:35 2022	Mon Jun 27 06:42:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1718	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.608	23.504	660255	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:42:30 2022	Mon Jun 27 06:42:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1717	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.526	23.509	659135	1	1	100000	tingxu20220626	13	102.41	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:42:26 2022	Mon Jun 27 06:42:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1716	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.546	23.505	657940	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:42:21 2022	Mon Jun 27 06:42:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1715	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.631	-273.150	28.604	23.498	655385	1	1	100000	tingxu20220626	13	102.44	102.43	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:42:16 2022	Mon Jun 27 06:42:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1714	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.631	-273.150	28.621	23.496	658011	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:42:11 2022	Mon Jun 27 06:42:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1713	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.631	-273.150	28.586	23.488	659659	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:42:07 2022	Mon Jun 27 06:42:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1712	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.517	23.496	659670	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:42:02 2022	Mon Jun 27 06:42:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1711	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.510	23.497	658821	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:41:57 2022	Mon Jun 27 06:41:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1710	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.485	23.489	659371	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A663_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:41:52 2022	Mon Jun 27 06:41:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1709	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.499	23.489	661237	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:41:33 2022	Mon Jun 27 06:41:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2099	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.524	23.481	632890	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:41:28 2022	Mon Jun 27 06:41:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2098	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	0.000	23.495	661743	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:41:24 2022	Mon Jun 27 06:41:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2097	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.634	0.000	28.542	23.494	654499	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:41:14 2022	Mon Jun 27 06:41:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2096	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.634	-273.150	28.599	23.494	659377	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:41:09 2022	Mon Jun 27 06:41:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2095	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.636	-273.150	28.623	0.000	654930	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:41:04 2022	Mon Jun 27 06:41:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2094	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.550	23.496	660620	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:41:00 2022	Mon Jun 27 06:41:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2093	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	0.000	23.499	659006	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:40:55 2022	Mon Jun 27 06:40:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2092	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.636	-273.150	28.551	23.498	660375	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:40:49 2022	Mon Jun 27 06:40:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2091	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.552	23.499	661257	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C662_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:40:45 2022	Mon Jun 27 06:40:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2090	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.546	23.497	659377	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:40:31 2022	Mon Jun 27 06:40:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3993	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.620	23.500	652295	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:40:27 2022	Mon Jun 27 06:40:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3992	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.609	23.497	659351	1	1	100000	tingxu20220626	13	102.37	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:40:22 2022	Mon Jun 27 06:40:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3991	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	0.000	28.535	23.492	656654	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:40:17 2022	Mon Jun 27 06:40:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3990	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.545	23.486	653141	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:40:09 2022	Mon Jun 27 06:40:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3989	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.608	23.492	655002	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:40:04 2022	Mon Jun 27 06:40:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3988	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.543	23.504	655211	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:39:59 2022	Mon Jun 27 06:40:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3987	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.570	23.501	654222	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:39:54 2022	Mon Jun 27 06:39:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3986	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.513	23.497	584083	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:39:49 2022	Mon Jun 27 06:39:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3985	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.535	23.494	672420	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B661_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:39:44 2022	Mon Jun 27 06:39:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3984	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.634	-273.150	28.542	23.483	657406	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:39:31 2022	Mon Jun 27 06:39:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1708	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.478	23.500	657809	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:39:26 2022	Mon Jun 27 06:39:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1707	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.517	23.500	666864	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:39:22 2022	Mon Jun 27 06:39:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1706	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.633	-273.150	28.555	23.490	670710	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:39:17 2022	Mon Jun 27 06:39:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1705	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.632	-273.150	28.556	23.497	658198	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:39:12 2022	Mon Jun 27 06:39:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1704	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.632	-273.150	28.591	23.497	658226	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:39:04 2022	Mon Jun 27 06:39:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1703	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.520	23.501	656114	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:38:59 2022	Mon Jun 27 06:39:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1702	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.559	23.493	658613	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:38:55 2022	Mon Jun 27 06:38:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1701	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.585	23.496	656068	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:38:48 2022	Mon Jun 27 06:38:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1700	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.570	23.493	657809	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A660_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:38:43 2022	Mon Jun 27 06:38:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1699	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.528	23.506	663549	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:38:24 2022	Mon Jun 27 06:38:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2089	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.586	23.510	655019	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:38:19 2022	Mon Jun 27 06:38:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2088	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.630	-273.150	28.526	0.000	652468	1	1	100000	tingxu20220626	13	101.93	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:38:15 2022	Mon Jun 27 06:38:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2087	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.559	23.502	656633	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:38:10 2022	Mon Jun 27 06:38:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2086	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.538	23.502	658625	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:38:01 2022	Mon Jun 27 06:38:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2085	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.635	-273.150	28.540	23.506	658727	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:37:56 2022	Mon Jun 27 06:37:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2084	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.576	0.000	653949	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:37:51 2022	Mon Jun 27 06:37:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2083	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.552	23.493	660413	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:37:46 2022	Mon Jun 27 06:37:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2082	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.541	23.493	656602	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:37:42 2022	Mon Jun 27 06:37:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2081	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.565	23.490	657133	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C659_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:37:37 2022	Mon Jun 27 06:37:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2080	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.551	0.000	657048	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:37:23 2022	Mon Jun 27 06:37:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3983	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.545	23.494	652503	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:37:19 2022	Mon Jun 27 06:37:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3982	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.632	-273.150	28.555	23.497	657538	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:37:14 2022	Mon Jun 27 06:37:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3981	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.542	23.500	660222	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:37:09 2022	Mon Jun 27 06:37:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3980	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.532	23.511	602797	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:37:04 2022	Mon Jun 27 06:37:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3979	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	0.000	28.565	23.510	838710	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:36:59 2022	Mon Jun 27 06:37:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3978	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.631	-273.150	28.549	23.504	654217	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:36:54 2022	Mon Jun 27 06:36:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3977	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.514	23.507	566514	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:36:49 2022	Mon Jun 27 06:36:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3976	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.586	23.508	660002	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:36:44 2022	Mon Jun 27 06:36:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3975	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.531	23.511	651491	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B658_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:36:39 2022	Mon Jun 27 06:36:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3974	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.564	23.511	651977	1	1	100000	tingxu20220626	13	102.26	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:36:23 2022	Mon Jun 27 06:36:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1698	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.562	23.508	652592	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:36:19 2022	Mon Jun 27 06:36:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1697	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.631	-273.150	28.587	23.506	658286	1	1	100000	tingxu20220626	13	101.89	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:36:14 2022	Mon Jun 27 06:36:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1696	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.584	23.509	656322	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:36:09 2022	Mon Jun 27 06:36:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1695	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.630	-273.150	28.557	23.504	797021	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:36:04 2022	Mon Jun 27 06:36:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1694	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.545	23.500	661940	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:35:59 2022	Mon Jun 27 06:36:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1693	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.631	0.000	28.589	23.499	655932	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:35:54 2022	Mon Jun 27 06:35:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1692	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.631	-273.150	28.498	23.494	612237	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:35:49 2022	Mon Jun 27 06:35:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1691	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.549	23.493	657879	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:35:45 2022	Mon Jun 27 06:35:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1690	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	0.000	28.584	23.486	657980	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A657_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:35:40 2022	Mon Jun 27 06:35:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1689	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.553	23.476	655583	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:35:20 2022	Mon Jun 27 06:35:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2079	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.529	23.501	652616	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:35:15 2022	Mon Jun 27 06:35:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2078	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.557	23.496	655748	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:35:10 2022	Mon Jun 27 06:35:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2077	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.461	23.492	658584	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:35:06 2022	Mon Jun 27 06:35:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2076	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.629	-273.150	28.578	23.496	656181	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:35:01 2022	Mon Jun 27 06:35:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2075	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.629	-273.150	28.458	23.502	656226	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:34:56 2022	Mon Jun 27 06:34:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2074	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.517	23.491	652956	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:34:45 2022	Mon Jun 27 06:34:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2073	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.547	23.503	652864	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:34:40 2022	Mon Jun 27 06:34:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2072	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.552	23.499	653655	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:34:36 2022	Mon Jun 27 06:34:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2071	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	0.000	23.507	653467	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C656_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:34:31 2022	Mon Jun 27 06:34:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2070	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.629	-273.150	28.468	23.506	656052	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:34:17 2022	Mon Jun 27 06:34:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3973	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	28.532	23.494	650006	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:34:12 2022	Mon Jun 27 06:34:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3972	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	28.541	23.492	654678	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:34:08 2022	Mon Jun 27 06:34:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3971	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.562	23.486	651358	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:34:03 2022	Mon Jun 27 06:34:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3970	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.628	-273.150	28.534	23.477	656906	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:33:58 2022	Mon Jun 27 06:34:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3969	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.627	-273.150	28.571	23.476	652366	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:33:53 2022	Mon Jun 27 06:33:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3968	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.627	-273.150	28.568	23.485	655481	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:33:46 2022	Mon Jun 27 06:33:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3967	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.628	-273.150	28.598	23.490	654121	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:33:41 2022	Mon Jun 27 06:33:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3966	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.628	-273.150	28.547	23.502	655120	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:33:36 2022	Mon Jun 27 06:33:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3965	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.628	-273.150	28.551	23.496	652357	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B655_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:33:31 2022	Mon Jun 27 06:33:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3964	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.628	-273.150	28.530	23.499	655984	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:33:18 2022	Mon Jun 27 06:33:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1688	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.488	23.484	653074	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:33:13 2022	Mon Jun 27 06:33:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1687	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.535	23.492	652992	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:33:08 2022	Mon Jun 27 06:33:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1686	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.626	-273.150	28.533	23.490	657789	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:33:03 2022	Mon Jun 27 06:33:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1685	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.628	-273.150	28.508	23.496	572866	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:32:58 2022	Mon Jun 27 06:33:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1684	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.549	23.496	658016	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:32:54 2022	Mon Jun 27 06:32:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1683	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.567	23.495	658314	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:32:48 2022	Mon Jun 27 06:32:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1682	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.525	23.501	725325	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:32:38 2022	Mon Jun 27 06:32:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1681	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.559	23.507	656302	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:32:33 2022	Mon Jun 27 06:32:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1680	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.540	23.505	605093	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A654_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:32:28 2022	Mon Jun 27 06:32:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1679	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.533	23.495	640215	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:32:06 2022	Mon Jun 27 06:32:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2069	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.635	-273.150	28.504	0.000	646035	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:32:01 2022	Mon Jun 27 06:32:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2068	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.574	23.493	653928	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:31:57 2022	Mon Jun 27 06:31:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2067	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.634	-273.150	28.581	23.489	643192	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:31:52 2022	Mon Jun 27 06:31:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2066	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.633	-273.150	28.542	23.504	655095	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:31:46 2022	Mon Jun 27 06:31:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2065	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.557	23.500	659168	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:31:41 2022	Mon Jun 27 06:31:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2064	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.479	23.493	658079	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:31:33 2022	Mon Jun 27 06:31:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2063	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.633	-273.150	28.537	23.497	656955	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:31:28 2022	Mon Jun 27 06:31:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2062	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.540	23.488	656725	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:31:23 2022	Mon Jun 27 06:31:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2061	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.631	-273.150	28.564	23.489	638508	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C653_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:31:18 2022	Mon Jun 27 06:31:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2060	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.632	-273.150	28.513	23.477	540547	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:31:02 2022	Mon Jun 27 06:31:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3963	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.526	23.507	649576	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:30:58 2022	Mon Jun 27 06:31:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3962	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.571	23.502	648893	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:30:53 2022	Mon Jun 27 06:30:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3961	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.544	23.511	652846	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:30:46 2022	Mon Jun 27 06:30:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3960	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	28.519	23.506	651944	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:30:41 2022	Mon Jun 27 06:30:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3959	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.563	23.499	653386	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:30:37 2022	Mon Jun 27 06:30:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3958	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.628	-273.150	28.556	0.000	656269	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:30:31 2022	Mon Jun 27 06:30:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3957	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.628	-273.150	28.524	23.512	653159	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:30:27 2022	Mon Jun 27 06:30:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3956	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.629	0.000	28.622	23.510	662808	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:30:22 2022	Mon Jun 27 06:30:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3955	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.574	23.504	656145	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B652_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:30:17 2022	Mon Jun 27 06:30:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3954	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.498	23.497	649586	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:29:58 2022	Mon Jun 27 06:30:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1678	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	0.000	28.514	23.502	654700	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:29:53 2022	Mon Jun 27 06:29:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1677	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.631	0.000	28.545	23.505	702658	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:29:45 2022	Mon Jun 27 06:29:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1676	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.630	-273.150	28.537	23.506	650218	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:29:41 2022	Mon Jun 27 06:29:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1675	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.613	23.502	652756	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:29:36 2022	Mon Jun 27 06:29:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1674	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.630	-273.150	28.596	0.000	656889	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:29:31 2022	Mon Jun 27 06:29:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1673	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.631	-273.150	28.559	23.496	655630	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:29:25 2022	Mon Jun 27 06:29:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1672	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.646	0.000	645298	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:29:20 2022	Mon Jun 27 06:29:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1671	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.558	23.504	646282	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:29:16 2022	Mon Jun 27 06:29:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1670	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.578	23.510	660958	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A651_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:29:11 2022	Mon Jun 27 06:29:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1669	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.629	-273.150	28.594	23.508	654720	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:28:52 2022	Mon Jun 27 06:28:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2059	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.629	23.507	650891	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:28:47 2022	Mon Jun 27 06:28:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2058	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.630	-273.150	28.594	23.506	652455	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:28:42 2022	Mon Jun 27 06:28:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2057	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.631	-273.150	28.603	23.508	654164	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:28:38 2022	Mon Jun 27 06:28:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2056	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	28.622	23.501	652552	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:28:33 2022	Mon Jun 27 06:28:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2055	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.564	23.500	656037	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:28:28 2022	Mon Jun 27 06:28:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2054	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.583	23.496	658180	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:28:22 2022	Mon Jun 27 06:28:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2053	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.635	23.501	655320	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:28:17 2022	Mon Jun 27 06:28:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2052	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.601	23.501	651633	1	1	100000	tingxu20220626	13	101.74	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:28:12 2022	Mon Jun 27 06:28:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2051	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.594	0.000	655584	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C650_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:28:07 2022	Mon Jun 27 06:28:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2050	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.630	-273.150	28.561	23.495	654078	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:27:54 2022	Mon Jun 27 06:27:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3953	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.630	-273.150	28.556	0.000	662673	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:27:43 2022	Mon Jun 27 06:27:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3952	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.561	23.509	657117	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:27:38 2022	Mon Jun 27 06:27:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3951	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.627	-273.150	28.594	23.513	659964	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:27:33 2022	Mon Jun 27 06:27:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3950	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.564	23.505	690356	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:27:29 2022	Mon Jun 27 06:27:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3949	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.603	0.000	654533	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:27:24 2022	Mon Jun 27 06:27:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3948	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.597	23.509	655262	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:27:19 2022	Mon Jun 27 06:27:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3947	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.626	-273.150	28.586	23.495	658671	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:27:15 2022	Mon Jun 27 06:27:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3946	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	-273.150	28.559	23.504	652004	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:27:10 2022	Mon Jun 27 06:27:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3945	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	-273.150	28.546	23.509	654505	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B649_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:27:05 2022	Mon Jun 27 06:27:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3944	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.624	-273.150	28.562	23.510	653020	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:26:52 2022	Mon Jun 27 06:26:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1668	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.627	-273.150	28.571	23.491	653416	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:26:43 2022	Mon Jun 27 06:26:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1667	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.627	-273.150	28.582	23.495	668185	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:26:38 2022	Mon Jun 27 06:26:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1666	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.629	-273.150	28.584	23.506	652875	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:26:34 2022	Mon Jun 27 06:26:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1665	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.628	-273.150	28.612	23.495	655756	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:26:29 2022	Mon Jun 27 06:26:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1664	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.629	-273.150	28.573	23.509	655842	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:26:24 2022	Mon Jun 27 06:26:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1663	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.630	-273.150	28.592	23.507	569229	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:26:20 2022	Mon Jun 27 06:26:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1662	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.630	-273.150	28.612	23.512	650319	1	1	100000	tingxu20220626	13	101.69	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:26:14 2022	Mon Jun 27 06:26:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1661	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	28.589	23.501	663657	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:26:09 2022	Mon Jun 27 06:26:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1660	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.629	-273.150	28.586	23.501	564910	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A648_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:26:05 2022	Mon Jun 27 06:26:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1659	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.630	-273.150	28.529	23.507	655835	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:25:46 2022	Mon Jun 27 06:25:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2049	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.628	-273.150	28.577	0.000	650879	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:25:39 2022	Mon Jun 27 06:25:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2048	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.566	23.508	581738	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:25:34 2022	Mon Jun 27 06:25:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2047	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.627	-273.150	28.598	23.503	652889	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:25:30 2022	Mon Jun 27 06:25:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2046	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.600	23.491	652606	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:25:25 2022	Mon Jun 27 06:25:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2045	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.627	-273.150	28.569	23.477	655608	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:25:20 2022	Mon Jun 27 06:25:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2044	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.626	-273.150	28.537	23.473	653278	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:25:16 2022	Mon Jun 27 06:25:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2043	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.570	23.504	650636	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:25:08 2022	Mon Jun 27 06:25:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2042	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	-273.150	28.561	23.513	662404	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:25:03 2022	Mon Jun 27 06:25:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2041	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	-273.150	28.547	23.520	633537	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C647_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:24:58 2022	Mon Jun 27 06:25:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2040	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.591	23.518	654167	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:24:44 2022	Mon Jun 27 06:24:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3943	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.595	23.512	657385	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:24:39 2022	Mon Jun 27 06:24:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3942	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.584	0.000	656807	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:24:34 2022	Mon Jun 27 06:24:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3941	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.560	23.512	656783	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:24:29 2022	Mon Jun 27 06:24:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3940	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.624	-273.150	28.525	23.508	658548	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:24:25 2022	Mon Jun 27 06:24:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3939	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.564	23.502	685386	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:24:20 2022	Mon Jun 27 06:24:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3938	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.549	23.503	653408	1	1	100000	tingxu20220626	13	101.64	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:24:15 2022	Mon Jun 27 06:24:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3937	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.547	23.499	648782	1	1	100000	tingxu20220626	13	101.65	101.65	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:24:10 2022	Mon Jun 27 06:24:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3936	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.622	-273.150	28.540	23.499	659166	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:24:04 2022	Mon Jun 27 06:24:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3935	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.538	23.505	655503	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B646_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:23:59 2022	Mon Jun 27 06:24:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3934	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	0.000	28.591	23.504	655816	1	1	100000	tingxu20220626	13	101.70	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:23:45 2022	Mon Jun 27 06:23:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1658	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	-273.150	28.556	23.505	656627	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:23:41 2022	Mon Jun 27 06:23:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1657	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.625	0.000	28.595	23.516	658486	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:23:32 2022	Mon Jun 27 06:23:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1656	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.626	-273.150	28.589	23.518	653428	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:23:27 2022	Mon Jun 27 06:23:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1655	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.624	-273.150	28.563	0.000	656327	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:23:22 2022	Mon Jun 27 06:23:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1654	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	0.000	23.507	659162	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:23:18 2022	Mon Jun 27 06:23:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1653	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.566	23.504	653594	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:23:13 2022	Mon Jun 27 06:23:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1652	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.540	23.511	653352	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:23:08 2022	Mon Jun 27 06:23:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1651	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.588	0.000	659422	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:23:03 2022	Mon Jun 27 06:23:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1650	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.584	23.503	584476	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A645_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:22:58 2022	Mon Jun 27 06:23:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1649	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.623	-273.150	28.541	23.504	655640	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:22:39 2022	Mon Jun 27 06:22:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2039	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.511	23.507	601011	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:22:35 2022	Mon Jun 27 06:22:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2038	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.538	0.000	660035	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:22:27 2022	Mon Jun 27 06:22:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2037	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.622	-273.150	28.534	23.499	655861	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:22:23 2022	Mon Jun 27 06:22:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2036	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.621	-273.150	28.569	23.497	656587	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:22:18 2022	Mon Jun 27 06:22:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2035	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.621	-273.150	28.504	23.491	657451	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:22:13 2022	Mon Jun 27 06:22:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2034	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.622	-273.150	28.552	23.493	657424	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:22:08 2022	Mon Jun 27 06:22:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2033	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.536	23.505	654793	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:22:03 2022	Mon Jun 27 06:22:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2032	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.622	-273.150	28.585	0.000	657727	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:21:57 2022	Mon Jun 27 06:22:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2031	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.574	23.490	660284	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C644_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:21:53 2022	Mon Jun 27 06:21:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2030	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.548	23.497	656436	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:21:38 2022	Mon Jun 27 06:21:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3933	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.512	23.487	656212	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:21:34 2022	Mon Jun 27 06:21:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3932	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.620	-273.150	28.590	23.491	658258	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:21:29 2022	Mon Jun 27 06:21:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3931	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.620	-273.150	28.562	23.502	656112	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:21:23 2022	Mon Jun 27 06:21:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3930	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.620	-273.150	28.534	0.000	660257	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:21:18 2022	Mon Jun 27 06:21:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3929	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.620	-273.150	28.527	23.502	658486	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:21:13 2022	Mon Jun 27 06:21:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3928	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.619	-273.150	28.535	23.504	642568	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:21:08 2022	Mon Jun 27 06:21:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3927	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.620	-273.150	28.582	23.512	658940	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:21:04 2022	Mon Jun 27 06:21:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3926	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.620	-273.150	28.549	23.508	675624	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:20:59 2022	Mon Jun 27 06:21:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3925	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.621	-273.150	28.535	23.514	657587	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B643_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:20:54 2022	Mon Jun 27 06:20:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3924	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.621	-273.150	28.528	0.000	664855	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:20:40 2022	Mon Jun 27 06:20:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1648	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.533	23.495	659715	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:20:36 2022	Mon Jun 27 06:20:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1647	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.621	-273.150	28.527	23.494	665587	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:20:31 2022	Mon Jun 27 06:20:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1646	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.621	-273.150	28.537	23.497	671239	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:20:26 2022	Mon Jun 27 06:20:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1645	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.558	23.495	652030	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:20:20 2022	Mon Jun 27 06:20:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1644	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.621	-273.150	28.536	23.500	651917	1	1	100000	tingxu20220626	13	101.99	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:20:15 2022	Mon Jun 27 06:20:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1643	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.622	-273.150	28.541	23.506	659362	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:20:10 2022	Mon Jun 27 06:20:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1642	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.621	-273.150	28.586	23.508	664521	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:20:05 2022	Mon Jun 27 06:20:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1641	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.620	-273.150	28.568	23.501	649481	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:20:01 2022	Mon Jun 27 06:20:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1640	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.620	-273.150	28.495	23.502	656558	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A642_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:19:56 2022	Mon Jun 27 06:19:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1639	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.620	-273.150	28.575	23.495	667612	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:19:37 2022	Mon Jun 27 06:19:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2029	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.617	-273.150	28.490	23.499	659193	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:19:32 2022	Mon Jun 27 06:19:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2028	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.617	-273.150	28.558	23.492	659270	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:19:27 2022	Mon Jun 27 06:19:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2027	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.617	-273.150	28.530	23.501	658682	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:19:23 2022	Mon Jun 27 06:19:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2026	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.587	23.509	651230	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:19:14 2022	Mon Jun 27 06:19:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2025	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.616	-273.150	28.524	23.503	661292	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:19:09 2022	Mon Jun 27 06:19:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2024	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.616	-273.150	28.521	23.512	659291	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:19:04 2022	Mon Jun 27 06:19:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2023	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.616	-273.150	28.619	23.505	652194	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:18:59 2022	Mon Jun 27 06:19:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2022	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.615	-273.150	28.560	23.503	660288	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:18:55 2022	Mon Jun 27 06:18:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2021	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.617	-273.150	28.535	23.508	670568	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C641_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:18:42 2022	Mon Jun 27 06:18:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2020	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.525	23.509	685910	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:18:28 2022	Mon Jun 27 06:18:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3923	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.617	-273.150	28.536	0.000	658124	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:18:23 2022	Mon Jun 27 06:18:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3922	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.563	23.515	662115	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:18:18 2022	Mon Jun 27 06:18:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3921	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.614	0.000	28.543	23.514	662368	1	1	100000	tingxu20220626	13	101.95	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:18:11 2022	Mon Jun 27 06:18:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3920	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	28.546	23.508	653314	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:18:06 2022	Mon Jun 27 06:18:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3919	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.613	-273.150	28.595	23.516	651484	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:18:01 2022	Mon Jun 27 06:18:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3918	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.614	-273.150	28.568	23.514	660341	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:17:57 2022	Mon Jun 27 06:17:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3917	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	0.000	23.517	653381	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:17:52 2022	Mon Jun 27 06:17:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3916	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.612	-273.150	28.572	23.506	659491	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:17:47 2022	Mon Jun 27 06:17:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3915	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.554	23.504	659069	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B640_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:17:40 2022	Mon Jun 27 06:17:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3914	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.611	-273.150	28.569	23.508	659510	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:17:26 2022	Mon Jun 27 06:17:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1638	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	28.594	0.000	658023	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:17:22 2022	Mon Jun 27 06:17:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1637	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.613	-273.150	28.606	23.508	658306	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:17:17 2022	Mon Jun 27 06:17:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1636	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	28.569	23.509	660200	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:17:12 2022	Mon Jun 27 06:17:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1635	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.614	0.000	28.615	23.507	652017	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:17:05 2022	Mon Jun 27 06:17:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1634	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	28.590	23.505	652359	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:17:01 2022	Mon Jun 27 06:17:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1633	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	28.556	23.515	661130	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:16:56 2022	Mon Jun 27 06:16:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1632	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.614	-273.150	28.572	23.511	660500	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:16:51 2022	Mon Jun 27 06:16:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1631	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.615	-273.150	28.544	23.505	671546	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:16:47 2022	Mon Jun 27 06:16:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1630	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.615	-273.150	28.610	23.510	657232	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A639_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:16:38 2022	Mon Jun 27 06:16:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1629	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.614	-273.150	28.548	23.516	663818	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:16:19 2022	Mon Jun 27 06:16:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2019	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.611	-273.150	28.526	23.504	657141	1	1	100000	tingxu20220626	13	101.91	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:16:14 2022	Mon Jun 27 06:16:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2018	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.611	-273.150	28.549	23.504	659142	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:16:10 2022	Mon Jun 27 06:16:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2017	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.610	-273.150	28.585	23.508	685099	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:16:05 2022	Mon Jun 27 06:16:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2016	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.584	23.511	655237	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:16:00 2022	Mon Jun 27 06:16:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2015	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.613	23.519	657670	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:15:56 2022	Mon Jun 27 06:15:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2014	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.611	-273.150	28.568	23.511	665086	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:15:51 2022	Mon Jun 27 06:15:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2013	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.611	-273.150	28.557	23.507	653705	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:15:46 2022	Mon Jun 27 06:15:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2012	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.611	-273.150	28.565	23.517	661582	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:15:38 2022	Mon Jun 27 06:15:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2011	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.552	0.000	665497	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C638_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:15:33 2022	Mon Jun 27 06:15:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2010	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.610	-273.150	28.588	23.515	695672	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:15:20 2022	Mon Jun 27 06:15:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3913	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.528	23.513	656841	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:15:15 2022	Mon Jun 27 06:15:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3912	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.609	-273.150	28.612	23.510	660833	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:15:11 2022	Mon Jun 27 06:15:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3911	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.622	23.510	661380	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:15:06 2022	Mon Jun 27 06:15:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3910	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.610	-273.150	28.549	23.511	656048	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:15:01 2022	Mon Jun 27 06:15:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3909	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.609	-273.150	28.605	23.513	662355	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:14:56 2022	Mon Jun 27 06:14:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3908	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.609	-273.150	28.602	23.515	660936	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:14:52 2022	Mon Jun 27 06:14:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3907	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.608	-273.150	28.627	23.515	663575	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:14:47 2022	Mon Jun 27 06:14:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3906	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.608	-273.150	28.580	0.000	659458	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:14:42 2022	Mon Jun 27 06:14:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3905	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.608	-273.150	28.660	23.512	660659	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B637_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:14:37 2022	Mon Jun 27 06:14:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3904	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.608	-273.150	28.551	23.508	661053	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:14:24 2022	Mon Jun 27 06:14:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1628	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.607	-273.150	28.599	0.000	663590	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:14:19 2022	Mon Jun 27 06:14:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1627	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.587	23.502	659781	1	1	100000	tingxu20220626	13	101.88	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:14:14 2022	Mon Jun 27 06:14:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1626	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.606	-273.150	28.594	23.491	658354	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:14:09 2022	Mon Jun 27 06:14:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1625	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.606	-273.150	28.607	23.478	666156	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:14:05 2022	Mon Jun 27 06:14:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1624	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.606	-273.150	28.574	23.494	660841	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:14:00 2022	Mon Jun 27 06:14:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1623	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.606	-273.150	28.582	23.509	660708	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:13:53 2022	Mon Jun 27 06:13:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1622	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.606	-273.150	28.616	23.515	653818	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:13:48 2022	Mon Jun 27 06:13:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1621	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.606	0.000	28.652	23.511	587888	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:13:40 2022	Mon Jun 27 06:13:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1620	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.607	-273.150	28.519	23.512	686838	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A636_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:13:35 2022	Mon Jun 27 06:13:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1619	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.608	-273.150	28.593	23.515	660159	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:13:16 2022	Mon Jun 27 06:13:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2009	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.606	-273.150	28.610	23.515	659562	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:13:11 2022	Mon Jun 27 06:13:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2008	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.605	-273.150	28.588	23.515	657050	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:13:06 2022	Mon Jun 27 06:13:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2007	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.605	-273.150	28.640	23.514	657835	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:13:01 2022	Mon Jun 27 06:13:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2006	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.604	-273.150	28.523	23.513	659672	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:12:57 2022	Mon Jun 27 06:12:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2005	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.603	-273.150	28.595	23.517	657557	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:12:52 2022	Mon Jun 27 06:12:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2004	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.602	-273.150	28.563	23.509	651610	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:12:47 2022	Mon Jun 27 06:12:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2003	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.604	-273.150	28.559	23.505	659802	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:12:38 2022	Mon Jun 27 06:12:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2002	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.604	-273.150	28.564	23.507	653459	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:12:33 2022	Mon Jun 27 06:12:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2001	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.605	-273.150	28.610	23.493	664773	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C635_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:12:28 2022	Mon Jun 27 06:12:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	2000	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.604	-273.150	28.607	23.491	660153	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:12:14 2022	Mon Jun 27 06:12:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3903	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.603	-273.150	28.555	23.520	656581	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:12:10 2022	Mon Jun 27 06:12:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3902	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.602	-273.150	28.558	23.512	690719	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:12:05 2022	Mon Jun 27 06:12:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3901	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.601	-273.150	28.586	23.503	652837	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:12:00 2022	Mon Jun 27 06:12:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3900	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.600	-273.150	28.625	23.504	659753	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:11:56 2022	Mon Jun 27 06:11:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3899	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.600	-273.150	28.613	23.501	664944	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:11:51 2022	Mon Jun 27 06:11:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3898	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.599	-273.150	28.641	23.505	659924	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:11:45 2022	Mon Jun 27 06:11:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3897	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.599	-273.150	28.587	23.503	656086	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:11:40 2022	Mon Jun 27 06:11:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3896	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.600	-273.150	28.557	23.501	778014	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:11:35 2022	Mon Jun 27 06:11:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3895	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.601	-273.150	28.516	23.508	652249	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B634_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:11:31 2022	Mon Jun 27 06:11:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3894	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.600	-273.150	28.548	23.508	663578	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:11:15 2022	Mon Jun 27 06:11:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1618	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.601	-273.150	28.572	0.000	660370	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:11:10 2022	Mon Jun 27 06:11:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1617	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.506	23.499	663537	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:11:05 2022	Mon Jun 27 06:11:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1616	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.600	-273.150	28.582	23.504	658194	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:11:01 2022	Mon Jun 27 06:11:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1615	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.600	-273.150	0.000	23.505	660494	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:10:56 2022	Mon Jun 27 06:10:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1614	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.600	-273.150	28.572	23.519	655719	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:10:51 2022	Mon Jun 27 06:10:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1613	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.600	-273.150	28.638	23.518	663509	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:10:38 2022	Mon Jun 27 06:10:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1612	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.599	-273.150	28.604	23.519	660934	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:10:33 2022	Mon Jun 27 06:10:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1611	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.583	23.523	559434	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:10:28 2022	Mon Jun 27 06:10:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1610	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.567	23.513	663263	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A633_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:10:24 2022	Mon Jun 27 06:10:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1609	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.597	0.000	28.586	23.512	661470	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:10:05 2022	Mon Jun 27 06:10:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1999	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.598	-273.150	28.553	23.526	654561	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:10:00 2022	Mon Jun 27 06:10:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1998	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.597	-273.150	28.608	23.526	659881	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:09:55 2022	Mon Jun 27 06:09:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1997	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.598	-273.150	28.574	23.520	656483	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:09:50 2022	Mon Jun 27 06:09:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1996	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.598	-273.150	28.606	23.508	646818	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:09:46 2022	Mon Jun 27 06:09:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1995	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.596	-273.150	28.550	23.511	662189	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:09:36 2022	Mon Jun 27 06:09:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1994	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.527	23.507	663175	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:09:31 2022	Mon Jun 27 06:09:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1993	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	28.559	23.521	659734	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:09:27 2022	Mon Jun 27 06:09:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1992	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.597	-273.150	28.587	23.514	665820	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:09:22 2022	Mon Jun 27 06:09:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1991	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.576	23.512	659297	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C632_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:09:17 2022	Mon Jun 27 06:09:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1990	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.533	23.512	660935	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:09:03 2022	Mon Jun 27 06:09:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3893	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.598	-273.150	28.577	23.506	661354	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:08:58 2022	Mon Jun 27 06:09:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3892	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.598	-273.150	28.546	23.505	657769	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:08:53 2022	Mon Jun 27 06:08:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3891	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.598	-273.150	0.000	23.500	658449	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:08:48 2022	Mon Jun 27 06:08:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3890	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.597	-273.150	28.560	23.504	688597	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:08:44 2022	Mon Jun 27 06:08:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3889	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.545	23.503	659854	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:08:39 2022	Mon Jun 27 06:08:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3888	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.597	-273.150	0.000	23.498	644831	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:08:34 2022	Mon Jun 27 06:08:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3887	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.597	-273.150	28.627	23.501	658483	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:08:30 2022	Mon Jun 27 06:08:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3886	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.598	-273.150	28.552	23.504	662096	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:08:25 2022	Mon Jun 27 06:08:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3885	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.598	0.000	28.590	23.520	666411	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B631_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:08:20 2022	Mon Jun 27 06:08:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3884	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.518	23.514	663316	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:08:07 2022	Mon Jun 27 06:08:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1608	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	28.564	0.000	660372	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:08:02 2022	Mon Jun 27 06:08:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1607	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	28.574	23.511	663016	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:07:57 2022	Mon Jun 27 06:07:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1606	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	0.000	23.512	658910	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:07:52 2022	Mon Jun 27 06:07:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1605	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.596	-273.150	28.628	23.518	658880	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:07:47 2022	Mon Jun 27 06:07:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1604	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.596	-273.150	28.552	23.520	659402	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:07:43 2022	Mon Jun 27 06:07:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1603	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.596	-273.150	0.000	23.520	662166	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:07:37 2022	Mon Jun 27 06:07:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1602	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.597	-273.150	28.551	23.516	660190	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:07:28 2022	Mon Jun 27 06:07:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1601	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	28.538	23.501	659625	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:07:23 2022	Mon Jun 27 06:07:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1600	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	28.583	23.505	662279	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A630_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:07:19 2022	Mon Jun 27 06:07:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1599	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.594	-273.150	0.000	23.511	680532	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:06:59 2022	Mon Jun 27 06:07:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1989	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.594	-273.150	28.574	23.509	656613	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:06:54 2022	Mon Jun 27 06:06:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1988	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.595	-273.150	28.520	23.508	559005	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:06:50 2022	Mon Jun 27 06:06:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1987	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.593	-273.150	28.521	23.507	659514	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:06:45 2022	Mon Jun 27 06:06:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1986	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.593	-273.150	28.542	23.509	660062	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:06:36 2022	Mon Jun 27 06:06:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1985	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.512	23.501	651895	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:06:31 2022	Mon Jun 27 06:06:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1984	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.591	-273.150	28.597	23.511	643945	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:06:26 2022	Mon Jun 27 06:06:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1983	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.592	-273.150	28.574	23.513	838472	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:06:21 2022	Mon Jun 27 06:06:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1982	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.575	23.507	655407	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:06:16 2022	Mon Jun 27 06:06:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1981	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.591	-273.150	28.560	23.500	654670	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C629_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:06:11 2022	Mon Jun 27 06:06:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1980	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.591	-273.150	0.000	23.491	658235	1	1	100000	tingxu20220626	13	101.76	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:05:58 2022	Mon Jun 27 06:06:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3883	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.590	-273.150	28.572	23.501	641991	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:05:52 2022	Mon Jun 27 06:05:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3882	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.560	23.492	660317	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:05:47 2022	Mon Jun 27 06:05:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3881	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	28.572	23.512	658258	1	1	100000	tingxu20220626	13	101.83	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:05:42 2022	Mon Jun 27 06:05:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3880	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.553	23.514	658707	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:05:34 2022	Mon Jun 27 06:05:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3879	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	28.586	23.508	659011	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:05:29 2022	Mon Jun 27 06:05:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3878	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	28.639	23.517	654670	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:05:21 2022	Mon Jun 27 06:05:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3877	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	0.000	23.508	658353	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:05:16 2022	Mon Jun 27 06:05:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3876	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	0.000	23.501	653694	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:05:11 2022	Mon Jun 27 06:05:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3875	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	28.610	23.499	655700	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B628_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:05:06 2022	Mon Jun 27 06:05:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3874	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.589	-273.150	28.635	23.512	659428	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:04:53 2022	Mon Jun 27 06:04:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1598	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.588	-273.150	28.562	23.505	655218	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:04:47 2022	Mon Jun 27 06:04:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1597	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.586	-273.150	28.538	0.000	651985	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:04:42 2022	Mon Jun 27 06:04:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1596	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.585	-273.150	28.587	23.504	670400	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:04:35 2022	Mon Jun 27 06:04:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1595	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.585	-273.150	28.605	23.503	658985	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:04:30 2022	Mon Jun 27 06:04:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1594	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.584	-273.150	28.588	23.500	655531	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:04:25 2022	Mon Jun 27 06:04:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1593	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.582	-273.150	28.529	23.517	654301	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:04:20 2022	Mon Jun 27 06:04:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1592	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.583	-273.150	28.576	23.510	667240	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:04:14 2022	Mon Jun 27 06:04:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1591	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.581	-273.150	28.569	23.511	660089	1	1	100000	tingxu20220626	13	101.70	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:04:09 2022	Mon Jun 27 06:04:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1590	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.583	-273.150	28.576	23.498	605900	1	1	100000	tingxu20220626	13	101.71	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A627_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:04:04 2022	Mon Jun 27 06:04:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1589	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.574	23.505	656142	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:03:45 2022	Mon Jun 27 06:03:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1979	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.582	-273.150	28.542	23.525	659234	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:03:41 2022	Mon Jun 27 06:03:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1978	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.583	-273.150	28.574	23.523	655811	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:03:33 2022	Mon Jun 27 06:03:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1977	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.582	-273.150	28.630	0.000	659735	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:03:28 2022	Mon Jun 27 06:03:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1976	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.516	23.521	654174	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:03:23 2022	Mon Jun 27 06:03:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1975	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.582	0.000	0.000	23.513	653884	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:03:19 2022	Mon Jun 27 06:03:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1974	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.582	0.000	28.638	23.517	675065	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:03:14 2022	Mon Jun 27 06:03:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1973	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.581	-273.150	28.579	23.522	656091	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:03:09 2022	Mon Jun 27 06:03:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1972	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.506	23.534	655139	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:03:04 2022	Mon Jun 27 06:03:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1971	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.582	-273.150	0.000	0.000	654358	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C626_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 06:02:59 2022	Mon Jun 27 06:03:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1970	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.582	-273.150	28.508	23.525	656037	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 06:02:46 2022	Mon Jun 27 06:02:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3873	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.581	-273.150	28.558	23.517	658779	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 06:02:41 2022	Mon Jun 27 06:02:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3872	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.581	-273.150	28.561	23.512	657013	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 06:02:34 2022	Mon Jun 27 06:02:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3871	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.582	0.000	28.571	23.509	653680	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 06:02:29 2022	Mon Jun 27 06:02:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3870	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.581	-273.150	28.506	23.509	658765	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 06:02:25 2022	Mon Jun 27 06:02:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3869	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.581	-273.150	28.535	23.516	670423	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 06:02:20 2022	Mon Jun 27 06:02:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3868	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.580	-273.150	28.506	23.514	660105	1	1	100000	tingxu20220626	13	101.64	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 06:02:15 2022	Mon Jun 27 06:02:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3867	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.579	-273.150	28.549	23.506	640331	1	1	100000	tingxu20220626	13	101.66	101.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 06:02:11 2022	Mon Jun 27 06:02:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3866	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.577	-273.150	28.582	23.504	659689	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 06:02:05 2022	Mon Jun 27 06:02:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3865	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.578	-273.150	28.573	23.502	656027	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B625_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 06:02:00 2022	Mon Jun 27 06:02:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3864	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.578	0.000	28.547	23.483	655568	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 06:01:46 2022	Mon Jun 27 06:01:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1588	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.579	-273.150	28.553	23.518	654014	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 06:01:42 2022	Mon Jun 27 06:01:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1587	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.579	-273.150	28.527	23.512	652850	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 06:01:32 2022	Mon Jun 27 06:01:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1586	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.578	-273.150	28.561	23.514	656877	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 06:01:28 2022	Mon Jun 27 06:01:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1585	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.575	-273.150	28.587	23.517	656217	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 06:01:23 2022	Mon Jun 27 06:01:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1584	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.574	-273.150	28.588	23.508	657803	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 06:01:18 2022	Mon Jun 27 06:01:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1583	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.573	-273.150	28.584	23.510	657629	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 06:01:13 2022	Mon Jun 27 06:01:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1582	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.573	-273.150	28.592	23.503	655675	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 06:01:08 2022	Mon Jun 27 06:01:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1581	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.573	-273.150	28.592	23.497	667473	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 06:01:04 2022	Mon Jun 27 06:01:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1580	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.574	-273.150	28.547	23.504	665324	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A624_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 06:00:59 2022	Mon Jun 27 06:01:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1579	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.574	-273.150	28.572	23.498	659334	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 06:00:40 2022	Mon Jun 27 06:00:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1969	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.573	-273.150	28.569	23.511	654520	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 06:00:34 2022	Mon Jun 27 06:00:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1968	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.573	-273.150	28.614	23.508	656164	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 06:00:28 2022	Mon Jun 27 06:00:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1967	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.573	-273.150	28.565	23.499	653792	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 06:00:23 2022	Mon Jun 27 06:00:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1966	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.573	-273.150	28.574	23.483	656944	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 06:00:19 2022	Mon Jun 27 06:00:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1965	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.572	-273.150	28.559	23.490	653643	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 06:00:14 2022	Mon Jun 27 06:00:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1964	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.572	-273.150	28.630	23.493	652673	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 06:00:09 2022	Mon Jun 27 06:00:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1963	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.571	-273.150	28.546	23.508	577310	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 06:00:05 2022	Mon Jun 27 06:00:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1962	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.571	-273.150	28.571	23.510	650717	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 06:00:00 2022	Mon Jun 27 06:00:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1961	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.571	-273.150	28.561	23.525	641267	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C623_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:59:55 2022	Mon Jun 27 05:59:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1960	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.571	-273.150	28.511	23.531	656814	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:59:42 2022	Mon Jun 27 05:59:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3863	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.572	-273.150	28.565	23.515	660082	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:59:37 2022	Mon Jun 27 05:59:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3862	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.571	0.000	28.560	23.513	653072	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:59:31 2022	Mon Jun 27 05:59:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3861	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.570	-273.150	28.583	23.521	652891	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:59:24 2022	Mon Jun 27 05:59:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3860	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.571	-273.150	28.512	23.523	657068	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:59:19 2022	Mon Jun 27 05:59:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3859	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.570	-273.150	28.510	23.521	654666	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:59:15 2022	Mon Jun 27 05:59:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3858	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.570	-273.150	28.563	0.000	654648	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:59:10 2022	Mon Jun 27 05:59:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3857	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.570	-273.150	28.564	23.517	660856	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:59:05 2022	Mon Jun 27 05:59:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3856	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.570	-273.150	28.528	23.515	654656	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:59:00 2022	Mon Jun 27 05:59:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3855	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.570	-273.150	28.576	23.517	657900	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B622_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:58:56 2022	Mon Jun 27 05:58:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3854	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.570	-273.150	28.573	23.514	657940	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:58:42 2022	Mon Jun 27 05:58:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1578	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.568	-273.150	28.536	23.522	654327	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:58:37 2022	Mon Jun 27 05:58:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1577	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.568	-273.150	28.609	23.527	659905	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:58:33 2022	Mon Jun 27 05:58:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1576	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.567	-273.150	28.583	23.523	661321	1	1	100000	tingxu20220626	13	102.37	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:58:28 2022	Mon Jun 27 05:58:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1575	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.568	-273.150	28.565	23.523	657530	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:58:23 2022	Mon Jun 27 05:58:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1574	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.614	23.522	660202	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:58:18 2022	Mon Jun 27 05:58:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1573	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.568	-273.150	28.546	23.519	603768	1	1	100000	tingxu20220626	13	101.99	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:58:14 2022	Mon Jun 27 05:58:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1572	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.569	-273.150	28.597	23.520	655261	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:58:09 2022	Mon Jun 27 05:58:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1571	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.568	-273.150	28.582	23.521	657394	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:58:04 2022	Mon Jun 27 05:58:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1570	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.568	0.000	28.570	23.512	652843	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A621_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:57:59 2022	Mon Jun 27 05:58:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1569	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.568	-273.150	28.523	23.513	662127	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:57:40 2022	Mon Jun 27 05:57:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1959	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.567	-273.150	28.549	23.530	656900	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:57:35 2022	Mon Jun 27 05:57:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1958	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.566	-273.150	28.581	23.526	657267	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:57:29 2022	Mon Jun 27 05:57:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1957	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.567	-273.150	28.536	23.523	656007	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:57:24 2022	Mon Jun 27 05:57:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1956	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.567	-273.150	28.562	0.000	630225	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:57:20 2022	Mon Jun 27 05:57:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1955	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.565	-273.150	28.548	23.516	659493	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:57:14 2022	Mon Jun 27 05:57:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1954	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.566	-273.150	28.571	23.514	656623	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:57:09 2022	Mon Jun 27 05:57:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1953	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.565	-273.150	28.634	23.508	657262	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:57:04 2022	Mon Jun 27 05:57:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1952	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.565	-273.150	0.000	23.496	650656	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:57:00 2022	Mon Jun 27 05:57:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1951	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.565	-273.150	28.572	23.510	656632	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C620_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:56:55 2022	Mon Jun 27 05:56:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1950	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.565	-273.150	28.577	23.509	655910	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:56:41 2022	Mon Jun 27 05:56:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3853	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.564	-273.150	28.615	23.516	658428	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:56:37 2022	Mon Jun 27 05:56:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3852	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.563	-273.150	28.550	23.511	660379	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:56:32 2022	Mon Jun 27 05:56:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3851	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.564	-273.150	28.568	23.512	657557	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:56:27 2022	Mon Jun 27 05:56:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3850	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.563	-273.150	28.637	23.513	652185	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:56:22 2022	Mon Jun 27 05:56:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3849	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.564	-273.150	28.574	23.515	657948	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:56:17 2022	Mon Jun 27 05:56:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3848	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.564	-273.150	0.000	23.526	656738	1	1	100000	tingxu20220626	13	101.95	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:56:13 2022	Mon Jun 27 05:56:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3847	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.563	-273.150	28.552	23.528	638666	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:56:08 2022	Mon Jun 27 05:56:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3846	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.562	-273.150	28.565	23.524	654302	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:56:03 2022	Mon Jun 27 05:56:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3845	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.562	-273.150	28.629	23.524	650392	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B619_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:55:58 2022	Mon Jun 27 05:56:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3844	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.560	-273.150	28.522	23.519	657858	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:55:45 2022	Mon Jun 27 05:55:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1568	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.559	0.000	28.615	23.511	652939	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:55:38 2022	Mon Jun 27 05:55:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1567	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.560	-273.150	28.602	23.501	656039	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:55:31 2022	Mon Jun 27 05:55:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1566	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.559	-273.150	28.554	23.504	675795	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:55:26 2022	Mon Jun 27 05:55:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1565	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.558	-273.150	28.569	23.521	659441	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:55:22 2022	Mon Jun 27 05:55:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1564	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.559	-273.150	28.574	23.522	653825	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:55:17 2022	Mon Jun 27 05:55:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1563	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.560	-273.150	0.000	23.526	651991	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:55:12 2022	Mon Jun 27 05:55:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1562	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.559	-273.150	28.549	23.526	656832	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:55:06 2022	Mon Jun 27 05:55:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1561	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.558	-273.150	28.570	23.536	654393	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:55:02 2022	Mon Jun 27 05:55:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1560	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.558	-273.150	28.568	23.536	656724	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A618_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:54:57 2022	Mon Jun 27 05:54:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1559	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.557	-273.150	0.000	23.537	655293	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:54:38 2022	Mon Jun 27 05:54:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1949	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.553	-273.150	28.502	23.528	640176	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:54:33 2022	Mon Jun 27 05:54:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1948	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.554	-273.150	28.524	23.526	647312	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:54:28 2022	Mon Jun 27 05:54:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1947	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.554	-273.150	28.568	23.530	640956	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:54:23 2022	Mon Jun 27 05:54:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1946	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.553	-273.150	28.569	23.527	659464	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:54:19 2022	Mon Jun 27 05:54:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1945	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.552	-273.150	28.533	23.523	675319	1	1	100000	tingxu20220626	13	101.90	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:54:14 2022	Mon Jun 27 05:54:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1944	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.554	-273.150	28.532	23.523	655441	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:54:09 2022	Mon Jun 27 05:54:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1943	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.553	-273.150	28.597	23.527	653707	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:54:04 2022	Mon Jun 27 05:54:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1942	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.552	-273.150	28.546	23.529	658377	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:53:59 2022	Mon Jun 27 05:54:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1941	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.553	-273.150	28.569	23.535	657773	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C617_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:53:55 2022	Mon Jun 27 05:53:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1940	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.554	0.000	28.544	23.536	656361	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:53:41 2022	Mon Jun 27 05:53:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3843	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.550	-273.150	28.514	23.521	653884	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:53:37 2022	Mon Jun 27 05:53:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3842	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.550	-273.150	28.574	23.524	657050	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:53:32 2022	Mon Jun 27 05:53:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3841	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.560	23.525	652949	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:53:27 2022	Mon Jun 27 05:53:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3840	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.549	-273.150	28.585	23.516	656858	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:53:22 2022	Mon Jun 27 05:53:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3839	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.549	-273.150	28.574	23.509	654055	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:53:17 2022	Mon Jun 27 05:53:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3838	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.550	-273.150	28.585	23.490	648618	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:53:13 2022	Mon Jun 27 05:53:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3837	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.549	-273.150	28.539	23.501	660225	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:53:08 2022	Mon Jun 27 05:53:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3836	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.550	-273.150	28.563	23.507	654816	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:52:59 2022	Mon Jun 27 05:53:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3835	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.551	-273.150	28.605	23.516	651143	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B616_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:52:54 2022	Mon Jun 27 05:52:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3834	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.552	-273.150	28.636	23.519	649412	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:52:40 2022	Mon Jun 27 05:52:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1558	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.548	-273.150	28.588	23.500	658160	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:52:36 2022	Mon Jun 27 05:52:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1557	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.547	-273.150	28.570	23.520	663036	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:52:31 2022	Mon Jun 27 05:52:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1556	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.547	0.000	28.586	23.522	656815	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:52:25 2022	Mon Jun 27 05:52:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1555	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.547	-273.150	0.000	23.529	660361	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:52:20 2022	Mon Jun 27 05:52:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1554	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.547	-273.150	28.555	23.525	660393	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:52:16 2022	Mon Jun 27 05:52:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1553	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.546	-273.150	28.535	23.517	657046	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:52:11 2022	Mon Jun 27 05:52:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1552	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.546	-273.150	28.557	23.515	656414	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:52:06 2022	Mon Jun 27 05:52:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1551	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.545	-273.150	28.617	23.505	659013	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:52:01 2022	Mon Jun 27 05:52:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1550	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.581	23.505	657695	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A615_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:51:54 2022	Mon Jun 27 05:51:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1549	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.544	-273.150	28.605	23.495	574206	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:51:35 2022	Mon Jun 27 05:51:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1939	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.542	-273.150	28.556	23.516	649330	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:51:31 2022	Mon Jun 27 05:51:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1938	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.543	-273.150	28.552	23.531	656786	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:51:23 2022	Mon Jun 27 05:51:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1937	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.542	-273.150	28.590	23.529	653176	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:51:18 2022	Mon Jun 27 05:51:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1936	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.542	-273.150	28.598	23.535	536116	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:51:14 2022	Mon Jun 27 05:51:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1935	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.540	-273.150	28.603	23.531	653404	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:51:09 2022	Mon Jun 27 05:51:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1934	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.538	-273.150	28.616	23.530	649548	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:51:04 2022	Mon Jun 27 05:51:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1933	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.538	-273.150	28.552	23.529	656814	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:50:59 2022	Mon Jun 27 05:51:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1932	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.584	23.524	654022	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:50:55 2022	Mon Jun 27 05:50:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1931	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.538	-273.150	28.641	23.526	656921	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C614_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:50:48 2022	Mon Jun 27 05:50:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1930	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.538	-273.150	28.535	0.000	690161	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:50:35 2022	Mon Jun 27 05:50:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3833	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.538	-273.150	28.569	23.514	655746	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:50:28 2022	Mon Jun 27 05:50:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3832	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.539	-273.150	28.552	0.000	658948	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:50:23 2022	Mon Jun 27 05:50:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3831	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.504	23.527	641246	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:50:17 2022	Mon Jun 27 05:50:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3830	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.538	-273.150	28.575	23.527	653839	1	1	100000	tingxu20220626	13	101.83	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:50:12 2022	Mon Jun 27 05:50:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3829	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.536	0.000	28.544	23.531	653684	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:50:08 2022	Mon Jun 27 05:50:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3828	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.613	23.528	650012	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:50:03 2022	Mon Jun 27 05:50:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3827	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.536	-273.150	28.562	23.528	640931	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:49:58 2022	Mon Jun 27 05:50:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3826	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.535	-273.150	28.559	23.525	658512	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:49:53 2022	Mon Jun 27 05:49:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3825	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.563	23.520	640358	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B613_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:49:48 2022	Mon Jun 27 05:49:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3824	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.536	-273.150	28.578	23.517	675627	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:49:35 2022	Mon Jun 27 05:49:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1548	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.534	-273.150	0.000	23.518	650036	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:49:30 2022	Mon Jun 27 05:49:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1547	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.535	-273.150	28.591	23.520	657618	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:49:26 2022	Mon Jun 27 05:49:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1546	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.535	-273.150	28.608	0.000	655353	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:49:21 2022	Mon Jun 27 05:49:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1545	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.536	-273.150	0.000	23.508	654302	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:49:13 2022	Mon Jun 27 05:49:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1544	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.535	-273.150	28.534	23.499	659474	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:49:08 2022	Mon Jun 27 05:49:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1543	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.606	23.499	642721	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:49:03 2022	Mon Jun 27 05:49:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1542	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.533	-273.150	28.601	23.505	606610	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:48:58 2022	Mon Jun 27 05:49:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1541	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.534	-273.150	28.545	23.514	658841	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:48:53 2022	Mon Jun 27 05:48:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1540	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.534	-273.150	28.638	23.508	658298	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A612_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:48:49 2022	Mon Jun 27 05:48:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1539	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.534	-273.150	28.566	23.514	659072	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:48:30 2022	Mon Jun 27 05:48:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1929	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.533	0.000	28.620	23.490	667077	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:48:25 2022	Mon Jun 27 05:48:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1928	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.532	-273.150	28.593	23.486	642094	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:48:20 2022	Mon Jun 27 05:48:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1927	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.532	-273.150	28.550	23.494	659026	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:48:16 2022	Mon Jun 27 05:48:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1926	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.531	-273.150	28.617	23.492	656369	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:48:11 2022	Mon Jun 27 05:48:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1925	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.531	-273.150	28.604	0.000	655749	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:48:06 2022	Mon Jun 27 05:48:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1924	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.531	-273.150	28.577	23.486	654364	1	1	100000	tingxu20220626	13	101.81	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:48:01 2022	Mon Jun 27 05:48:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1923	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.529	-273.150	28.574	23.483	659358	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:47:56 2022	Mon Jun 27 05:47:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1922	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.528	-273.150	28.558	23.504	660824	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:47:52 2022	Mon Jun 27 05:47:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1921	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.528	-273.150	28.573	23.513	660140	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C611_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:47:47 2022	Mon Jun 27 05:47:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1920	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.527	-273.150	28.580	23.509	655039	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:47:33 2022	Mon Jun 27 05:47:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3823	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.528	-273.150	28.548	23.518	546756	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:47:27 2022	Mon Jun 27 05:47:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3822	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.527	-273.150	28.599	23.518	658442	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:47:22 2022	Mon Jun 27 05:47:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3821	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.526	-273.150	28.525	23.520	658646	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:47:17 2022	Mon Jun 27 05:47:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3820	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.525	-273.150	28.583	23.519	661259	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:47:13 2022	Mon Jun 27 05:47:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3819	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.525	-273.150	28.639	23.526	658295	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:47:08 2022	Mon Jun 27 05:47:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3818	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.524	-273.150	28.632	0.000	661122	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:47:03 2022	Mon Jun 27 05:47:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3817	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.576	23.518	655689	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:46:58 2022	Mon Jun 27 05:47:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3816	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.523	0.000	28.620	23.516	660934	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:46:53 2022	Mon Jun 27 05:46:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3815	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.602	23.521	653833	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B610_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:46:48 2022	Mon Jun 27 05:46:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3814	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.522	-273.150	28.568	23.521	529518	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:46:35 2022	Mon Jun 27 05:46:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1538	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.522	-273.150	28.582	23.526	657403	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:46:27 2022	Mon Jun 27 05:46:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1537	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.521	-273.150	28.578	0.000	659425	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:46:23 2022	Mon Jun 27 05:46:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1536	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.521	-273.150	28.622	23.514	661008	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:46:18 2022	Mon Jun 27 05:46:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1535	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.520	-273.150	0.000	23.505	648972	1	1	100000	tingxu20220626	13	101.73	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:46:13 2022	Mon Jun 27 05:46:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1534	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.519	-273.150	28.623	23.496	650621	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:46:08 2022	Mon Jun 27 05:46:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1533	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.519	-273.150	28.548	23.497	660759	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:46:03 2022	Mon Jun 27 05:46:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1532	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.518	-273.150	28.626	23.503	571683	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:45:58 2022	Mon Jun 27 05:46:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1531	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.517	0.000	28.575	23.504	661124	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:45:54 2022	Mon Jun 27 05:45:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1530	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.517	-273.150	28.604	23.507	657674	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A609_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:45:49 2022	Mon Jun 27 05:45:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1529	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.516	-273.150	28.551	23.515	658063	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:45:29 2022	Mon Jun 27 05:45:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1919	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.512	-273.150	28.610	23.526	656606	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:45:25 2022	Mon Jun 27 05:45:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1918	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.510	-273.150	28.568	0.000	655063	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:45:20 2022	Mon Jun 27 05:45:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1917	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.509	-273.150	28.597	23.523	657166	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:45:15 2022	Mon Jun 27 05:45:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1916	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.509	-273.150	28.635	23.513	658496	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:45:11 2022	Mon Jun 27 05:45:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1915	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.508	-273.150	28.596	23.518	656378	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:45:06 2022	Mon Jun 27 05:45:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1914	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.506	-273.150	28.555	23.510	651684	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:44:57 2022	Mon Jun 27 05:44:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1913	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.506	-273.150	28.588	23.514	654951	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:44:52 2022	Mon Jun 27 05:44:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1912	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.504	-273.150	28.599	23.527	658810	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:44:47 2022	Mon Jun 27 05:44:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1911	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.504	-273.150	28.598	23.521	659018	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C608_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:44:42 2022	Mon Jun 27 05:44:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1910	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.502	-273.150	28.599	23.524	661540	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:44:29 2022	Mon Jun 27 05:44:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3813	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.500	-273.150	28.553	23.508	653818	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:44:22 2022	Mon Jun 27 05:44:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3812	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.499	-273.150	28.569	23.510	659109	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:44:17 2022	Mon Jun 27 05:44:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3811	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.498	-273.150	28.587	23.500	656412	1	1	100000	tingxu20220626	13	101.69	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:44:13 2022	Mon Jun 27 05:44:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3810	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.497	-273.150	28.598	23.481	660224	1	1	100000	tingxu20220626	13	101.70	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:44:08 2022	Mon Jun 27 05:44:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3809	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.497	-273.150	28.610	23.487	659509	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:44:03 2022	Mon Jun 27 05:44:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3808	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.496	-273.150	0.000	23.488	549874	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:43:59 2022	Mon Jun 27 05:44:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3807	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.496	-273.150	28.606	23.477	655194	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:43:52 2022	Mon Jun 27 05:43:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3806	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.496	0.000	28.518	23.477	655999	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:43:47 2022	Mon Jun 27 05:43:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3805	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.497	-273.150	0.000	23.487	652035	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B607_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:43:42 2022	Mon Jun 27 05:43:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3804	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.496	-273.150	28.586	23.488	657841	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:43:29 2022	Mon Jun 27 05:43:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1528	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.497	-273.150	28.578	23.461	658629	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:43:23 2022	Mon Jun 27 05:43:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1527	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.498	-273.150	28.589	23.481	657697	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:43:18 2022	Mon Jun 27 05:43:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1526	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.498	-273.150	28.591	23.491	655112	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:43:13 2022	Mon Jun 27 05:43:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1525	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.498	-273.150	28.616	23.517	659837	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:43:08 2022	Mon Jun 27 05:43:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1524	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.497	-273.150	28.583	23.529	659878	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:43:04 2022	Mon Jun 27 05:43:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1523	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.496	-273.150	28.662	23.532	658795	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:42:59 2022	Mon Jun 27 05:43:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1522	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.496	-273.150	28.634	23.532	642698	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:42:53 2022	Mon Jun 27 05:42:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1521	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.495	-273.150	28.593	23.539	671511	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:42:49 2022	Mon Jun 27 05:42:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1520	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.563	23.544	658902	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A606_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:42:44 2022	Mon Jun 27 05:42:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1519	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.546	23.548	656357	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:42:24 2022	Mon Jun 27 05:42:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1909	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.525	23.521	657638	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:42:14 2022	Mon Jun 27 05:42:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1908	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.495	-273.150	28.570	23.528	657573	1	1	100000	tingxu20220626	13	101.65	101.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:42:09 2022	Mon Jun 27 05:42:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1907	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.583	23.528	657242	1	1	100000	tingxu20220626	13	101.67	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:42:04 2022	Mon Jun 27 05:42:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1906	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.593	23.526	659883	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:41:59 2022	Mon Jun 27 05:42:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1905	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	0.000	28.577	23.528	657576	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:41:54 2022	Mon Jun 27 05:41:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1904	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.604	23.533	657562	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:41:49 2022	Mon Jun 27 05:41:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1903	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.495	-273.150	28.620	23.538	654641	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:41:43 2022	Mon Jun 27 05:41:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1902	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.679	23.532	658498	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:41:38 2022	Mon Jun 27 05:41:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1901	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.592	23.533	658151	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C605_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:41:34 2022	Mon Jun 27 05:41:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1900	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.575	23.533	642635	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:41:20 2022	Mon Jun 27 05:41:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3803	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.626	23.522	665064	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:41:16 2022	Mon Jun 27 05:41:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3802	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.530	23.524	651514	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:41:09 2022	Mon Jun 27 05:41:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3801	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.571	23.530	557590	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:41:05 2022	Mon Jun 27 05:41:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3800	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.512	23.526	660051	1	1	100000	tingxu20220626	13	101.89	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:41:00 2022	Mon Jun 27 05:41:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3799	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.553	0.000	656825	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:40:55 2022	Mon Jun 27 05:40:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3798	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.606	23.538	658792	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:40:51 2022	Mon Jun 27 05:40:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3797	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.528	23.538	664759	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:40:46 2022	Mon Jun 27 05:40:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3796	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.512	23.537	642836	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:40:39 2022	Mon Jun 27 05:40:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3795	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.629	23.527	658905	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B604_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:40:34 2022	Mon Jun 27 05:40:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3794	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.602	23.524	658470	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:40:20 2022	Mon Jun 27 05:40:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1518	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.607	23.538	662731	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:40:16 2022	Mon Jun 27 05:40:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1517	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.495	-273.150	28.589	23.529	653308	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:40:11 2022	Mon Jun 27 05:40:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1516	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.596	23.518	665791	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:40:05 2022	Mon Jun 27 05:40:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1515	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.494	-273.150	28.594	23.521	661401	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:40:00 2022	Mon Jun 27 05:40:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1514	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.584	23.527	662230	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:39:56 2022	Mon Jun 27 05:39:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1513	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.592	23.517	653903	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:39:51 2022	Mon Jun 27 05:39:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1512	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.493	-273.150	0.000	23.525	656250	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:39:46 2022	Mon Jun 27 05:39:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1511	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.590	23.525	655446	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:39:42 2022	Mon Jun 27 05:39:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1510	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.493	-273.150	28.608	23.526	659788	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A603_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:39:34 2022	Mon Jun 27 05:39:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1509	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.495	-273.150	28.635	23.522	660123	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:39:15 2022	Mon Jun 27 05:39:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1899	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.587	23.537	659286	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:39:10 2022	Mon Jun 27 05:39:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1898	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.594	23.542	660781	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:39:03 2022	Mon Jun 27 05:39:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1897	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.494	-273.150	28.576	23.534	655093	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:38:58 2022	Mon Jun 27 05:39:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1896	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.495	-273.150	28.572	23.539	655310	1	1	100000	tingxu20220626	13	102.29	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:38:53 2022	Mon Jun 27 05:38:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1895	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.496	-273.150	28.584	23.531	661148	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:38:48 2022	Mon Jun 27 05:38:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1894	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.495	-273.150	28.616	23.526	587452	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:38:44 2022	Mon Jun 27 05:38:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1893	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.495	-273.150	28.573	23.526	656326	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:38:39 2022	Mon Jun 27 05:38:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1892	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.495	-273.150	28.586	23.527	659895	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:38:30 2022	Mon Jun 27 05:38:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1891	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.496	-273.150	28.607	23.527	661830	1	1	100000	tingxu20220626	13	102.39	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C602_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:38:25 2022	Mon Jun 27 05:38:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1890	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.497	-273.150	0.000	23.536	660175	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:38:11 2022	Mon Jun 27 05:38:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3793	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.496	-273.150	28.655	23.543	654021	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:38:07 2022	Mon Jun 27 05:38:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3792	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.497	-273.150	28.654	23.540	660073	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:37:58 2022	Mon Jun 27 05:38:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3791	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.496	-273.150	28.612	0.000	642379	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:37:53 2022	Mon Jun 27 05:37:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3790	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.494	-273.150	28.594	23.521	656034	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:37:49 2022	Mon Jun 27 05:37:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3789	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.493	-273.150	28.564	23.524	659720	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:37:44 2022	Mon Jun 27 05:37:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3788	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.590	23.530	661280	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:37:39 2022	Mon Jun 27 05:37:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3787	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.495	-273.150	28.674	23.536	604378	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:37:35 2022	Mon Jun 27 05:37:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3786	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.496	0.000	28.581	23.533	661025	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:37:26 2022	Mon Jun 27 05:37:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3785	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.496	-273.150	28.608	23.528	655783	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B601_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:37:20 2022	Mon Jun 27 05:37:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3784	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.494	-273.150	0.000	23.536	651889	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:37:06 2022	Mon Jun 27 05:37:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1508	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.492	-273.150	28.575	0.000	657819	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:37:02 2022	Mon Jun 27 05:37:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1507	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.491	-273.150	28.571	23.523	654939	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:36:55 2022	Mon Jun 27 05:36:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1506	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.563	23.536	659459	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:36:50 2022	Mon Jun 27 05:36:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1505	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.648	23.535	660470	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:36:45 2022	Mon Jun 27 05:36:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1504	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.493	-273.150	28.598	23.544	659651	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:36:41 2022	Mon Jun 27 05:36:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1503	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.494	-273.150	28.614	23.539	659359	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:36:36 2022	Mon Jun 27 05:36:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1502	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.492	-273.150	28.595	23.538	665170	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:36:21 2022	Mon Jun 27 05:36:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1501	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.491	-273.150	28.640	23.545	656666	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:36:16 2022	Mon Jun 27 05:36:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1500	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.489	-273.150	28.595	23.532	657114	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A600_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:36:11 2022	Mon Jun 27 05:36:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1499	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.489	-273.150	0.000	23.541	662562	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:35:50 2022	Mon Jun 27 05:35:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1889	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.486	-273.150	28.583	23.534	647280	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:35:46 2022	Mon Jun 27 05:35:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1888	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.486	-273.150	28.575	23.532	664698	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:35:41 2022	Mon Jun 27 05:35:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1887	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.485	-273.150	28.521	23.533	656656	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:35:36 2022	Mon Jun 27 05:35:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1886	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.483	-273.150	28.553	23.535	660933	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:35:32 2022	Mon Jun 27 05:35:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1885	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.484	-273.150	28.598	23.537	655270	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:35:27 2022	Mon Jun 27 05:35:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1884	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.486	-273.150	28.574	23.535	652507	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:35:21 2022	Mon Jun 27 05:35:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1883	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.486	-273.150	28.585	23.538	660413	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:35:16 2022	Mon Jun 27 05:35:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1882	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.487	-273.150	28.611	23.533	658569	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:35:11 2022	Mon Jun 27 05:35:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1881	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.486	-273.150	28.543	0.000	655594	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C599_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:35:06 2022	Mon Jun 27 05:35:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1880	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.486	-273.150	28.610	23.529	652415	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:34:52 2022	Mon Jun 27 05:34:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3783	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.485	-273.150	28.645	23.539	654113	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:34:47 2022	Mon Jun 27 05:34:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3782	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.484	-273.150	28.588	23.541	659695	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:34:43 2022	Mon Jun 27 05:34:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3781	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.484	-273.150	28.626	23.524	659724	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:34:38 2022	Mon Jun 27 05:34:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3780	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.485	-273.150	28.632	23.529	657957	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:34:33 2022	Mon Jun 27 05:34:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3779	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.484	-273.150	28.567	23.522	625745	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:34:28 2022	Mon Jun 27 05:34:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3778	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.483	-273.150	28.505	23.518	659480	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:34:20 2022	Mon Jun 27 05:34:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3777	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.482	0.000	28.573	23.519	662128	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:34:12 2022	Mon Jun 27 05:34:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3776	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.483	-273.150	28.631	23.523	656968	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:34:07 2022	Mon Jun 27 05:34:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3775	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.481	-273.150	28.619	23.523	657557	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B598_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:34:02 2022	Mon Jun 27 05:34:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3774	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.482	-273.150	28.661	23.535	657346	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:33:49 2022	Mon Jun 27 05:33:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1498	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.483	-273.150	28.595	0.000	653873	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:33:44 2022	Mon Jun 27 05:33:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1497	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.481	-273.150	28.637	23.538	652345	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:33:39 2022	Mon Jun 27 05:33:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1496	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.482	-273.150	28.611	23.540	556105	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:33:35 2022	Mon Jun 27 05:33:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1495	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.480	-273.150	28.615	23.536	655189	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:33:30 2022	Mon Jun 27 05:33:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1494	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.479	-273.150	28.550	23.537	658374	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:33:25 2022	Mon Jun 27 05:33:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1493	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.479	-273.150	28.623	23.537	657996	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:33:19 2022	Mon Jun 27 05:33:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1492	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.477	-273.150	28.605	23.544	657073	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:33:14 2022	Mon Jun 27 05:33:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1491	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.477	-273.150	28.590	23.552	659150	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:33:08 2022	Mon Jun 27 05:33:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1490	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.476	-273.150	28.584	23.546	658901	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A597_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:33:03 2022	Mon Jun 27 05:33:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1489	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.474	-273.150	28.622	23.549	654406	1	1	100000	tingxu20220626	13	102.15	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:32:44 2022	Mon Jun 27 05:32:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1879	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.472	-273.150	28.634	23.531	660110	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:32:38 2022	Mon Jun 27 05:32:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1878	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.472	-273.150	28.588	23.525	654540	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:32:34 2022	Mon Jun 27 05:32:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1877	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.472	-273.150	28.625	23.533	656682	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:32:29 2022	Mon Jun 27 05:32:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1876	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.471	-273.150	28.668	23.540	659406	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:32:20 2022	Mon Jun 27 05:32:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1875	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.471	-273.150	28.675	23.542	660313	1	1	100000	tingxu20220626	13	102.03	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:32:15 2022	Mon Jun 27 05:32:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1874	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.470	-273.150	28.698	23.551	654913	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:32:06 2022	Mon Jun 27 05:32:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1873	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.468	-273.150	28.665	23.541	654957	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:32:01 2022	Mon Jun 27 05:32:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1872	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.468	-273.150	28.597	23.543	654747	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:31:56 2022	Mon Jun 27 05:31:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1871	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.468	-273.150	28.588	23.538	656697	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C596_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:31:51 2022	Mon Jun 27 05:31:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1870	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.467	-273.150	28.622	23.534	656538	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:31:33 2022	Mon Jun 27 05:31:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3773	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.467	-273.150	28.623	23.522	667617	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:31:28 2022	Mon Jun 27 05:31:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3772	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.468	-273.150	28.542	23.548	655264	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:31:18 2022	Mon Jun 27 05:31:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3771	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.470	-273.150	28.589	23.555	656390	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:31:13 2022	Mon Jun 27 05:31:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3770	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.469	-273.150	28.576	23.554	655742	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:31:08 2022	Mon Jun 27 05:31:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3769	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.468	-273.150	28.597	23.556	655533	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:31:03 2022	Mon Jun 27 05:31:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3768	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.467	-273.150	28.613	23.539	572518	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:30:58 2022	Mon Jun 27 05:31:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3767	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.467	-273.150	0.000	23.542	648180	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:30:54 2022	Mon Jun 27 05:30:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3766	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.464	-273.150	28.591	23.540	655642	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:30:49 2022	Mon Jun 27 05:30:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3765	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.463	-273.150	28.598	23.539	654335	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B595_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:30:44 2022	Mon Jun 27 05:30:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3764	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.463	-273.150	28.611	23.541	656209	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:30:30 2022	Mon Jun 27 05:30:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1488	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.463	-273.150	28.601	23.546	653452	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:30:26 2022	Mon Jun 27 05:30:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1487	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.462	-273.150	28.661	23.547	652928	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:30:18 2022	Mon Jun 27 05:30:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1486	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.461	-273.150	28.605	0.000	645669	1	1	100000	tingxu20220626	13	101.81	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:30:13 2022	Mon Jun 27 05:30:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1485	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.462	-273.150	28.678	23.543	654710	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:30:09 2022	Mon Jun 27 05:30:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1484	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.462	-273.150	28.624	23.545	652441	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:30:04 2022	Mon Jun 27 05:30:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1483	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.461	-273.150	28.690	23.546	647124	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:29:59 2022	Mon Jun 27 05:30:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1482	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.462	-273.150	28.629	23.551	646887	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:29:54 2022	Mon Jun 27 05:29:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1481	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.461	-273.150	28.615	23.546	632578	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:29:49 2022	Mon Jun 27 05:29:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1480	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.460	-273.150	28.605	23.544	658733	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A594_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:29:45 2022	Mon Jun 27 05:29:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1479	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.459	-273.150	28.614	23.535	654864	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:29:25 2022	Mon Jun 27 05:29:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1869	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.458	-273.150	28.597	23.537	662858	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:29:19 2022	Mon Jun 27 05:29:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1868	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.458	-273.150	28.590	23.535	654931	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:29:14 2022	Mon Jun 27 05:29:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1867	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.458	-273.150	28.581	23.543	655470	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:29:09 2022	Mon Jun 27 05:29:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1866	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.457	0.000	28.615	23.543	619034	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:29:04 2022	Mon Jun 27 05:29:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1865	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.456	-273.150	28.591	23.547	903359	1	1	100000	tingxu20220626	13	102.05	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:28:59 2022	Mon Jun 27 05:29:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1864	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.455	-273.150	28.605	23.546	657605	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:28:52 2022	Mon Jun 27 05:28:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1863	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.455	-273.150	28.544	23.550	649611	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:28:47 2022	Mon Jun 27 05:28:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1862	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.454	-273.150	28.626	23.549	652378	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:28:42 2022	Mon Jun 27 05:28:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1861	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.454	-273.150	28.604	23.556	656686	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C593_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:28:37 2022	Mon Jun 27 05:28:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1860	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.454	-273.150	28.547	23.560	656239	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:28:17 2022	Mon Jun 27 05:28:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3763	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.455	-273.150	28.560	23.549	651858	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:28:13 2022	Mon Jun 27 05:28:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3762	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.453	0.000	28.556	23.531	652118	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:28:08 2022	Mon Jun 27 05:28:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3761	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.454	-273.150	28.632	23.533	654765	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:28:03 2022	Mon Jun 27 05:28:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3760	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.455	-273.150	28.589	23.536	654234	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:27:58 2022	Mon Jun 27 05:28:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3759	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.455	-273.150	28.595	23.544	655137	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:27:53 2022	Mon Jun 27 05:27:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3758	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.454	-273.150	28.588	23.547	654022	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:27:49 2022	Mon Jun 27 05:27:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3757	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.453	-273.150	28.631	23.540	659627	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:27:44 2022	Mon Jun 27 05:27:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3756	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.453	-273.150	28.564	23.544	654464	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:27:39 2022	Mon Jun 27 05:27:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3755	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.453	-273.150	28.609	23.539	628958	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B592_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:27:34 2022	Mon Jun 27 05:27:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3754	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.451	-273.150	28.579	23.548	654284	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:27:19 2022	Mon Jun 27 05:27:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1478	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.451	-273.150	28.657	23.551	653460	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:27:13 2022	Mon Jun 27 05:27:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1477	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.450	-273.150	28.555	23.551	656598	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:27:08 2022	Mon Jun 27 05:27:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1476	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.450	-273.150	28.599	23.553	655205	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:27:04 2022	Mon Jun 27 05:27:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1475	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.449	-273.150	28.568	23.556	661255	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:26:59 2022	Mon Jun 27 05:27:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1474	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.448	-273.150	28.632	23.560	656958	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:26:53 2022	Mon Jun 27 05:26:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1473	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.450	-273.150	28.594	23.561	652276	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:26:48 2022	Mon Jun 27 05:26:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1472	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.450	-273.150	0.000	0.000	583081	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:26:43 2022	Mon Jun 27 05:26:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1471	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.451	-273.150	28.597	23.549	660631	1	1	100000	tingxu20220626	13	102.07	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:26:38 2022	Mon Jun 27 05:26:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1470	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.451	-273.150	28.607	23.550	652743	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A591_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:26:34 2022	Mon Jun 27 05:26:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1469	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.450	-273.150	28.640	23.553	655398	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:26:15 2022	Mon Jun 27 05:26:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1859	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.445	-273.150	28.629	23.560	649463	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:26:09 2022	Mon Jun 27 05:26:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1858	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.443	-273.150	28.560	23.568	654118	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:26:04 2022	Mon Jun 27 05:26:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1857	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.443	-273.150	28.570	23.568	648146	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:25:59 2022	Mon Jun 27 05:26:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1856	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.442	-273.150	28.601	23.562	652578	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:25:55 2022	Mon Jun 27 05:25:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1855	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.442	-273.150	28.546	23.559	681090	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:25:50 2022	Mon Jun 27 05:25:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1854	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.443	-273.150	28.615	23.562	659120	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:25:45 2022	Mon Jun 27 05:25:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1853	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.442	-273.150	28.590	23.557	651432	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:25:37 2022	Mon Jun 27 05:25:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1852	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.441	-273.150	28.565	23.558	654105	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:25:32 2022	Mon Jun 27 05:25:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1851	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.440	-273.150	28.632	23.569	651806	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C590_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:25:27 2022	Mon Jun 27 05:25:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1850	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.440	-273.150	28.612	23.568	654641	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:25:13 2022	Mon Jun 27 05:25:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3753	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.442	-273.150	28.616	23.567	654537	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:25:09 2022	Mon Jun 27 05:25:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3752	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.441	-273.150	28.600	23.566	654806	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:25:03 2022	Mon Jun 27 05:25:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3751	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.441	-273.150	28.691	23.564	654717	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:24:58 2022	Mon Jun 27 05:25:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3750	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.441	-273.150	28.630	23.564	654333	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:24:53 2022	Mon Jun 27 05:24:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3749	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.441	-273.150	28.657	23.566	655526	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:24:48 2022	Mon Jun 27 05:24:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3748	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.440	-273.150	28.665	23.553	570738	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:24:43 2022	Mon Jun 27 05:24:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3747	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.439	-273.150	0.000	23.565	652021	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:24:39 2022	Mon Jun 27 05:24:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3746	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.438	-273.150	28.676	23.570	654600	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:24:34 2022	Mon Jun 27 05:24:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3745	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.438	-273.150	28.623	23.569	657721	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B589_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:24:29 2022	Mon Jun 27 05:24:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3744	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.438	-273.150	28.639	23.564	650404	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:24:15 2022	Mon Jun 27 05:24:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1468	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.436	-273.150	28.652	23.555	666483	1	1	100000	tingxu20220626	13	101.68	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:24:11 2022	Mon Jun 27 05:24:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1467	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.435	-273.150	28.632	23.560	637674	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:24:06 2022	Mon Jun 27 05:24:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1466	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.435	-273.150	28.643	23.567	656227	1	1	100000	tingxu20220626	13	101.70	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:24:00 2022	Mon Jun 27 05:24:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1465	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.681	23.570	659755	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:23:55 2022	Mon Jun 27 05:23:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1464	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.436	-273.150	28.659	23.575	656596	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:23:51 2022	Mon Jun 27 05:23:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1463	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.436	0.000	28.657	23.579	644197	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:23:46 2022	Mon Jun 27 05:23:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1462	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.435	-273.150	28.590	23.579	652878	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:23:41 2022	Mon Jun 27 05:23:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1461	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.433	-273.150	28.608	23.576	653226	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:23:36 2022	Mon Jun 27 05:23:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1460	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.434	-273.150	28.646	23.574	657771	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A588_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:23:28 2022	Mon Jun 27 05:23:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1459	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.434	-273.150	28.566	23.570	657400	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:23:09 2022	Mon Jun 27 05:23:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1849	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.434	-273.150	28.642	23.575	654881	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:23:04 2022	Mon Jun 27 05:23:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1848	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.434	-273.150	28.619	23.568	651594	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:22:55 2022	Mon Jun 27 05:22:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1847	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.434	-273.150	28.616	23.561	647358	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:22:50 2022	Mon Jun 27 05:22:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1846	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.433	-273.150	28.639	0.000	643139	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:22:46 2022	Mon Jun 27 05:22:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1845	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.433	-273.150	28.621	23.556	652365	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:22:41 2022	Mon Jun 27 05:22:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1844	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.432	-273.150	28.640	23.563	651328	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:22:36 2022	Mon Jun 27 05:22:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1843	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.431	-273.150	28.636	23.556	652660	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:22:32 2022	Mon Jun 27 05:22:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1842	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.431	-273.150	28.635	23.557	657260	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:22:27 2022	Mon Jun 27 05:22:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1841	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.429	-273.150	28.695	23.558	657342	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C587_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:22:22 2022	Mon Jun 27 05:22:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1840	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.428	0.000	28.641	23.560	655767	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:22:08 2022	Mon Jun 27 05:22:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3743	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.424	-273.150	28.619	23.561	654601	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:22:03 2022	Mon Jun 27 05:22:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3742	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.424	-273.150	28.634	23.555	654595	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:21:59 2022	Mon Jun 27 05:22:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3741	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.425	0.000	28.665	23.555	658063	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:21:54 2022	Mon Jun 27 05:21:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3740	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.425	-273.150	28.625	23.551	652187	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:21:49 2022	Mon Jun 27 05:21:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3739	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.425	-273.150	28.613	23.548	657343	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:21:44 2022	Mon Jun 27 05:21:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3738	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.426	-273.150	28.660	23.548	657349	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:21:39 2022	Mon Jun 27 05:21:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3737	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.425	-273.150	0.000	23.548	639979	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:21:34 2022	Mon Jun 27 05:21:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3736	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.426	-273.150	28.670	23.549	656564	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:21:30 2022	Mon Jun 27 05:21:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3735	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.425	-273.150	28.641	23.547	652725	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B586_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:21:25 2022	Mon Jun 27 05:21:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3734	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.424	-273.150	28.615	23.545	656345	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:21:11 2022	Mon Jun 27 05:21:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1458	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.422	-273.150	28.657	23.542	652568	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:21:07 2022	Mon Jun 27 05:21:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1457	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.422	-273.150	28.668	0.000	652195	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:21:02 2022	Mon Jun 27 05:21:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1456	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.421	-273.150	28.605	23.536	653178	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:20:57 2022	Mon Jun 27 05:20:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1455	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.422	-273.150	0.000	23.529	652607	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:20:52 2022	Mon Jun 27 05:20:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1454	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.420	-273.150	28.635	23.536	656495	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:20:46 2022	Mon Jun 27 05:20:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1453	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.421	-273.150	28.672	23.549	650649	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:20:42 2022	Mon Jun 27 05:20:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1452	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.419	-273.150	28.634	23.542	656831	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:20:37 2022	Mon Jun 27 05:20:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1451	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.417	-273.150	28.619	23.540	658989	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:20:32 2022	Mon Jun 27 05:20:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1450	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.417	-273.150	28.658	23.555	645090	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A585_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:20:27 2022	Mon Jun 27 05:20:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1449	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.417	-273.150	28.632	23.560	658782	1	1	100000	tingxu20220626	13	102.41	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:20:08 2022	Mon Jun 27 05:20:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1839	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.417	-273.150	28.693	23.574	653045	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:20:03 2022	Mon Jun 27 05:20:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1838	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.418	-273.150	28.652	23.571	657940	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:19:58 2022	Mon Jun 27 05:20:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1837	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.416	-273.150	28.656	23.569	647596	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:19:53 2022	Mon Jun 27 05:19:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1836	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.417	-273.150	28.678	23.567	652013	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:19:43 2022	Mon Jun 27 05:19:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1835	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.416	-273.150	28.698	23.558	639173	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:19:38 2022	Mon Jun 27 05:19:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1834	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.414	-273.150	28.687	23.554	655629	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:19:33 2022	Mon Jun 27 05:19:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1833	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.412	-273.150	28.599	23.554	574199	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:19:29 2022	Mon Jun 27 05:19:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1832	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.411	-273.150	28.638	0.000	647671	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:19:24 2022	Mon Jun 27 05:19:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1831	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.409	-273.150	28.663	23.553	656311	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C584_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:19:19 2022	Mon Jun 27 05:19:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1830	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.409	-273.150	28.613	23.555	655857	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:19:06 2022	Mon Jun 27 05:19:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3733	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.408	-273.150	28.603	23.551	645095	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:19:01 2022	Mon Jun 27 05:19:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3732	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.407	-273.150	28.633	23.547	658281	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:18:56 2022	Mon Jun 27 05:18:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3731	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.406	0.000	28.664	23.555	660040	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:18:50 2022	Mon Jun 27 05:18:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3730	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.406	-273.150	28.604	23.565	874696	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:18:46 2022	Mon Jun 27 05:18:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3729	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.406	-273.150	28.649	23.566	656754	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:18:41 2022	Mon Jun 27 05:18:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3728	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.406	-273.150	28.602	23.561	656234	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:18:36 2022	Mon Jun 27 05:18:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3727	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.404	0.000	28.608	23.559	653607	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:18:31 2022	Mon Jun 27 05:18:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3726	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.404	-273.150	28.593	23.567	657311	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:18:27 2022	Mon Jun 27 05:18:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3725	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.402	-273.150	28.613	23.562	651438	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B583_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:18:22 2022	Mon Jun 27 05:18:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3724	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.403	-273.150	28.575	23.554	654127	1	1	100000	tingxu20220626	13	102.38	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:18:08 2022	Mon Jun 27 05:18:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1448	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.402	-273.150	28.635	23.557	655068	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:18:03 2022	Mon Jun 27 05:18:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1447	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.403	-273.150	28.591	23.558	690394	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:17:59 2022	Mon Jun 27 05:18:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1446	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.402	-273.150	28.580	23.550	659954	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:17:54 2022	Mon Jun 27 05:17:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1445	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.400	-273.150	28.588	23.547	657108	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:17:49 2022	Mon Jun 27 05:17:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1444	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.400	-273.150	28.618	23.541	652756	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:17:45 2022	Mon Jun 27 05:17:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1443	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.400	-273.150	28.618	23.544	659385	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:17:40 2022	Mon Jun 27 05:17:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1442	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.399	-273.150	28.647	23.540	679357	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:17:34 2022	Mon Jun 27 05:17:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1441	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.397	-273.150	28.626	23.535	654144	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:17:29 2022	Mon Jun 27 05:17:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1440	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.396	-273.150	28.617	23.541	657904	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A582_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:17:25 2022	Mon Jun 27 05:17:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1439	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.396	-273.150	28.590	23.534	670627	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:17:02 2022	Mon Jun 27 05:17:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1829	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.394	-273.150	28.598	0.000	656352	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:16:57 2022	Mon Jun 27 05:16:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1828	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.395	-273.150	28.544	23.554	658196	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:16:52 2022	Mon Jun 27 05:16:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1827	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.394	-273.150	28.617	0.000	659746	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:16:47 2022	Mon Jun 27 05:16:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1826	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.394	-273.150	28.609	23.550	658019	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:16:43 2022	Mon Jun 27 05:16:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1825	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.393	-273.150	28.584	23.558	659456	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:16:38 2022	Mon Jun 27 05:16:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1824	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.392	-273.150	28.592	23.545	656988	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:16:33 2022	Mon Jun 27 05:16:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1823	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.390	0.000	28.587	23.555	606192	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:16:28 2022	Mon Jun 27 05:16:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1822	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.390	-273.150	28.661	23.554	657304	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:16:23 2022	Mon Jun 27 05:16:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1821	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.389	-273.150	28.645	23.555	660872	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C581_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:16:19 2022	Mon Jun 27 05:16:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1820	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.388	-273.150	28.618	23.561	657232	1	1	100000	tingxu20220626	13	101.91	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:16:05 2022	Mon Jun 27 05:16:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3723	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.385	-273.150	28.594	23.544	659560	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:16:00 2022	Mon Jun 27 05:16:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3722	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.385	-273.150	28.679	23.545	652368	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:15:56 2022	Mon Jun 27 05:15:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3721	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.385	-273.150	28.611	23.551	653874	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:15:51 2022	Mon Jun 27 05:15:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3720	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.386	-273.150	28.637	23.544	653466	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:15:46 2022	Mon Jun 27 05:15:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3719	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.387	-273.150	28.632	23.548	651684	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:15:42 2022	Mon Jun 27 05:15:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3718	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.389	-273.150	28.620	23.551	647044	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:15:37 2022	Mon Jun 27 05:15:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3717	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.390	-273.150	28.650	23.553	657632	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:15:32 2022	Mon Jun 27 05:15:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3716	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.389	-273.150	28.673	23.548	656764	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:15:27 2022	Mon Jun 27 05:15:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3715	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.388	-273.150	28.647	23.544	657260	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B580_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:15:23 2022	Mon Jun 27 05:15:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3714	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.387	0.000	28.596	23.519	657201	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:15:09 2022	Mon Jun 27 05:15:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1438	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.382	-273.150	28.668	23.533	659950	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:15:04 2022	Mon Jun 27 05:15:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1437	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.639	23.535	659002	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:14:59 2022	Mon Jun 27 05:15:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1436	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.638	0.000	660254	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:14:52 2022	Mon Jun 27 05:14:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1435	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.379	-273.150	28.632	23.541	658762	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:14:47 2022	Mon Jun 27 05:14:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1434	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.618	23.537	671558	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:14:43 2022	Mon Jun 27 05:14:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1433	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.630	23.536	653737	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:14:38 2022	Mon Jun 27 05:14:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1432	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.375	-273.150	28.563	23.526	658224	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:14:33 2022	Mon Jun 27 05:14:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1431	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.375	-273.150	28.656	23.521	549511	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:14:29 2022	Mon Jun 27 05:14:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1430	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.374	-273.150	28.667	23.536	657897	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A579_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:14:23 2022	Mon Jun 27 05:14:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1429	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.372	-273.150	28.626	23.528	655853	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:14:04 2022	Mon Jun 27 05:14:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1819	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.371	-273.150	28.644	23.535	654268	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:13:59 2022	Mon Jun 27 05:14:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1818	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	0.000	28.675	23.537	657784	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:13:55 2022	Mon Jun 27 05:13:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1817	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.606	0.000	654607	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:13:49 2022	Mon Jun 27 05:13:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1816	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.640	23.535	651294	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:13:44 2022	Mon Jun 27 05:13:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1815	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.367	-273.150	28.720	23.528	658364	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:13:39 2022	Mon Jun 27 05:13:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1814	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.671	23.542	657499	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:13:34 2022	Mon Jun 27 05:13:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1813	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.366	-273.150	28.654	23.549	659125	1	1	100000	tingxu20220626	13	102.02	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:13:30 2022	Mon Jun 27 05:13:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1812	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.618	23.547	641921	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:13:25 2022	Mon Jun 27 05:13:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1811	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.599	23.543	655070	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C578_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:13:20 2022	Mon Jun 27 05:13:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1810	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.633	23.535	658516	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:13:07 2022	Mon Jun 27 05:13:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3713	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.695	23.535	657732	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:13:02 2022	Mon Jun 27 05:13:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3712	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.630	23.531	652804	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:12:57 2022	Mon Jun 27 05:13:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3711	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.629	23.525	656674	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:12:52 2022	Mon Jun 27 05:12:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3710	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.682	23.518	655928	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:12:45 2022	Mon Jun 27 05:12:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3709	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.576	23.529	656199	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:12:40 2022	Mon Jun 27 05:12:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3708	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.617	23.529	656708	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:12:35 2022	Mon Jun 27 05:12:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3707	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.361	-273.150	28.709	23.531	660461	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:12:31 2022	Mon Jun 27 05:12:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3706	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.360	-273.150	28.636	23.529	658692	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:12:26 2022	Mon Jun 27 05:12:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3705	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.360	-273.150	28.637	23.528	657162	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B577_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:12:21 2022	Mon Jun 27 05:12:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3704	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.631	23.531	658748	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:12:08 2022	Mon Jun 27 05:12:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1428	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.357	-273.150	28.666	23.529	649350	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:12:03 2022	Mon Jun 27 05:12:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1427	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.356	-273.150	28.590	23.523	641775	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:11:58 2022	Mon Jun 27 05:12:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1426	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.354	-273.150	28.623	23.523	641408	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:11:53 2022	Mon Jun 27 05:11:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1425	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.354	-273.150	28.676	23.522	658012	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:11:49 2022	Mon Jun 27 05:11:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1424	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.353	-273.150	28.608	23.530	677316	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:11:39 2022	Mon Jun 27 05:11:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1423	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.351	-273.150	28.643	23.532	655121	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:11:34 2022	Mon Jun 27 05:11:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1422	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.348	-273.150	28.632	23.525	642320	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:11:30 2022	Mon Jun 27 05:11:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1421	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.348	-273.150	28.605	23.537	658576	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:11:25 2022	Mon Jun 27 05:11:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1420	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.347	-273.150	28.584	23.531	658540	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A576_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:11:20 2022	Mon Jun 27 05:11:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1419	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.347	-273.150	28.624	23.530	643884	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:11:01 2022	Mon Jun 27 05:11:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1809	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.342	0.000	28.599	23.553	660181	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:10:56 2022	Mon Jun 27 05:10:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1808	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.340	-273.150	28.572	23.557	653724	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:10:52 2022	Mon Jun 27 05:10:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1807	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.338	-273.150	28.601	23.556	658793	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:10:47 2022	Mon Jun 27 05:10:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1806	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.337	-273.150	28.673	23.562	661024	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:10:42 2022	Mon Jun 27 05:10:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1805	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.337	-273.150	28.631	23.555	655141	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:10:37 2022	Mon Jun 27 05:10:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1804	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.335	-273.150	28.631	23.536	659503	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:10:33 2022	Mon Jun 27 05:10:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1803	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.336	-273.150	28.640	23.526	661540	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:10:28 2022	Mon Jun 27 05:10:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1802	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.334	-273.150	28.595	23.522	659260	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:10:23 2022	Mon Jun 27 05:10:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1801	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.335	-273.150	28.622	0.000	656589	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C575_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:10:18 2022	Mon Jun 27 05:10:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1800	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.332	-273.150	28.659	23.537	529962	1	1	100000	tingxu20220626	13	101.78	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:10:04 2022	Mon Jun 27 05:10:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3703	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.330	-273.150	28.613	23.536	651982	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:09:59 2022	Mon Jun 27 05:10:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3702	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.329	-273.150	28.593	23.542	657196	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:09:54 2022	Mon Jun 27 05:09:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3701	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.330	-273.150	28.631	23.541	602139	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:09:50 2022	Mon Jun 27 05:09:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3700	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.328	-273.150	28.646	0.000	641920	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:09:45 2022	Mon Jun 27 05:09:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3699	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.327	-273.150	28.591	23.549	652122	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:09:40 2022	Mon Jun 27 05:09:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3698	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.326	-273.150	28.575	23.553	657655	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:09:36 2022	Mon Jun 27 05:09:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3697	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.324	-273.150	28.581	23.564	658039	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:09:29 2022	Mon Jun 27 05:09:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3696	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.323	-273.150	28.615	23.560	657705	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:09:24 2022	Mon Jun 27 05:09:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3695	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.321	-273.150	28.635	23.561	601192	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B574_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:09:20 2022	Mon Jun 27 05:09:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3694	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.320	-273.150	28.585	23.557	651171	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:09:06 2022	Mon Jun 27 05:09:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1418	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.317	-273.150	28.623	23.547	661037	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:09:01 2022	Mon Jun 27 05:09:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1417	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.316	-273.150	28.609	23.549	659366	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:08:56 2022	Mon Jun 27 05:08:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1416	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.315	-273.150	28.620	23.544	662037	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:08:52 2022	Mon Jun 27 05:08:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1415	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.312	-273.150	28.605	23.546	658342	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:08:47 2022	Mon Jun 27 05:08:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1414	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.312	-273.150	28.625	23.544	659545	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:08:42 2022	Mon Jun 27 05:08:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1413	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.310	-273.150	28.618	23.544	654281	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:08:38 2022	Mon Jun 27 05:08:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1412	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.309	-273.150	28.584	23.539	661891	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:08:33 2022	Mon Jun 27 05:08:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1411	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.307	-273.150	28.608	23.552	662403	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:08:28 2022	Mon Jun 27 05:08:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1410	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.306	-273.150	28.628	23.544	656868	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A573_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:08:23 2022	Mon Jun 27 05:08:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1409	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.305	0.000	28.616	23.558	662779	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:08:04 2022	Mon Jun 27 05:08:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1799	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.657	23.540	657163	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:07:59 2022	Mon Jun 27 05:08:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1798	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.301	-273.150	28.634	23.538	658163	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:07:53 2022	Mon Jun 27 05:07:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1797	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.299	-273.150	28.583	23.530	658873	1	1	100000	tingxu20220626	13	101.81	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:07:48 2022	Mon Jun 27 05:07:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1796	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.296	-273.150	28.645	23.524	661047	1	1	100000	tingxu20220626	13	101.84	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:07:43 2022	Mon Jun 27 05:07:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1795	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.294	-273.150	28.611	0.000	656116	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:07:38 2022	Mon Jun 27 05:07:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1794	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.294	-273.150	28.666	23.539	659949	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:07:34 2022	Mon Jun 27 05:07:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1793	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.293	-273.150	28.602	23.546	663910	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:07:29 2022	Mon Jun 27 05:07:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1792	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.292	0.000	28.629	23.541	650070	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:07:21 2022	Mon Jun 27 05:07:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1791	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.290	-273.150	28.622	23.529	659803	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C572_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:07:16 2022	Mon Jun 27 05:07:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1790	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.290	-273.150	28.621	23.539	649832	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:07:03 2022	Mon Jun 27 05:07:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3693	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.288	-273.150	28.665	23.529	660174	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:06:58 2022	Mon Jun 27 05:07:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3692	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.288	-273.150	28.636	23.531	655351	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:06:50 2022	Mon Jun 27 05:06:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3691	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.288	-273.150	28.665	23.543	658095	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:06:45 2022	Mon Jun 27 05:06:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3690	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.284	-273.150	28.686	23.544	657726	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:06:40 2022	Mon Jun 27 05:06:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3689	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.283	-273.150	28.673	23.534	658971	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:06:35 2022	Mon Jun 27 05:06:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3688	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.280	-273.150	28.656	0.000	765589	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:06:31 2022	Mon Jun 27 05:06:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3687	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.279	-273.150	28.631	23.543	655879	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:06:26 2022	Mon Jun 27 05:06:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3686	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.278	-273.150	28.671	23.525	659559	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:06:19 2022	Mon Jun 27 05:06:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3685	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.276	-273.150	28.685	23.521	658375	1	1	100000	tingxu20220626	13	101.69	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B571_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:06:14 2022	Mon Jun 27 05:06:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3684	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.275	-273.150	28.668	23.546	657427	1	1	100000	tingxu20220626	13	101.70	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:06:01 2022	Mon Jun 27 05:06:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1408	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.274	-273.150	28.665	0.000	659640	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:05:56 2022	Mon Jun 27 05:05:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1407	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.274	-273.150	28.686	23.559	657766	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:05:47 2022	Mon Jun 27 05:05:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1406	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.273	-273.150	28.694	23.552	660123	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:05:42 2022	Mon Jun 27 05:05:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1405	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.271	-273.150	28.640	0.000	655594	1	1	100000	tingxu20220626	13	101.80	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:05:37 2022	Mon Jun 27 05:05:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1404	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.269	-273.150	28.639	23.545	659819	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:05:32 2022	Mon Jun 27 05:05:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1403	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.267	0.000	28.590	23.538	660049	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:05:28 2022	Mon Jun 27 05:05:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1402	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.621	23.534	657887	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:05:23 2022	Mon Jun 27 05:05:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1401	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.263	-273.150	28.672	23.536	658382	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:05:15 2022	Mon Jun 27 05:05:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1400	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.262	-273.150	28.677	23.540	658202	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A570_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:05:08 2022	Mon Jun 27 05:05:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1399	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.260	-273.150	28.641	23.562	663511	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:04:49 2022	Mon Jun 27 05:04:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1789	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.255	0.000	28.689	23.538	657343	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:04:44 2022	Mon Jun 27 05:04:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1788	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.254	-273.150	28.639	23.541	659366	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:04:40 2022	Mon Jun 27 05:04:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1787	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.253	-273.150	28.596	23.552	655181	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:04:35 2022	Mon Jun 27 05:04:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1786	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.254	-273.150	28.671	23.557	657913	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:04:30 2022	Mon Jun 27 05:04:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1785	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.254	-273.150	28.620	23.550	653651	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:04:26 2022	Mon Jun 27 05:04:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1784	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.254	-273.150	28.631	23.544	657269	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:04:21 2022	Mon Jun 27 05:04:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1783	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.254	-273.150	28.646	23.551	655937	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:04:16 2022	Mon Jun 27 05:04:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1782	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.253	-273.150	28.684	0.000	652391	1	1	100000	tingxu20220626	13	101.66	101.65	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:04:12 2022	Mon Jun 27 05:04:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1781	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.252	-273.150	28.653	0.000	656378	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C569_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:04:07 2022	Mon Jun 27 05:04:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1780	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.252	-273.150	28.629	23.546	656712	1	1	100000	tingxu20220626	13	101.68	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:03:53 2022	Mon Jun 27 05:03:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3683	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.591	23.561	659080	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:03:49 2022	Mon Jun 27 05:03:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3682	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.247	-273.150	28.615	0.000	660730	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:03:44 2022	Mon Jun 27 05:03:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3681	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.245	-273.150	28.578	23.556	653371	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:03:39 2022	Mon Jun 27 05:03:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3680	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.244	-273.150	28.625	23.546	629654	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:03:35 2022	Mon Jun 27 05:03:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3679	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.244	-273.150	28.663	23.546	651791	1	1	100000	tingxu20220626	13	101.78	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:03:30 2022	Mon Jun 27 05:03:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3678	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.244	-273.150	28.600	23.546	658214	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:03:25 2022	Mon Jun 27 05:03:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3677	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.244	-273.150	28.608	23.544	654208	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:03:21 2022	Mon Jun 27 05:03:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3676	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.242	-273.150	28.593	0.000	645918	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:03:16 2022	Mon Jun 27 05:03:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3675	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.240	-273.150	28.605	23.534	650575	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B568_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:03:11 2022	Mon Jun 27 05:03:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3674	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.238	-273.150	28.537	23.540	656854	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 05:02:58 2022	Mon Jun 27 05:03:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1398	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.644	23.546	641000	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 05:02:53 2022	Mon Jun 27 05:02:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1397	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.236	-273.150	28.698	23.548	658466	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 05:02:48 2022	Mon Jun 27 05:02:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1396	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.234	-273.150	28.663	0.000	538647	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 05:02:44 2022	Mon Jun 27 05:02:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1395	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.231	-273.150	28.567	23.551	658324	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 05:02:33 2022	Mon Jun 27 05:02:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1394	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.229	-273.150	28.725	0.000	657775	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 05:02:28 2022	Mon Jun 27 05:02:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1393	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.226	-273.150	28.674	0.000	656952	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 05:02:23 2022	Mon Jun 27 05:02:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1392	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.225	-273.150	28.613	0.000	654054	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 05:02:18 2022	Mon Jun 27 05:02:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1391	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.223	-273.150	28.679	23.561	650820	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 05:02:13 2022	Mon Jun 27 05:02:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1390	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.221	-273.150	28.623	23.565	649545	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A567_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 05:02:07 2022	Mon Jun 27 05:02:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1389	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.217	-273.150	28.626	23.560	655429	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 05:01:48 2022	Mon Jun 27 05:01:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1779	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.622	23.548	651834	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 05:01:43 2022	Mon Jun 27 05:01:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1778	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.196	-273.150	28.657	23.539	656707	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 05:01:38 2022	Mon Jun 27 05:01:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1777	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.193	-273.150	28.661	23.531	640073	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 05:01:34 2022	Mon Jun 27 05:01:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1776	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.191	-273.150	28.668	23.536	657013	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 05:01:28 2022	Mon Jun 27 05:01:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1775	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.189	-273.150	28.729	23.527	659895	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 05:01:23 2022	Mon Jun 27 05:01:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1774	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.186	-273.150	28.680	23.532	650101	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 05:01:18 2022	Mon Jun 27 05:01:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1773	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.183	-273.150	28.693	23.534	632928	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 05:01:13 2022	Mon Jun 27 05:01:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1772	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.180	-273.150	28.663	23.535	836967	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 05:01:08 2022	Mon Jun 27 05:01:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1771	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.176	-273.150	28.695	23.543	657097	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C566_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 05:01:03 2022	Mon Jun 27 05:01:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1770	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.174	-273.150	28.687	23.538	660145	1	1	100000	tingxu20220626	13	102.28	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 05:00:49 2022	Mon Jun 27 05:00:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3673	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.164	-273.150	28.637	0.000	656773	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 05:00:44 2022	Mon Jun 27 05:00:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3672	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.160	-273.150	28.631	0.000	657757	1	1	100000	tingxu20220626	13	102.33	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 05:00:40 2022	Mon Jun 27 05:00:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3671	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.617	23.555	675583	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 05:00:35 2022	Mon Jun 27 05:00:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3670	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.153	-273.150	28.621	23.551	651757	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 05:00:30 2022	Mon Jun 27 05:00:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3669	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.616	23.548	657133	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 05:00:26 2022	Mon Jun 27 05:00:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3668	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.144	-273.150	28.612	23.552	654120	1	1	100000	tingxu20220626	13	102.39	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 05:00:21 2022	Mon Jun 27 05:00:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3667	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.140	-273.150	0.000	23.554	649817	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 05:00:16 2022	Mon Jun 27 05:00:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3666	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.641	23.557	655221	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 05:00:12 2022	Mon Jun 27 05:00:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3665	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.130	0.000	28.677	23.558	655700	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B565_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 05:00:07 2022	Mon Jun 27 05:00:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3664	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.125	-273.150	28.629	23.558	659809	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:59:53 2022	Mon Jun 27 04:59:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1388	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.117	-273.150	28.628	23.554	655671	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:59:49 2022	Mon Jun 27 04:59:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1387	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.620	23.549	656378	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:59:44 2022	Mon Jun 27 04:59:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1386	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.111	0.000	28.605	23.549	661301	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:59:39 2022	Mon Jun 27 04:59:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1385	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.109	-273.150	28.660	23.540	648745	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:59:34 2022	Mon Jun 27 04:59:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1384	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.108	-273.150	28.608	23.538	656877	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:59:29 2022	Mon Jun 27 04:59:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1383	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.106	-273.150	28.672	23.540	657350	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:59:25 2022	Mon Jun 27 04:59:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1382	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.105	-273.150	28.635	23.558	683738	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:59:19 2022	Mon Jun 27 04:59:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1381	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.103	-273.150	28.668	23.561	657472	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:59:14 2022	Mon Jun 27 04:59:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1380	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.101	-273.150	28.592	23.562	658660	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A564_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:59:08 2022	Mon Jun 27 04:59:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1379	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.641	23.557	831558	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:58:49 2022	Mon Jun 27 04:58:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1769	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.673	23.559	656473	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:58:45 2022	Mon Jun 27 04:58:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1768	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.596	23.563	656165	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:58:40 2022	Mon Jun 27 04:58:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1767	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.081	-273.150	28.651	23.563	652700	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:58:35 2022	Mon Jun 27 04:58:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1766	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.077	-273.150	28.601	0.000	647389	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:58:30 2022	Mon Jun 27 04:58:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1765	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.072	-273.150	28.669	23.561	654586	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:58:26 2022	Mon Jun 27 04:58:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1764	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.654	23.549	655014	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:58:21 2022	Mon Jun 27 04:58:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1763	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.671	0.000	653708	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:58:16 2022	Mon Jun 27 04:58:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1762	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.073	0.000	28.651	23.556	635796	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:58:12 2022	Mon Jun 27 04:58:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1761	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.667	23.553	653434	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C563_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:58:06 2022	Mon Jun 27 04:58:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1760	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.635	23.553	652949	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:57:52 2022	Mon Jun 27 04:57:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3663	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.610	23.558	656179	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:57:48 2022	Mon Jun 27 04:57:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3662	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.070	-273.150	28.659	23.569	659008	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:57:42 2022	Mon Jun 27 04:57:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3661	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.662	23.552	641974	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:57:37 2022	Mon Jun 27 04:57:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3660	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.073	-273.150	28.693	23.557	656439	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:57:32 2022	Mon Jun 27 04:57:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3659	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.654	23.564	655917	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:57:27 2022	Mon Jun 27 04:57:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3658	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.681	23.569	655570	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:57:23 2022	Mon Jun 27 04:57:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3657	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.071	-273.150	28.696	23.570	647567	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:57:18 2022	Mon Jun 27 04:57:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3656	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.651	23.571	652078	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:57:13 2022	Mon Jun 27 04:57:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3655	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.072	-273.150	28.689	23.575	660150	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B562_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:57:08 2022	Mon Jun 27 04:57:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3654	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.652	23.579	651452	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:56:55 2022	Mon Jun 27 04:56:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1378	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.069	-273.150	28.616	23.568	687923	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:56:50 2022	Mon Jun 27 04:56:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1377	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.069	-273.150	28.628	23.564	658580	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:56:45 2022	Mon Jun 27 04:56:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1376	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.068	-273.150	28.659	23.560	654695	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:56:39 2022	Mon Jun 27 04:56:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1375	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.662	23.551	630567	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:56:34 2022	Mon Jun 27 04:56:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1374	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.685	23.558	655593	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:56:30 2022	Mon Jun 27 04:56:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1373	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.071	-273.150	28.645	23.554	648537	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:56:25 2022	Mon Jun 27 04:56:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1372	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.672	23.571	655009	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:56:21 2022	Mon Jun 27 04:56:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1371	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.657	23.573	662098	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:56:16 2022	Mon Jun 27 04:56:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1370	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.070	-273.150	28.659	23.567	650977	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A561_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:56:11 2022	Mon Jun 27 04:56:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1369	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.069	-273.150	28.601	23.564	655361	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:55:52 2022	Mon Jun 27 04:55:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1759	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.068	-273.150	28.678	23.563	639236	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:55:47 2022	Mon Jun 27 04:55:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1758	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.068	-273.150	28.620	23.556	657249	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:55:43 2022	Mon Jun 27 04:55:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1757	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.068	-273.150	28.610	23.563	656948	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:55:38 2022	Mon Jun 27 04:55:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1756	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.067	-273.150	28.654	23.556	655949	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:55:32 2022	Mon Jun 27 04:55:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1755	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.627	23.560	653579	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:55:27 2022	Mon Jun 27 04:55:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1754	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.069	-273.150	28.643	23.557	653925	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:55:23 2022	Mon Jun 27 04:55:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1753	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.667	23.552	656365	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:55:18 2022	Mon Jun 27 04:55:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1752	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.069	-273.150	28.580	23.552	648168	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:55:13 2022	Mon Jun 27 04:55:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1751	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.679	23.553	655337	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C560_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:55:04 2022	Mon Jun 27 04:55:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1750	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.643	23.543	655591	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:54:50 2022	Mon Jun 27 04:54:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3653	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.693	0.000	650299	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:54:46 2022	Mon Jun 27 04:54:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3652	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.668	23.553	656178	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:54:41 2022	Mon Jun 27 04:54:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3651	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.070	-273.150	28.676	23.539	648015	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:54:36 2022	Mon Jun 27 04:54:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3650	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.649	23.549	656519	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:54:31 2022	Mon Jun 27 04:54:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3649	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.669	23.566	651992	1	1	100000	tingxu20220626	13	102.24	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:54:27 2022	Mon Jun 27 04:54:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3648	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.607	0.000	650402	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:54:22 2022	Mon Jun 27 04:54:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3647	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.071	-273.150	28.622	23.563	656189	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:54:17 2022	Mon Jun 27 04:54:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3646	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.071	-273.150	28.632	23.560	647980	1	1	100000	tingxu20220626	13	101.84	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:54:12 2022	Mon Jun 27 04:54:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3645	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.070	-273.150	28.624	23.554	654990	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B559_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:54:08 2022	Mon Jun 27 04:54:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3644	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.632	23.538	654454	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:53:53 2022	Mon Jun 27 04:53:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1368	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.070	-273.150	28.696	23.557	651603	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:53:49 2022	Mon Jun 27 04:53:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1367	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.674	23.539	656005	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:53:44 2022	Mon Jun 27 04:53:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1366	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.649	23.550	653161	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:53:39 2022	Mon Jun 27 04:53:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1365	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.667	23.557	650724	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:53:34 2022	Mon Jun 27 04:53:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1364	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.673	23.561	657768	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:53:30 2022	Mon Jun 27 04:53:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1363	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.070	-273.150	28.751	23.559	651963	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:53:23 2022	Mon Jun 27 04:53:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1362	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.711	23.550	651554	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:53:18 2022	Mon Jun 27 04:53:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1361	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.668	23.533	601780	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:53:13 2022	Mon Jun 27 04:53:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1360	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.069	-273.150	28.708	23.544	660298	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A558_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:53:09 2022	Mon Jun 27 04:53:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1359	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.621	23.552	656100	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:52:49 2022	Mon Jun 27 04:52:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1749	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.067	-273.150	28.670	23.539	652531	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:52:45 2022	Mon Jun 27 04:52:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1748	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.067	-273.150	28.638	23.554	653064	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:52:40 2022	Mon Jun 27 04:52:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1747	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.069	-273.150	28.675	23.564	653176	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:52:35 2022	Mon Jun 27 04:52:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1746	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.673	23.564	657192	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:52:31 2022	Mon Jun 27 04:52:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1745	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.068	-273.150	28.606	23.568	652532	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:52:26 2022	Mon Jun 27 04:52:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1744	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.636	23.571	658022	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:52:20 2022	Mon Jun 27 04:52:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1743	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	0.000	23.563	640022	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:52:16 2022	Mon Jun 27 04:52:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1742	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.071	-273.150	28.692	23.558	638841	1	1	100000	tingxu20220626	13	101.80	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:52:11 2022	Mon Jun 27 04:52:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1741	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.659	23.560	653851	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C557_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:52:05 2022	Mon Jun 27 04:52:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1740	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.070	-273.150	28.669	23.567	657490	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:51:51 2022	Mon Jun 27 04:51:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3643	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.697	23.562	654160	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:51:46 2022	Mon Jun 27 04:51:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3642	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.069	-273.150	28.664	23.565	659957	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:51:41 2022	Mon Jun 27 04:51:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3641	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.070	-273.150	28.678	23.567	658232	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:51:37 2022	Mon Jun 27 04:51:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3640	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.071	-273.150	28.716	23.566	654963	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:51:32 2022	Mon Jun 27 04:51:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3639	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.668	23.554	651467	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:51:27 2022	Mon Jun 27 04:51:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3638	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.700	23.557	653147	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:51:22 2022	Mon Jun 27 04:51:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3637	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.672	23.564	657821	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:51:17 2022	Mon Jun 27 04:51:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3636	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	0.000	28.677	23.565	639686	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:51:13 2022	Mon Jun 27 04:51:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3635	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.069	-273.150	28.645	23.564	658184	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B556_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:51:08 2022	Mon Jun 27 04:51:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3634	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.665	23.562	657195	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:50:54 2022	Mon Jun 27 04:50:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1358	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.070	-273.150	28.676	23.566	623969	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:50:50 2022	Mon Jun 27 04:50:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1357	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.071	-273.150	28.672	23.567	655887	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:50:43 2022	Mon Jun 27 04:50:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1356	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.662	23.574	721642	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:50:38 2022	Mon Jun 27 04:50:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1355	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.672	23.572	639772	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:50:33 2022	Mon Jun 27 04:50:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1354	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.634	23.568	601686	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:50:29 2022	Mon Jun 27 04:50:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1353	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.664	23.556	651860	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:50:24 2022	Mon Jun 27 04:50:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1352	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.663	23.551	655914	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:50:19 2022	Mon Jun 27 04:50:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1351	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.669	23.566	656204	1	1	100000	tingxu20220626	13	101.74	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:50:14 2022	Mon Jun 27 04:50:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1350	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.658	23.569	653676	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A555_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:50:09 2022	Mon Jun 27 04:50:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1349	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.071	0.000	28.664	23.568	580511	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:49:50 2022	Mon Jun 27 04:49:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1739	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.696	23.579	649236	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:49:45 2022	Mon Jun 27 04:49:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1738	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.652	23.581	655354	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:49:38 2022	Mon Jun 27 04:49:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1737	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.695	23.580	654181	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:49:34 2022	Mon Jun 27 04:49:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1736	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.072	-273.150	28.702	23.585	664867	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:49:29 2022	Mon Jun 27 04:49:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1735	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.648	23.583	654537	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:49:24 2022	Mon Jun 27 04:49:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1734	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.073	-273.150	28.573	23.578	628320	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:49:20 2022	Mon Jun 27 04:49:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1733	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.682	23.569	651048	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:49:15 2022	Mon Jun 27 04:49:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1732	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.074	-273.150	28.611	23.571	645941	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:49:10 2022	Mon Jun 27 04:49:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1731	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.075	-273.150	28.621	23.572	651272	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C554_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:49:01 2022	Mon Jun 27 04:49:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1730	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	0.000	28.679	23.577	656452	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:48:47 2022	Mon Jun 27 04:48:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3633	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.652	0.000	638194	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:48:43 2022	Mon Jun 27 04:48:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3632	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.685	23.571	638440	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:48:38 2022	Mon Jun 27 04:48:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3631	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.680	23.571	657333	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:48:33 2022	Mon Jun 27 04:48:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3630	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.074	-273.150	28.676	23.575	543860	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:48:29 2022	Mon Jun 27 04:48:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3629	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.075	-273.150	28.686	23.575	654558	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:48:24 2022	Mon Jun 27 04:48:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3628	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.075	-273.150	28.628	23.571	654820	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:48:19 2022	Mon Jun 27 04:48:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3627	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.641	23.573	657346	1	1	100000	tingxu20220626	13	101.70	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:48:14 2022	Mon Jun 27 04:48:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3626	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.074	-273.150	0.000	23.572	656804	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:48:09 2022	Mon Jun 27 04:48:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3625	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.622	23.564	542312	1	1	100000	tingxu20220626	13	101.73	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B553_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:48:05 2022	Mon Jun 27 04:48:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3624	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.074	-273.150	28.641	0.000	660962	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:47:51 2022	Mon Jun 27 04:47:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1348	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.686	23.585	656014	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:47:46 2022	Mon Jun 27 04:47:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1347	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.075	0.000	28.672	23.577	647913	1	1	100000	tingxu20220626	13	101.81	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:47:42 2022	Mon Jun 27 04:47:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1346	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.076	-273.150	28.685	23.577	653715	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:47:37 2022	Mon Jun 27 04:47:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1345	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.681	0.000	656737	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:47:31 2022	Mon Jun 27 04:47:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1344	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.721	23.575	653799	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:47:26 2022	Mon Jun 27 04:47:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1343	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.072	-273.150	28.693	0.000	651510	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:47:22 2022	Mon Jun 27 04:47:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1342	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.071	-273.150	28.642	0.000	655187	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:47:17 2022	Mon Jun 27 04:47:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1341	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.072	-273.150	28.644	23.553	657062	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:47:12 2022	Mon Jun 27 04:47:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1340	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	0.000	23.565	651599	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A552_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:47:07 2022	Mon Jun 27 04:47:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1339	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.684	23.578	656080	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:46:48 2022	Mon Jun 27 04:46:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1729	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.638	23.566	627304	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:46:43 2022	Mon Jun 27 04:46:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1728	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.648	0.000	658162	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:46:38 2022	Mon Jun 27 04:46:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1727	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.650	23.571	653226	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:46:34 2022	Mon Jun 27 04:46:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1726	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.681	23.569	655424	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:46:29 2022	Mon Jun 27 04:46:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1725	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.657	23.566	639311	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:46:24 2022	Mon Jun 27 04:46:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1724	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.687	23.564	582793	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:46:20 2022	Mon Jun 27 04:46:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1723	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.692	23.560	654836	1	1	100000	tingxu20220626	13	101.66	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:46:15 2022	Mon Jun 27 04:46:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1722	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.669	23.548	650977	1	1	100000	tingxu20220626	13	101.67	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:46:10 2022	Mon Jun 27 04:46:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1721	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.646	23.538	651829	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C551_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:46:05 2022	Mon Jun 27 04:46:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1720	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.667	23.539	653843	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:45:52 2022	Mon Jun 27 04:45:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3623	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.678	23.561	711933	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:45:46 2022	Mon Jun 27 04:45:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3622	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.078	-273.150	28.585	23.570	765337	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:45:42 2022	Mon Jun 27 04:45:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3621	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.664	23.566	646556	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:45:37 2022	Mon Jun 27 04:45:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3620	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.642	23.571	648096	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:45:32 2022	Mon Jun 27 04:45:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3619	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.677	23.568	652176	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:45:28 2022	Mon Jun 27 04:45:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3618	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.079	-273.150	28.660	0.000	639293	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:45:22 2022	Mon Jun 27 04:45:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3617	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.079	-273.150	28.667	23.569	655577	1	1	100000	tingxu20220626	13	101.85	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:45:17 2022	Mon Jun 27 04:45:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3616	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.695	23.567	654198	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:45:12 2022	Mon Jun 27 04:45:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3615	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.078	-273.150	28.716	23.571	650817	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B550_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:45:08 2022	Mon Jun 27 04:45:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3614	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.714	23.564	638858	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:44:50 2022	Mon Jun 27 04:44:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1338	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.077	-273.150	0.000	23.557	655301	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:44:45 2022	Mon Jun 27 04:44:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1337	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.079	-273.150	28.643	23.558	652458	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:44:40 2022	Mon Jun 27 04:44:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1336	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.653	23.560	658650	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:44:36 2022	Mon Jun 27 04:44:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1335	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	0.000	28.723	23.554	652685	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:44:31 2022	Mon Jun 27 04:44:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1334	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.672	23.576	653071	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:44:26 2022	Mon Jun 27 04:44:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1333	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.077	-273.150	28.648	23.579	653645	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:44:22 2022	Mon Jun 27 04:44:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1332	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.660	23.573	657011	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:44:16 2022	Mon Jun 27 04:44:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1331	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.079	-273.150	28.647	23.579	654348	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:44:11 2022	Mon Jun 27 04:44:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1330	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.078	-273.150	28.711	23.578	655715	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A549_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:44:06 2022	Mon Jun 27 04:44:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1329	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.076	-273.150	0.000	23.573	659514	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:43:46 2022	Mon Jun 27 04:43:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1719	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.079	-273.150	28.688	23.561	653197	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:43:41 2022	Mon Jun 27 04:43:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1718	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.079	-273.150	28.702	23.562	658644	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:43:37 2022	Mon Jun 27 04:43:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1717	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.650	23.578	657995	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:43:32 2022	Mon Jun 27 04:43:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1716	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.077	-273.150	28.625	0.000	664304	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:43:27 2022	Mon Jun 27 04:43:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1715	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.669	23.569	657738	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:43:23 2022	Mon Jun 27 04:43:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1714	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.078	-273.150	28.670	23.575	655624	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:43:18 2022	Mon Jun 27 04:43:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1713	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.699	23.572	658380	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:43:12 2022	Mon Jun 27 04:43:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1712	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.078	-273.150	28.657	23.574	657533	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:43:07 2022	Mon Jun 27 04:43:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1711	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.690	23.572	653143	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C548_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:43:02 2022	Mon Jun 27 04:43:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1710	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.079	-273.150	28.691	23.580	659069	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:42:48 2022	Mon Jun 27 04:42:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3613	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.079	-273.150	28.668	23.577	595701	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:42:42 2022	Mon Jun 27 04:42:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3612	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.079	-273.150	28.673	23.568	658480	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:42:37 2022	Mon Jun 27 04:42:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3611	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.079	-273.150	28.684	23.565	643625	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:42:32 2022	Mon Jun 27 04:42:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3610	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.078	-273.150	28.640	23.566	656708	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:42:28 2022	Mon Jun 27 04:42:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3609	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.079	-273.150	28.638	0.000	659827	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:42:23 2022	Mon Jun 27 04:42:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3608	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.081	-273.150	28.677	23.561	654746	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:42:18 2022	Mon Jun 27 04:42:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3607	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.081	-273.150	28.625	23.575	630276	1	1	100000	tingxu20220626	13	102.01	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:42:13 2022	Mon Jun 27 04:42:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3606	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	0.000	23.579	657640	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:42:07 2022	Mon Jun 27 04:42:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3605	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.645	23.580	659990	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B547_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:42:02 2022	Mon Jun 27 04:42:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3604	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.075	-273.150	28.734	23.575	658121	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:41:48 2022	Mon Jun 27 04:41:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1328	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.075	-273.150	28.671	23.567	690772	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:41:44 2022	Mon Jun 27 04:41:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1327	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.075	-273.150	28.654	0.000	658111	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:41:39 2022	Mon Jun 27 04:41:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1326	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.074	0.000	28.631	23.564	658623	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:41:34 2022	Mon Jun 27 04:41:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1325	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.590	23.569	667623	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:41:29 2022	Mon Jun 27 04:41:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1324	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.639	23.566	658203	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:41:25 2022	Mon Jun 27 04:41:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1323	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.074	-273.150	28.683	23.571	657180	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:41:20 2022	Mon Jun 27 04:41:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1322	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.681	23.564	661935	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:41:15 2022	Mon Jun 27 04:41:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1321	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.677	23.562	694079	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:41:11 2022	Mon Jun 27 04:41:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1320	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.645	23.564	656768	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A546_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:41:06 2022	Mon Jun 27 04:41:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1319	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.598	23.561	645466	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:40:47 2022	Mon Jun 27 04:40:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1709	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.073	-273.150	28.594	23.570	659712	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:40:42 2022	Mon Jun 27 04:40:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1708	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.669	23.587	656033	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:40:37 2022	Mon Jun 27 04:40:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1707	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.075	-273.150	28.641	23.576	659090	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:40:31 2022	Mon Jun 27 04:40:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1706	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.690	0.000	661664	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:40:26 2022	Mon Jun 27 04:40:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1705	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.701	23.559	662050	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:40:22 2022	Mon Jun 27 04:40:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1704	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.610	23.563	658104	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:40:17 2022	Mon Jun 27 04:40:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1703	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.076	-273.150	28.625	23.558	655838	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:40:12 2022	Mon Jun 27 04:40:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1702	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.648	23.544	658101	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:40:07 2022	Mon Jun 27 04:40:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1701	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.698	23.546	655015	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C545_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:40:02 2022	Mon Jun 27 04:40:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1700	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.077	-273.150	28.640	23.559	658820	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:39:49 2022	Mon Jun 27 04:39:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3603	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.079	-273.150	28.648	23.557	658080	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:39:44 2022	Mon Jun 27 04:39:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3602	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.080	-273.150	28.675	23.564	678424	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:39:39 2022	Mon Jun 27 04:39:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3601	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.080	-273.150	28.649	0.000	547113	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:39:35 2022	Mon Jun 27 04:39:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3600	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.081	-273.150	28.690	0.000	655698	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:39:27 2022	Mon Jun 27 04:39:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3599	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.645	23.562	656167	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:39:22 2022	Mon Jun 27 04:39:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3598	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.081	-273.150	28.608	23.558	658101	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:39:18 2022	Mon Jun 27 04:39:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3597	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.082	-273.150	28.665	23.577	655270	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:39:13 2022	Mon Jun 27 04:39:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3596	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.082	-273.150	28.684	0.000	650691	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:39:08 2022	Mon Jun 27 04:39:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3595	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.081	-273.150	28.687	23.559	659015	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B544_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:39:03 2022	Mon Jun 27 04:39:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3594	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.082	-273.150	28.660	23.568	586424	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:38:50 2022	Mon Jun 27 04:38:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1318	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.652	23.553	658586	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:38:45 2022	Mon Jun 27 04:38:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1317	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.626	0.000	659326	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:38:40 2022	Mon Jun 27 04:38:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1316	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.082	-273.150	28.682	23.560	660706	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:38:35 2022	Mon Jun 27 04:38:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1315	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.082	-273.150	28.677	0.000	656412	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:38:30 2022	Mon Jun 27 04:38:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1314	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.633	23.577	660060	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:38:23 2022	Mon Jun 27 04:38:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1313	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.648	23.585	659297	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:38:18 2022	Mon Jun 27 04:38:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1312	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.667	23.589	656467	1	1	100000	tingxu20220626	13	101.93	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:38:13 2022	Mon Jun 27 04:38:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1311	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.656	23.583	655660	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:38:08 2022	Mon Jun 27 04:38:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1310	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.665	23.585	661463	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A543_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:38:03 2022	Mon Jun 27 04:38:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1309	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.647	23.579	659497	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:37:44 2022	Mon Jun 27 04:37:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1699	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.700	23.586	660830	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:37:40 2022	Mon Jun 27 04:37:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1698	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.655	23.584	657513	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:37:35 2022	Mon Jun 27 04:37:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1697	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.082	-273.150	28.637	23.583	656278	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:37:30 2022	Mon Jun 27 04:37:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1696	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.081	-273.150	28.665	23.589	657126	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:37:25 2022	Mon Jun 27 04:37:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1695	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.711	23.592	660790	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:37:19 2022	Mon Jun 27 04:37:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1694	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.085	-273.150	28.642	23.592	642922	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:37:15 2022	Mon Jun 27 04:37:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1693	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.671	23.590	658795	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:37:10 2022	Mon Jun 27 04:37:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1692	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.665	23.587	660638	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:37:05 2022	Mon Jun 27 04:37:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1691	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.083	-273.150	28.666	23.582	659298	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C542_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:36:57 2022	Mon Jun 27 04:36:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1690	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.082	-273.150	28.662	23.580	649081	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:36:43 2022	Mon Jun 27 04:36:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3593	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.659	23.574	643537	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:36:38 2022	Mon Jun 27 04:36:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3592	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.710	23.573	657472	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:36:34 2022	Mon Jun 27 04:36:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3591	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.683	0.000	651794	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:36:29 2022	Mon Jun 27 04:36:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3590	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.689	23.569	654696	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:36:24 2022	Mon Jun 27 04:36:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3589	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.681	23.577	615232	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:36:19 2022	Mon Jun 27 04:36:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3588	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.661	23.572	659890	1	1	100000	tingxu20220626	13	101.88	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:36:15 2022	Mon Jun 27 04:36:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3587	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.658	23.570	658284	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:36:11 2022	Mon Jun 27 04:36:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3586	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.708	23.565	656664	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:36:06 2022	Mon Jun 27 04:36:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3585	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.666	23.572	650447	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B541_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:36:01 2022	Mon Jun 27 04:36:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3584	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.656	23.578	658692	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:35:43 2022	Mon Jun 27 04:35:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1308	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.624	0.000	660156	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:35:38 2022	Mon Jun 27 04:35:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1307	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	0.000	28.665	23.577	659149	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:35:33 2022	Mon Jun 27 04:35:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1306	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.679	23.566	572531	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:35:28 2022	Mon Jun 27 04:35:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1305	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.636	0.000	661534	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:35:24 2022	Mon Jun 27 04:35:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1304	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.659	23.565	658354	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:35:19 2022	Mon Jun 27 04:35:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1303	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.655	23.569	660269	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:35:11 2022	Mon Jun 27 04:35:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1302	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.678	23.567	659279	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:35:06 2022	Mon Jun 27 04:35:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1301	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.685	23.565	660237	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:35:02 2022	Mon Jun 27 04:35:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1300	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	0.000	23.565	658790	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A540_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:34:56 2022	Mon Jun 27 04:34:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1299	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.722	23.569	659150	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:34:37 2022	Mon Jun 27 04:34:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1689	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.679	23.580	658706	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:34:32 2022	Mon Jun 27 04:34:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1688	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.755	23.585	643474	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:34:27 2022	Mon Jun 27 04:34:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1687	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.670	23.584	659581	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:34:22 2022	Mon Jun 27 04:34:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1686	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.089	-273.150	28.677	23.580	659903	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:34:17 2022	Mon Jun 27 04:34:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1685	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	0.000	28.667	23.570	656630	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:34:13 2022	Mon Jun 27 04:34:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1684	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.650	23.567	658433	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:34:07 2022	Mon Jun 27 04:34:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1683	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.726	0.000	655503	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:34:02 2022	Mon Jun 27 04:34:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1682	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	0.000	-273.150	28.651	23.569	656928	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:33:55 2022	Mon Jun 27 04:33:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1681	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.087	-273.150	28.701	23.572	658130	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C539_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:33:50 2022	Mon Jun 27 04:33:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1680	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	0.000	28.604	23.573	660288	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:33:37 2022	Mon Jun 27 04:33:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3583	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.623	23.567	657577	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:33:32 2022	Mon Jun 27 04:33:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3582	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.664	23.562	657473	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:33:27 2022	Mon Jun 27 04:33:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3581	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.651	23.569	659260	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:33:22 2022	Mon Jun 27 04:33:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3580	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.618	23.580	656611	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:33:18 2022	Mon Jun 27 04:33:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3579	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.672	23.575	658772	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:33:13 2022	Mon Jun 27 04:33:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3578	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.659	23.577	657604	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:33:08 2022	Mon Jun 27 04:33:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3577	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.698	23.578	660803	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:33:02 2022	Mon Jun 27 04:33:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3576	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	0.000	23.571	658790	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:32:57 2022	Mon Jun 27 04:32:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3575	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.694	23.570	658024	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B538_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:32:52 2022	Mon Jun 27 04:32:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3574	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.646	0.000	658695	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:32:39 2022	Mon Jun 27 04:32:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1298	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.665	23.582	662184	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:32:34 2022	Mon Jun 27 04:32:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1297	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.653	23.577	660624	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:32:28 2022	Mon Jun 27 04:32:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1296	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.649	0.000	589825	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:32:23 2022	Mon Jun 27 04:32:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1295	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.687	23.574	656284	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:32:18 2022	Mon Jun 27 04:32:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1294	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.673	23.569	587022	1	1	100000	tingxu20220626	13	101.79	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:32:14 2022	Mon Jun 27 04:32:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1293	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.615	23.573	659228	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:32:09 2022	Mon Jun 27 04:32:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1292	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.634	23.563	660900	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:32:04 2022	Mon Jun 27 04:32:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1291	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.674	23.556	660865	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:31:58 2022	Mon Jun 27 04:32:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1290	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.570	23.562	659983	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A537_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:31:53 2022	Mon Jun 27 04:31:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1289	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.607	23.559	660398	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:31:34 2022	Mon Jun 27 04:31:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1679	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.665	23.562	674662	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:31:24 2022	Mon Jun 27 04:31:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1678	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.681	23.561	631669	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:31:19 2022	Mon Jun 27 04:31:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1677	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.085	-273.150	28.678	23.560	641840	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:31:15 2022	Mon Jun 27 04:31:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1676	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.624	23.559	654351	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:31:10 2022	Mon Jun 27 04:31:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1675	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.688	23.564	654846	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:31:05 2022	Mon Jun 27 04:31:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1674	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.690	0.000	656286	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:31:01 2022	Mon Jun 27 04:31:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1673	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.649	23.562	656305	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:30:52 2022	Mon Jun 27 04:30:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1672	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.704	0.000	659677	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:30:47 2022	Mon Jun 27 04:30:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1671	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.709	23.552	656655	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C536_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:30:42 2022	Mon Jun 27 04:30:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1670	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.669	23.548	656362	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:30:29 2022	Mon Jun 27 04:30:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3573	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.659	23.549	658160	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:30:24 2022	Mon Jun 27 04:30:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3572	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.685	23.565	658615	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:30:19 2022	Mon Jun 27 04:30:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3571	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.644	23.564	656196	1	1	100000	tingxu20220626	13	101.75	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:30:14 2022	Mon Jun 27 04:30:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3570	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.675	23.567	654660	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:30:09 2022	Mon Jun 27 04:30:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3569	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.670	23.576	566395	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:30:05 2022	Mon Jun 27 04:30:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3568	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.594	23.567	661564	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:30:00 2022	Mon Jun 27 04:30:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3567	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.643	23.566	656051	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:29:55 2022	Mon Jun 27 04:29:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3566	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.671	0.000	654107	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:29:50 2022	Mon Jun 27 04:29:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3565	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.692	23.561	654424	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B535_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:29:46 2022	Mon Jun 27 04:29:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3564	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.662	0.000	659406	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:29:32 2022	Mon Jun 27 04:29:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1288	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.630	0.000	659690	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:29:27 2022	Mon Jun 27 04:29:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1287	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	0.000	28.643	23.581	657736	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:29:22 2022	Mon Jun 27 04:29:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1286	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.642	23.594	651272	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:29:17 2022	Mon Jun 27 04:29:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1285	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.687	23.585	640123	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:29:13 2022	Mon Jun 27 04:29:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1284	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.677	23.575	657280	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:29:08 2022	Mon Jun 27 04:29:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1283	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.092	-273.150	28.725	23.589	658739	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:29:03 2022	Mon Jun 27 04:29:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1282	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.092	0.000	28.651	23.581	659986	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:28:58 2022	Mon Jun 27 04:29:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1281	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.692	23.583	654585	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:28:52 2022	Mon Jun 27 04:28:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1280	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.696	23.594	653084	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A534_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:28:47 2022	Mon Jun 27 04:28:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1279	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.669	23.592	657077	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:28:28 2022	Mon Jun 27 04:28:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1669	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.086	0.000	28.737	23.596	653484	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:28:23 2022	Mon Jun 27 04:28:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1668	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.644	23.594	656978	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:28:18 2022	Mon Jun 27 04:28:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1667	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.642	23.592	573794	1	1	100000	tingxu20220626	13	101.70	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:28:13 2022	Mon Jun 27 04:28:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1666	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	0.000	28.700	23.585	657136	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:28:08 2022	Mon Jun 27 04:28:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1665	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.655	23.588	654621	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:28:04 2022	Mon Jun 27 04:28:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1664	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.666	23.590	667350	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:27:59 2022	Mon Jun 27 04:28:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1663	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.657	23.584	657645	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:27:53 2022	Mon Jun 27 04:27:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1662	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.675	23.575	654637	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:27:48 2022	Mon Jun 27 04:27:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1661	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.687	23.573	537034	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C533_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:27:39 2022	Mon Jun 27 04:27:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1660	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.681	23.572	655568	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:27:25 2022	Mon Jun 27 04:27:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3563	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.719	23.590	652384	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:27:20 2022	Mon Jun 27 04:27:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3562	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.692	0.000	648784	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:27:16 2022	Mon Jun 27 04:27:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3561	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.675	23.590	656886	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:27:07 2022	Mon Jun 27 04:27:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3560	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.088	0.000	28.671	23.588	654911	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:27:02 2022	Mon Jun 27 04:27:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3559	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.089	-273.150	28.664	23.588	658694	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:26:52 2022	Mon Jun 27 04:26:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3558	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.688	23.586	653212	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:26:47 2022	Mon Jun 27 04:26:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3557	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.676	0.000	654757	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:26:42 2022	Mon Jun 27 04:26:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3556	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.705	23.582	650933	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:26:37 2022	Mon Jun 27 04:26:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3555	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.615	23.583	657254	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B532_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:26:33 2022	Mon Jun 27 04:26:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3554	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.642	23.585	647220	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:26:19 2022	Mon Jun 27 04:26:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1278	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.665	23.576	652518	1	1	100000	tingxu20220626	13	101.66	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:26:14 2022	Mon Jun 27 04:26:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1277	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.678	0.000	653728	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:26:09 2022	Mon Jun 27 04:26:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1276	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.690	23.575	581929	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:26:03 2022	Mon Jun 27 04:26:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1275	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.645	23.589	610848	1	1	100000	tingxu20220626	13	101.70	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:25:58 2022	Mon Jun 27 04:26:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1274	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.670	23.589	650520	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:25:52 2022	Mon Jun 27 04:25:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1273	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.633	23.586	651755	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:25:47 2022	Mon Jun 27 04:25:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1272	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.657	23.581	646125	1	1	100000	tingxu20220626	13	101.75	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:25:43 2022	Mon Jun 27 04:25:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1271	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.668	23.573	654372	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:25:38 2022	Mon Jun 27 04:25:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1270	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.653	23.567	638443	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A531_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:25:32 2022	Mon Jun 27 04:25:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1269	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.656	23.578	651740	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:25:13 2022	Mon Jun 27 04:25:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1659	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.639	23.591	650252	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:25:08 2022	Mon Jun 27 04:25:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1658	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.683	23.589	651537	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:24:59 2022	Mon Jun 27 04:25:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1657	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.649	23.577	655093	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:24:55 2022	Mon Jun 27 04:24:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1656	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.717	23.574	672461	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:24:48 2022	Mon Jun 27 04:24:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1655	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.675	23.572	581886	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:24:43 2022	Mon Jun 27 04:24:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1654	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.610	23.577	656835	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:24:39 2022	Mon Jun 27 04:24:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1653	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	0.000	28.719	23.583	650348	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:24:34 2022	Mon Jun 27 04:24:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1652	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.634	23.589	652215	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:24:26 2022	Mon Jun 27 04:24:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1651	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.616	23.588	654934	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C530_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:24:22 2022	Mon Jun 27 04:24:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1650	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.627	23.588	654996	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:24:08 2022	Mon Jun 27 04:24:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3553	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.650	23.559	654680	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:24:03 2022	Mon Jun 27 04:24:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3552	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.684	0.000	600439	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:23:58 2022	Mon Jun 27 04:24:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3551	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.670	23.555	639690	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:23:53 2022	Mon Jun 27 04:23:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3550	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.695	23.567	659152	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:23:49 2022	Mon Jun 27 04:23:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3549	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.712	23.574	666827	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:23:44 2022	Mon Jun 27 04:23:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3548	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.634	23.559	655798	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:23:39 2022	Mon Jun 27 04:23:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3547	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.665	23.558	650550	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:23:34 2022	Mon Jun 27 04:23:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3546	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.642	23.548	655108	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:23:30 2022	Mon Jun 27 04:23:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3545	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.609	23.565	653602	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B529_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:23:24 2022	Mon Jun 27 04:23:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3544	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.637	0.000	582806	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:23:11 2022	Mon Jun 27 04:23:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1268	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	0.000	28.643	23.562	653571	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:23:06 2022	Mon Jun 27 04:23:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1267	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.571	0.000	657739	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:23:01 2022	Mon Jun 27 04:23:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1266	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	0.000	28.610	23.577	655861	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:22:51 2022	Mon Jun 27 04:22:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1265	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.625	23.583	657870	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:22:46 2022	Mon Jun 27 04:22:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1264	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	0.000	28.645	23.587	659472	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:22:42 2022	Mon Jun 27 04:22:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1263	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.611	23.589	658356	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:22:37 2022	Mon Jun 27 04:22:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1262	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.682	23.584	651396	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:22:32 2022	Mon Jun 27 04:22:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1261	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.647	23.574	643483	1	1	100000	tingxu20220626	13	102.38	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:22:28 2022	Mon Jun 27 04:22:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1260	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.702	23.567	656042	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A528_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:22:22 2022	Mon Jun 27 04:22:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1259	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.604	23.570	767935	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:22:03 2022	Mon Jun 27 04:22:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1649	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	0.000	28.649	23.588	582790	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:21:58 2022	Mon Jun 27 04:22:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1648	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.623	23.588	655334	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:21:54 2022	Mon Jun 27 04:21:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1647	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.617	23.582	639223	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:21:48 2022	Mon Jun 27 04:21:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1646	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.617	23.580	655115	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:21:43 2022	Mon Jun 27 04:21:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1645	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.082	-273.150	28.693	23.563	653233	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:21:38 2022	Mon Jun 27 04:21:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1644	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.082	-273.150	28.598	23.573	651404	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:21:34 2022	Mon Jun 27 04:21:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1643	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.639	23.576	663571	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:21:29 2022	Mon Jun 27 04:21:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1642	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.586	23.561	655347	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:21:24 2022	Mon Jun 27 04:21:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1641	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.617	23.577	639610	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C527_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:21:19 2022	Mon Jun 27 04:21:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1640	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.620	23.595	655507	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:21:06 2022	Mon Jun 27 04:21:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3543	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.626	23.581	653789	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:21:01 2022	Mon Jun 27 04:21:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3542	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.605	23.578	656047	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:20:57 2022	Mon Jun 27 04:20:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3541	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.697	23.584	652322	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:20:48 2022	Mon Jun 27 04:20:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3540	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.677	23.575	541791	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:20:44 2022	Mon Jun 27 04:20:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3539	00	25.00	24.99	25.00	24.98	25.000	25.000	25.000	27.085	-273.150	28.654	23.593	652092	1	1	100000	tingxu20220626	13	102.30	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:20:39 2022	Mon Jun 27 04:20:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3538	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.669	23.589	656366	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:20:34 2022	Mon Jun 27 04:20:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3537	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.675	23.590	640185	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:20:29 2022	Mon Jun 27 04:20:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3536	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.084	-273.150	28.600	23.586	640191	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:20:24 2022	Mon Jun 27 04:20:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3535	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.710	23.584	752530	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B526_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:20:19 2022	Mon Jun 27 04:20:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3534	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.737	23.587	656016	1	1	100000	tingxu20220626	13	101.95	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:20:06 2022	Mon Jun 27 04:20:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1258	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.713	0.000	652401	1	1	100000	tingxu20220626	13	101.99	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:20:01 2022	Mon Jun 27 04:20:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1257	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.653	23.586	658789	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:19:57 2022	Mon Jun 27 04:19:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1256	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.691	23.583	658043	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:19:52 2022	Mon Jun 27 04:19:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1255	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.699	23.586	653010	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:19:47 2022	Mon Jun 27 04:19:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1254	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.653	23.573	654785	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:19:38 2022	Mon Jun 27 04:19:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1253	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.727	23.578	653598	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:19:33 2022	Mon Jun 27 04:19:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1252	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.716	0.000	653397	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:19:28 2022	Mon Jun 27 04:19:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1251	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.687	23.578	656221	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:19:23 2022	Mon Jun 27 04:19:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1250	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.715	23.577	652980	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A525_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:19:18 2022	Mon Jun 27 04:19:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1249	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.673	23.583	692137	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:18:59 2022	Mon Jun 27 04:19:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1639	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.672	23.582	655211	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:18:55 2022	Mon Jun 27 04:18:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1638	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.721	23.578	654809	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:18:50 2022	Mon Jun 27 04:18:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1637	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.673	0.000	640312	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:18:45 2022	Mon Jun 27 04:18:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1636	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.714	23.583	659208	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:18:40 2022	Mon Jun 27 04:18:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1635	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.643	23.595	654161	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:18:32 2022	Mon Jun 27 04:18:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1634	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.722	23.587	658716	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:18:27 2022	Mon Jun 27 04:18:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1633	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.660	23.582	654154	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:18:23 2022	Mon Jun 27 04:18:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1632	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.689	23.587	650260	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:18:18 2022	Mon Jun 27 04:18:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1631	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.669	23.581	653076	1	1	100000	tingxu20220626	13	101.91	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C524_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:18:13 2022	Mon Jun 27 04:18:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1630	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.688	23.588	657945	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:17:59 2022	Mon Jun 27 04:18:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3533	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.678	0.000	652477	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:17:55 2022	Mon Jun 27 04:17:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3532	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.727	23.591	686437	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:17:50 2022	Mon Jun 27 04:17:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3531	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.678	23.588	652555	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:17:45 2022	Mon Jun 27 04:17:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3530	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	-273.150	28.670	0.000	657762	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:17:40 2022	Mon Jun 27 04:17:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3529	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.655	23.574	653460	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:17:36 2022	Mon Jun 27 04:17:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3528	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.701	23.575	652998	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:17:31 2022	Mon Jun 27 04:17:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3527	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.700	23.565	654551	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:17:26 2022	Mon Jun 27 04:17:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3526	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.087	0.000	28.753	23.552	651039	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:17:22 2022	Mon Jun 27 04:17:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3525	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.699	23.558	651973	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B523_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:17:17 2022	Mon Jun 27 04:17:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3524	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.688	0.000	651727	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:17:03 2022	Mon Jun 27 04:17:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1248	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.693	23.572	612007	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:16:58 2022	Mon Jun 27 04:17:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1247	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.091	-273.150	28.670	23.586	657857	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:16:53 2022	Mon Jun 27 04:16:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1246	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.690	23.582	648986	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:16:49 2022	Mon Jun 27 04:16:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1245	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.090	-273.150	28.759	23.569	657504	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:16:44 2022	Mon Jun 27 04:16:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1244	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.653	23.574	658768	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:16:39 2022	Mon Jun 27 04:16:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1243	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.716	23.575	654170	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:16:34 2022	Mon Jun 27 04:16:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1242	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.683	23.566	655910	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:16:30 2022	Mon Jun 27 04:16:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1241	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.702	23.570	653273	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:16:23 2022	Mon Jun 27 04:16:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1240	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.690	23.584	652131	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A522_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:16:18 2022	Mon Jun 27 04:16:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1239	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.648	23.586	660742	1	1	100000	tingxu20220626	13	101.87	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:15:59 2022	Mon Jun 27 04:16:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1629	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.639	0.000	654407	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:15:54 2022	Mon Jun 27 04:15:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1628	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.687	23.581	655304	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:15:45 2022	Mon Jun 27 04:15:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1627	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.674	23.579	649295	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:15:41 2022	Mon Jun 27 04:15:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1626	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.731	23.573	657879	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:15:36 2022	Mon Jun 27 04:15:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1625	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	0.000	28.672	23.586	648004	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:15:31 2022	Mon Jun 27 04:15:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1624	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.743	0.000	653870	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:15:26 2022	Mon Jun 27 04:15:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1623	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.706	23.603	654895	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:15:22 2022	Mon Jun 27 04:15:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1622	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.090	0.000	28.660	23.605	656278	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:15:17 2022	Mon Jun 27 04:15:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1621	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.646	23.603	650655	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C521_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:15:12 2022	Mon Jun 27 04:15:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1620	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.091	-273.150	28.669	23.601	656809	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:14:59 2022	Mon Jun 27 04:15:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3523	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.693	23.589	648820	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:14:53 2022	Mon Jun 27 04:14:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3522	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.673	23.594	656321	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:14:47 2022	Mon Jun 27 04:14:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3521	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.662	0.000	658217	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:14:42 2022	Mon Jun 27 04:14:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3520	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.093	-273.150	28.671	23.589	657171	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:14:37 2022	Mon Jun 27 04:14:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3519	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.093	-273.150	0.000	23.588	656339	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:14:32 2022	Mon Jun 27 04:14:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3518	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.092	-273.150	28.659	0.000	654603	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:14:28 2022	Mon Jun 27 04:14:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3517	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.649	0.000	658963	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:14:23 2022	Mon Jun 27 04:14:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3516	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.648	23.585	654816	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:14:16 2022	Mon Jun 27 04:14:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3515	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.671	23.590	652717	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B520_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:14:12 2022	Mon Jun 27 04:14:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3514	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.634	23.590	652002	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:13:58 2022	Mon Jun 27 04:14:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1238	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.633	23.587	654320	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:13:53 2022	Mon Jun 27 04:13:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1237	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.660	23.584	657467	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:13:48 2022	Mon Jun 27 04:13:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1236	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.714	23.591	583906	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:13:42 2022	Mon Jun 27 04:13:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1235	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.666	23.593	655818	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:13:37 2022	Mon Jun 27 04:13:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1234	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.683	23.580	658999	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:13:32 2022	Mon Jun 27 04:13:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1233	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.698	23.573	658565	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:13:27 2022	Mon Jun 27 04:13:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1232	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.089	-273.150	28.653	23.564	658498	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:13:23 2022	Mon Jun 27 04:13:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1231	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.727	23.548	662429	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:13:18 2022	Mon Jun 27 04:13:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1230	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.784	23.574	656317	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A519_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:13:13 2022	Mon Jun 27 04:13:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1229	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.687	23.594	660163	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:12:54 2022	Mon Jun 27 04:12:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1619	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.703	0.000	656020	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:12:46 2022	Mon Jun 27 04:12:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1618	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.639	23.589	658988	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:12:38 2022	Mon Jun 27 04:12:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1617	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.728	23.590	655391	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:12:33 2022	Mon Jun 27 04:12:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1616	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.714	23.583	601715	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:12:28 2022	Mon Jun 27 04:12:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1615	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.731	23.586	653130	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:12:24 2022	Mon Jun 27 04:12:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1614	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.759	23.579	648629	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:12:19 2022	Mon Jun 27 04:12:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1613	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.760	23.571	656601	1	1	100000	tingxu20220626	13	101.80	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:12:14 2022	Mon Jun 27 04:12:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1612	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.726	23.568	651491	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:12:06 2022	Mon Jun 27 04:12:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1611	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.713	23.570	655253	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C518_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:12:01 2022	Mon Jun 27 04:12:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1610	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.084	-273.150	28.735	23.579	658412	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:11:44 2022	Mon Jun 27 04:11:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3513	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.716	0.000	654249	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:11:39 2022	Mon Jun 27 04:11:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3512	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.709	23.586	565335	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:11:34 2022	Mon Jun 27 04:11:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3511	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.703	23.588	658181	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:11:29 2022	Mon Jun 27 04:11:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3510	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.685	23.595	663611	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:11:24 2022	Mon Jun 27 04:11:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3509	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.747	23.598	634663	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:11:20 2022	Mon Jun 27 04:11:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3508	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.660	23.596	661570	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:11:15 2022	Mon Jun 27 04:11:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3507	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.734	23.599	657493	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:11:10 2022	Mon Jun 27 04:11:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3506	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.632	23.601	658034	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:11:05 2022	Mon Jun 27 04:11:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3505	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.086	-273.150	28.663	0.000	658217	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B517_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:11:00 2022	Mon Jun 27 04:11:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3504	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.751	23.590	657904	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:10:46 2022	Mon Jun 27 04:10:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1228	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.754	23.583	658296	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:10:42 2022	Mon Jun 27 04:10:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1227	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.751	23.590	650542	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:10:37 2022	Mon Jun 27 04:10:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1226	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.687	23.585	661116	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:10:29 2022	Mon Jun 27 04:10:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1225	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.083	-273.150	28.683	23.586	911191	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:10:25 2022	Mon Jun 27 04:10:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1224	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.669	23.590	660499	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:10:20 2022	Mon Jun 27 04:10:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1223	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.669	23.587	659766	1	1	100000	tingxu20220626	13	101.75	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:10:15 2022	Mon Jun 27 04:10:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1222	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.728	23.578	660394	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:10:11 2022	Mon Jun 27 04:10:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1221	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.692	23.587	653241	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:10:06 2022	Mon Jun 27 04:10:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1220	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.773	23.594	653680	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A516_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:09:59 2022	Mon Jun 27 04:10:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1219	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.726	23.584	655584	1	1	100000	tingxu20220626	13	101.81	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:09:40 2022	Mon Jun 27 04:09:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1609	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.683	23.574	659287	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:09:35 2022	Mon Jun 27 04:09:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1608	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.685	23.585	657074	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:09:25 2022	Mon Jun 27 04:09:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1607	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	0.000	28.695	23.593	686238	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:09:21 2022	Mon Jun 27 04:09:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1606	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.712	23.586	654965	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:09:16 2022	Mon Jun 27 04:09:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1605	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.651	23.588	658788	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:09:11 2022	Mon Jun 27 04:09:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1604	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.737	23.588	660880	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:09:07 2022	Mon Jun 27 04:09:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1603	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.666	23.585	657659	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:09:02 2022	Mon Jun 27 04:09:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1602	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.089	-273.150	28.704	23.583	655308	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:08:57 2022	Mon Jun 27 04:08:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1601	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.687	23.576	656203	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C515_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:08:52 2022	Mon Jun 27 04:08:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1600	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.715	23.575	658973	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:08:38 2022	Mon Jun 27 04:08:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3503	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.746	23.588	658498	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:08:34 2022	Mon Jun 27 04:08:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3502	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.605	23.591	660841	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:08:29 2022	Mon Jun 27 04:08:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3501	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.653	0.000	658835	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:08:20 2022	Mon Jun 27 04:08:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3500	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.698	23.594	654038	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:08:16 2022	Mon Jun 27 04:08:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3499	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.089	-273.150	28.680	23.579	640710	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:08:11 2022	Mon Jun 27 04:08:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3498	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.699	23.574	657687	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:08:06 2022	Mon Jun 27 04:08:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3497	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.089	-273.150	28.663	23.584	653552	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:08:01 2022	Mon Jun 27 04:08:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3496	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.728	23.591	657034	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:07:57 2022	Mon Jun 27 04:07:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3495	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.685	23.589	646750	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B514_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:07:50 2022	Mon Jun 27 04:07:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3494	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.087	-273.150	28.719	23.595	644413	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:07:37 2022	Mon Jun 27 04:07:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1218	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.706	23.586	655305	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:07:32 2022	Mon Jun 27 04:07:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1217	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.085	-273.150	28.709	23.588	658413	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:07:28 2022	Mon Jun 27 04:07:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1216	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.698	23.583	660948	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:07:23 2022	Mon Jun 27 04:07:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1215	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.738	23.567	657387	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:07:16 2022	Mon Jun 27 04:07:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1214	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.716	23.575	655701	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:07:11 2022	Mon Jun 27 04:07:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1213	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.659	23.584	664315	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:07:07 2022	Mon Jun 27 04:07:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1212	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.705	23.587	655939	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:07:02 2022	Mon Jun 27 04:07:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1211	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.657	0.000	658318	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:06:57 2022	Mon Jun 27 04:06:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1210	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.664	23.596	663611	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A513_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:06:52 2022	Mon Jun 27 04:06:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1209	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.687	23.589	714091	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:06:33 2022	Mon Jun 27 04:06:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1599	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.085	0.000	28.752	23.599	658538	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:06:28 2022	Mon Jun 27 04:06:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1598	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.695	23.604	652197	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:06:23 2022	Mon Jun 27 04:06:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1597	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.744	23.606	652770	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:06:19 2022	Mon Jun 27 04:06:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1596	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.719	23.605	655465	1	1	100000	tingxu20220626	13	101.66	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:06:14 2022	Mon Jun 27 04:06:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1595	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.698	23.601	659928	1	1	100000	tingxu20220626	13	101.68	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:06:09 2022	Mon Jun 27 04:06:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1594	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.085	-273.150	28.712	23.601	640795	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:06:04 2022	Mon Jun 27 04:06:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1593	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.728	23.600	653904	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:06:00 2022	Mon Jun 27 04:06:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1592	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	0.000	28.714	23.600	658024	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:05:55 2022	Mon Jun 27 04:05:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1591	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.084	-273.150	28.728	23.595	660110	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C512_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:05:50 2022	Mon Jun 27 04:05:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1590	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.700	23.595	660839	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:05:37 2022	Mon Jun 27 04:05:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3493	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.667	23.585	655482	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:05:32 2022	Mon Jun 27 04:05:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3492	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.690	23.584	657334	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:05:27 2022	Mon Jun 27 04:05:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3491	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.707	23.578	657012	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:05:22 2022	Mon Jun 27 04:05:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3490	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.689	23.576	657405	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:05:18 2022	Mon Jun 27 04:05:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3489	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.678	0.000	641331	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:05:13 2022	Mon Jun 27 04:05:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3488	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.696	23.570	658543	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:05:08 2022	Mon Jun 27 04:05:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3487	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.627	23.568	659354	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:05:03 2022	Mon Jun 27 04:05:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3486	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.083	-273.150	28.737	0.000	598806	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:04:58 2022	Mon Jun 27 04:05:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3485	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.083	-273.150	28.752	23.596	657801	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B511_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:04:54 2022	Mon Jun 27 04:04:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3484	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.699	23.601	659935	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:04:40 2022	Mon Jun 27 04:04:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1208	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.715	23.590	701938	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:04:33 2022	Mon Jun 27 04:04:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1207	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	-273.150	28.660	23.593	654040	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:04:28 2022	Mon Jun 27 04:04:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1206	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.710	23.589	660987	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:04:23 2022	Mon Jun 27 04:04:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1205	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.717	0.000	660833	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:04:18 2022	Mon Jun 27 04:04:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1204	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.734	23.585	686814	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:04:14 2022	Mon Jun 27 04:04:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1203	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.083	-273.150	28.724	23.580	659121	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:04:09 2022	Mon Jun 27 04:04:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1202	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.638	23.583	658606	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:04:01 2022	Mon Jun 27 04:04:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1201	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.085	-273.150	28.699	23.565	661213	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:03:56 2022	Mon Jun 27 04:03:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1200	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.084	0.000	28.716	23.581	659415	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A510_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:03:52 2022	Mon Jun 27 04:03:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1199	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.671	23.581	659441	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:03:33 2022	Mon Jun 27 04:03:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1589	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.085	-273.150	28.680	23.590	657090	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:03:28 2022	Mon Jun 27 04:03:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1588	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.710	23.579	659098	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:03:23 2022	Mon Jun 27 04:03:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1587	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.681	23.574	656319	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:03:18 2022	Mon Jun 27 04:03:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1586	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.086	-273.150	28.718	23.566	558462	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:03:14 2022	Mon Jun 27 04:03:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1585	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.671	23.581	659276	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:03:09 2022	Mon Jun 27 04:03:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1584	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.682	23.590	660090	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 04:03:04 2022	Mon Jun 27 04:03:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1583	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.087	-273.150	28.705	23.594	661859	1	1	100000	tingxu20220626	13	102.29	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 04:02:58 2022	Mon Jun 27 04:03:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1582	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.693	23.588	658868	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 04:02:53 2022	Mon Jun 27 04:02:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1581	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.704	23.585	661202	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C509_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 04:02:48 2022	Mon Jun 27 04:02:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1580	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.703	0.000	586675	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 04:02:35 2022	Mon Jun 27 04:02:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3483	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.626	23.584	662474	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 04:02:26 2022	Mon Jun 27 04:02:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3482	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.744	23.582	656554	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 04:02:22 2022	Mon Jun 27 04:02:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3481	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.724	0.000	652367	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 04:02:17 2022	Mon Jun 27 04:02:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3480	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.736	23.592	655750	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 04:02:12 2022	Mon Jun 27 04:02:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3479	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.089	-273.150	28.668	23.591	655343	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 04:02:08 2022	Mon Jun 27 04:02:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3478	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.657	23.591	660287	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 04:02:03 2022	Mon Jun 27 04:02:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3477	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.700	0.000	655779	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 04:01:54 2022	Mon Jun 27 04:01:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3476	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.695	23.588	656155	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 04:01:49 2022	Mon Jun 27 04:01:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3475	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.088	-273.150	28.693	23.589	659111	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B508_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 04:01:44 2022	Mon Jun 27 04:01:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3474	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.088	-273.150	28.681	0.000	651974	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 04:01:31 2022	Mon Jun 27 04:01:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1198	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.086	-273.150	28.727	23.588	667799	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 04:01:26 2022	Mon Jun 27 04:01:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1197	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.088	-273.150	28.754	23.578	659333	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 04:01:20 2022	Mon Jun 27 04:01:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1196	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.740	0.000	662594	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 04:01:15 2022	Mon Jun 27 04:01:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1195	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.684	23.581	662368	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 04:01:11 2022	Mon Jun 27 04:01:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1194	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.633	23.586	659230	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 04:01:06 2022	Mon Jun 27 04:01:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1193	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.701	23.590	651611	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 04:01:01 2022	Mon Jun 27 04:01:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1192	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.676	23.585	655777	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 04:00:56 2022	Mon Jun 27 04:00:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1191	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	0.000	23.583	661785	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 04:00:50 2022	Mon Jun 27 04:00:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1190	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.682	23.580	661566	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A507_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 04:00:45 2022	Mon Jun 27 04:00:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1189	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.685	23.586	659057	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 04:00:26 2022	Mon Jun 27 04:00:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1579	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.088	-273.150	28.714	23.588	654216	1	1	100000	tingxu20220626	13	102.38	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 04:00:22 2022	Mon Jun 27 04:00:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1578	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.722	23.590	642555	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 04:00:16 2022	Mon Jun 27 04:00:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1577	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.769	23.587	651262	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 04:00:11 2022	Mon Jun 27 04:00:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1576	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.715	23.587	654271	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 04:00:07 2022	Mon Jun 27 04:00:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1575	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.709	23.575	657189	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 04:00:02 2022	Mon Jun 27 04:00:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1574	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.738	23.562	659419	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:59:57 2022	Mon Jun 27 03:59:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1573	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.091	-273.150	28.703	23.580	652686	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:59:52 2022	Mon Jun 27 03:59:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1572	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	0.000	28.680	23.581	656490	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:59:47 2022	Mon Jun 27 03:59:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1571	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.719	23.578	654195	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C506_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:59:43 2022	Mon Jun 27 03:59:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1570	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.709	23.588	656471	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:59:29 2022	Mon Jun 27 03:59:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3473	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.694	23.575	657116	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:59:24 2022	Mon Jun 27 03:59:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3472	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.090	-273.150	28.704	23.569	621469	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:59:20 2022	Mon Jun 27 03:59:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3471	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.090	-273.150	28.729	23.572	658956	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:59:15 2022	Mon Jun 27 03:59:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3470	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.091	-273.150	28.647	23.574	655614	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:59:10 2022	Mon Jun 27 03:59:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3469	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.092	-273.150	28.729	23.592	656594	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:59:06 2022	Mon Jun 27 03:59:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3468	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.094	-273.150	28.697	23.584	646065	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:59:01 2022	Mon Jun 27 03:59:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3467	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.700	23.577	641712	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:58:56 2022	Mon Jun 27 03:58:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3466	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.716	23.576	656117	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:58:41 2022	Mon Jun 27 03:58:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3465	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.721	23.589	655845	1	1	100000	tingxu20220626	13	102.29	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B505_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:58:36 2022	Mon Jun 27 03:58:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3464	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.690	23.592	656740	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:58:22 2022	Mon Jun 27 03:58:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1188	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.093	-273.150	28.624	23.578	659396	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:58:17 2022	Mon Jun 27 03:58:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1187	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.655	23.587	652207	1	1	100000	tingxu20220626	13	101.94	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:58:09 2022	Mon Jun 27 03:58:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1186	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.094	-273.150	28.672	23.586	655704	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:58:04 2022	Mon Jun 27 03:58:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1185	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.690	23.593	656205	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:57:59 2022	Mon Jun 27 03:58:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1184	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.697	23.607	658576	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:57:55 2022	Mon Jun 27 03:57:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1183	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.675	23.603	657769	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:57:50 2022	Mon Jun 27 03:57:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1182	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.667	23.599	661590	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:57:45 2022	Mon Jun 27 03:57:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1181	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.633	23.588	656637	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:57:37 2022	Mon Jun 27 03:57:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1180	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.710	23.587	660969	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A504_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:57:32 2022	Mon Jun 27 03:57:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1179	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.096	-273.150	28.667	23.598	673008	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:57:13 2022	Mon Jun 27 03:57:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1569	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.691	23.591	653626	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:57:09 2022	Mon Jun 27 03:57:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1568	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.707	23.586	650544	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:57:03 2022	Mon Jun 27 03:57:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1567	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.670	23.590	649657	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:56:58 2022	Mon Jun 27 03:57:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1566	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.672	23.574	652892	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:56:53 2022	Mon Jun 27 03:56:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1565	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.093	-273.150	28.673	23.580	656624	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:56:49 2022	Mon Jun 27 03:56:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1564	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.721	23.575	657864	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:56:40 2022	Mon Jun 27 03:56:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1563	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.629	23.575	641251	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:56:33 2022	Mon Jun 27 03:56:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1562	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.095	-273.150	28.670	23.567	578424	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:56:28 2022	Mon Jun 27 03:56:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1561	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	0.000	28.671	23.573	653750	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C503_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:56:24 2022	Mon Jun 27 03:56:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1560	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	-273.150	28.639	23.578	658608	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:56:10 2022	Mon Jun 27 03:56:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3463	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	-273.150	28.650	23.589	651458	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:56:01 2022	Mon Jun 27 03:56:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3462	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.645	23.598	654556	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:55:56 2022	Mon Jun 27 03:55:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3461	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.096	-273.150	28.662	23.604	654415	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:55:52 2022	Mon Jun 27 03:55:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3460	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.703	23.608	651663	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:55:47 2022	Mon Jun 27 03:55:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3459	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.662	23.606	652074	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:55:39 2022	Mon Jun 27 03:55:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3458	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.698	23.601	566193	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:55:35 2022	Mon Jun 27 03:55:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3457	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.093	-273.150	28.694	23.596	648104	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:55:29 2022	Mon Jun 27 03:55:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3456	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.705	23.586	657559	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:55:24 2022	Mon Jun 27 03:55:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3455	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.714	23.581	919307	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B502_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:55:19 2022	Mon Jun 27 03:55:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3454	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.702	23.580	654456	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:55:06 2022	Mon Jun 27 03:55:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1178	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.701	23.572	657911	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:55:01 2022	Mon Jun 27 03:55:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1177	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.636	23.569	653291	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:54:55 2022	Mon Jun 27 03:54:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1176	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.727	23.568	653827	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:54:50 2022	Mon Jun 27 03:54:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1175	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.683	23.589	652561	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:54:45 2022	Mon Jun 27 03:54:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1174	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	0.000	23.592	654236	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:54:40 2022	Mon Jun 27 03:54:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1173	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.714	23.612	655888	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:54:36 2022	Mon Jun 27 03:54:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1172	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.662	23.615	651211	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:54:31 2022	Mon Jun 27 03:54:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1171	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.688	23.609	658199	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:54:23 2022	Mon Jun 27 03:54:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1170	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.662	23.609	655671	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A501_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:54:18 2022	Mon Jun 27 03:54:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1169	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.670	23.593	573277	1	1	100000	tingxu20220626	13	101.87	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:53:59 2022	Mon Jun 27 03:54:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1559	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.685	23.579	653863	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:53:51 2022	Mon Jun 27 03:53:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1558	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	-273.150	28.648	23.573	654275	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:53:46 2022	Mon Jun 27 03:53:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1557	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.664	23.556	650806	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:53:42 2022	Mon Jun 27 03:53:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1556	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.099	-273.150	28.695	23.570	648231	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:53:37 2022	Mon Jun 27 03:53:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1555	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.697	23.575	646737	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:53:32 2022	Mon Jun 27 03:53:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1554	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.706	23.572	654932	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:53:27 2022	Mon Jun 27 03:53:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1553	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.737	23.577	654725	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:53:22 2022	Mon Jun 27 03:53:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1552	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.671	23.576	638115	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:53:17 2022	Mon Jun 27 03:53:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1551	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.703	23.584	654767	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C500_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:53:12 2022	Mon Jun 27 03:53:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1550	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.719	0.000	637580	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:52:58 2022	Mon Jun 27 03:53:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3453	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.662	0.000	738998	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:52:54 2022	Mon Jun 27 03:52:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3452	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.699	23.591	646989	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:52:48 2022	Mon Jun 27 03:52:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3451	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.672	23.593	636983	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:52:43 2022	Mon Jun 27 03:52:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3450	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.685	23.588	653971	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:52:38 2022	Mon Jun 27 03:52:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3449	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.731	23.577	654381	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:52:33 2022	Mon Jun 27 03:52:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3448	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.693	23.589	652080	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:52:28 2022	Mon Jun 27 03:52:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3447	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	0.000	28.680	23.597	638601	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:52:23 2022	Mon Jun 27 03:52:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3446	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.679	23.599	653669	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:52:18 2022	Mon Jun 27 03:52:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3445	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.101	-273.150	28.726	23.595	643001	1	1	100000	tingxu20220626	13	101.83	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B499_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:52:13 2022	Mon Jun 27 03:52:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3444	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.664	23.597	644336	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:52:00 2022	Mon Jun 27 03:52:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1168	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	0.000	23.580	652669	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:51:55 2022	Mon Jun 27 03:51:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1167	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.717	23.576	654982	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:51:50 2022	Mon Jun 27 03:51:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1166	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.100	0.000	28.649	23.575	640952	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:51:46 2022	Mon Jun 27 03:51:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1165	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.099	-273.150	28.736	23.577	637006	1	1	100000	tingxu20220626	13	101.93	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:51:38 2022	Mon Jun 27 03:51:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1164	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.710	23.568	648463	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:51:34 2022	Mon Jun 27 03:51:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1163	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.734	23.583	651850	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:51:29 2022	Mon Jun 27 03:51:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1162	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.688	23.589	652505	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:51:24 2022	Mon Jun 27 03:51:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1161	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.656	23.573	648774	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:51:19 2022	Mon Jun 27 03:51:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1160	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.095	-273.150	28.670	23.586	655039	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A498_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:51:15 2022	Mon Jun 27 03:51:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1159	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.724	23.576	655872	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:50:56 2022	Mon Jun 27 03:50:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1549	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.708	23.606	647700	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:50:51 2022	Mon Jun 27 03:50:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1548	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.655	23.597	649546	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:50:46 2022	Mon Jun 27 03:50:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1547	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.677	23.605	648820	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:50:40 2022	Mon Jun 27 03:50:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1546	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.674	23.609	654162	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:50:35 2022	Mon Jun 27 03:50:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1545	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.676	23.604	648930	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:50:30 2022	Mon Jun 27 03:50:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1544	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.682	0.000	646754	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:50:26 2022	Mon Jun 27 03:50:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1543	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.698	23.585	647655	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:50:21 2022	Mon Jun 27 03:50:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1542	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	-273.150	28.612	23.587	651116	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:50:16 2022	Mon Jun 27 03:50:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1541	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.687	23.585	643648	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C497_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:50:12 2022	Mon Jun 27 03:50:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1540	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.738	23.580	639457	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:49:58 2022	Mon Jun 27 03:50:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3443	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	0.000	28.700	23.574	651703	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:49:53 2022	Mon Jun 27 03:49:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3442	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	0.000	28.650	23.593	651242	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:49:48 2022	Mon Jun 27 03:49:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3441	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.095	0.000	28.676	23.598	533257	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:49:44 2022	Mon Jun 27 03:49:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3440	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.711	23.588	644998	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:49:39 2022	Mon Jun 27 03:49:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3439	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.713	23.587	652908	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:49:33 2022	Mon Jun 27 03:49:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3438	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.095	-273.150	28.669	23.582	595643	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:49:28 2022	Mon Jun 27 03:49:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3437	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.094	-273.150	28.681	23.590	647953	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:49:24 2022	Mon Jun 27 03:49:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3436	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	-273.150	28.698	23.594	651289	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:49:19 2022	Mon Jun 27 03:49:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3435	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.700	0.000	652847	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B496_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:49:14 2022	Mon Jun 27 03:49:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3434	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.642	23.592	645476	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:49:01 2022	Mon Jun 27 03:49:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1158	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.100	-273.150	28.745	23.589	652473	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:48:56 2022	Mon Jun 27 03:48:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1157	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.678	23.594	656866	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:48:51 2022	Mon Jun 27 03:48:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1156	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.726	23.592	651800	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:48:46 2022	Mon Jun 27 03:48:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1155	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.704	0.000	650283	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:48:37 2022	Mon Jun 27 03:48:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1154	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.688	23.595	651137	1	1	100000	tingxu20220626	13	102.10	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:48:31 2022	Mon Jun 27 03:48:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1153	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.099	-273.150	28.685	23.593	670214	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:48:27 2022	Mon Jun 27 03:48:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1152	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	0.000	23.581	648581	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:48:22 2022	Mon Jun 27 03:48:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1151	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.684	23.584	653379	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:48:17 2022	Mon Jun 27 03:48:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1150	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	0.000	28.676	23.582	646779	1	1	100000	tingxu20220626	13	101.75	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A495_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:48:12 2022	Mon Jun 27 03:48:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1149	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.734	23.581	649916	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:47:53 2022	Mon Jun 27 03:47:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1539	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.695	23.568	647812	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:47:48 2022	Mon Jun 27 03:47:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1538	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.690	23.562	606383	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:47:43 2022	Mon Jun 27 03:47:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1537	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.669	23.576	647624	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:47:38 2022	Mon Jun 27 03:47:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1536	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.098	-273.150	28.664	23.592	659506	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:47:34 2022	Mon Jun 27 03:47:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1535	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.098	-273.150	28.654	23.601	647974	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:47:29 2022	Mon Jun 27 03:47:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1534	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.658	23.597	647477	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:47:24 2022	Mon Jun 27 03:47:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1533	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.673	23.601	541857	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:47:20 2022	Mon Jun 27 03:47:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1532	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.639	0.000	649101	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:47:15 2022	Mon Jun 27 03:47:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1531	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.663	23.594	648557	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C494_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:47:10 2022	Mon Jun 27 03:47:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1530	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.685	23.581	653516	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:46:57 2022	Mon Jun 27 03:46:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3433	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.661	23.591	653405	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:46:52 2022	Mon Jun 27 03:46:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3432	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.672	23.602	634935	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:46:47 2022	Mon Jun 27 03:46:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3431	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.735	23.601	648225	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:46:43 2022	Mon Jun 27 03:46:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3430	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.701	23.597	649762	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:46:38 2022	Mon Jun 27 03:46:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3429	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.100	-273.150	28.671	23.597	651748	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:46:33 2022	Mon Jun 27 03:46:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3428	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.670	23.588	636158	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:46:28 2022	Mon Jun 27 03:46:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3427	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.101	-273.150	28.694	23.597	644717	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:46:23 2022	Mon Jun 27 03:46:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3426	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.672	23.599	653157	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:46:19 2022	Mon Jun 27 03:46:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3425	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.719	23.605	652930	1	1	100000	tingxu20220626	13	101.71	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B493_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:46:14 2022	Mon Jun 27 03:46:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3424	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.615	23.603	650505	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:46:01 2022	Mon Jun 27 03:46:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1148	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.685	23.585	654523	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:45:56 2022	Mon Jun 27 03:45:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1147	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.679	23.580	653318	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:45:51 2022	Mon Jun 27 03:45:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1146	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.694	0.000	655020	1	1	100000	tingxu20220626	13	101.80	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:45:46 2022	Mon Jun 27 03:45:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1145	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.614	23.589	657406	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:45:36 2022	Mon Jun 27 03:45:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1144	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.100	-273.150	28.703	23.592	655321	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:45:31 2022	Mon Jun 27 03:45:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1143	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.649	0.000	648651	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:45:26 2022	Mon Jun 27 03:45:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1142	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.658	23.601	654304	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:45:22 2022	Mon Jun 27 03:45:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1141	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.654	23.599	651740	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:45:16 2022	Mon Jun 27 03:45:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1140	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.609	23.595	652671	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A492_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:45:11 2022	Mon Jun 27 03:45:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1139	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.102	0.000	28.643	23.610	648297	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:44:52 2022	Mon Jun 27 03:44:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1529	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.103	-273.150	28.660	23.597	634321	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:44:47 2022	Mon Jun 27 03:44:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1528	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.647	23.587	651976	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:44:42 2022	Mon Jun 27 03:44:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1527	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.685	23.592	650870	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:44:38 2022	Mon Jun 27 03:44:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1526	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.685	23.600	649250	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:44:33 2022	Mon Jun 27 03:44:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1525	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.719	23.590	655223	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:44:28 2022	Mon Jun 27 03:44:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1524	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.100	-273.150	28.645	23.592	655237	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:44:23 2022	Mon Jun 27 03:44:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1523	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.721	23.589	655595	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:44:18 2022	Mon Jun 27 03:44:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1522	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.628	23.588	648457	1	1	100000	tingxu20220626	13	101.68	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:44:12 2022	Mon Jun 27 03:44:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1521	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.721	23.584	653166	1	1	100000	tingxu20220626	13	101.70	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C491_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:44:07 2022	Mon Jun 27 03:44:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1520	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.100	-273.150	28.681	23.587	650345	1	1	100000	tingxu20220626	13	101.71	101.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:43:54 2022	Mon Jun 27 03:43:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3423	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.693	23.598	648538	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:43:49 2022	Mon Jun 27 03:43:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3422	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.099	-273.150	28.654	23.600	654927	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:43:40 2022	Mon Jun 27 03:43:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3421	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	0.000	23.600	656762	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:43:33 2022	Mon Jun 27 03:43:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3420	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.673	23.595	552578	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:43:29 2022	Mon Jun 27 03:43:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3419	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.646	23.597	655673	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:43:24 2022	Mon Jun 27 03:43:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3418	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.608	0.000	651492	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:43:19 2022	Mon Jun 27 03:43:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3417	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.634	23.592	653668	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:43:14 2022	Mon Jun 27 03:43:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3416	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.680	23.595	653976	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:43:09 2022	Mon Jun 27 03:43:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3415	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.632	23.595	574000	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B490_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:43:05 2022	Mon Jun 27 03:43:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3414	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.680	23.596	646325	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:42:51 2022	Mon Jun 27 03:42:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1138	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.660	23.598	664341	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:42:46 2022	Mon Jun 27 03:42:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1137	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.098	-273.150	28.708	23.594	652702	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:42:42 2022	Mon Jun 27 03:42:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1136	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.681	23.599	652368	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:42:34 2022	Mon Jun 27 03:42:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1135	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.675	23.603	651833	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:42:29 2022	Mon Jun 27 03:42:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1134	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.635	23.606	652718	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:42:25 2022	Mon Jun 27 03:42:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1133	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.713	23.606	665619	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:42:20 2022	Mon Jun 27 03:42:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1132	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.688	23.603	653575	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:42:15 2022	Mon Jun 27 03:42:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1131	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.097	-273.150	28.748	23.599	676138	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:42:10 2022	Mon Jun 27 03:42:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1130	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.676	23.597	648050	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A489_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:42:06 2022	Mon Jun 27 03:42:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1129	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.725	23.595	649635	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:41:47 2022	Mon Jun 27 03:41:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1519	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.096	-273.150	28.696	23.599	652585	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:41:42 2022	Mon Jun 27 03:41:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1518	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	-273.150	28.653	23.615	656328	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:41:37 2022	Mon Jun 27 03:41:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1517	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.097	-273.150	28.667	23.610	652821	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:41:30 2022	Mon Jun 27 03:41:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1516	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.615	23.611	653774	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:41:24 2022	Mon Jun 27 03:41:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1515	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.096	-273.150	28.701	23.615	651535	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:41:19 2022	Mon Jun 27 03:41:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1514	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.674	23.615	647699	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:41:15 2022	Mon Jun 27 03:41:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1513	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.096	-273.150	28.698	23.611	654729	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:41:10 2022	Mon Jun 27 03:41:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1512	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.692	0.000	654848	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:41:05 2022	Mon Jun 27 03:41:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1511	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.098	-273.150	28.631	0.000	653727	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C488_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:41:00 2022	Mon Jun 27 03:41:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1510	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.098	-273.150	28.614	23.601	659996	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:40:47 2022	Mon Jun 27 03:40:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3413	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.099	-273.150	28.737	23.595	652111	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:40:42 2022	Mon Jun 27 03:40:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3412	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.098	-273.150	28.731	23.581	657806	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:40:35 2022	Mon Jun 27 03:40:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3411	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.099	-273.150	28.691	23.578	656457	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:40:26 2022	Mon Jun 27 03:40:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3410	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.099	-273.150	28.693	23.596	652279	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:40:21 2022	Mon Jun 27 03:40:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3409	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.100	-273.150	28.708	23.604	656654	1	1	100000	tingxu20220626	13	102.44	102.44	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:40:16 2022	Mon Jun 27 03:40:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3408	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.101	-273.150	28.694	0.000	649650	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:40:12 2022	Mon Jun 27 03:40:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3407	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.100	-273.150	28.709	23.606	654655	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:40:07 2022	Mon Jun 27 03:40:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3406	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.627	0.000	648576	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:40:02 2022	Mon Jun 27 03:40:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3405	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.099	-273.150	28.677	23.606	656892	1	1	100000	tingxu20220626	13	102.08	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B487_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:39:55 2022	Mon Jun 27 03:39:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3404	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.699	23.609	654661	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:39:42 2022	Mon Jun 27 03:39:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1128	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.706	23.602	660131	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:39:34 2022	Mon Jun 27 03:39:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1127	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.703	23.600	654752	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:39:30 2022	Mon Jun 27 03:39:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1126	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.101	-273.150	28.673	23.598	657446	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:39:21 2022	Mon Jun 27 03:39:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1125	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.102	-273.150	28.678	23.597	657447	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:39:16 2022	Mon Jun 27 03:39:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1124	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.103	-273.150	28.675	23.593	667955	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:39:12 2022	Mon Jun 27 03:39:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1123	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.103	-273.150	28.602	23.586	655428	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:39:07 2022	Mon Jun 27 03:39:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1122	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.682	23.582	655283	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:39:02 2022	Mon Jun 27 03:39:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1121	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.710	23.604	656348	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:38:57 2022	Mon Jun 27 03:39:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1120	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.102	-273.150	28.641	23.620	655501	1	1	100000	tingxu20220626	13	102.26	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A486_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:38:50 2022	Mon Jun 27 03:38:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1119	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.686	23.615	656240	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:38:31 2022	Mon Jun 27 03:38:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1509	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.105	-273.150	28.683	0.000	655823	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:38:26 2022	Mon Jun 27 03:38:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1508	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.104	-273.150	28.678	23.610	655621	1	1	100000	tingxu20220626	13	102.38	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:38:17 2022	Mon Jun 27 03:38:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1507	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.104	-273.150	28.666	23.614	651957	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:38:12 2022	Mon Jun 27 03:38:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1506	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.106	-273.150	28.669	23.617	654718	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:38:08 2022	Mon Jun 27 03:38:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1505	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.104	-273.150	28.724	23.617	652186	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:38:03 2022	Mon Jun 27 03:38:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1504	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.104	-273.150	28.621	0.000	652020	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:37:58 2022	Mon Jun 27 03:38:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1503	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.104	0.000	28.673	23.621	652732	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:37:53 2022	Mon Jun 27 03:37:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1502	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.102	0.000	28.715	23.618	657799	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:37:45 2022	Mon Jun 27 03:37:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1501	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.102	-273.150	28.680	23.607	654758	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C485_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:37:41 2022	Mon Jun 27 03:37:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1500	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.102	-273.150	28.670	23.598	651838	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:37:27 2022	Mon Jun 27 03:37:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3403	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.103	-273.150	28.672	23.610	658365	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:37:22 2022	Mon Jun 27 03:37:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3402	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.103	-273.150	28.663	23.605	659010	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:37:13 2022	Mon Jun 27 03:37:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3401	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.104	-273.150	28.631	23.605	655864	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:37:08 2022	Mon Jun 27 03:37:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3400	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.105	0.000	28.712	23.607	654912	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:37:03 2022	Mon Jun 27 03:37:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3399	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.105	-273.150	28.665	0.000	684042	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:36:59 2022	Mon Jun 27 03:37:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3398	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.104	-273.150	28.725	23.615	655247	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:36:54 2022	Mon Jun 27 03:36:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3397	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.104	-273.150	28.719	0.000	651642	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:36:49 2022	Mon Jun 27 03:36:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3396	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.104	-273.150	28.732	23.597	656091	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:36:44 2022	Mon Jun 27 03:36:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3395	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.103	-273.150	28.711	23.599	654395	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B484_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:36:40 2022	Mon Jun 27 03:36:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3394	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.104	-273.150	28.730	0.000	661542	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:36:26 2022	Mon Jun 27 03:36:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1118	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.106	-273.150	28.701	23.617	660055	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:36:21 2022	Mon Jun 27 03:36:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1117	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.104	-273.150	28.710	23.620	659382	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:36:17 2022	Mon Jun 27 03:36:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1116	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.104	-273.150	28.683	23.625	651340	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:36:10 2022	Mon Jun 27 03:36:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1115	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.107	-273.150	28.641	23.614	652018	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:36:05 2022	Mon Jun 27 03:36:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1114	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.107	-273.150	28.696	23.601	663849	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:36:00 2022	Mon Jun 27 03:36:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1113	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.107	-273.150	28.712	23.602	655262	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:35:56 2022	Mon Jun 27 03:35:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1112	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.106	-273.150	28.694	23.600	655073	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:35:51 2022	Mon Jun 27 03:35:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1111	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.709	23.605	651008	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:35:46 2022	Mon Jun 27 03:35:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1110	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.105	-273.150	28.677	0.000	658051	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A483_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:35:42 2022	Mon Jun 27 03:35:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1109	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.107	-273.150	28.666	23.597	657826	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:35:22 2022	Mon Jun 27 03:35:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1499	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.108	-273.150	28.671	23.609	651452	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:35:17 2022	Mon Jun 27 03:35:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1498	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.107	-273.150	28.686	23.610	656354	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:35:13 2022	Mon Jun 27 03:35:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1497	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.107	-273.150	28.665	23.604	656980	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:35:04 2022	Mon Jun 27 03:35:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1496	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.108	-273.150	28.666	0.000	655263	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:35:00 2022	Mon Jun 27 03:35:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1495	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.677	23.609	657551	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:34:55 2022	Mon Jun 27 03:34:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1494	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.107	-273.150	28.650	23.600	648657	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:34:50 2022	Mon Jun 27 03:34:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1493	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.108	-273.150	28.677	23.602	639468	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:34:46 2022	Mon Jun 27 03:34:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1492	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.108	-273.150	28.683	23.606	657115	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:34:41 2022	Mon Jun 27 03:34:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1491	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.108	-273.150	28.683	23.597	654260	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C482_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:34:33 2022	Mon Jun 27 03:34:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1490	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.107	-273.150	28.710	23.586	673899	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:34:20 2022	Mon Jun 27 03:34:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3393	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.107	-273.150	28.663	23.599	653126	1	1	100000	tingxu20220626	13	101.89	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:34:15 2022	Mon Jun 27 03:34:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3392	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	28.627	23.601	655874	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:34:10 2022	Mon Jun 27 03:34:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3391	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	28.702	23.616	652057	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:34:06 2022	Mon Jun 27 03:34:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3390	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	0.000	23.613	641674	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:34:00 2022	Mon Jun 27 03:34:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3389	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.110	-273.150	28.587	23.610	647212	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:33:55 2022	Mon Jun 27 03:33:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3388	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.664	23.600	657217	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:33:50 2022	Mon Jun 27 03:33:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3387	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.677	23.609	646779	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:33:46 2022	Mon Jun 27 03:33:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3386	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.648	23.604	647798	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:33:41 2022	Mon Jun 27 03:33:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3385	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.111	-273.150	28.661	23.605	646986	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B481_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:33:37 2022	Mon Jun 27 03:33:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3384	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.718	23.602	652270	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:33:23 2022	Mon Jun 27 03:33:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1108	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.110	-273.150	28.667	23.582	656086	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:33:18 2022	Mon Jun 27 03:33:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1107	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.682	23.575	647769	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:33:13 2022	Mon Jun 27 03:33:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1106	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.670	23.580	681319	1	1	100000	tingxu20220626	13	102.10	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:33:08 2022	Mon Jun 27 03:33:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1105	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	0.000	23.586	664329	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:33:04 2022	Mon Jun 27 03:33:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1104	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.112	-273.150	28.618	23.588	657340	1	1	100000	tingxu20220626	13	102.14	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:32:55 2022	Mon Jun 27 03:32:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1103	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.625	23.587	652836	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:32:51 2022	Mon Jun 27 03:32:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1102	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.603	23.602	649008	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:32:46 2022	Mon Jun 27 03:32:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1101	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.111	-273.150	28.649	23.596	652673	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:32:41 2022	Mon Jun 27 03:32:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1100	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.656	23.598	655391	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A480_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:32:37 2022	Mon Jun 27 03:32:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1099	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.705	23.613	657746	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:32:17 2022	Mon Jun 27 03:32:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1489	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.112	-273.150	28.715	23.600	647970	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:32:13 2022	Mon Jun 27 03:32:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1488	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.617	23.592	653856	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:32:08 2022	Mon Jun 27 03:32:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1487	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.622	23.596	654001	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:32:03 2022	Mon Jun 27 03:32:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1486	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.112	-273.150	28.649	23.594	553771	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:31:58 2022	Mon Jun 27 03:32:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1485	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.635	23.600	638409	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:31:53 2022	Mon Jun 27 03:31:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1484	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.111	-273.150	28.596	23.604	650763	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:31:49 2022	Mon Jun 27 03:31:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1483	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.652	23.585	656448	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:31:44 2022	Mon Jun 27 03:31:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1482	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.114	-273.150	28.667	0.000	653781	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:31:38 2022	Mon Jun 27 03:31:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1481	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.114	-273.150	28.602	23.599	638459	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C479_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:31:34 2022	Mon Jun 27 03:31:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1480	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.681	23.609	653698	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:31:19 2022	Mon Jun 27 03:31:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3383	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.111	-273.150	28.678	23.594	650868	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:31:14 2022	Mon Jun 27 03:31:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3382	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.716	23.584	654922	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:31:10 2022	Mon Jun 27 03:31:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3381	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.663	23.575	652283	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:31:05 2022	Mon Jun 27 03:31:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3380	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.683	23.592	655627	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:31:00 2022	Mon Jun 27 03:31:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3379	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.684	23.589	650815	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:30:56 2022	Mon Jun 27 03:30:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3378	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.672	23.588	648016	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:30:51 2022	Mon Jun 27 03:30:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3377	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.116	-273.150	28.677	23.606	651219	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:30:46 2022	Mon Jun 27 03:30:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3376	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.116	-273.150	28.666	23.596	655169	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:30:41 2022	Mon Jun 27 03:30:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3375	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.115	-273.150	28.674	23.600	657345	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B478_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:30:37 2022	Mon Jun 27 03:30:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3374	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.115	-273.150	28.698	23.604	654679	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:30:23 2022	Mon Jun 27 03:30:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1098	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.681	23.600	657084	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:30:15 2022	Mon Jun 27 03:30:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1097	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.704	0.000	651436	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:30:10 2022	Mon Jun 27 03:30:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1096	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.679	23.583	817317	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:30:05 2022	Mon Jun 27 03:30:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1095	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.114	-273.150	28.735	23.596	656067	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:30:01 2022	Mon Jun 27 03:30:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1094	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.112	-273.150	28.681	23.613	656187	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:29:56 2022	Mon Jun 27 03:29:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1093	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.113	-273.150	28.654	23.613	654881	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:29:51 2022	Mon Jun 27 03:29:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1092	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.640	23.607	654705	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:29:46 2022	Mon Jun 27 03:29:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1091	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.647	23.601	654539	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:29:42 2022	Mon Jun 27 03:29:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1090	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.670	23.598	654198	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A477_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:29:37 2022	Mon Jun 27 03:29:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1089	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.603	23.593	654504	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:29:18 2022	Mon Jun 27 03:29:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1479	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.115	-273.150	28.759	0.000	651679	1	1	100000	tingxu20220626	13	102.02	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:29:12 2022	Mon Jun 27 03:29:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1478	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.672	23.592	652793	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:29:08 2022	Mon Jun 27 03:29:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1477	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.115	-273.150	28.676	23.601	650849	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:29:02 2022	Mon Jun 27 03:29:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1476	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.114	-273.150	28.677	23.610	676294	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:28:58 2022	Mon Jun 27 03:29:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1475	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.114	-273.150	28.684	23.613	651359	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:28:53 2022	Mon Jun 27 03:28:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1474	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.115	-273.150	28.653	23.607	655132	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:28:48 2022	Mon Jun 27 03:28:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1473	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.660	23.599	571787	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:28:43 2022	Mon Jun 27 03:28:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1472	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	0.000	23.593	656331	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:28:38 2022	Mon Jun 27 03:28:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1471	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.665	0.000	651550	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C476_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:28:33 2022	Mon Jun 27 03:28:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1470	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.114	-273.150	28.656	23.603	652279	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:28:19 2022	Mon Jun 27 03:28:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3373	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.686	23.607	655476	1	1	100000	tingxu20220626	13	101.77	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:28:14 2022	Mon Jun 27 03:28:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3372	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.687	23.619	651304	1	1	100000	tingxu20220626	13	101.78	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:28:10 2022	Mon Jun 27 03:28:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3371	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.612	23.620	683197	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:28:05 2022	Mon Jun 27 03:28:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3370	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.670	23.617	654742	1	1	100000	tingxu20220626	13	101.82	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:28:00 2022	Mon Jun 27 03:28:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3369	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.625	23.611	655215	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:27:56 2022	Mon Jun 27 03:27:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3368	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.652	23.609	656461	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:27:51 2022	Mon Jun 27 03:27:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3367	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.109	-273.150	28.681	23.601	650914	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:27:46 2022	Mon Jun 27 03:27:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3366	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	28.635	23.594	651831	1	1	100000	tingxu20220626	13	101.87	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:27:41 2022	Mon Jun 27 03:27:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3365	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	28.690	23.595	650376	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B475_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:27:37 2022	Mon Jun 27 03:27:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3364	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.677	0.000	653776	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:27:23 2022	Mon Jun 27 03:27:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1088	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.112	-273.150	28.698	23.588	655806	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:27:18 2022	Mon Jun 27 03:27:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1087	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.112	0.000	28.606	23.588	592321	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:27:13 2022	Mon Jun 27 03:27:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1086	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.668	23.599	652759	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:27:09 2022	Mon Jun 27 03:27:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1085	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.674	23.589	648958	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:27:03 2022	Mon Jun 27 03:27:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1084	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.681	23.596	657487	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:26:58 2022	Mon Jun 27 03:27:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1083	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.669	23.582	653984	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:26:53 2022	Mon Jun 27 03:26:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1082	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.703	23.595	651957	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:26:48 2022	Mon Jun 27 03:26:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1081	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.682	23.603	674813	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:26:43 2022	Mon Jun 27 03:26:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1080	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.697	23.603	656821	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A474_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:26:29 2022	Mon Jun 27 03:26:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1079	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.111	-273.150	28.648	23.602	654062	1	1	100000	tingxu20220626	13	102.13	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:26:10 2022	Mon Jun 27 03:26:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1469	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.674	23.572	651873	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:26:05 2022	Mon Jun 27 03:26:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1468	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.625	23.571	650237	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:26:00 2022	Mon Jun 27 03:26:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1467	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.693	23.584	655283	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:25:56 2022	Mon Jun 27 03:25:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1466	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.677	23.582	652425	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:25:51 2022	Mon Jun 27 03:25:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1465	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.635	23.583	652946	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:25:46 2022	Mon Jun 27 03:25:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1464	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.715	23.589	651820	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:25:42 2022	Mon Jun 27 03:25:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1463	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.655	23.581	650466	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:25:37 2022	Mon Jun 27 03:25:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1462	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.670	23.582	649195	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:25:32 2022	Mon Jun 27 03:25:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1461	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.113	-273.150	28.703	23.590	649903	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C473_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:25:26 2022	Mon Jun 27 03:25:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1460	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.111	0.000	28.654	23.578	653321	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:25:12 2022	Mon Jun 27 03:25:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3363	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.671	23.600	649824	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:25:07 2022	Mon Jun 27 03:25:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3362	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.610	23.599	658293	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:25:02 2022	Mon Jun 27 03:25:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3361	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	0.000	28.713	23.591	652537	1	1	100000	tingxu20220626	13	101.97	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:24:57 2022	Mon Jun 27 03:24:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3360	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.668	23.587	649838	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:24:52 2022	Mon Jun 27 03:24:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3359	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.649	23.600	648495	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:24:48 2022	Mon Jun 27 03:24:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3358	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.626	23.612	652244	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:24:43 2022	Mon Jun 27 03:24:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3357	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.664	23.612	652284	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:24:38 2022	Mon Jun 27 03:24:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3356	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.646	23.612	649157	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:24:33 2022	Mon Jun 27 03:24:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3355	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.677	23.615	562542	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B472_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:24:27 2022	Mon Jun 27 03:24:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3354	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.696	23.614	650212	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:24:14 2022	Mon Jun 27 03:24:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1078	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.112	-273.150	28.665	23.608	635502	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:24:09 2022	Mon Jun 27 03:24:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1077	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.111	-273.150	28.637	23.609	654223	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:24:04 2022	Mon Jun 27 03:24:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1076	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.625	23.616	653452	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:23:59 2022	Mon Jun 27 03:24:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1075	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.108	-273.150	28.678	23.618	653986	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:23:50 2022	Mon Jun 27 03:23:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1074	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.108	0.000	28.662	23.619	665530	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:23:46 2022	Mon Jun 27 03:23:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1073	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	28.699	23.616	653830	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:23:41 2022	Mon Jun 27 03:23:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1072	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.109	-273.150	28.703	0.000	648790	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:23:36 2022	Mon Jun 27 03:23:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1071	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.110	-273.150	28.679	23.616	653834	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:23:27 2022	Mon Jun 27 03:23:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1070	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.112	-273.150	28.650	23.605	650464	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A471_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:23:22 2022	Mon Jun 27 03:23:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1069	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.738	23.619	652658	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:23:03 2022	Mon Jun 27 03:23:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1459	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.115	-273.150	28.687	23.615	535104	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:22:59 2022	Mon Jun 27 03:23:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1458	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.116	-273.150	28.647	23.611	635934	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:22:54 2022	Mon Jun 27 03:22:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1457	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.674	23.608	651379	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:22:47 2022	Mon Jun 27 03:22:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1456	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.115	-273.150	28.688	23.612	648249	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:22:42 2022	Mon Jun 27 03:22:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1455	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.116	-273.150	28.692	23.603	648214	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:22:38 2022	Mon Jun 27 03:22:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1454	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.115	-273.150	28.730	23.603	655038	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:22:33 2022	Mon Jun 27 03:22:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1453	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.115	-273.150	28.610	23.607	653651	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:22:27 2022	Mon Jun 27 03:22:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1452	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.115	-273.150	28.672	0.000	652266	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:22:22 2022	Mon Jun 27 03:22:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1451	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.701	23.594	649179	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C470_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:22:17 2022	Mon Jun 27 03:22:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1450	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.115	-273.150	28.688	23.587	651632	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:22:04 2022	Mon Jun 27 03:22:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3353	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.610	23.588	652540	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:21:59 2022	Mon Jun 27 03:22:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3352	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.668	23.587	653083	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:21:54 2022	Mon Jun 27 03:21:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3351	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.703	23.581	653043	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:21:49 2022	Mon Jun 27 03:21:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3350	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.114	-273.150	28.705	23.570	665307	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:21:41 2022	Mon Jun 27 03:21:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3349	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.115	-273.150	28.660	23.584	651500	1	1	100000	tingxu20220626	13	102.18	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:21:37 2022	Mon Jun 27 03:21:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3348	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.117	-273.150	28.716	23.596	663984	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:21:28 2022	Mon Jun 27 03:21:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3347	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.118	-273.150	28.657	23.609	653010	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:21:23 2022	Mon Jun 27 03:21:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3346	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.118	-273.150	28.672	23.608	644816	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:21:18 2022	Mon Jun 27 03:21:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3345	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.664	23.606	637167	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B469_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:21:13 2022	Mon Jun 27 03:21:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3344	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.606	23.598	650220	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:21:00 2022	Mon Jun 27 03:21:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1068	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.607	23.602	651692	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:20:55 2022	Mon Jun 27 03:20:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1067	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.610	23.600	649248	1	1	100000	tingxu20220626	13	102.33	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:20:50 2022	Mon Jun 27 03:20:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1066	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.123	-273.150	28.664	23.596	655198	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:20:45 2022	Mon Jun 27 03:20:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1065	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.694	23.599	666263	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:20:41 2022	Mon Jun 27 03:20:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1064	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.683	23.589	656721	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:20:36 2022	Mon Jun 27 03:20:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1063	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.119	-273.150	28.734	23.577	653844	1	1	100000	tingxu20220626	13	102.39	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:20:31 2022	Mon Jun 27 03:20:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1062	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.121	-273.150	28.723	23.578	658661	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:20:25 2022	Mon Jun 27 03:20:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1061	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.750	23.579	667981	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:20:20 2022	Mon Jun 27 03:20:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1060	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.640	23.602	677515	1	1	100000	tingxu20220626	13	102.45	102.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A468_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:20:15 2022	Mon Jun 27 03:20:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1059	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.655	23.621	657003	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:19:56 2022	Mon Jun 27 03:19:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1449	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.119	-273.150	28.638	23.615	651924	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:19:52 2022	Mon Jun 27 03:19:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1448	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.622	23.609	649524	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:19:47 2022	Mon Jun 27 03:19:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1447	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.622	23.600	653785	1	1	100000	tingxu20220626	13	102.11	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:19:42 2022	Mon Jun 27 03:19:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1446	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.677	23.592	652775	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:19:37 2022	Mon Jun 27 03:19:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1445	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.658	23.585	650702	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:19:33 2022	Mon Jun 27 03:19:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1444	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.674	23.606	652089	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:19:28 2022	Mon Jun 27 03:19:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1443	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.680	23.597	645120	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:19:23 2022	Mon Jun 27 03:19:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1442	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.622	23.607	648490	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:19:18 2022	Mon Jun 27 03:19:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1441	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.706	23.605	532001	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C467_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:19:14 2022	Mon Jun 27 03:19:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1440	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.705	23.605	651689	1	1	100000	tingxu20220626	13	102.22	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:19:00 2022	Mon Jun 27 03:19:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3343	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.700	23.620	646109	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:18:55 2022	Mon Jun 27 03:18:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3342	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.603	23.626	651900	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:18:51 2022	Mon Jun 27 03:18:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3341	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.705	23.616	654709	1	1	100000	tingxu20220626	13	102.29	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:18:46 2022	Mon Jun 27 03:18:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3340	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.649	23.610	656188	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:18:41 2022	Mon Jun 27 03:18:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3339	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.118	-273.150	28.667	0.000	652327	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:18:37 2022	Mon Jun 27 03:18:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3338	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.679	23.599	652149	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:18:30 2022	Mon Jun 27 03:18:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3337	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.117	-273.150	28.664	23.596	654409	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:18:25 2022	Mon Jun 27 03:18:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3336	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.716	23.598	652484	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:18:20 2022	Mon Jun 27 03:18:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3335	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.120	-273.150	28.685	23.596	652060	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B466_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:18:15 2022	Mon Jun 27 03:18:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3334	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.121	-273.150	28.669	23.601	642359	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:17:59 2022	Mon Jun 27 03:18:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1058	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.121	0.000	28.675	23.616	663971	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:17:54 2022	Mon Jun 27 03:17:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1057	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.669	23.618	663433	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:17:49 2022	Mon Jun 27 03:17:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1056	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.121	-273.150	28.679	23.618	648176	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:17:45 2022	Mon Jun 27 03:17:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1055	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.727	23.617	669081	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:17:40 2022	Mon Jun 27 03:17:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1054	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.121	-273.150	0.000	23.614	659823	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:17:35 2022	Mon Jun 27 03:17:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1053	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.121	-273.150	28.643	23.608	654132	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:17:31 2022	Mon Jun 27 03:17:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1052	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.121	0.000	28.666	23.618	653993	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:17:23 2022	Mon Jun 27 03:17:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1051	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.618	23.611	663465	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:17:19 2022	Mon Jun 27 03:17:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1050	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.715	23.588	659970	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A465_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:17:14 2022	Mon Jun 27 03:17:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1049	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.721	23.581	682288	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:16:53 2022	Mon Jun 27 03:16:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1439	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.641	23.575	651923	1	1	100000	tingxu20220626	13	102.24	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:16:48 2022	Mon Jun 27 03:16:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1438	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.675	23.587	563999	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:16:44 2022	Mon Jun 27 03:16:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1437	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.120	-273.150	28.665	23.601	655072	1	1	100000	tingxu20220626	13	102.27	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:16:39 2022	Mon Jun 27 03:16:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1436	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.119	-273.150	28.650	23.612	652424	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:16:34 2022	Mon Jun 27 03:16:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1435	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.691	23.607	655429	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:16:29 2022	Mon Jun 27 03:16:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1434	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.680	23.599	654960	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:16:23 2022	Mon Jun 27 03:16:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1433	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.700	23.608	650278	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:16:18 2022	Mon Jun 27 03:16:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1432	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.122	-273.150	28.657	23.609	645771	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:16:13 2022	Mon Jun 27 03:16:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1431	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.703	23.606	635250	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C464_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:16:08 2022	Mon Jun 27 03:16:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1430	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.716	23.607	650954	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:15:54 2022	Mon Jun 27 03:15:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3333	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.683	23.616	540477	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:15:48 2022	Mon Jun 27 03:15:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3332	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.671	0.000	592171	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:15:44 2022	Mon Jun 27 03:15:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3331	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.665	23.621	648316	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:15:39 2022	Mon Jun 27 03:15:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3330	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.122	-273.150	28.621	23.619	645943	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:15:34 2022	Mon Jun 27 03:15:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3329	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.686	23.616	654649	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:15:29 2022	Mon Jun 27 03:15:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3328	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.673	23.627	651589	1	1	100000	tingxu20220626	13	102.08	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:15:25 2022	Mon Jun 27 03:15:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3327	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.694	23.626	686979	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:15:20 2022	Mon Jun 27 03:15:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3326	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.684	23.627	652759	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:15:15 2022	Mon Jun 27 03:15:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3325	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.706	0.000	651474	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B463_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:15:10 2022	Mon Jun 27 03:15:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3324	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.688	23.624	651070	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:14:57 2022	Mon Jun 27 03:14:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1048	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.665	23.616	670382	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:14:52 2022	Mon Jun 27 03:14:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1047	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.123	-273.150	28.674	23.613	680190	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:14:44 2022	Mon Jun 27 03:14:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1046	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.683	23.611	655890	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:14:39 2022	Mon Jun 27 03:14:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1045	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.679	23.599	669819	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:14:35 2022	Mon Jun 27 03:14:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1044	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.127	-273.150	28.675	23.594	665265	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:14:30 2022	Mon Jun 27 03:14:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1043	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.709	23.600	669922	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:14:25 2022	Mon Jun 27 03:14:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1042	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.688	23.601	688110	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:14:21 2022	Mon Jun 27 03:14:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1041	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.696	23.615	642042	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:14:16 2022	Mon Jun 27 03:14:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1040	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.695	23.615	658232	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A462_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:14:11 2022	Mon Jun 27 03:14:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1039	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.740	23.621	666699	1	1	100000	tingxu20220626	13	101.90	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:13:52 2022	Mon Jun 27 03:13:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1429	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.680	23.605	651904	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:13:42 2022	Mon Jun 27 03:13:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1428	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.122	-273.150	28.672	23.598	651916	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:13:37 2022	Mon Jun 27 03:13:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1427	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.679	23.606	649857	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:13:32 2022	Mon Jun 27 03:13:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1426	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.712	23.604	653541	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:13:27 2022	Mon Jun 27 03:13:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1425	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.125	-273.150	28.690	23.606	654318	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:13:20 2022	Mon Jun 27 03:13:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1424	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.125	-273.150	28.711	0.000	645418	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:13:16 2022	Mon Jun 27 03:13:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1423	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.125	-273.150	28.698	23.608	652867	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:13:08 2022	Mon Jun 27 03:13:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1422	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.718	23.618	653064	1	1	100000	tingxu20220626	13	102.11	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:13:03 2022	Mon Jun 27 03:13:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1421	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.724	23.622	573090	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C461_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:12:58 2022	Mon Jun 27 03:13:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1420	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	0.000	28.692	23.618	655804	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:12:45 2022	Mon Jun 27 03:12:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3323	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.617	23.611	656490	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:12:38 2022	Mon Jun 27 03:12:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3322	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.706	23.606	652165	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:12:34 2022	Mon Jun 27 03:12:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3321	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.125	-273.150	28.722	23.625	652245	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:12:29 2022	Mon Jun 27 03:12:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3320	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.126	-273.150	28.689	0.000	646586	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:12:24 2022	Mon Jun 27 03:12:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3319	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.124	-273.150	28.699	23.604	602592	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:12:20 2022	Mon Jun 27 03:12:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3318	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.125	0.000	28.667	23.618	651213	1	1	100000	tingxu20220626	13	101.84	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:12:15 2022	Mon Jun 27 03:12:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3317	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.124	-273.150	28.675	23.616	644625	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:12:10 2022	Mon Jun 27 03:12:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3316	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.125	-273.150	28.749	23.611	649723	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:12:04 2022	Mon Jun 27 03:12:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3315	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.124	-273.150	28.689	23.609	658259	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B460_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:12:00 2022	Mon Jun 27 03:12:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3314	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.126	-273.150	28.679	23.606	651217	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:11:46 2022	Mon Jun 27 03:11:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1038	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.679	23.623	679070	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:11:41 2022	Mon Jun 27 03:11:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1037	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.127	-273.150	28.695	0.000	654297	1	1	100000	tingxu20220626	13	101.96	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:11:34 2022	Mon Jun 27 03:11:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1036	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.128	-273.150	28.717	23.607	681709	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:11:29 2022	Mon Jun 27 03:11:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1035	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.127	-273.150	28.699	23.609	665030	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:11:24 2022	Mon Jun 27 03:11:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1034	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.126	-273.150	28.708	23.613	603614	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:11:19 2022	Mon Jun 27 03:11:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1033	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.638	23.599	645707	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:11:15 2022	Mon Jun 27 03:11:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1032	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.687	23.600	665813	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:11:10 2022	Mon Jun 27 03:11:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1031	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.606	23.606	666200	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:11:01 2022	Mon Jun 27 03:11:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1030	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.695	23.617	650227	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A459_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:10:56 2022	Mon Jun 27 03:10:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1029	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.126	-273.150	28.646	23.623	671510	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:10:37 2022	Mon Jun 27 03:10:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1419	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.126	-273.150	28.643	23.628	653780	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:10:32 2022	Mon Jun 27 03:10:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1418	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.126	-273.150	28.728	0.000	646283	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:10:27 2022	Mon Jun 27 03:10:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1417	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.652	23.618	650482	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:10:23 2022	Mon Jun 27 03:10:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1416	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.680	23.611	649908	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:10:18 2022	Mon Jun 27 03:10:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1415	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.736	23.627	646340	1	1	100000	tingxu20220626	13	101.79	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:10:13 2022	Mon Jun 27 03:10:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1414	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.665	23.627	654290	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:10:08 2022	Mon Jun 27 03:10:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1413	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.125	-273.150	28.620	23.628	650361	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:10:04 2022	Mon Jun 27 03:10:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1412	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.124	-273.150	28.677	23.620	650178	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:09:59 2022	Mon Jun 27 03:10:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1411	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.626	23.613	652144	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C458_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:09:53 2022	Mon Jun 27 03:09:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1410	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.125	-273.150	28.659	23.610	859896	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:09:40 2022	Mon Jun 27 03:09:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3313	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.127	-273.150	28.679	23.616	655458	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:09:35 2022	Mon Jun 27 03:09:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3312	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	0.000	28.689	23.621	644597	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:09:30 2022	Mon Jun 27 03:09:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3311	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.707	23.628	652347	1	1	100000	tingxu20220626	13	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:09:20 2022	Mon Jun 27 03:09:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3310	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.684	23.627	649546	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:09:15 2022	Mon Jun 27 03:09:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3309	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.633	23.613	649970	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:09:10 2022	Mon Jun 27 03:09:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3308	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	0.000	28.649	23.608	654571	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:09:05 2022	Mon Jun 27 03:09:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3307	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.123	-273.150	28.638	0.000	652604	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:09:01 2022	Mon Jun 27 03:09:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3306	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.124	-273.150	28.670	23.600	649753	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:08:56 2022	Mon Jun 27 03:08:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3305	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.720	23.599	656469	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B457_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:08:51 2022	Mon Jun 27 03:08:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3304	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.121	-273.150	28.694	23.618	651772	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:08:37 2022	Mon Jun 27 03:08:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1028	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.121	-273.150	28.651	23.612	654708	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:08:33 2022	Mon Jun 27 03:08:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1027	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.121	0.000	28.684	23.603	675827	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:08:28 2022	Mon Jun 27 03:08:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1026	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.122	-273.150	28.670	23.600	668226	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:08:19 2022	Mon Jun 27 03:08:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1025	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.123	-273.150	28.603	0.000	658984	1	1	100000	tingxu20220626	13	101.75	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:08:14 2022	Mon Jun 27 03:08:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1024	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.668	23.608	663869	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:08:09 2022	Mon Jun 27 03:08:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1023	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.722	23.610	568124	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:08:05 2022	Mon Jun 27 03:08:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1022	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.125	-273.150	28.624	23.614	657069	1	1	100000	tingxu20220626	13	101.79	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:08:00 2022	Mon Jun 27 03:08:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1021	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.665	23.606	677032	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:07:55 2022	Mon Jun 27 03:07:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1020	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.127	-273.150	28.710	23.596	647496	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A456_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:07:50 2022	Mon Jun 27 03:07:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1019	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.126	-273.150	28.607	0.000	654631	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:07:31 2022	Mon Jun 27 03:07:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1409	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.127	-273.150	28.659	23.618	653828	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:07:26 2022	Mon Jun 27 03:07:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1408	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.127	-273.150	0.000	23.615	652366	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:07:15 2022	Mon Jun 27 03:07:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1407	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.615	23.616	652340	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:07:10 2022	Mon Jun 27 03:07:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1406	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.128	-273.150	28.619	23.615	653511	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:07:05 2022	Mon Jun 27 03:07:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1405	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.128	-273.150	28.730	23.604	649637	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:07:01 2022	Mon Jun 27 03:07:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1404	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.130	-273.150	0.000	23.598	646345	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:06:56 2022	Mon Jun 27 03:06:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1403	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.131	-273.150	28.726	23.594	650452	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:06:51 2022	Mon Jun 27 03:06:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1402	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.131	-273.150	28.657	23.599	654497	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:06:43 2022	Mon Jun 27 03:06:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1401	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.132	-273.150	28.673	23.626	647816	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C455_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:06:38 2022	Mon Jun 27 03:06:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1400	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.654	23.636	650481	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:06:24 2022	Mon Jun 27 03:06:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3303	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.129	-273.150	0.000	23.624	552711	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:06:19 2022	Mon Jun 27 03:06:21 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3302	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.131	-273.150	28.673	23.625	655950	1	1	100000	tingxu20220626	13	101.70	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:06:14 2022	Mon Jun 27 03:06:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3301	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.618	23.633	649110	1	1	100000	tingxu20220626	13	101.71	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:06:09 2022	Mon Jun 27 03:06:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3300	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.131	-273.150	28.715	0.000	620248	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:06:04 2022	Mon Jun 27 03:06:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3299	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.131	-273.150	28.704	23.622	653444	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:06:00 2022	Mon Jun 27 03:06:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3298	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.131	-273.150	28.669	23.628	650431	1	1	100000	tingxu20220626	13	101.76	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:05:55 2022	Mon Jun 27 03:05:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3297	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.130	-273.150	28.681	23.617	650090	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:05:50 2022	Mon Jun 27 03:05:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3296	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.130	-273.150	28.704	23.610	651428	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:05:45 2022	Mon Jun 27 03:05:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3295	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.131	-273.150	0.000	23.606	657798	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B454_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:05:41 2022	Mon Jun 27 03:05:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3294	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.626	23.605	651374	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:05:27 2022	Mon Jun 27 03:05:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1018	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.695	23.610	668312	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:05:18 2022	Mon Jun 27 03:05:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1017	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	0.000	23.616	545966	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:05:14 2022	Mon Jun 27 03:05:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1016	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.644	23.620	647663	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:05:09 2022	Mon Jun 27 03:05:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1015	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.702	23.614	665109	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:05:04 2022	Mon Jun 27 03:05:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1014	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.642	23.608	658900	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:04:59 2022	Mon Jun 27 03:05:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1013	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.703	23.608	654696	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:04:55 2022	Mon Jun 27 03:04:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1012	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.606	23.629	652446	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:04:50 2022	Mon Jun 27 03:04:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1011	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.680	23.624	677745	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:04:45 2022	Mon Jun 27 03:04:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1010	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.681	23.623	665235	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A453_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:04:40 2022	Mon Jun 27 03:04:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1009	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.131	-273.150	28.724	23.623	665769	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:04:19 2022	Mon Jun 27 03:04:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1399	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.132	0.000	28.682	23.619	655437	1	1	100000	tingxu20220626	13	101.66	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:04:15 2022	Mon Jun 27 03:04:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1398	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.744	23.633	653652	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:04:10 2022	Mon Jun 27 03:04:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1397	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.692	23.626	649082	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:04:03 2022	Mon Jun 27 03:04:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1396	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.695	0.000	648570	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:03:58 2022	Mon Jun 27 03:04:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1395	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.693	23.630	647061	1	1	100000	tingxu20220626	13	101.72	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:03:53 2022	Mon Jun 27 03:03:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1394	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.678	23.636	646795	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:03:48 2022	Mon Jun 27 03:03:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1393	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.703	23.632	580196	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:03:44 2022	Mon Jun 27 03:03:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1392	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.736	23.622	646869	1	1	100000	tingxu20220626	13	101.77	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:03:39 2022	Mon Jun 27 03:03:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1391	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.693	23.609	654365	1	1	100000	tingxu20220626	13	101.78	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C452_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:03:34 2022	Mon Jun 27 03:03:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1390	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	0.000	28.699	23.625	652188	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:03:20 2022	Mon Jun 27 03:03:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3293	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.702	23.626	651649	1	1	100000	tingxu20220626	13	101.84	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:03:15 2022	Mon Jun 27 03:03:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3292	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.702	23.627	647810	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:03:11 2022	Mon Jun 27 03:03:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3291	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.692	0.000	653024	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:03:06 2022	Mon Jun 27 03:03:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3290	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	0.000	23.604	644463	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 03:02:59 2022	Mon Jun 27 03:03:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3289	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.133	-273.150	28.725	23.603	644395	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 03:02:54 2022	Mon Jun 27 03:02:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3288	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.134	-273.150	28.721	23.599	540220	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 03:02:50 2022	Mon Jun 27 03:02:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3287	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	0.000	23.625	651624	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 03:02:45 2022	Mon Jun 27 03:02:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3286	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	0.000	23.618	651127	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 03:02:41 2022	Mon Jun 27 03:02:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3285	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.135	0.000	28.682	23.614	651719	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B451_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 03:02:36 2022	Mon Jun 27 03:02:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3284	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.703	23.610	654642	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 03:02:18 2022	Mon Jun 27 03:02:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1008	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.138	-273.150	28.656	0.000	596487	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 03:02:13 2022	Mon Jun 27 03:02:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1007	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.693	23.612	658115	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 03:02:08 2022	Mon Jun 27 03:02:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1006	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.672	23.626	672619	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 03:02:04 2022	Mon Jun 27 03:02:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1005	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.677	23.630	655624	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 03:01:54 2022	Mon Jun 27 03:01:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1004	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.716	23.618	560915	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 03:01:50 2022	Mon Jun 27 03:01:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1003	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.634	23.619	658761	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 03:01:45 2022	Mon Jun 27 03:01:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1002	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.136	-273.150	28.691	23.613	670187	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 03:01:40 2022	Mon Jun 27 03:01:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1001	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.658	0.000	665852	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 03:01:35 2022	Mon Jun 27 03:01:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1000	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.738	23.611	653569	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A450_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 03:01:31 2022	Mon Jun 27 03:01:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	999	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.663	23.606	666843	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 03:01:11 2022	Mon Jun 27 03:01:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1389	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.678	0.000	653362	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 03:01:07 2022	Mon Jun 27 03:01:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1388	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.680	0.000	655335	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 03:01:02 2022	Mon Jun 27 03:01:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1387	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.742	23.621	655207	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 03:00:57 2022	Mon Jun 27 03:00:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1386	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.687	23.616	637490	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 03:00:52 2022	Mon Jun 27 03:00:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1385	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.138	-273.150	28.697	23.616	652630	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 03:00:48 2022	Mon Jun 27 03:00:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1384	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.695	23.612	656586	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 03:00:43 2022	Mon Jun 27 03:00:45 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1383	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.648	23.615	652071	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 03:00:38 2022	Mon Jun 27 03:00:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1382	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	0.000	23.610	652624	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 03:00:33 2022	Mon Jun 27 03:00:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1381	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	0.000	23.615	542985	1	1	100000	tingxu20220626	13	102.39	102.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C449_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 03:00:29 2022	Mon Jun 27 03:00:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1380	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.691	23.607	653884	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 03:00:15 2022	Mon Jun 27 03:00:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3283	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.693	23.611	651278	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 03:00:10 2022	Mon Jun 27 03:00:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3282	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.708	0.000	651133	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 03:00:06 2022	Mon Jun 27 03:00:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3281	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.134	-273.150	28.680	0.000	654297	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 03:00:01 2022	Mon Jun 27 03:00:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3280	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.134	-273.150	28.661	23.604	651020	1	1	100000	tingxu20220626	13	102.06	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:59:56 2022	Mon Jun 27 02:59:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3279	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.134	-273.150	28.726	0.000	652383	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:59:46 2022	Mon Jun 27 02:59:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3278	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.669	23.605	681820	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:59:42 2022	Mon Jun 27 02:59:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3277	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.688	0.000	638199	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:59:37 2022	Mon Jun 27 02:59:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3276	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.724	23.618	650232	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:59:32 2022	Mon Jun 27 02:59:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3275	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.130	-273.150	28.699	23.610	653582	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B448_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:59:28 2022	Mon Jun 27 02:59:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3274	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.130	-273.150	28.652	23.620	652963	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:59:13 2022	Mon Jun 27 02:59:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	998	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.130	-273.150	28.676	23.633	655804	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:59:08 2022	Mon Jun 27 02:59:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	997	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.131	-273.150	28.669	0.000	663709	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:59:03 2022	Mon Jun 27 02:59:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	996	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.132	-273.150	28.710	23.620	658120	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:58:58 2022	Mon Jun 27 02:59:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	995	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.133	-273.150	28.651	23.609	652502	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:58:53 2022	Mon Jun 27 02:58:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	994	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.132	-273.150	28.675	23.606	651011	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:58:48 2022	Mon Jun 27 02:58:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	993	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.132	-273.150	28.694	23.600	581796	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:58:41 2022	Mon Jun 27 02:58:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	992	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.714	23.609	664918	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:58:37 2022	Mon Jun 27 02:58:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	991	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.690	23.622	652112	1	1	100000	tingxu20220626	13	102.33	102.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:58:32 2022	Mon Jun 27 02:58:34 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	990	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.636	23.622	672292	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A447_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:58:27 2022	Mon Jun 27 02:58:29 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	989	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.133	-273.150	28.667	23.619	668817	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:58:08 2022	Mon Jun 27 02:58:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1379	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.135	-273.150	0.000	23.614	649360	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:58:03 2022	Mon Jun 27 02:58:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1378	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.134	-273.150	28.653	23.609	651235	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:57:58 2022	Mon Jun 27 02:58:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1377	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.135	-273.150	28.700	23.614	658713	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:57:53 2022	Mon Jun 27 02:57:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1376	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.711	23.612	650841	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:57:48 2022	Mon Jun 27 02:57:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1375	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.137	-273.150	28.603	23.620	597996	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:57:43 2022	Mon Jun 27 02:57:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1374	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.692	23.611	650459	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:57:39 2022	Mon Jun 27 02:57:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1373	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.684	23.618	653873	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:57:34 2022	Mon Jun 27 02:57:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1372	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.672	23.620	653879	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:57:29 2022	Mon Jun 27 02:57:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1371	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.719	23.619	646414	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C446_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:57:24 2022	Mon Jun 27 02:57:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1370	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.133	-273.150	28.714	23.630	539502	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:57:11 2022	Mon Jun 27 02:57:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3273	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.134	-273.150	28.658	23.613	652174	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:57:05 2022	Mon Jun 27 02:57:07 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3272	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.134	-273.150	0.000	23.615	650333	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:57:00 2022	Mon Jun 27 02:57:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3271	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.700	23.618	653470	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:56:55 2022	Mon Jun 27 02:56:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3270	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.707	23.614	635986	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:56:50 2022	Mon Jun 27 02:56:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3269	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.134	-273.150	28.727	23.613	648701	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:56:46 2022	Mon Jun 27 02:56:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3268	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.134	-273.150	28.728	23.634	649198	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:56:41 2022	Mon Jun 27 02:56:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3267	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.134	-273.150	28.735	23.623	652150	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:56:36 2022	Mon Jun 27 02:56:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3266	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.689	23.616	650832	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:56:31 2022	Mon Jun 27 02:56:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3265	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.135	-273.150	28.716	0.000	646129	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B445_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:56:26 2022	Mon Jun 27 02:56:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3264	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.136	-273.150	28.716	0.000	653985	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:56:13 2022	Mon Jun 27 02:56:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	988	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.654	23.623	677716	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:56:08 2022	Mon Jun 27 02:56:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	987	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.721	23.626	651992	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:55:59 2022	Mon Jun 27 02:56:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	986	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.673	23.620	656268	1	1	100000	tingxu20220626	13	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:55:54 2022	Mon Jun 27 02:55:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	985	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.710	23.615	595528	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:55:50 2022	Mon Jun 27 02:55:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	984	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.139	0.000	28.700	23.617	649932	1	1	100000	tingxu20220626	13	102.01	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:55:45 2022	Mon Jun 27 02:55:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	983	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.658	23.618	676373	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:55:40 2022	Mon Jun 27 02:55:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	982	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.736	23.621	652252	1	1	100000	tingxu20220626	13	102.04	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:55:35 2022	Mon Jun 27 02:55:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	981	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.742	23.609	653801	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:55:31 2022	Mon Jun 27 02:55:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	980	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.140	-273.150	28.708	23.602	653304	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A444_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:55:26 2022	Mon Jun 27 02:55:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	979	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.139	0.000	28.688	23.591	658027	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:55:07 2022	Mon Jun 27 02:55:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1369	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.134	-273.150	28.679	23.621	646920	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:55:02 2022	Mon Jun 27 02:55:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1368	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.136	-273.150	28.728	23.627	652192	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:54:55 2022	Mon Jun 27 02:54:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1367	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.663	23.628	649621	1	1	100000	tingxu20220626	13	102.19	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:54:51 2022	Mon Jun 27 02:54:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1366	00	25.00	25.01	25.00	24.98	25.000	25.000	25.000	27.138	-273.150	28.679	0.000	651901	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:54:46 2022	Mon Jun 27 02:54:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1365	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.138	-273.150	28.703	23.635	650659	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:54:41 2022	Mon Jun 27 02:54:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1364	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.674	23.627	653414	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:54:37 2022	Mon Jun 27 02:54:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1363	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.136	-273.150	28.671	23.613	650802	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:54:32 2022	Mon Jun 27 02:54:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1362	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.137	-273.150	28.634	23.623	647861	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:54:27 2022	Mon Jun 27 02:54:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1361	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.136	-273.150	28.690	23.608	645704	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C443_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:54:22 2022	Mon Jun 27 02:54:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1360	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.702	23.615	651349	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:54:09 2022	Mon Jun 27 02:54:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3263	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.723	23.622	650594	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:54:04 2022	Mon Jun 27 02:54:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3262	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.137	-273.150	28.704	23.626	645938	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:53:59 2022	Mon Jun 27 02:54:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3261	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.691	23.619	648525	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:53:53 2022	Mon Jun 27 02:53:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3260	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.136	-273.150	28.737	23.623	649490	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:53:49 2022	Mon Jun 27 02:53:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3259	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.729	23.627	662747	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:53:44 2022	Mon Jun 27 02:53:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3258	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.137	-273.150	28.675	23.625	643785	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:53:39 2022	Mon Jun 27 02:53:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3257	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.137	-273.150	28.659	23.622	652457	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:53:34 2022	Mon Jun 27 02:53:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3256	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.712	23.625	652185	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:53:29 2022	Mon Jun 27 02:53:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3255	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.139	-273.150	28.709	23.630	648759	1	1	100000	tingxu20220626	13	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B442_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:53:25 2022	Mon Jun 27 02:53:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3254	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.139	-273.150	28.692	23.619	649027	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:53:11 2022	Mon Jun 27 02:53:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	978	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.621	23.622	669116	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:53:06 2022	Mon Jun 27 02:53:09 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	977	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.137	-273.150	28.682	23.629	653225	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:53:01 2022	Mon Jun 27 02:53:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	976	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.139	0.000	28.712	23.628	675726	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:52:57 2022	Mon Jun 27 02:52:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	975	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	0.000	23.617	656048	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:52:48 2022	Mon Jun 27 02:52:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	974	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.138	-273.150	28.702	23.608	682177	1	1	100000	tingxu20220626	13	102.16	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:52:43 2022	Mon Jun 27 02:52:45 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	973	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.651	23.620	682435	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:52:38 2022	Mon Jun 27 02:52:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	972	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.135	-273.150	28.646	23.618	663857	1	1	100000	tingxu20220626	13	102.19	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:52:33 2022	Mon Jun 27 02:52:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	971	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.136	-273.150	28.662	23.607	656933	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:52:28 2022	Mon Jun 27 02:52:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	970	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.138	-273.150	28.599	23.598	656071	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A441_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:52:23 2022	Mon Jun 27 02:52:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	969	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.662	23.590	663710	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:52:04 2022	Mon Jun 27 02:52:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1359	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.138	-273.150	28.678	23.614	648674	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:51:59 2022	Mon Jun 27 02:52:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1358	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.713	23.622	650978	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:51:54 2022	Mon Jun 27 02:51:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1357	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.666	23.624	645796	1	1	100000	tingxu20220626	13	102.34	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:51:49 2022	Mon Jun 27 02:51:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1356	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.138	-273.150	28.595	23.619	650588	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:51:44 2022	Mon Jun 27 02:51:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1355	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.696	23.627	653511	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:51:40 2022	Mon Jun 27 02:51:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1354	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.137	-273.150	28.736	23.621	649955	1	1	100000	tingxu20220626	13	102.38	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:51:35 2022	Mon Jun 27 02:51:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1353	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.138	-273.150	28.686	23.626	651385	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:51:30 2022	Mon Jun 27 02:51:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1352	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.138	-273.150	28.689	23.623	645012	1	1	100000	tingxu20220626	13	102.41	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:51:26 2022	Mon Jun 27 02:51:28 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1351	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.139	-273.150	28.682	23.614	643703	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C440_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:51:21 2022	Mon Jun 27 02:51:23 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1350	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	28.627	23.622	646710	1	1	100000	tingxu20220626	13	102.45	102.44	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:51:07 2022	Mon Jun 27 02:51:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3253	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.144	-273.150	28.613	23.634	652182	1	1	100000	tingxu20220626	13	102.49	102.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:51:03 2022	Mon Jun 27 02:51:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3252	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.734	23.627	648475	1	1	100000	tingxu20220626	13	102.50	102.50	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:50:58 2022	Mon Jun 27 02:51:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3251	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.687	23.631	651283	1	1	100000	tingxu20220626	13	102.52	102.51	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:50:53 2022	Mon Jun 27 02:50:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3250	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.142	-273.150	28.665	23.626	651103	1	1	100000	tingxu20220626	13	102.54	102.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:50:48 2022	Mon Jun 27 02:50:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3249	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	28.669	23.639	651104	1	1	100000	tingxu20220626	13	102.55	102.55	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:50:43 2022	Mon Jun 27 02:50:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3248	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.141	-273.150	28.660	23.635	649325	1	1	100000	tingxu20220626	13	102.57	102.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:50:37 2022	Mon Jun 27 02:50:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3247	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.141	-273.150	28.691	23.630	652002	1	1	100000	tingxu20220626	13	102.59	102.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:50:32 2022	Mon Jun 27 02:50:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3246	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.670	23.626	649397	1	1	100000	tingxu20220626	13	102.60	102.60	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:50:28 2022	Mon Jun 27 02:50:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3245	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.734	23.639	649699	1	1	100000	tingxu20220626	13	102.62	102.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B439_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:50:23 2022	Mon Jun 27 02:50:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3244	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.707	23.640	651610	1	1	100000	tingxu20220626	13	102.63	102.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:50:09 2022	Mon Jun 27 02:50:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	968	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.142	-273.150	28.627	23.634	653120	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:50:04 2022	Mon Jun 27 02:50:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	967	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.142	0.000	28.693	23.640	655397	1	1	100000	tingxu20220626	13	102.05	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:49:59 2022	Mon Jun 27 02:50:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	966	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.141	0.000	28.689	23.638	658516	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:49:54 2022	Mon Jun 27 02:49:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	965	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.719	23.632	709811	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:49:50 2022	Mon Jun 27 02:49:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	964	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.143	-273.150	0.000	23.626	649421	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:49:45 2022	Mon Jun 27 02:49:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	963	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.143	-273.150	28.692	23.619	658144	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:49:40 2022	Mon Jun 27 02:49:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	962	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.143	-273.150	28.705	23.629	678206	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:49:34 2022	Mon Jun 27 02:49:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	961	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.143	-273.150	28.658	23.624	652533	1	1	100000	tingxu20220626	13	102.15	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:49:29 2022	Mon Jun 27 02:49:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	960	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.669	23.620	651259	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A438_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:49:25 2022	Mon Jun 27 02:49:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	959	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.646	0.000	673338	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:49:03 2022	Mon Jun 27 02:49:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1349	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.145	-273.150	28.656	23.618	620060	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:48:58 2022	Mon Jun 27 02:49:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1348	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.654	23.612	650522	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:48:53 2022	Mon Jun 27 02:48:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1347	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.144	-273.150	28.670	23.618	651913	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:48:49 2022	Mon Jun 27 02:48:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1346	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.144	-273.150	28.683	23.619	653525	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:48:44 2022	Mon Jun 27 02:48:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1345	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.657	23.616	649445	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:48:39 2022	Mon Jun 27 02:48:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1344	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.667	23.621	650703	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:48:31 2022	Mon Jun 27 02:48:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1343	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.144	-273.150	28.688	23.633	650566	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:48:26 2022	Mon Jun 27 02:48:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1342	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.144	-273.150	28.732	23.626	651242	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:48:22 2022	Mon Jun 27 02:48:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1341	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.143	-273.150	28.687	23.627	652006	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C437_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:48:17 2022	Mon Jun 27 02:48:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1340	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.666	23.619	649265	1	1	100000	tingxu20220626	13	101.75	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:48:03 2022	Mon Jun 27 02:48:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3243	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.141	-273.150	28.673	23.618	650045	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:47:57 2022	Mon Jun 27 02:47:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3242	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.143	-273.150	28.701	23.620	650799	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:47:52 2022	Mon Jun 27 02:47:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3241	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.680	23.640	652319	1	1	100000	tingxu20220626	13	101.83	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:47:47 2022	Mon Jun 27 02:47:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3240	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.666	23.642	653102	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:47:42 2022	Mon Jun 27 02:47:45 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3239	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	0.000	28.722	23.634	652503	1	1	100000	tingxu20220626	13	101.86	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:47:37 2022	Mon Jun 27 02:47:40 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3238	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	0.000	23.634	651900	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:47:33 2022	Mon Jun 27 02:47:35 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3237	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.651	23.630	646510	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:47:28 2022	Mon Jun 27 02:47:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3236	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.649	23.628	650880	1	1	100000	tingxu20220626	13	101.91	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:47:23 2022	Mon Jun 27 02:47:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3235	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.142	-273.150	28.663	23.626	656320	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B436_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:47:14 2022	Mon Jun 27 02:47:16 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3234	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.142	-273.150	28.641	23.630	651534	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:47:00 2022	Mon Jun 27 02:47:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	958	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	28.744	23.613	667610	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:46:53 2022	Mon Jun 27 02:46:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	957	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	28.701	0.000	670897	1	1	100000	tingxu20220626	13	102.02	102.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:46:48 2022	Mon Jun 27 02:46:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	956	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.729	23.620	625720	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:46:43 2022	Mon Jun 27 02:46:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	955	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.141	0.000	28.753	23.624	673416	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:46:38 2022	Mon Jun 27 02:46:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	954	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	0.000	23.625	656563	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:46:34 2022	Mon Jun 27 02:46:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	953	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.722	23.632	671294	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:46:29 2022	Mon Jun 27 02:46:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	952	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.140	-273.150	28.711	23.637	688228	1	1	100000	tingxu20220626	13	102.11	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:46:24 2022	Mon Jun 27 02:46:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	951	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.142	-273.150	28.664	23.642	675734	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:46:19 2022	Mon Jun 27 02:46:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	950	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	28.704	23.635	654196	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A435_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:46:12 2022	Mon Jun 27 02:46:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	949	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	0.000	23.634	657387	1	1	100000	tingxu20220626	13	102.15	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:45:53 2022	Mon Jun 27 02:45:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1339	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.140	0.000	28.707	23.606	654196	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:45:48 2022	Mon Jun 27 02:45:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1338	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.139	-273.150	28.653	23.623	566601	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:45:44 2022	Mon Jun 27 02:45:46 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1337	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.139	-273.150	28.692	0.000	662207	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:45:39 2022	Mon Jun 27 02:45:41 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1336	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.140	-273.150	28.700	23.614	650516	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:45:34 2022	Mon Jun 27 02:45:36 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1335	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.140	-273.150	28.680	23.616	650491	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:45:29 2022	Mon Jun 27 02:45:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1334	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.140	-273.150	28.686	23.625	657304	1	1	100000	tingxu20220626	13	102.29	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:45:25 2022	Mon Jun 27 02:45:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1333	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.141	-273.150	28.707	23.634	652751	1	1	100000	tingxu20220626	13	102.31	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:45:20 2022	Mon Jun 27 02:45:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1332	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.142	-273.150	28.695	0.000	682789	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:45:15 2022	Mon Jun 27 02:45:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1331	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.143	-273.150	28.682	23.639	646689	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C434_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:45:10 2022	Mon Jun 27 02:45:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1330	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.649	23.631	653651	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:44:57 2022	Mon Jun 27 02:44:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3233	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.143	-273.150	28.723	23.634	643885	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:44:52 2022	Mon Jun 27 02:44:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3232	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.668	23.633	652531	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:44:45 2022	Mon Jun 27 02:44:48 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3231	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.147	-273.150	28.696	23.625	648803	1	1	100000	tingxu20220626	13	102.44	102.43	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:44:41 2022	Mon Jun 27 02:44:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3230	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.631	23.623	651923	1	1	100000	tingxu20220626	13	102.45	102.44	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:44:36 2022	Mon Jun 27 02:44:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3229	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.704	23.634	653081	1	1	100000	tingxu20220626	13	102.47	102.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:44:31 2022	Mon Jun 27 02:44:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3228	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.145	-273.150	28.643	23.620	653121	1	1	100000	tingxu20220626	13	102.48	102.47	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:44:26 2022	Mon Jun 27 02:44:29 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3227	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.644	23.618	652614	1	1	100000	tingxu20220626	13	102.50	102.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:44:21 2022	Mon Jun 27 02:44:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3226	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.145	-273.150	0.000	0.000	652193	1	1	100000	tingxu20220626	13	102.51	102.50	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:44:12 2022	Mon Jun 27 02:44:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3225	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.664	0.000	650648	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B433_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:44:07 2022	Mon Jun 27 02:44:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3224	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.685	0.000	678813	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:43:53 2022	Mon Jun 27 02:43:56 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	948	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.145	-273.150	28.624	23.637	663100	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:43:48 2022	Mon Jun 27 02:43:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	947	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.675	23.635	659193	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:43:44 2022	Mon Jun 27 02:43:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	946	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.145	-273.150	28.663	23.623	670648	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:43:39 2022	Mon Jun 27 02:43:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	945	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.144	-273.150	28.717	23.633	684529	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:43:34 2022	Mon Jun 27 02:43:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	944	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.146	-273.150	28.663	23.627	650443	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:43:29 2022	Mon Jun 27 02:43:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	943	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.680	0.000	668095	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:43:24 2022	Mon Jun 27 02:43:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	942	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.644	0.000	663830	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:43:08 2022	Mon Jun 27 02:43:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	941	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.148	-273.150	28.689	23.629	680328	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:43:04 2022	Mon Jun 27 02:43:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	940	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	0.000	23.627	653952	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A432_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:42:59 2022	Mon Jun 27 02:43:01 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	939	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.148	-273.150	0.000	23.625	656672	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:42:37 2022	Mon Jun 27 02:42:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1329	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.718	23.640	651038	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:42:33 2022	Mon Jun 27 02:42:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1328	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.145	-273.150	28.698	23.638	654640	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:42:28 2022	Mon Jun 27 02:42:30 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1327	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.726	23.638	651807	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:42:23 2022	Mon Jun 27 02:42:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1326	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	0.000	28.672	23.640	652580	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:42:18 2022	Mon Jun 27 02:42:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1325	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	0.000	23.645	534071	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:42:12 2022	Mon Jun 27 02:42:14 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1324	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.702	23.641	651994	1	1	100000	tingxu20220626	13	102.28	102.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:42:07 2022	Mon Jun 27 02:42:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1323	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	28.725	23.636	654995	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:42:02 2022	Mon Jun 27 02:42:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1322	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.149	-273.150	0.000	23.630	650969	1	1	100000	tingxu20220626	13	102.32	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:41:58 2022	Mon Jun 27 02:42:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1321	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.147	-273.150	28.633	23.633	650526	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C431_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:41:53 2022	Mon Jun 27 02:41:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1320	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	28.646	0.000	652133	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:41:39 2022	Mon Jun 27 02:41:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3223	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.649	23.630	646603	1	1	100000	tingxu20220626	13	102.39	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:41:34 2022	Mon Jun 27 02:41:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3222	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	28.670	23.633	650190	1	1	100000	tingxu20220626	13	102.41	102.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:41:30 2022	Mon Jun 27 02:41:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3221	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.147	-273.150	28.586	23.630	653903	1	1	100000	tingxu20220626	13	102.42	102.42	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:41:24 2022	Mon Jun 27 02:41:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3220	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.146	-273.150	28.698	23.620	582028	1	1	100000	tingxu20220626	13	102.44	102.43	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:41:20 2022	Mon Jun 27 02:41:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3219	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.146	-273.150	28.663	23.628	655163	1	1	100000	tingxu20220626	13	102.45	102.45	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:41:15 2022	Mon Jun 27 02:41:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3218	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.146	-273.150	28.604	23.624	655811	1	1	100000	tingxu20220626	13	102.47	102.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:41:10 2022	Mon Jun 27 02:41:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3217	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.146	-273.150	28.640	23.632	652261	1	1	100000	tingxu20220626	13	102.49	102.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:41:05 2022	Mon Jun 27 02:41:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3216	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.146	-273.150	28.664	23.634	651976	1	1	100000	tingxu20220626	13	102.50	102.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:40:59 2022	Mon Jun 27 02:41:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3215	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.685	0.000	653367	1	1	100000	tingxu20220626	13	102.52	102.52	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B430_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:40:54 2022	Mon Jun 27 02:40:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3214	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.669	23.633	610526	1	1	100000	tingxu20220626	13	102.54	102.53	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:40:41 2022	Mon Jun 27 02:40:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	938	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.147	-273.150	28.685	23.624	684726	1	1	100000	tingxu20220626	13	102.58	102.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:40:36 2022	Mon Jun 27 02:40:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	937	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.746	23.620	675299	1	1	100000	tingxu20220626	13	102.60	102.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:40:29 2022	Mon Jun 27 02:40:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	936	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.150	-273.150	28.659	23.624	682257	1	1	100000	tingxu20220626	13	102.62	102.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:40:23 2022	Mon Jun 27 02:40:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	935	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.150	-273.150	28.663	23.618	677803	1	1	100000	tingxu20220626	13	102.64	102.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:40:19 2022	Mon Jun 27 02:40:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	934	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.690	23.623	686445	1	1	100000	tingxu20220626	13	102.02	102.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:40:14 2022	Mon Jun 27 02:40:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	933	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.682	23.615	670890	1	1	100000	tingxu20220626	13	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:40:09 2022	Mon Jun 27 02:40:11 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	932	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.637	0.000	679095	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:40:04 2022	Mon Jun 27 02:40:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	931	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	28.599	23.627	686040	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:39:59 2022	Mon Jun 27 02:40:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	930	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.661	23.628	653462	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A429_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:39:54 2022	Mon Jun 27 02:39:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	929	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.657	23.621	596251	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:39:35 2022	Mon Jun 27 02:39:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1319	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.672	23.644	646363	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:39:30 2022	Mon Jun 27 02:39:33 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1318	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.705	23.642	652071	1	1	100000	tingxu20220626	13	102.18	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:39:23 2022	Mon Jun 27 02:39:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1317	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	0.000	28.639	23.643	651530	1	1	100000	tingxu20220626	13	102.20	102.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:39:18 2022	Mon Jun 27 02:39:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1316	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.663	23.633	651953	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:39:14 2022	Mon Jun 27 02:39:16 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1315	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.152	-273.150	28.668	23.625	653233	1	1	100000	tingxu20220626	13	102.23	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:39:09 2022	Mon Jun 27 02:39:11 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1314	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	28.639	23.626	649627	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:39:04 2022	Mon Jun 27 02:39:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1313	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.624	0.000	649613	1	1	100000	tingxu20220626	13	102.26	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:39:00 2022	Mon Jun 27 02:39:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1312	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	0.000	28.661	23.612	650187	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:38:55 2022	Mon Jun 27 02:38:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1311	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.656	23.614	652808	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C428_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:38:50 2022	Mon Jun 27 02:38:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1310	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	0.000	23.624	652289	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:38:37 2022	Mon Jun 27 02:38:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3213	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.153	-273.150	28.651	23.620	652598	1	1	100000	tingxu20220626	13	102.35	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:38:32 2022	Mon Jun 27 02:38:34 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3212	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.152	-273.150	28.706	23.637	650916	1	1	100000	tingxu20220626	13	102.37	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:38:27 2022	Mon Jun 27 02:38:30 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3211	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	0.000	28.687	23.629	651919	1	1	100000	tingxu20220626	13	102.39	102.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:38:22 2022	Mon Jun 27 02:38:25 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3210	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.724	23.635	647827	1	1	100000	tingxu20220626	13	102.40	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:38:17 2022	Mon Jun 27 02:38:20 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3209	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.685	23.629	654533	1	1	100000	tingxu20220626	13	101.77	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:38:13 2022	Mon Jun 27 02:38:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3208	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.693	23.632	651579	1	1	100000	tingxu20220626	13	101.78	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:38:08 2022	Mon Jun 27 02:38:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3207	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.687	0.000	651548	1	1	100000	tingxu20220626	13	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:38:03 2022	Mon Jun 27 02:38:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3206	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	28.634	23.622	657034	1	1	100000	tingxu20220626	13	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:37:58 2022	Mon Jun 27 02:38:00 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3205	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.636	23.620	650205	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B427_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:37:53 2022	Mon Jun 27 02:37:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3204	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.149	0.000	28.697	23.621	648543	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:37:39 2022	Mon Jun 27 02:37:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	928	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.668	0.000	552507	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:37:35 2022	Mon Jun 27 02:37:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	927	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.698	23.631	665220	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:37:30 2022	Mon Jun 27 02:37:32 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	926	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.732	23.632	654804	1	1	100000	tingxu20220626	13	101.93	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:37:25 2022	Mon Jun 27 02:37:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	925	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	0.000	28.702	23.626	674720	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:37:20 2022	Mon Jun 27 02:37:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	924	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.644	23.618	677119	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:37:11 2022	Mon Jun 27 02:37:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	923	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.149	-273.150	28.716	23.622	664101	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:37:06 2022	Mon Jun 27 02:37:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	922	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.147	-273.150	28.696	23.622	658690	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:37:01 2022	Mon Jun 27 02:37:04 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	921	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.677	23.628	666728	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:36:56 2022	Mon Jun 27 02:36:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	920	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.718	23.625	682229	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A426_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:36:51 2022	Mon Jun 27 02:36:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	919	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.701	23.626	672160	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:36:32 2022	Mon Jun 27 02:36:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1309	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.703	23.616	651447	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:36:27 2022	Mon Jun 27 02:36:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1308	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.637	23.627	654310	1	1	100000	tingxu20220626	13	102.13	102.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:36:22 2022	Mon Jun 27 02:36:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1307	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.693	0.000	654760	1	1	100000	tingxu20220626	13	102.14	102.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:36:18 2022	Mon Jun 27 02:36:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1306	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.643	23.640	655348	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:36:12 2022	Mon Jun 27 02:36:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1305	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.718	23.644	655905	1	1	100000	tingxu20220626	13	102.17	102.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:36:07 2022	Mon Jun 27 02:36:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1304	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.150	-273.150	28.712	23.640	654946	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:36:03 2022	Mon Jun 27 02:36:05 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1303	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.647	23.636	655292	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:35:58 2022	Mon Jun 27 02:36:00 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1302	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.693	23.637	648940	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:35:53 2022	Mon Jun 27 02:35:55 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1301	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.650	23.634	652157	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C425_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:35:48 2022	Mon Jun 27 02:35:50 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1300	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	0.000	23.626	609747	1	1	100000	tingxu20220626	13	102.25	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:35:34 2022	Mon Jun 27 02:35:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3203	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	0.000	28.685	23.633	638067	1	1	100000	tingxu20220626	13	102.30	102.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:35:30 2022	Mon Jun 27 02:35:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3202	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	28.662	23.630	652564	1	1	100000	tingxu20220626	13	102.31	102.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:35:25 2022	Mon Jun 27 02:35:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3201	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	28.578	23.633	654700	1	1	100000	tingxu20220626	13	102.33	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:35:20 2022	Mon Jun 27 02:35:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3200	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	28.703	23.633	654453	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:35:16 2022	Mon Jun 27 02:35:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3199	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.152	-273.150	28.596	23.630	656700	1	1	100000	tingxu20220626	13	102.36	102.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:35:10 2022	Mon Jun 27 02:35:12 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3198	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.153	0.000	28.656	23.632	654882	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:35:05 2022	Mon Jun 27 02:35:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3197	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.648	23.638	655537	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:35:00 2022	Mon Jun 27 02:35:03 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3196	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.723	23.640	657142	1	1	100000	tingxu20220626	13	102.41	102.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:34:56 2022	Mon Jun 27 02:34:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3195	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.634	0.000	651134	1	1	100000	tingxu20220626	13	102.43	102.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B424_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:34:51 2022	Mon Jun 27 02:34:53 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3194	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.652	23.637	654056	1	1	100000	tingxu20220626	13	102.44	102.44	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:34:37 2022	Mon Jun 27 02:34:40 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	918	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.676	23.634	683152	1	1	100000	tingxu20220626	13	102.49	102.48	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:34:32 2022	Mon Jun 27 02:34:35 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	917	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.771	23.640	682789	1	1	100000	tingxu20220626	13	102.50	102.50	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:34:27 2022	Mon Jun 27 02:34:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	916	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.145	-273.150	28.729	23.634	678650	1	1	100000	tingxu20220626	13	102.52	102.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:34:22 2022	Mon Jun 27 02:34:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	915	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.670	23.622	677059	1	1	100000	tingxu20220626	13	102.54	102.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:34:17 2022	Mon Jun 27 02:34:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	914	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.149	-273.150	28.698	23.622	666231	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:34:11 2022	Mon Jun 27 02:34:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	913	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.673	23.621	672657	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:34:06 2022	Mon Jun 27 02:34:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	912	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.677	23.622	658296	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:34:01 2022	Mon Jun 27 02:34:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	911	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.666	23.626	675938	1	1	100000	tingxu20220626	13	101.96	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:33:56 2022	Mon Jun 27 02:33:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	910	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.146	0.000	28.719	23.630	686368	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A423_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:33:51 2022	Mon Jun 27 02:33:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	909	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.710	23.630	676892	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:33:29 2022	Mon Jun 27 02:33:32 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1299	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.145	0.000	28.650	23.633	645584	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:33:25 2022	Mon Jun 27 02:33:27 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1298	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.693	23.622	653655	1	1	100000	tingxu20220626	13	102.07	102.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:33:20 2022	Mon Jun 27 02:33:22 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1297	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.685	23.609	651347	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:33:15 2022	Mon Jun 27 02:33:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1296	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.683	23.633	651684	1	1	100000	tingxu20220626	13	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:33:10 2022	Mon Jun 27 02:33:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1295	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.148	-273.150	28.691	23.627	650765	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:33:06 2022	Mon Jun 27 02:33:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1294	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.148	-273.150	28.620	23.630	651443	1	1	100000	tingxu20220626	13	102.13	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:32:59 2022	Mon Jun 27 02:33:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1293	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.150	-273.150	0.000	23.637	646495	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:32:54 2022	Mon Jun 27 02:32:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1292	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.673	23.637	654419	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:32:49 2022	Mon Jun 27 02:32:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1291	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.150	-273.150	28.668	23.637	652581	1	1	100000	tingxu20220626	13	102.18	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C422_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:32:44 2022	Mon Jun 27 02:32:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1290	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.718	23.630	653335	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:32:31 2022	Mon Jun 27 02:32:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3193	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.692	23.616	648821	1	1	100000	tingxu20220626	13	102.25	102.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:32:25 2022	Mon Jun 27 02:32:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3192	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.149	-273.150	28.678	23.621	655857	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:32:20 2022	Mon Jun 27 02:32:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3191	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.681	23.619	652620	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:32:16 2022	Mon Jun 27 02:32:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3190	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.723	23.617	653346	1	1	100000	tingxu20220626	13	101.66	101.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:32:11 2022	Mon Jun 27 02:32:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3189	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.648	23.629	650569	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:32:06 2022	Mon Jun 27 02:32:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3188	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.707	0.000	649405	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:32:01 2022	Mon Jun 27 02:32:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3187	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.730	23.627	654337	1	1	100000	tingxu20220626	13	101.70	101.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:31:56 2022	Mon Jun 27 02:31:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3186	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.151	-273.150	28.626	23.623	650332	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:31:52 2022	Mon Jun 27 02:31:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3185	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.662	23.632	648971	1	1	100000	tingxu20220626	13	101.73	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B421_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:31:47 2022	Mon Jun 27 02:31:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3184	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.696	23.633	653057	1	1	100000	tingxu20220626	13	101.75	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:31:33 2022	Mon Jun 27 02:31:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	908	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.755	23.651	596248	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:31:28 2022	Mon Jun 27 02:31:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	907	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	28.720	23.652	682430	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:31:23 2022	Mon Jun 27 02:31:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	906	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.672	23.641	676918	1	1	100000	tingxu20220626	13	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:31:18 2022	Mon Jun 27 02:31:21 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	905	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.147	-273.150	28.718	23.644	566615	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:31:14 2022	Mon Jun 27 02:31:16 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	904	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.149	-273.150	28.639	23.635	664742	1	1	100000	tingxu20220626	13	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:31:08 2022	Mon Jun 27 02:31:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	903	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.710	23.624	652102	1	1	100000	tingxu20220626	13	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:31:03 2022	Mon Jun 27 02:31:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	902	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.701	23.621	668401	1	1	100000	tingxu20220626	13	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:30:58 2022	Mon Jun 27 02:31:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	901	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.778	23.622	674566	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:30:53 2022	Mon Jun 27 02:30:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	900	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.705	23.620	680970	1	1	100000	tingxu20220626	13	101.93	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A420_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:30:48 2022	Mon Jun 27 02:30:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	899	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.152	-273.150	28.735	0.000	664545	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:30:28 2022	Mon Jun 27 02:30:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1289	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	0.000	28.710	23.640	650652	1	1	100000	tingxu20220626	13	102.01	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:30:24 2022	Mon Jun 27 02:30:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1288	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.691	23.637	654612	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:30:16 2022	Mon Jun 27 02:30:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1287	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.704	23.641	793169	1	1	100000	tingxu20220626	13	102.05	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:30:11 2022	Mon Jun 27 02:30:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1286	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.149	-273.150	28.670	0.000	654799	1	1	100000	tingxu20220626	13	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:30:06 2022	Mon Jun 27 02:30:09 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1285	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.674	23.639	651019	1	1	100000	tingxu20220626	13	102.07	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:30:02 2022	Mon Jun 27 02:30:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1284	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.688	23.633	650997	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:29:57 2022	Mon Jun 27 02:29:59 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1283	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.716	23.635	642043	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:29:52 2022	Mon Jun 27 02:29:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1282	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.700	23.630	651920	1	1	100000	tingxu20220626	13	102.12	102.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:29:44 2022	Mon Jun 27 02:29:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1281	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.732	23.630	652098	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C419_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:29:39 2022	Mon Jun 27 02:29:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1280	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.753	23.634	552765	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:29:26 2022	Mon Jun 27 02:29:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3183	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.708	23.643	649575	1	1	100000	tingxu20220626	13	102.21	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:29:21 2022	Mon Jun 27 02:29:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3182	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.689	23.636	647407	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:29:16 2022	Mon Jun 27 02:29:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3181	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.716	23.630	650164	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:29:08 2022	Mon Jun 27 02:29:11 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3180	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.150	-273.150	28.692	23.628	652442	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:29:03 2022	Mon Jun 27 02:29:06 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3179	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.671	23.633	553273	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:28:58 2022	Mon Jun 27 02:29:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3178	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.722	23.634	651385	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:28:54 2022	Mon Jun 27 02:28:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3177	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.150	-273.150	28.688	23.635	651968	1	1	100000	tingxu20220626	13	102.31	102.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:28:49 2022	Mon Jun 27 02:28:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3176	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.687	23.630	648083	1	1	100000	tingxu20220626	13	102.32	102.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:28:44 2022	Mon Jun 27 02:28:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3175	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.739	23.633	653560	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B418_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:28:39 2022	Mon Jun 27 02:28:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3174	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.718	23.630	540717	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:28:26 2022	Mon Jun 27 02:28:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	898	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.700	23.638	675993	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:28:21 2022	Mon Jun 27 02:28:23 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	897	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.677	0.000	678416	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:28:16 2022	Mon Jun 27 02:28:18 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	896	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.756	23.621	668597	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:28:10 2022	Mon Jun 27 02:28:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	895	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.673	23.628	672850	1	1	100000	tingxu20220626	13	101.79	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:28:05 2022	Mon Jun 27 02:28:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	894	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.750	23.623	689339	1	1	100000	tingxu20220626	13	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:28:00 2022	Mon Jun 27 02:28:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	893	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.707	23.633	674306	1	1	100000	tingxu20220626	13	101.82	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:27:56 2022	Mon Jun 27 02:27:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	892	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.734	23.642	679195	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:27:51 2022	Mon Jun 27 02:27:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	891	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.146	0.000	28.712	23.635	692814	1	1	100000	tingxu20220626	13	101.85	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:27:46 2022	Mon Jun 27 02:27:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	890	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.769	23.635	673600	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A417_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:27:41 2022	Mon Jun 27 02:27:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	889	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.147	-273.150	28.706	23.645	682438	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:27:22 2022	Mon Jun 27 02:27:25 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1279	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.149	-273.150	28.741	23.619	653217	1	1	100000	tingxu20220626	13	101.94	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:27:17 2022	Mon Jun 27 02:27:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1278	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.149	-273.150	28.733	23.620	653086	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:27:13 2022	Mon Jun 27 02:27:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1277	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.754	23.627	651054	1	1	100000	tingxu20220626	13	101.98	101.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:27:04 2022	Mon Jun 27 02:27:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1276	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.704	23.631	646831	1	1	100000	tingxu20220626	13	102.00	102.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:26:59 2022	Mon Jun 27 02:27:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1275	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.148	-273.150	28.653	23.638	644884	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:26:55 2022	Mon Jun 27 02:26:57 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1274	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.744	23.639	683536	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:26:50 2022	Mon Jun 27 02:26:52 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1273	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.146	-273.150	28.669	23.635	651624	1	1	100000	tingxu20220626	13	102.05	102.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:26:45 2022	Mon Jun 27 02:26:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1272	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.700	23.637	647922	1	1	100000	tingxu20220626	13	102.07	102.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:26:40 2022	Mon Jun 27 02:26:43 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1271	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.717	23.635	654485	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C416_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:26:36 2022	Mon Jun 27 02:26:38 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1270	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.147	-273.150	28.721	23.632	642848	1	1	100000	tingxu20220626	13	102.09	102.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:26:22 2022	Mon Jun 27 02:26:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3173	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.148	-273.150	28.710	0.000	651383	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:26:17 2022	Mon Jun 27 02:26:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3172	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.686	23.635	654575	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:26:12 2022	Mon Jun 27 02:26:15 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3171	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.701	23.634	650216	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:26:08 2022	Mon Jun 27 02:26:10 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3170	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.150	-273.150	28.697	23.642	653952	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:25:59 2022	Mon Jun 27 02:26:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3169	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.687	23.643	651541	1	1	100000	tingxu20220626	13	102.21	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:25:54 2022	Mon Jun 27 02:25:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3168	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.705	23.634	566010	1	1	100000	tingxu20220626	13	102.23	102.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:25:50 2022	Mon Jun 27 02:25:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3167	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.150	-273.150	28.703	23.621	651913	1	1	100000	tingxu20220626	13	102.24	102.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:25:45 2022	Mon Jun 27 02:25:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3166	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.703	23.620	651908	1	1	100000	tingxu20220626	13	102.26	102.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:25:40 2022	Mon Jun 27 02:25:42 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3165	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.661	0.000	652150	1	1	100000	tingxu20220626	13	102.28	102.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B415_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:25:35 2022	Mon Jun 27 02:25:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3164	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.150	-273.150	28.602	23.633	653613	1	1	100000	tingxu20220626	13	102.29	102.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:25:22 2022	Mon Jun 27 02:25:24 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	888	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.151	-273.150	28.658	23.630	683794	1	1	100000	tingxu20220626	13	102.34	102.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:25:17 2022	Mon Jun 27 02:25:19 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	887	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.151	-273.150	28.687	23.639	683926	1	1	100000	tingxu20220626	13	102.35	102.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:25:12 2022	Mon Jun 27 02:25:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	886	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.152	-273.150	28.650	0.000	671436	1	1	100000	tingxu20220626	13	102.36	102.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:25:07 2022	Mon Jun 27 02:25:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	885	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.153	-273.150	0.000	23.621	688247	1	1	100000	tingxu20220626	13	102.38	102.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:25:02 2022	Mon Jun 27 02:25:05 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	884	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.153	-273.150	28.716	23.633	674688	1	1	100000	tingxu20220626	13	102.40	102.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:24:56 2022	Mon Jun 27 02:24:59 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	883	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.154	0.000	28.748	23.643	683122	1	1	100000	tingxu20220626	13	102.42	102.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:24:51 2022	Mon Jun 27 02:24:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	882	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.154	-273.150	28.740	23.636	680418	1	1	100000	tingxu20220626	13	102.43	102.43	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:24:47 2022	Mon Jun 27 02:24:49 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	881	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.152	-273.150	28.687	0.000	675169	1	1	100000	tingxu20220626	13	102.45	102.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:24:42 2022	Mon Jun 27 02:24:44 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	880	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.152	-273.150	28.707	23.634	663011	1	1	100000	tingxu20220626	13	102.46	102.46	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A414_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:24:37 2022	Mon Jun 27 02:24:39 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	879	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.152	-273.150	28.673	23.635	686321	1	1	100000	tingxu20220626	13	102.48	102.47	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:24:18 2022	Mon Jun 27 02:24:20 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1269	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.154	-273.150	28.746	23.630	647898	1	1	100000	tingxu20220626	13	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:24:13 2022	Mon Jun 27 02:24:15 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1268	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.155	-273.150	28.660	23.634	649716	1	1	100000	tingxu20220626	13	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:24:08 2022	Mon Jun 27 02:24:10 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1267	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.154	-273.150	28.685	23.634	635947	1	1	100000	tingxu20220626	13	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:24:03 2022	Mon Jun 27 02:24:06 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1266	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.154	-273.150	28.677	23.630	540839	1	1	100000	tingxu20220626	13	101.94	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:23:59 2022	Mon Jun 27 02:24:01 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1265	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.154	-273.150	28.682	23.628	650807	1	1	100000	tingxu20220626	13	101.95	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:23:54 2022	Mon Jun 27 02:23:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1264	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.153	-273.150	28.663	23.645	653904	1	1	100000	tingxu20220626	13	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:23:49 2022	Mon Jun 27 02:23:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1263	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.153	0.000	28.618	23.646	650131	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:23:44 2022	Mon Jun 27 02:23:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1262	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.153	-273.150	28.654	23.641	654281	1	1	100000	tingxu20220626	13	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:23:39 2022	Mon Jun 27 02:23:42 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1261	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.154	-273.150	28.681	0.000	597551	1	1	100000	tingxu20220626	13	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C413_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:23:34 2022	Mon Jun 27 02:23:37 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1260	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.155	0.000	28.634	23.652	651018	1	1	100000	tingxu20220626	13	102.03	102.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:23:21 2022	Mon Jun 27 02:23:23 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3163	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.153	-273.150	28.673	0.000	650376	1	1	100000	tingxu20220626	13	102.08	102.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:23:16 2022	Mon Jun 27 02:23:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3162	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.153	-273.150	28.688	23.643	659248	1	1	100000	tingxu20220626	13	102.09	102.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:23:11 2022	Mon Jun 27 02:23:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3161	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.154	-273.150	28.677	23.633	649764	1	1	100000	tingxu20220626	13	102.11	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:23:06 2022	Mon Jun 27 02:23:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3160	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.153	-273.150	28.739	23.624	651530	1	1	100000	tingxu20220626	13	102.12	102.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:23:02 2022	Mon Jun 27 02:23:04 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3159	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.152	-273.150	28.714	23.628	643439	1	1	100000	tingxu20220626	13	102.14	102.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:22:57 2022	Mon Jun 27 02:22:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3158	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.152	-273.150	28.679	23.640	642677	1	1	100000	tingxu20220626	13	102.16	102.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:22:52 2022	Mon Jun 27 02:22:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3157	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.154	-273.150	28.703	23.643	650925	1	1	100000	tingxu20220626	13	102.17	102.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:22:46 2022	Mon Jun 27 02:22:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3156	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.156	-273.150	28.693	23.633	653829	1	1	100000	tingxu20220626	13	102.19	102.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:22:42 2022	Mon Jun 27 02:22:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3155	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.743	23.633	650382	1	1	100000	tingxu20220626	13	102.20	102.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B412_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:22:37 2022	Mon Jun 27 02:22:39 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3154	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.155	-273.150	0.000	23.635	651471	1	1	100000	tingxu20220626	13	102.22	102.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:22:23 2022	Mon Jun 27 02:22:25 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	878	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.155	-273.150	28.702	23.632	720322	1	1	100000	tingxu20220626	13	102.27	102.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:22:18 2022	Mon Jun 27 02:22:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	877	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.153	-273.150	28.647	23.637	697447	1	1	100000	tingxu20220626	13	101.64	102.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:22:12 2022	Mon Jun 27 02:22:14 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	876	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.153	-273.150	28.686	0.000	705715	1	1	100000	tingxu20220626	13	101.66	101.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:22:05 2022	Mon Jun 27 02:22:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	875	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.154	-273.150	28.634	23.624	699726	1	1	100000	tingxu20220626	13	101.68	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:22:00 2022	Mon Jun 27 02:22:03 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	874	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.669	23.623	705013	1	1	100000	tingxu20220626	13	101.69	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:21:55 2022	Mon Jun 27 02:21:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	873	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.634	0.000	716700	1	1	100000	tingxu20220626	13	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:21:50 2022	Mon Jun 27 02:21:53 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	872	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.666	23.632	725386	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:21:46 2022	Mon Jun 27 02:21:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	871	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.155	-273.150	28.720	23.632	689197	1	1	100000	tingxu20220626	13	101.74	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:21:40 2022	Mon Jun 27 02:21:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	870	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.155	-273.150	28.648	23.635	708790	1	1	100000	tingxu20220626	13	101.76	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A411_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:21:35 2022	Mon Jun 27 02:21:37 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	869	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.695	23.640	674272	1	1	100000	tingxu20220626	13	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:21:16 2022	Mon Jun 27 02:21:18 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1259	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.664	23.632	651601	1	1	100000	tingxu20220626	13	101.84	101.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:21:11 2022	Mon Jun 27 02:21:13 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1258	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.159	-273.150	28.708	23.622	650998	1	1	100000	tingxu20220626	13	101.85	101.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:21:06 2022	Mon Jun 27 02:21:08 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1257	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.704	23.622	655371	1	1	100000	tingxu20220626	13	101.87	101.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:21:01 2022	Mon Jun 27 02:21:03 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1256	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.157	-273.150	28.605	23.638	646564	1	1	100000	tingxu20220626	13	101.88	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:20:56 2022	Mon Jun 27 02:20:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1255	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.650	23.647	631795	1	1	100000	tingxu20220626	13	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:20:51 2022	Mon Jun 27 02:20:54 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1254	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.680	23.643	648327	1	1	100000	tingxu20220626	13	101.92	101.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:20:46 2022	Mon Jun 27 02:20:49 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1253	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	0.000	28.675	23.642	647434	1	1	100000	tingxu20220626	13	101.93	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:20:38 2022	Mon Jun 27 02:20:40 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1252	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.685	23.632	650534	1	1	100000	tingxu20220626	13	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:20:33 2022	Mon Jun 27 02:20:35 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1251	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.155	-273.150	0.000	23.635	622196	1	1	100000	tingxu20220626	13	101.97	101.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C410_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:20:28 2022	Mon Jun 27 02:20:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1250	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.155	-273.150	0.000	23.633	647260	1	1	100000	tingxu20220626	13	101.99	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:20:15 2022	Mon Jun 27 02:20:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3153	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.157	-273.150	28.710	23.618	643489	1	1	100000	tingxu20220626	13	101.38	101.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:20:03 2022	Mon Jun 27 02:20:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3152	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.157	-273.150	28.659	23.627	617671	1	1	100000	tingxu20220626	13	101.42	101.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:19:58 2022	Mon Jun 27 02:20:01 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3151	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.637	23.643	644472	1	1	100000	tingxu20220626	13	101.44	101.43	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:19:53 2022	Mon Jun 27 02:19:56 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3150	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.157	-273.150	28.647	23.638	644879	1	1	100000	tingxu20220626	13	101.45	101.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:19:49 2022	Mon Jun 27 02:19:51 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3149	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.157	-273.150	28.650	23.630	656465	1	1	100000	tingxu20220626	13	101.47	101.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:19:44 2022	Mon Jun 27 02:19:46 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3148	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.632	23.632	645819	1	1	100000	tingxu20220626	13	101.48	101.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:19:39 2022	Mon Jun 27 02:19:41 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3147	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.735	23.639	621131	1	1	100000	tingxu20220626	13	101.50	101.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:19:34 2022	Mon Jun 27 02:19:36 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3146	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.667	23.632	648286	1	1	100000	tingxu20220626	13	101.52	101.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:19:29 2022	Mon Jun 27 02:19:31 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3145	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.662	23.641	645603	1	1	100000	tingxu20220626	13	101.53	101.52	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B409_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:19:24 2022	Mon Jun 27 02:19:26 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3144	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.157	-273.150	28.705	23.645	646616	1	1	100000	tingxu20220626	13	101.55	101.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:19:10 2022	Mon Jun 27 02:19:13 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	868	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.158	-273.150	28.695	23.637	673818	1	1	100000	tingxu20220626	13	101.59	101.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:19:05 2022	Mon Jun 27 02:19:08 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	867	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.636	23.636	672238	1	1	100000	tingxu20220626	13	101.60	101.60	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:18:59 2022	Mon Jun 27 02:19:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	866	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.670	23.640	676389	1	1	100000	tingxu20220626	13	101.62	101.61	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:18:54 2022	Mon Jun 27 02:18:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	865	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.157	-273.150	28.602	23.637	714557	1	1	100000	tingxu20220626	13	101.64	101.63	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:18:50 2022	Mon Jun 27 02:18:52 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	864	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.642	23.632	669179	1	1	100000	tingxu20220626	13	101.66	101.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:18:45 2022	Mon Jun 27 02:18:47 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	863	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.631	0.000	688517	1	1	100000	tingxu20220626	13	101.67	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:18:40 2022	Mon Jun 27 02:18:42 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	862	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.157	-273.150	28.694	23.639	692217	1	1	100000	tingxu20220626	13	101.69	101.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:18:35 2022	Mon Jun 27 02:18:38 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	861	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.715	23.637	674816	1	1	100000	tingxu20220626	13	101.70	101.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:18:30 2022	Mon Jun 27 02:18:33 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	860	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.676	23.638	681194	1	1	100000	tingxu20220626	13	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A408_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:18:25 2022	Mon Jun 27 02:18:28 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	859	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.677	23.637	680258	1	1	100000	tingxu20220626	13	101.73	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:18:02 2022	Mon Jun 27 02:18:04 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1249	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.154	-273.150	28.718	23.619	646325	1	1	100000	tingxu20220626	13	101.17	101.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:17:55 2022	Mon Jun 27 02:17:58 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1248	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.154	-273.150	28.712	23.624	644180	1	1	100000	tingxu20220626	13	101.19	101.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:17:51 2022	Mon Jun 27 02:17:53 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1247	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.155	-273.150	28.701	23.618	643462	1	1	100000	tingxu20220626	13	101.21	101.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:17:46 2022	Mon Jun 27 02:17:48 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1246	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.708	23.628	629391	1	1	100000	tingxu20220626	13	101.22	101.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:17:41 2022	Mon Jun 27 02:17:44 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1245	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.155	-273.150	28.723	23.643	642961	1	1	100000	tingxu20220626	13	101.24	101.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:17:36 2022	Mon Jun 27 02:17:39 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1244	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.154	-273.150	28.691	23.641	644693	1	1	100000	tingxu20220626	13	101.25	101.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:17:32 2022	Mon Jun 27 02:17:34 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1243	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.718	23.643	644774	1	1	100000	tingxu20220626	13	101.27	101.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:17:27 2022	Mon Jun 27 02:17:29 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1242	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.155	-273.150	28.666	23.635	644194	1	1	100000	tingxu20220626	13	101.28	101.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:17:22 2022	Mon Jun 27 02:17:24 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1241	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.156	-273.150	28.713	0.000	648086	1	1	100000	tingxu20220626	13	101.30	101.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C407_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:17:17 2022	Mon Jun 27 02:17:19 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1240	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.155	0.000	28.678	23.631	645168	1	1	100000	tingxu20220626	13	101.32	101.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:16:59 2022	Mon Jun 27 02:17:02 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3143	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.154	-273.150	28.703	23.625	647977	1	1	100000	tingxu20220626	13	101.37	101.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:16:54 2022	Mon Jun 27 02:16:57 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3142	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.157	-273.150	28.674	23.626	534105	1	1	100000	tingxu20220626	13	101.39	101.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:16:50 2022	Mon Jun 27 02:16:52 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3141	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.157	-273.150	28.698	0.000	630513	1	1	100000	tingxu20220626	13	101.40	101.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:16:45 2022	Mon Jun 27 02:16:47 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3140	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.156	-273.150	28.633	23.626	646082	1	1	100000	tingxu20220626	13	101.42	101.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:16:40 2022	Mon Jun 27 02:16:43 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3139	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.157	-273.150	28.662	0.000	642036	1	1	100000	tingxu20220626	13	101.43	101.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:16:35 2022	Mon Jun 27 02:16:38 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3138	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.156	-273.150	28.714	23.630	871617	1	1	100000	tingxu20220626	13	101.45	101.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:16:30 2022	Mon Jun 27 02:16:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3137	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.646	23.631	649454	1	1	100000	tingxu20220626	13	101.47	101.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:16:25 2022	Mon Jun 27 02:16:28 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3136	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.155	-273.150	28.652	23.631	644563	1	1	100000	tingxu20220626	13	101.48	101.47	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:16:20 2022	Mon Jun 27 02:16:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3135	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.156	-273.150	28.663	0.000	645996	1	1	100000	tingxu20220626	13	100.86	101.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B406_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:16:15 2022	Mon Jun 27 02:16:17 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3134	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.157	-273.150	28.661	23.644	643813	1	1	100000	tingxu20220626	13	100.88	100.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:15:59 2022	Mon Jun 27 02:16:02 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	858	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.729	23.633	671598	1	1	100000	tingxu20220626	13	100.92	100.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:15:54 2022	Mon Jun 27 02:15:57 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	857	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.696	0.000	554362	1	1	100000	tingxu20220626	13	100.94	100.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:15:48 2022	Mon Jun 27 02:15:51 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	856	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.159	-273.150	28.674	23.632	590771	1	1	100000	tingxu20220626	13	100.96	100.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:15:43 2022	Mon Jun 27 02:15:46 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	855	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.159	-273.150	28.655	23.629	669000	1	1	100000	tingxu20220626	13	100.98	100.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:15:38 2022	Mon Jun 27 02:15:41 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	854	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.644	0.000	702331	1	1	100000	tingxu20220626	13	100.99	100.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:15:33 2022	Mon Jun 27 02:15:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	853	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.159	-273.150	28.639	23.634	586467	1	1	100000	tingxu20220626	13	101.01	101.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:15:28 2022	Mon Jun 27 02:15:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	852	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.158	-273.150	28.661	23.628	671767	1	1	100000	tingxu20220626	13	101.02	101.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:15:23 2022	Mon Jun 27 02:15:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	851	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.674	23.638	684209	1	1	100000	tingxu20220626	13	101.04	101.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:15:15 2022	Mon Jun 27 02:15:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	850	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.158	-273.150	28.655	23.640	655126	1	1	100000	tingxu20220626	13	101.07	101.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A405_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:15:10 2022	Mon Jun 27 02:15:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	849	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.159	-273.150	28.653	23.634	702888	1	1	100000	tingxu20220626	13	101.08	101.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:12:34 2022	Mon Jun 27 02:12:37 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3133	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.169	-273.150	28.683	23.640	644098	1	1	100000	tingxu20220626	13	100.93	100.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:12:29 2022	Mon Jun 27 02:12:32 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3132	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.170	-273.150	28.640	23.637	644694	1	1	100000	tingxu20220626	13	100.95	100.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:12:25 2022	Mon Jun 27 02:12:27 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3131	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.170	-273.150	28.717	23.638	644337	1	1	100000	tingxu20220626	13	100.96	100.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:12:20 2022	Mon Jun 27 02:12:22 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3130	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.170	-273.150	0.000	23.638	637425	1	1	100000	tingxu20220626	13	100.33	100.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:12:15 2022	Mon Jun 27 02:12:18 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3129	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.169	-273.150	28.683	23.640	634625	1	1	100000	tingxu20220626	13	100.35	100.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:12:11 2022	Mon Jun 27 02:12:13 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3128	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.169	-273.150	28.653	23.632	641160	1	1	100000	tingxu20220626	13	100.36	100.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:12:06 2022	Mon Jun 27 02:12:08 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3127	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.171	-273.150	28.650	23.636	641892	1	1	100000	tingxu20220626	13	100.37	100.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:11:57 2022	Mon Jun 27 02:11:59 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3126	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.172	-273.150	28.666	23.629	641614	1	1	100000	tingxu20220626	13	100.40	100.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:11:52 2022	Mon Jun 27 02:11:55 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3125	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.732	23.638	642208	1	1	100000	tingxu20220626	13	100.42	100.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B404_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:11:47 2022	Mon Jun 27 02:11:50 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3124	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.171	-273.150	28.687	0.000	642619	1	1	100000	tingxu20220626	13	100.43	100.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:11:34 2022	Mon Jun 27 02:11:36 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	848	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.674	23.637	673798	1	1	100000	tingxu20220626	13	100.48	100.47	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:11:29 2022	Mon Jun 27 02:11:31 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	847	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.168	-273.150	28.676	23.643	644801	1	1	100000	tingxu20220626	13	100.49	100.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:11:24 2022	Mon Jun 27 02:11:27 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	846	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.168	0.000	28.708	23.642	627550	1	1	100000	tingxu20220626	13	100.50	100.50	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:11:19 2022	Mon Jun 27 02:11:22 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	845	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.167	-273.150	28.648	23.640	675613	1	1	100000	tingxu20220626	13	100.52	100.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:11:14 2022	Mon Jun 27 02:11:17 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	844	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.166	-273.150	28.666	23.644	645729	1	1	100000	tingxu20220626	13	100.54	100.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:11:09 2022	Mon Jun 27 02:11:12 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	843	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.168	-273.150	28.757	0.000	601276	1	1	100000	tingxu20220626	13	100.55	100.55	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:11:04 2022	Mon Jun 27 02:11:07 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	842	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.169	-273.150	28.676	23.649	671254	1	1	100000	tingxu20220626	13	100.57	100.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:10:57 2022	Mon Jun 27 02:11:00 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	841	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.168	0.000	28.674	23.633	672580	1	1	100000	tingxu20220626	13	100.59	100.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:10:52 2022	Mon Jun 27 02:10:55 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	840	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.169	-273.150	28.675	23.621	663022	1	1	100000	tingxu20220626	13	100.61	100.60	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A403_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:10:47 2022	Mon Jun 27 02:10:50 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	839	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.167	-273.150	28.702	23.632	665320	1	1	100000	tingxu20220626	13	100.62	100.61	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00010	Mon Jun 27 02:10:28 2022	Mon Jun 27 02:10:31 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1239	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.168	-273.150	28.598	23.636	642071	1	1	100000	tingxu20220626	13	100.68	100.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00009	Mon Jun 27 02:10:24 2022	Mon Jun 27 02:10:26 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1238	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.168	-273.150	28.666	23.645	646501	1	1	100000	tingxu20220626	13	100.70	100.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00008	Mon Jun 27 02:10:19 2022	Mon Jun 27 02:10:21 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1237	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.167	0.000	28.703	23.651	645514	1	1	100000	tingxu20220626	13	100.07	100.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00007	Mon Jun 27 02:10:14 2022	Mon Jun 27 02:10:17 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1236	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.168	-273.150	28.677	23.644	641243	1	1	100000	tingxu20220626	13	100.08	100.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00006	Mon Jun 27 02:10:10 2022	Mon Jun 27 02:10:12 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1235	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.167	-273.150	28.662	23.629	644811	1	1	100000	tingxu20220626	13	100.10	100.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00005	Mon Jun 27 02:10:05 2022	Mon Jun 27 02:10:07 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1234	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.167	0.000	28.718	23.631	643276	1	1	100000	tingxu20220626	13	100.11	100.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00004	Mon Jun 27 02:10:00 2022	Mon Jun 27 02:10:02 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1233	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.166	-273.150	28.701	23.633	639906	1	1	100000	tingxu20220626	13	100.13	100.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00003	Mon Jun 27 02:09:54 2022	Mon Jun 27 02:09:56 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1232	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.165	-273.150	28.652	23.642	636807	1	1	100000	tingxu20220626	13	100.15	100.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00002	Mon Jun 27 02:09:49 2022	Mon Jun 27 02:09:51 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1231	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.163	-273.150	28.643	23.638	642198	1	1	100000	tingxu20220626	13	100.16	100.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
C402_Le_3_polymer_att00_Lq0_Rq0_00001	Mon Jun 27 02:09:44 2022	Mon Jun 27 02:09:47 2022	-0.200	0.000	0.000	0.300	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	1230	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.165	-273.150	28.683	23.637	638170	1	1	100000	tingxu20220626	13	100.18	100.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00010	Mon Jun 27 02:09:31 2022	Mon Jun 27 02:09:33 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3123	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.167	0.000	28.672	23.646	648658	1	1	100000	tingxu20220626	13	100.22	100.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00009	Mon Jun 27 02:09:21 2022	Mon Jun 27 02:09:24 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3122	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.167	-273.150	28.664	23.649	641027	1	1	100000	tingxu20220626	13	100.25	100.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00008	Mon Jun 27 02:09:16 2022	Mon Jun 27 02:09:19 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3121	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.168	-273.150	28.692	23.654	643412	1	1	100000	tingxu20220626	13	100.26	100.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00007	Mon Jun 27 02:09:12 2022	Mon Jun 27 02:09:14 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3120	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.169	-273.150	28.689	23.646	642683	1	1	100000	tingxu20220626	13	100.28	100.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00006	Mon Jun 27 02:09:07 2022	Mon Jun 27 02:09:09 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3119	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.167	-273.150	28.646	0.000	638531	1	1	100000	tingxu20220626	13	100.29	100.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00005	Mon Jun 27 02:09:02 2022	Mon Jun 27 02:09:05 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3118	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.167	-273.150	28.708	23.644	642892	1	1	100000	tingxu20220626	13	100.31	100.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00004	Mon Jun 27 02:08:56 2022	Mon Jun 27 02:08:58 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3117	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.167	-273.150	28.656	23.636	638078	1	1	100000	tingxu20220626	13	100.33	100.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00003	Mon Jun 27 02:08:51 2022	Mon Jun 27 02:08:54 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3116	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.168	-273.150	28.670	23.640	647492	1	1	100000	tingxu20220626	13	100.34	100.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00002	Mon Jun 27 02:08:46 2022	Mon Jun 27 02:08:49 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3115	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.169	-273.150	28.652	23.632	641255	1	1	100000	tingxu20220626	13	100.36	100.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
B401_Le_2_5nm_att00_Lq0_Rq0_00001	Mon Jun 27 02:08:42 2022	Mon Jun 27 02:08:44 2022	-0.080	0.000	0.000	0.400	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	3114	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.169	-273.150	28.706	23.631	647338	1	1	100000	tingxu20220626	13	100.38	100.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 02:08:28 2022	Mon Jun 27 02:08:30 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	838	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.168	-273.150	28.687	23.642	667360	1	1	100000	tingxu20220626	13	100.42	100.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 02:08:23 2022	Mon Jun 27 02:08:26 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	837	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.168	-273.150	28.682	23.630	675851	1	1	100000	tingxu20220626	13	100.43	100.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 02:08:18 2022	Mon Jun 27 02:08:20 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	836	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.169	-273.150	28.677	23.621	681673	1	1	100000	tingxu20220626	13	99.80	100.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 02:08:13 2022	Mon Jun 27 02:08:15 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	835	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.170	-273.150	0.000	23.630	667522	1	1	100000	tingxu20220626	13	99.81	99.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 02:08:08 2022	Mon Jun 27 02:08:10 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	834	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.170	-273.150	28.704	23.638	656991	1	1	100000	tingxu20220626	13	99.83	99.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 02:08:03 2022	Mon Jun 27 02:08:06 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	833	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.169	-273.150	0.000	23.645	586720	1	1	100000	tingxu20220626	13	99.85	99.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 02:07:56 2022	Mon Jun 27 02:07:58 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	832	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.170	-273.150	28.742	23.642	658564	1	1	100000	tingxu20220626	13	99.87	99.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 02:07:51 2022	Mon Jun 27 02:07:54 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	831	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.171	0.000	28.671	23.638	647043	1	1	100000	tingxu20220626	13	99.89	99.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 02:07:46 2022	Mon Jun 27 02:07:48 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	830	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.170	-273.150	28.684	23.640	646609	1	1	100000	tingxu20220626	13	99.90	99.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A400_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 02:07:40 2022	Mon Jun 27 02:07:43 2022	0.000	0.000	0.000	0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	829	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.693	23.634	670605	1	1	100000	tingxu20220626	13	99.92	99.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A399_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:35:04 2022	Mon Jun 27 01:35:06 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	827	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.194	-273.150	28.695	23.635	633986	1	1	100000	tingxu20220626	6	99.47	99.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A399_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:34:59 2022	Mon Jun 27 01:35:01 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	826	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.192	-273.150	28.716	23.635	641122	1	1	100000	tingxu20220626	6	99.48	99.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A399_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:34:54 2022	Mon Jun 27 01:34:56 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	825	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.193	-273.150	28.630	23.642	624131	1	1	100000	tingxu20220626	6	99.50	99.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A399_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:34:49 2022	Mon Jun 27 01:34:52 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	824	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.193	-273.150	28.689	23.640	640734	1	1	100000	tingxu20220626	6	99.52	99.51	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A399_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:34:43 2022	Mon Jun 27 01:34:45 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	823	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.194	-273.150	28.683	0.000	634429	1	1	100000	tingxu20220626	6	99.53	99.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:34:37 2022	Mon Jun 27 01:34:40 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	822	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.194	-273.150	28.661	0.000	640354	1	1	100000	tingxu20220626	6	99.55	99.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:34:29 2022	Mon Jun 27 01:34:32 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	821	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.193	-273.150	28.668	23.648	635411	1	1	100000	tingxu20220626	6	99.58	99.57	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:34:24 2022	Mon Jun 27 01:34:26 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	820	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.190	-273.150	28.689	23.640	632670	1	1	100000	tingxu20220626	6	99.59	99.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:34:19 2022	Mon Jun 27 01:34:22 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	819	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.192	-273.150	28.615	23.652	638045	1	1	100000	tingxu20220626	6	99.61	99.60	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:34:15 2022	Mon Jun 27 01:34:17 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	818	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.195	-273.150	28.668	0.000	638968	1	1	100000	tingxu20220626	6	99.62	99.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:34:09 2022	Mon Jun 27 01:34:12 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	817	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.664	23.656	586412	1	1	100000	tingxu20220626	6	99.64	99.63	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:34:04 2022	Mon Jun 27 01:34:07 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	816	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.195	-273.150	28.653	0.000	652240	1	1	100000	tingxu20220626	6	99.65	99.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:34:00 2022	Mon Jun 27 01:34:02 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	815	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.196	-273.150	28.634	0.000	638772	1	1	100000	tingxu20220626	6	99.67	99.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:33:55 2022	Mon Jun 27 01:33:57 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	814	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.665	23.646	639034	1	1	100000	tingxu20220626	6	99.68	99.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A398_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:33:50 2022	Mon Jun 27 01:33:52 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	813	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.703	23.650	635600	1	1	100000	tingxu20220626	6	99.69	99.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:33:45 2022	Mon Jun 27 01:33:47 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	812	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.715	23.653	648868	1	1	100000	tingxu20220626	6	99.72	99.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:33:40 2022	Mon Jun 27 01:33:42 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	811	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.668	23.667	639349	1	1	100000	tingxu20220626	6	99.73	99.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:33:35 2022	Mon Jun 27 01:33:38 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	810	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.682	23.668	649839	1	1	100000	tingxu20220626	6	99.74	99.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:33:26 2022	Mon Jun 27 01:33:28 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	809	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.667	23.666	640007	1	1	100000	tingxu20220626	6	99.77	99.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:33:21 2022	Mon Jun 27 01:33:24 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	808	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.659	23.658	643323	1	1	100000	tingxu20220626	6	99.79	99.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:33:16 2022	Mon Jun 27 01:33:19 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	807	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.656	23.645	646112	1	1	100000	tingxu20220626	6	99.80	99.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:33:12 2022	Mon Jun 27 01:33:14 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	806	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.655	23.643	638112	1	1	100000	tingxu20220626	6	99.82	99.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:33:07 2022	Mon Jun 27 01:33:09 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	805	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.675	23.639	647845	1	1	100000	tingxu20220626	6	99.83	99.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:33:02 2022	Mon Jun 27 01:33:05 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	804	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.688	23.639	646572	1	1	100000	tingxu20220626	6	99.85	99.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A397_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:32:57 2022	Mon Jun 27 01:33:00 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	803	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.672	23.644	639530	1	1	100000	tingxu20220626	6	99.86	99.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:32:52 2022	Mon Jun 27 01:32:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	802	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.651	23.643	640550	1	1	100000	tingxu20220626	6	99.88	99.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:32:43 2022	Mon Jun 27 01:32:46 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	801	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.670	23.647	643774	1	1	100000	tingxu20220626	6	99.90	99.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:32:38 2022	Mon Jun 27 01:32:41 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	800	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.653	23.651	640044	1	1	100000	tingxu20220626	6	99.92	99.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:32:33 2022	Mon Jun 27 01:32:36 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	799	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.705	23.650	688907	1	1	100000	tingxu20220626	6	99.94	99.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:32:29 2022	Mon Jun 27 01:32:31 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	798	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.706	23.659	639355	1	1	100000	tingxu20220626	6	99.95	99.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:32:24 2022	Mon Jun 27 01:32:26 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	797	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.681	23.657	636506	1	1	100000	tingxu20220626	6	99.97	99.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:32:19 2022	Mon Jun 27 01:32:21 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	796	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.665	23.647	639425	1	1	100000	tingxu20220626	6	99.98	99.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:32:14 2022	Mon Jun 27 01:32:16 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	795	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.198	-273.150	28.690	0.000	642918	1	1	100000	tingxu20220626	6	100.00	99.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:32:09 2022	Mon Jun 27 01:32:12 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	794	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.632	23.644	560982	1	1	100000	tingxu20220626	6	100.01	100.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A396_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:32:05 2022	Mon Jun 27 01:32:07 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	793	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.696	23.655	636768	1	1	100000	tingxu20220626	6	100.03	100.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:31:59 2022	Mon Jun 27 01:32:01 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	792	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	0.000	23.651	640089	1	1	100000	tingxu20220626	6	100.04	100.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:31:54 2022	Mon Jun 27 01:31:57 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	791	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.664	23.647	570593	1	1	100000	tingxu20220626	6	100.06	100.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:31:49 2022	Mon Jun 27 01:31:51 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	790	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.683	23.646	641086	1	1	100000	tingxu20220626	6	100.08	100.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:31:44 2022	Mon Jun 27 01:31:46 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	789	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.683	23.636	644924	1	1	100000	tingxu20220626	6	100.10	100.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:31:39 2022	Mon Jun 27 01:31:42 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	788	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.680	23.640	613021	1	1	100000	tingxu20220626	6	100.11	100.10	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:31:34 2022	Mon Jun 27 01:31:37 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	787	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.676	23.638	640070	1	1	100000	tingxu20220626	6	100.12	100.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:31:30 2022	Mon Jun 27 01:31:32 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	786	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.200	-273.150	28.681	23.646	638065	1	1	100000	tingxu20220626	6	100.14	100.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:31:25 2022	Mon Jun 27 01:31:27 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	785	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.623	23.655	664872	1	1	100000	tingxu20220626	6	100.15	100.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:31:20 2022	Mon Jun 27 01:31:23 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	784	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.649	23.649	644459	1	1	100000	tingxu20220626	6	100.17	100.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A395_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:31:15 2022	Mon Jun 27 01:31:18 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	783	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.620	23.638	638594	1	1	100000	tingxu20220626	6	100.18	100.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:31:10 2022	Mon Jun 27 01:31:12 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	782	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.665	0.000	645069	1	1	100000	tingxu20220626	6	100.20	100.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:31:05 2022	Mon Jun 27 01:31:08 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	781	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.682	23.643	645473	1	1	100000	tingxu20220626	6	100.22	100.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:31:00 2022	Mon Jun 27 01:31:03 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	780	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.697	23.648	641545	1	1	100000	tingxu20220626	6	100.23	100.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:30:56 2022	Mon Jun 27 01:30:58 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	779	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	0.000	23.649	644122	1	1	100000	tingxu20220626	6	100.24	100.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:30:51 2022	Mon Jun 27 01:30:53 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	778	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.705	23.654	645137	1	1	100000	tingxu20220626	6	100.25	100.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:30:48 2022	Mon Jun 27 01:30:50 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	777	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.637	23.653	620614	1	1	100000	tingxu20220626	6	100.26	100.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:30:45 2022	Mon Jun 27 01:30:47 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	776	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.669	23.650	644073	1	1	100000	tingxu20220626	6	100.27	100.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:30:40 2022	Mon Jun 27 01:30:43 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	775	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.692	23.651	644834	1	1	100000	tingxu20220626	6	100.29	100.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:30:36 2022	Mon Jun 27 01:30:38 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	774	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.675	23.646	630752	1	1	100000	tingxu20220626	6	100.30	100.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A394_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:30:31 2022	Mon Jun 27 01:30:33 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	773	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.200	-273.150	28.658	23.649	654106	1	1	100000	tingxu20220626	6	100.32	100.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:30:25 2022	Mon Jun 27 01:30:28 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	772	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.662	23.640	635256	1	1	100000	tingxu20220626	6	100.34	100.33	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:30:21 2022	Mon Jun 27 01:30:23 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	771	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.703	23.640	635834	1	1	100000	tingxu20220626	6	100.35	100.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:30:15 2022	Mon Jun 27 01:30:17 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	770	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.661	0.000	638380	1	1	100000	tingxu20220626	6	100.38	100.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:30:10 2022	Mon Jun 27 01:30:13 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	769	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.693	23.641	639118	1	1	100000	tingxu20220626	6	100.39	100.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:30:06 2022	Mon Jun 27 01:30:08 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	768	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.650	23.639	642639	1	1	100000	tingxu20220626	6	100.40	100.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:30:01 2022	Mon Jun 27 01:30:03 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	767	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.680	23.639	642226	1	1	100000	tingxu20220626	6	100.41	100.41	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:29:56 2022	Mon Jun 27 01:29:58 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	766	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.637	23.638	641403	1	1	100000	tingxu20220626	6	100.43	100.42	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:29:42 2022	Mon Jun 27 01:29:44 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	765	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.200	-273.150	28.626	23.647	637307	1	1	100000	tingxu20220626	6	100.48	100.47	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:29:37 2022	Mon Jun 27 01:29:39 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	764	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.606	23.639	642258	1	1	100000	tingxu20220626	6	100.49	100.48	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A393_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:29:32 2022	Mon Jun 27 01:29:35 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	763	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.652	23.644	642742	1	1	100000	tingxu20220626	6	100.51	100.50	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:29:27 2022	Mon Jun 27 01:29:29 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	762	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.657	23.644	647886	1	1	100000	tingxu20220626	6	100.52	100.52	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:29:22 2022	Mon Jun 27 01:29:24 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	761	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.639	23.649	639835	1	1	100000	tingxu20220626	6	100.54	100.53	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:29:17 2022	Mon Jun 27 01:29:20 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	760	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.644	23.654	642694	1	1	100000	tingxu20220626	6	100.55	100.55	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:29:08 2022	Mon Jun 27 01:29:10 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	759	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.204	-273.150	0.000	23.659	635929	1	1	100000	tingxu20220626	6	100.59	100.58	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:29:03 2022	Mon Jun 27 01:29:05 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	758	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.677	23.651	598240	1	1	100000	tingxu20220626	6	100.60	100.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:28:58 2022	Mon Jun 27 01:29:01 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	757	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.657	23.660	645505	1	1	100000	tingxu20220626	6	100.61	100.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:28:53 2022	Mon Jun 27 01:28:56 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	756	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.676	23.650	803106	1	1	100000	tingxu20220626	6	100.63	100.62	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:28:48 2022	Mon Jun 27 01:28:50 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	755	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.675	23.648	598025	1	1	100000	tingxu20220626	6	100.65	100.64	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:28:42 2022	Mon Jun 27 01:28:44 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	754	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.702	23.646	642286	1	1	100000	tingxu20220626	6	100.67	100.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A392_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:28:36 2022	Mon Jun 27 01:28:38 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	753	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.664	23.655	640786	1	1	100000	tingxu20220626	6	100.68	100.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:28:30 2022	Mon Jun 27 01:28:33 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	752	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.691	23.649	648111	1	1	100000	tingxu20220626	6	100.71	100.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:28:26 2022	Mon Jun 27 01:28:28 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	751	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.678	23.663	646826	1	1	100000	tingxu20220626	6	100.72	100.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:28:21 2022	Mon Jun 27 01:28:24 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	750	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.650	23.657	645173	1	1	100000	tingxu20220626	6	100.73	100.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:28:16 2022	Mon Jun 27 01:28:19 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	749	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.206	-273.150	28.712	23.652	645111	1	1	100000	tingxu20220626	6	100.75	100.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:28:12 2022	Mon Jun 27 01:28:14 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	748	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.206	-273.150	28.665	23.647	642952	1	1	100000	tingxu20220626	6	100.76	100.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:28:06 2022	Mon Jun 27 01:28:08 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	747	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.664	0.000	638114	1	1	100000	tingxu20220626	6	100.78	100.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:28:01 2022	Mon Jun 27 01:28:04 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	746	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.674	23.668	642740	1	1	100000	tingxu20220626	6	100.79	100.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:27:56 2022	Mon Jun 27 01:27:59 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	745	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.637	23.668	645537	1	1	100000	tingxu20220626	6	100.81	100.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:27:52 2022	Mon Jun 27 01:27:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	744	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.681	0.000	651392	1	1	100000	tingxu20220626	6	100.83	100.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A391_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:27:47 2022	Mon Jun 27 01:27:49 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	743	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.676	23.663	643983	1	1	100000	tingxu20220626	6	100.85	100.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:27:40 2022	Mon Jun 27 01:27:43 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	742	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.204	0.000	28.719	23.659	655809	1	1	100000	tingxu20220626	6	100.86	100.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:27:36 2022	Mon Jun 27 01:27:38 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	741	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.735	23.660	637022	1	1	100000	tingxu20220626	6	100.88	100.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:27:31 2022	Mon Jun 27 01:27:33 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	740	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.695	23.659	644385	1	1	100000	tingxu20220626	6	100.89	100.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:27:26 2022	Mon Jun 27 01:27:28 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	739	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	0.000	23.668	642017	1	1	100000	tingxu20220626	6	100.91	100.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:27:21 2022	Mon Jun 27 01:27:24 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	738	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.699	0.000	645075	1	1	100000	tingxu20220626	6	100.92	100.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:27:17 2022	Mon Jun 27 01:27:19 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	737	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.663	23.647	646474	1	1	100000	tingxu20220626	6	100.94	100.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:27:12 2022	Mon Jun 27 01:27:14 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	736	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.718	23.639	640642	1	1	100000	tingxu20220626	6	100.96	100.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:27:07 2022	Mon Jun 27 01:27:09 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	735	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.688	0.000	648825	1	1	100000	tingxu20220626	6	100.97	100.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:27:00 2022	Mon Jun 27 01:27:03 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	734	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	0.000	28.651	23.650	657528	1	1	100000	tingxu20220626	6	100.99	100.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A390_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:26:56 2022	Mon Jun 27 01:26:58 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	733	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.201	-273.150	28.678	23.645	646812	1	1	100000	tingxu20220626	6	101.01	101.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:26:50 2022	Mon Jun 27 01:26:52 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	732	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.686	23.637	641616	1	1	100000	tingxu20220626	6	101.02	101.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:26:45 2022	Mon Jun 27 01:26:48 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	731	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.630	23.638	646504	1	1	100000	tingxu20220626	6	101.04	101.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:26:41 2022	Mon Jun 27 01:26:43 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	730	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.679	23.641	650596	1	1	100000	tingxu20220626	6	101.05	101.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:26:36 2022	Mon Jun 27 01:26:38 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	729	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.204	-273.150	28.677	23.636	654894	1	1	100000	tingxu20220626	6	101.07	101.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:26:31 2022	Mon Jun 27 01:26:34 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	728	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.617	23.646	640823	1	1	100000	tingxu20220626	6	101.09	101.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:26:27 2022	Mon Jun 27 01:26:29 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	727	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.662	23.645	647199	1	1	100000	tingxu20220626	6	101.10	101.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:26:22 2022	Mon Jun 27 01:26:24 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	726	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.694	23.630	647233	1	1	100000	tingxu20220626	6	101.12	101.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:26:17 2022	Mon Jun 27 01:26:20 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	725	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.667	23.645	644157	1	1	100000	tingxu20220626	6	101.13	101.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:26:12 2022	Mon Jun 27 01:26:15 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	724	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.204	-273.150	28.649	0.000	651911	1	1	100000	tingxu20220626	6	101.15	101.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A389_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:26:07 2022	Mon Jun 27 01:26:10 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	723	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.699	23.647	650747	1	1	100000	tingxu20220626	6	101.16	101.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A388_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:25:25 2022	Mon Jun 27 01:25:27 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	721	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.720	0.000	645560	1	1	100000	tingxu20220626	6	101.30	101.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A388_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:25:20 2022	Mon Jun 27 01:25:23 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	720	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.722	0.000	634241	1	1	100000	tingxu20220626	6	101.32	101.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A388_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:25:16 2022	Mon Jun 27 01:25:18 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	719	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.698	23.647	647933	1	1	100000	tingxu20220626	6	101.33	101.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A388_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:25:11 2022	Mon Jun 27 01:25:13 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	718	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.698	23.643	643877	1	1	100000	tingxu20220626	6	101.34	101.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:25:05 2022	Mon Jun 27 01:25:08 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	717	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.751	0.000	653295	1	1	100000	tingxu20220626	6	101.37	101.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:25:01 2022	Mon Jun 27 01:25:03 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	716	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.755	23.656	646597	1	1	100000	tingxu20220626	6	101.38	101.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:24:52 2022	Mon Jun 27 01:24:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	715	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.763	23.654	647719	1	1	100000	tingxu20220626	6	101.41	101.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:24:47 2022	Mon Jun 27 01:24:50 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	714	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.203	0.000	28.746	23.651	642971	1	1	100000	tingxu20220626	6	101.42	101.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:24:43 2022	Mon Jun 27 01:24:45 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	713	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.698	23.656	649827	1	1	100000	tingxu20220626	6	101.44	101.44	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:24:36 2022	Mon Jun 27 01:24:39 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	712	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.720	23.659	647655	1	1	100000	tingxu20220626	6	101.46	101.45	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:24:32 2022	Mon Jun 27 01:24:34 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	711	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.204	-273.150	28.698	23.662	644014	1	1	100000	tingxu20220626	6	101.47	101.47	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:24:27 2022	Mon Jun 27 01:24:29 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	710	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.688	23.646	641793	1	1	100000	tingxu20220626	6	101.49	101.48	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:24:19 2022	Mon Jun 27 01:24:22 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	709	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.204	-273.150	28.751	23.640	633856	1	1	100000	tingxu20220626	6	101.52	101.51	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A387_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:24:15 2022	Mon Jun 27 01:24:17 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	708	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.689	23.635	651310	1	1	100000	tingxu20220626	6	101.53	101.52	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:24:08 2022	Mon Jun 27 01:24:11 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	707	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.661	23.640	656874	1	1	100000	tingxu20220626	6	101.55	101.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:24:03 2022	Mon Jun 27 01:24:06 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	706	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.205	-273.150	28.705	23.644	571841	1	1	100000	tingxu20220626	6	101.57	101.56	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:23:58 2022	Mon Jun 27 01:24:01 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	705	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.662	23.640	647529	1	1	100000	tingxu20220626	6	101.58	101.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:23:48 2022	Mon Jun 27 01:23:51 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	704	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.684	23.640	648914	1	1	100000	tingxu20220626	6	101.62	101.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:23:44 2022	Mon Jun 27 01:23:46 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	703	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.651	23.658	649998	1	1	100000	tingxu20220626	6	101.63	101.62	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:23:39 2022	Mon Jun 27 01:23:41 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	702	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.707	23.660	647901	1	1	100000	tingxu20220626	6	101.65	101.64	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:23:34 2022	Mon Jun 27 01:23:36 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	701	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.670	23.655	649141	1	1	100000	tingxu20220626	6	101.66	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:23:29 2022	Mon Jun 27 01:23:32 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	700	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.704	23.660	649970	1	1	100000	tingxu20220626	6	101.68	101.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:23:25 2022	Mon Jun 27 01:23:27 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	699	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.658	23.655	649145	1	1	100000	tingxu20220626	6	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A386_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:23:16 2022	Mon Jun 27 01:23:18 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	698	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.198	-273.150	28.685	23.656	653676	1	1	100000	tingxu20220626	6	101.72	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:23:10 2022	Mon Jun 27 01:23:12 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	697	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.198	-273.150	28.678	23.662	647721	1	1	100000	tingxu20220626	6	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:23:05 2022	Mon Jun 27 01:23:08 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	696	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.711	0.000	652069	1	1	100000	tingxu20220626	6	101.76	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:23:00 2022	Mon Jun 27 01:23:03 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	695	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.688	23.664	651926	1	1	100000	tingxu20220626	6	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:22:56 2022	Mon Jun 27 01:22:58 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	694	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.698	23.663	647163	1	1	100000	tingxu20220626	6	101.78	101.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:22:51 2022	Mon Jun 27 01:22:53 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	693	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.743	23.657	644140	1	1	100000	tingxu20220626	6	101.80	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:22:46 2022	Mon Jun 27 01:22:48 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	692	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.698	23.650	649687	1	1	100000	tingxu20220626	6	101.82	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:22:41 2022	Mon Jun 27 01:22:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	691	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.745	0.000	644053	1	1	100000	tingxu20220626	6	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:22:35 2022	Mon Jun 27 01:22:37 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	690	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.644	23.650	652432	1	1	100000	tingxu20220626	6	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:22:30 2022	Mon Jun 27 01:22:32 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	689	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	0.000	28.724	23.661	646471	1	1	100000	tingxu20220626	6	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A385_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:22:25 2022	Mon Jun 27 01:22:28 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	688	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.196	-273.150	28.700	23.662	643243	1	1	100000	tingxu20220626	6	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:22:20 2022	Mon Jun 27 01:22:22 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	687	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.696	23.654	648877	1	1	100000	tingxu20220626	6	101.91	101.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:22:15 2022	Mon Jun 27 01:22:17 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	686	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.747	23.652	650383	1	1	100000	tingxu20220626	6	101.92	101.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:22:10 2022	Mon Jun 27 01:22:13 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	685	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.710	0.000	647080	1	1	100000	tingxu20220626	6	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:22:06 2022	Mon Jun 27 01:22:08 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	684	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.596	23.653	649090	1	1	100000	tingxu20220626	6	101.96	101.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:22:01 2022	Mon Jun 27 01:22:03 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	683	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.664	23.655	652342	1	1	100000	tingxu20220626	6	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:21:56 2022	Mon Jun 27 01:21:58 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	682	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.673	23.660	645387	1	1	100000	tingxu20220626	6	101.98	101.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:21:51 2022	Mon Jun 27 01:21:54 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	681	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.667	23.654	649076	1	1	100000	tingxu20220626	6	102.00	101.99	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:21:46 2022	Mon Jun 27 01:21:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	680	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.197	-273.150	28.674	23.652	649585	1	1	100000	tingxu20220626	6	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:21:42 2022	Mon Jun 27 01:21:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	679	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	0.000	28.678	23.641	646073	1	1	100000	tingxu20220626	6	102.03	102.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A384_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:21:35 2022	Mon Jun 27 01:21:37 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	678	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.691	23.652	642333	1	1	100000	tingxu20220626	6	102.05	102.04	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:21:30 2022	Mon Jun 27 01:21:32 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	677	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.752	23.661	648794	1	1	100000	tingxu20220626	6	102.07	102.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:21:25 2022	Mon Jun 27 01:21:27 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	676	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.698	23.664	646513	1	1	100000	tingxu20220626	6	102.08	102.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:21:20 2022	Mon Jun 27 01:21:23 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	675	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.670	23.659	658634	1	1	100000	tingxu20220626	6	102.10	102.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:21:16 2022	Mon Jun 27 01:21:18 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	674	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.671	23.661	650903	1	1	100000	tingxu20220626	6	101.68	102.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:21:11 2022	Mon Jun 27 01:21:13 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	673	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	0.000	23.659	645739	1	1	100000	tingxu20220626	6	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:21:06 2022	Mon Jun 27 01:21:09 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	672	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.695	0.000	634140	1	1	100000	tingxu20220626	6	101.71	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:21:02 2022	Mon Jun 27 01:21:04 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	671	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.642	23.653	651022	1	1	100000	tingxu20220626	6	101.73	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:20:57 2022	Mon Jun 27 01:20:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	670	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.651	23.667	651743	1	1	100000	tingxu20220626	6	101.74	101.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:20:35 2022	Mon Jun 27 01:20:37 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	669	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.648	23.669	654577	1	1	100000	tingxu20220626	6	101.81	101.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A383_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:20:30 2022	Mon Jun 27 01:20:32 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	668	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.745	23.648	648107	1	1	100000	tingxu20220626	6	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:20:24 2022	Mon Jun 27 01:20:27 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	667	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.680	23.642	606079	1	1	100000	tingxu20220626	6	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:20:19 2022	Mon Jun 27 01:20:22 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	666	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.695	23.671	649084	1	1	100000	tingxu20220626	6	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:20:15 2022	Mon Jun 27 01:20:17 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	665	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.726	0.000	649217	1	1	100000	tingxu20220626	6	101.87	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:20:10 2022	Mon Jun 27 01:20:12 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	664	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.199	-273.150	28.727	23.664	649754	1	1	100000	tingxu20220626	6	101.89	101.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:20:04 2022	Mon Jun 27 01:20:07 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	663	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.682	23.661	643943	1	1	100000	tingxu20220626	6	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:20:00 2022	Mon Jun 27 01:20:02 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	662	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.706	23.650	652447	1	1	100000	tingxu20220626	6	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:19:55 2022	Mon Jun 27 01:19:57 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	661	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.200	0.000	28.702	23.650	651360	1	1	100000	tingxu20220626	6	101.94	101.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:19:50 2022	Mon Jun 27 01:19:53 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	660	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.663	23.655	645778	1	1	100000	tingxu20220626	6	101.95	101.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:19:46 2022	Mon Jun 27 01:19:48 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	659	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.656	23.659	652132	1	1	100000	tingxu20220626	6	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A382_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:19:41 2022	Mon Jun 27 01:19:43 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	658	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.694	23.666	652515	1	1	100000	tingxu20220626	6	101.98	101.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:19:34 2022	Mon Jun 27 01:19:36 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	657	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.680	0.000	660165	1	1	100000	tingxu20220626	6	102.01	102.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:19:29 2022	Mon Jun 27 01:19:31 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	656	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.678	23.655	651250	1	1	100000	tingxu20220626	6	102.02	102.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:19:24 2022	Mon Jun 27 01:19:26 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	655	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.199	-273.150	28.722	0.000	656800	1	1	100000	tingxu20220626	6	102.04	102.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:19:19 2022	Mon Jun 27 01:19:22 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	654	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.198	-273.150	28.708	23.667	652152	1	1	100000	tingxu20220626	6	102.06	102.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:19:14 2022	Mon Jun 27 01:19:17 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	653	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.705	23.664	649999	1	1	100000	tingxu20220626	6	101.64	101.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:19:09 2022	Mon Jun 27 01:19:12 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	652	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	0.000	23.664	577754	1	1	100000	tingxu20220626	6	101.66	101.65	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:18:59 2022	Mon Jun 27 01:19:01 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	651	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.678	23.669	651253	1	1	100000	tingxu20220626	6	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:18:54 2022	Mon Jun 27 01:18:56 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	650	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.690	23.671	623081	1	1	100000	tingxu20220626	6	101.70	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:18:49 2022	Mon Jun 27 01:18:52 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	649	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.725	23.666	647531	1	1	100000	tingxu20220626	6	101.72	101.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A381_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:18:45 2022	Mon Jun 27 01:18:47 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	648	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.744	23.662	648221	1	1	100000	tingxu20220626	6	101.73	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:18:39 2022	Mon Jun 27 01:18:41 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	647	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.785	23.665	648409	1	1	100000	tingxu20220626	6	101.75	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:18:34 2022	Mon Jun 27 01:18:36 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	646	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.714	23.675	643973	1	1	100000	tingxu20220626	6	101.77	101.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:18:26 2022	Mon Jun 27 01:18:28 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	645	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.198	-273.150	28.750	23.675	647277	1	1	100000	tingxu20220626	6	101.80	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:18:21 2022	Mon Jun 27 01:18:23 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	644	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.679	23.672	648390	1	1	100000	tingxu20220626	6	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:18:16 2022	Mon Jun 27 01:18:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	643	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.707	0.000	646781	1	1	100000	tingxu20220626	6	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:18:12 2022	Mon Jun 27 01:18:14 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	642	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	0.000	23.665	651116	1	1	100000	tingxu20220626	6	101.84	101.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:18:07 2022	Mon Jun 27 01:18:09 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	641	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.715	23.660	644071	1	1	100000	tingxu20220626	6	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:18:02 2022	Mon Jun 27 01:18:04 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	640	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.726	23.660	646710	1	1	100000	tingxu20220626	6	101.87	101.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:17:57 2022	Mon Jun 27 01:18:00 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	639	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.650	23.657	642022	1	1	100000	tingxu20220626	6	101.88	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A380_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:17:52 2022	Mon Jun 27 01:17:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	638	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.697	23.655	639242	1	1	100000	tingxu20220626	6	101.90	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:17:47 2022	Mon Jun 27 01:17:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	637	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.748	23.647	644066	1	1	100000	tingxu20220626	6	101.92	101.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:17:42 2022	Mon Jun 27 01:17:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	636	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.688	23.659	643111	1	1	100000	tingxu20220626	6	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:17:37 2022	Mon Jun 27 01:17:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	635	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.702	0.000	641643	1	1	100000	tingxu20220626	6	101.95	101.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:17:32 2022	Mon Jun 27 01:17:34 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	634	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.693	23.660	648525	1	1	100000	tingxu20220626	6	101.97	101.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:17:22 2022	Mon Jun 27 01:17:24 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	633	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	0.000	28.696	23.661	653930	1	1	100000	tingxu20220626	6	102.00	101.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:17:17 2022	Mon Jun 27 01:17:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	632	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	0.000	28.633	23.657	646671	1	1	100000	tingxu20220626	6	102.02	102.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:17:12 2022	Mon Jun 27 01:17:15 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	631	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.730	23.656	648219	1	1	100000	tingxu20220626	6	101.60	101.59	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:17:08 2022	Mon Jun 27 01:17:10 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	630	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.697	0.000	646110	1	1	100000	tingxu20220626	6	101.62	101.61	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:17:03 2022	Mon Jun 27 01:17:05 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	629	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	0.000	23.663	642808	1	1	100000	tingxu20220626	6	101.63	101.63	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A379_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:16:58 2022	Mon Jun 27 01:17:00 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	628	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.698	23.663	648845	1	1	100000	tingxu20220626	6	101.65	101.64	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:16:52 2022	Mon Jun 27 01:16:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	627	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.712	23.665	646988	1	1	100000	tingxu20220626	6	101.67	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:16:48 2022	Mon Jun 27 01:16:50 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	626	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.663	23.664	648746	1	1	100000	tingxu20220626	6	101.68	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:16:43 2022	Mon Jun 27 01:16:45 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	625	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.689	23.659	645788	1	1	100000	tingxu20220626	6	101.70	101.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:16:38 2022	Mon Jun 27 01:16:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	624	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.710	23.654	646155	1	1	100000	tingxu20220626	6	101.71	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:16:33 2022	Mon Jun 27 01:16:36 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	623	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.730	23.656	527513	1	1	100000	tingxu20220626	6	101.73	101.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:16:29 2022	Mon Jun 27 01:16:31 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	622	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.202	-273.150	28.751	23.658	647261	1	1	100000	tingxu20220626	6	101.74	101.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:16:24 2022	Mon Jun 27 01:16:26 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	621	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.713	0.000	646384	1	1	100000	tingxu20220626	6	101.76	101.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:16:18 2022	Mon Jun 27 01:16:20 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	620	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.697	23.657	643133	1	1	100000	tingxu20220626	6	101.78	101.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:16:13 2022	Mon Jun 27 01:16:16 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	619	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.677	23.662	648861	1	1	100000	tingxu20220626	6	101.79	101.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A378_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:16:08 2022	Mon Jun 27 01:16:11 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	618	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.201	-273.150	28.730	0.000	644576	1	1	100000	tingxu20220626	6	101.81	101.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:16:03 2022	Mon Jun 27 01:16:05 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	617	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.667	23.670	649330	1	1	100000	tingxu20220626	6	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:15:58 2022	Mon Jun 27 01:16:00 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	616	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	0.000	28.703	23.666	644903	1	1	100000	tingxu20220626	6	101.84	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:15:53 2022	Mon Jun 27 01:15:56 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	615	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.696	23.657	645087	1	1	100000	tingxu20220626	6	101.86	101.85	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:15:49 2022	Mon Jun 27 01:15:51 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	614	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.723	23.653	643347	1	1	100000	tingxu20220626	6	101.87	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:15:44 2022	Mon Jun 27 01:15:46 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	613	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.738	23.663	647017	1	1	100000	tingxu20220626	6	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:15:39 2022	Mon Jun 27 01:15:41 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	612	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.666	23.659	644562	1	1	100000	tingxu20220626	6	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:15:30 2022	Mon Jun 27 01:15:33 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	611	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.645	23.660	648164	1	1	100000	tingxu20220626	6	101.93	101.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:15:25 2022	Mon Jun 27 01:15:28 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	610	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.702	23.662	644894	1	1	100000	tingxu20220626	6	101.95	101.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:15:21 2022	Mon Jun 27 01:15:23 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	609	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.720	23.662	646942	1	1	100000	tingxu20220626	6	101.97	101.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A377_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:15:13 2022	Mon Jun 27 01:15:16 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	608	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.732	0.000	644027	1	1	100000	tingxu20220626	6	101.57	101.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:15:08 2022	Mon Jun 27 01:15:10 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	607	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	0.000	28.744	23.659	645685	1	1	100000	tingxu20220626	6	101.58	101.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:15:03 2022	Mon Jun 27 01:15:05 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	606	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.689	23.669	646859	1	1	100000	tingxu20220626	6	101.60	101.59	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:14:58 2022	Mon Jun 27 01:15:00 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	605	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.754	23.667	649669	1	1	100000	tingxu20220626	6	101.62	101.61	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:14:53 2022	Mon Jun 27 01:14:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	604	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	0.000	28.725	23.665	649638	1	1	100000	tingxu20220626	6	101.64	101.63	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:14:48 2022	Mon Jun 27 01:14:51 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	603	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.677	23.666	541854	1	1	100000	tingxu20220626	6	101.65	101.64	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:14:43 2022	Mon Jun 27 01:14:45 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	602	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.695	23.673	646627	1	1	100000	tingxu20220626	6	101.67	101.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:14:38 2022	Mon Jun 27 01:14:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	601	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.684	23.665	649805	1	1	100000	tingxu20220626	6	101.69	101.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:14:33 2022	Mon Jun 27 01:14:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	600	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.674	23.663	647024	1	1	100000	tingxu20220626	6	101.70	101.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:14:28 2022	Mon Jun 27 01:14:30 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	599	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.728	23.667	648183	1	1	100000	tingxu20220626	6	101.72	101.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A376_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:14:23 2022	Mon Jun 27 01:14:26 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	598	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.628	23.659	646030	1	1	100000	tingxu20220626	6	101.73	101.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:14:18 2022	Mon Jun 27 01:14:20 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	597	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.679	23.658	647627	1	1	100000	tingxu20220626	6	101.75	101.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:14:13 2022	Mon Jun 27 01:14:15 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	596	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.747	23.644	649333	1	1	100000	tingxu20220626	6	101.77	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:14:08 2022	Mon Jun 27 01:14:11 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	595	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.639	0.000	651062	1	1	100000	tingxu20220626	6	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:14:04 2022	Mon Jun 27 01:14:06 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	594	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.697	23.644	666908	1	1	100000	tingxu20220626	6	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:13:59 2022	Mon Jun 27 01:14:01 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	593	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.729	23.650	642240	1	1	100000	tingxu20220626	6	101.82	101.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:13:54 2022	Mon Jun 27 01:13:56 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	592	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.688	23.642	646187	1	1	100000	tingxu20220626	6	101.83	101.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:13:49 2022	Mon Jun 27 01:13:52 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	591	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.657	23.640	647696	1	1	100000	tingxu20220626	6	101.84	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:13:45 2022	Mon Jun 27 01:13:47 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	590	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.205	-273.150	28.757	23.644	648093	1	1	100000	tingxu20220626	6	101.86	101.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:13:39 2022	Mon Jun 27 01:13:42 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	589	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.717	23.653	550407	1	1	100000	tingxu20220626	6	101.88	101.87	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A375_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:13:34 2022	Mon Jun 27 01:13:37 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	588	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.744	23.650	648302	1	1	100000	tingxu20220626	6	101.89	101.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:12:32 2022	Mon Jun 27 01:12:34 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	586	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.715	23.656	654788	1	1	100000	tingxu20220626	6	101.66	101.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:12:27 2022	Mon Jun 27 01:12:30 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	585	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.677	23.661	650339	1	1	100000	tingxu20220626	6	101.68	101.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:12:22 2022	Mon Jun 27 01:12:25 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	584	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.199	-273.150	28.680	23.659	648439	1	1	100000	tingxu20220626	6	101.70	101.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:12:18 2022	Mon Jun 27 01:12:20 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	583	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.594	0.000	646399	1	1	100000	tingxu20220626	6	101.71	101.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:12:13 2022	Mon Jun 27 01:12:15 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	582	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.676	23.643	652357	1	1	100000	tingxu20220626	6	101.73	101.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:12:08 2022	Mon Jun 27 01:12:10 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	581	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.678	23.656	649013	1	1	100000	tingxu20220626	6	101.74	101.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:12:02 2022	Mon Jun 27 01:12:04 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	580	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.636	23.657	646541	1	1	100000	tingxu20220626	6	101.76	101.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A374_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:11:57 2022	Mon Jun 27 01:12:00 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	579	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.671	23.665	652690	1	1	100000	tingxu20220626	6	101.78	101.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:11:52 2022	Mon Jun 27 01:11:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	578	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.200	-273.150	28.726	23.656	649759	1	1	100000	tingxu20220626	6	101.80	101.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:11:47 2022	Mon Jun 27 01:11:49 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	577	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.676	0.000	648346	1	1	100000	tingxu20220626	6	101.81	101.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:11:42 2022	Mon Jun 27 01:11:44 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	576	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.691	23.663	649234	1	1	100000	tingxu20220626	6	101.83	101.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:11:37 2022	Mon Jun 27 01:11:40 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	575	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.588	23.652	652612	1	1	100000	tingxu20220626	6	101.85	101.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:11:28 2022	Mon Jun 27 01:11:30 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	574	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.673	23.652	654328	1	1	100000	tingxu20220626	6	101.88	101.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:11:23 2022	Mon Jun 27 01:11:25 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	573	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	0.000	28.691	23.658	653437	1	1	100000	tingxu20220626	6	101.89	101.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:11:18 2022	Mon Jun 27 01:11:20 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	572	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.200	0.000	28.676	23.658	624064	1	1	100000	tingxu20220626	6	101.91	101.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:11:13 2022	Mon Jun 27 01:11:16 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	571	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.200	-273.150	28.696	0.000	643605	1	1	100000	tingxu20220626	6	101.27	101.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:11:08 2022	Mon Jun 27 01:11:11 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	570	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.200	-273.150	28.665	23.674	650209	1	1	100000	tingxu20220626	6	101.28	101.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A373_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:10:59 2022	Mon Jun 27 01:11:01 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	569	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.700	23.675	650195	1	1	100000	tingxu20220626	6	101.31	101.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A372_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:10:08 2022	Mon Jun 27 01:10:10 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	567	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.658	0.000	646861	1	1	100000	tingxu20220626	6	101.48	101.47	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A372_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:10:03 2022	Mon Jun 27 01:10:05 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	566	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	0.000	23.665	645920	1	1	100000	tingxu20220626	6	101.50	101.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:09:57 2022	Mon Jun 27 01:09:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	565	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.636	23.665	641859	1	1	100000	tingxu20220626	6	101.51	101.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:09:52 2022	Mon Jun 27 01:09:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	564	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.720	23.666	643615	1	1	100000	tingxu20220626	6	101.53	101.52	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:09:47 2022	Mon Jun 27 01:09:50 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	563	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.198	-273.150	28.702	23.665	645153	1	1	100000	tingxu20220626	6	101.54	101.54	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:09:43 2022	Mon Jun 27 01:09:45 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	562	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.198	-273.150	28.737	23.665	645040	1	1	100000	tingxu20220626	6	101.56	101.55	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:09:38 2022	Mon Jun 27 01:09:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	561	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.198	-273.150	28.682	23.656	644525	1	1	100000	tingxu20220626	6	101.57	101.56	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:09:33 2022	Mon Jun 27 01:09:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	560	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	27.198	-273.150	28.729	0.000	646667	1	1	100000	tingxu20220626	6	101.59	101.58	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:09:26 2022	Mon Jun 27 01:09:28 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	559	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.197	-273.150	0.000	23.666	644413	1	1	100000	tingxu20220626	6	101.61	101.60	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:09:20 2022	Mon Jun 27 01:09:23 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	558	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.703	23.664	645356	1	1	100000	tingxu20220626	6	101.63	101.62	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:09:15 2022	Mon Jun 27 01:09:18 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	557	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.198	-273.150	0.000	23.669	642764	1	1	100000	tingxu20220626	6	101.00	101.64	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A371_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:09:11 2022	Mon Jun 27 01:09:13 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	556	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.671	23.662	644196	1	1	100000	tingxu20220626	6	101.02	101.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:09:05 2022	Mon Jun 27 01:09:08 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	555	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.198	-273.150	28.740	23.667	643815	1	1	100000	tingxu20220626	6	101.04	101.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:09:00 2022	Mon Jun 27 01:09:03 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	554	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.715	23.658	642851	1	1	100000	tingxu20220626	6	101.05	101.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:08:56 2022	Mon Jun 27 01:08:58 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	553	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.197	-273.150	28.767	23.664	646054	1	1	100000	tingxu20220626	6	101.07	101.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:08:50 2022	Mon Jun 27 01:08:53 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	552	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.197	-273.150	28.713	23.667	640095	1	1	100000	tingxu20220626	6	101.08	101.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:08:46 2022	Mon Jun 27 01:08:48 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	551	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.734	0.000	643411	1	1	100000	tingxu20220626	6	101.10	101.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:08:41 2022	Mon Jun 27 01:08:43 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	550	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.201	-273.150	28.712	23.668	646087	1	1	100000	tingxu20220626	6	101.11	101.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:08:36 2022	Mon Jun 27 01:08:38 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	549	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.697	23.668	637042	1	1	100000	tingxu20220626	6	101.13	101.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:08:26 2022	Mon Jun 27 01:08:28 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	548	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.746	0.000	641028	1	1	100000	tingxu20220626	6	101.16	101.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:08:17 2022	Mon Jun 27 01:08:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	547	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	28.698	0.000	644875	1	1	100000	tingxu20220626	6	101.19	101.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A370_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:08:12 2022	Mon Jun 27 01:08:15 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	546	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.694	0.000	644075	1	1	100000	tingxu20220626	6	101.20	101.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:08:07 2022	Mon Jun 27 01:08:09 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	545	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.204	-273.150	0.000	23.677	646342	1	1	100000	tingxu20220626	6	101.22	101.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:08:02 2022	Mon Jun 27 01:08:04 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	544	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.675	23.670	647247	1	1	100000	tingxu20220626	6	101.23	101.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:07:57 2022	Mon Jun 27 01:07:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	543	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.730	23.667	641044	1	1	100000	tingxu20220626	6	101.25	101.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:07:52 2022	Mon Jun 27 01:07:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	542	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.735	23.663	642371	1	1	100000	tingxu20220626	6	101.26	101.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:07:46 2022	Mon Jun 27 01:07:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	541	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.683	23.668	643367	1	1	100000	tingxu20220626	6	101.28	101.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:07:41 2022	Mon Jun 27 01:07:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	540	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.689	23.669	647096	1	1	100000	tingxu20220626	6	101.30	101.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:07:37 2022	Mon Jun 27 01:07:39 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	539	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.651	23.661	641279	1	1	100000	tingxu20220626	6	101.32	101.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:07:32 2022	Mon Jun 27 01:07:34 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	538	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.710	23.654	646962	1	1	100000	tingxu20220626	6	101.33	101.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:07:26 2022	Mon Jun 27 01:07:28 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	537	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.203	0.000	28.651	23.654	674562	1	1	100000	tingxu20220626	6	101.35	101.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A369_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:07:21 2022	Mon Jun 27 01:07:23 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	536	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.204	-273.150	28.677	23.647	651221	1	1	100000	tingxu20220626	6	101.37	101.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:07:16 2022	Mon Jun 27 01:07:18 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	535	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.703	23.647	640745	1	1	100000	tingxu20220626	6	100.74	101.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:07:11 2022	Mon Jun 27 01:07:13 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	534	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.202	-273.150	28.700	23.647	641597	1	1	100000	tingxu20220626	6	100.75	100.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:07:06 2022	Mon Jun 27 01:07:08 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	533	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.201	-273.150	28.702	0.000	640870	1	1	100000	tingxu20220626	6	100.76	100.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:07:01 2022	Mon Jun 27 01:07:04 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	532	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.201	-273.150	28.694	23.667	641359	1	1	100000	tingxu20220626	6	100.78	100.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:06:56 2022	Mon Jun 27 01:06:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	531	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.678	0.000	644601	1	1	100000	tingxu20220626	6	100.80	100.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:06:52 2022	Mon Jun 27 01:06:54 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	530	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.691	23.671	641309	1	1	100000	tingxu20220626	6	100.81	100.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:06:47 2022	Mon Jun 27 01:06:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	529	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.200	0.000	28.681	23.672	641355	1	1	100000	tingxu20220626	6	100.82	100.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:06:41 2022	Mon Jun 27 01:06:43 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	528	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.202	-273.150	28.714	0.000	642319	1	1	100000	tingxu20220626	6	100.84	100.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:06:36 2022	Mon Jun 27 01:06:39 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	527	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.682	0.000	635091	1	1	100000	tingxu20220626	6	100.85	100.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A368_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:06:31 2022	Mon Jun 27 01:06:34 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	526	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.202	0.000	28.664	23.676	640297	1	1	100000	tingxu20220626	6	100.87	100.86	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:06:24 2022	Mon Jun 27 01:06:26 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	525	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.687	23.669	641088	1	1	100000	tingxu20220626	6	100.89	100.89	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:06:19 2022	Mon Jun 27 01:06:22 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	524	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.742	0.000	637276	1	1	100000	tingxu20220626	6	100.91	100.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:06:15 2022	Mon Jun 27 01:06:17 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	523	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.697	23.653	637717	1	1	100000	tingxu20220626	6	100.92	100.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:06:08 2022	Mon Jun 27 01:06:10 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	522	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.682	23.643	640051	1	1	100000	tingxu20220626	6	100.94	100.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:06:03 2022	Mon Jun 27 01:06:05 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	521	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.728	23.650	642410	1	1	100000	tingxu20220626	6	100.96	100.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:05:58 2022	Mon Jun 27 01:06:01 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	520	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.700	23.657	640630	1	1	100000	tingxu20220626	6	100.97	100.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:05:53 2022	Mon Jun 27 01:05:56 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	519	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.691	23.657	639149	1	1	100000	tingxu20220626	6	100.99	100.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:05:48 2022	Mon Jun 27 01:05:51 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	518	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.201	-273.150	28.715	23.655	676442	1	1	100000	tingxu20220626	6	101.01	101.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:05:44 2022	Mon Jun 27 01:05:46 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	517	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	0.000	28.717	23.653	643399	1	1	100000	tingxu20220626	6	101.02	101.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A367_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:05:39 2022	Mon Jun 27 01:05:41 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	516	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.683	23.652	643167	1	1	100000	tingxu20220626	6	101.04	101.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:05:33 2022	Mon Jun 27 01:05:36 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	515	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.702	23.651	560336	1	1	100000	tingxu20220626	6	101.06	101.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:05:28 2022	Mon Jun 27 01:05:31 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	514	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.710	0.000	639997	1	1	100000	tingxu20220626	6	101.07	101.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:05:23 2022	Mon Jun 27 01:05:25 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	513	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.700	0.000	638979	1	1	100000	tingxu20220626	6	101.09	101.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:05:18 2022	Mon Jun 27 01:05:20 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	512	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.670	23.661	643132	1	1	100000	tingxu20220626	6	101.11	101.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:05:13 2022	Mon Jun 27 01:05:16 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	511	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.737	23.665	636798	1	1	100000	tingxu20220626	6	100.47	100.46	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:05:08 2022	Mon Jun 27 01:05:11 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	510	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.203	-273.150	28.742	23.662	639255	1	1	100000	tingxu20220626	6	100.48	100.47	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:05:03 2022	Mon Jun 27 01:05:06 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	509	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.711	23.669	635064	1	1	100000	tingxu20220626	6	100.50	100.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:04:59 2022	Mon Jun 27 01:05:01 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	508	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.758	23.663	634084	1	1	100000	tingxu20220626	6	100.52	100.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:04:54 2022	Mon Jun 27 01:04:56 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	507	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.665	23.658	637715	1	1	100000	tingxu20220626	6	100.53	100.52	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A366_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:04:49 2022	Mon Jun 27 01:04:52 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	506	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.202	-273.150	28.708	23.652	635803	1	1	100000	tingxu20220626	6	100.54	100.54	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:03:52 2022	Mon Jun 27 01:03:54 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	504	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.202	0.000	28.679	23.653	637953	1	1	100000	tingxu20220626	6	100.73	100.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:03:48 2022	Mon Jun 27 01:03:50 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	503	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.673	0.000	625232	1	1	100000	tingxu20220626	6	100.74	100.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:03:43 2022	Mon Jun 27 01:03:46 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	502	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.737	23.651	642258	1	1	100000	tingxu20220626	6	100.76	100.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:03:38 2022	Mon Jun 27 01:03:41 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	501	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.709	23.661	638899	1	1	100000	tingxu20220626	6	100.77	100.76	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:03:34 2022	Mon Jun 27 01:03:36 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	500	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.698	23.660	648311	1	1	100000	tingxu20220626	6	100.79	100.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:03:24 2022	Mon Jun 27 01:03:27 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	499	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.203	-273.150	28.681	23.662	608162	1	1	100000	tingxu20220626	6	100.82	100.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:03:19 2022	Mon Jun 27 01:03:22 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	498	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.676	23.650	640521	1	1	100000	tingxu20220626	6	100.83	100.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:03:15 2022	Mon Jun 27 01:03:17 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	497	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.733	0.000	634821	1	1	100000	tingxu20220626	6	100.20	100.20	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A365_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:03:10 2022	Mon Jun 27 01:03:12 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	496	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.650	23.640	638029	1	1	100000	tingxu20220626	6	100.22	100.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:03:04 2022	Mon Jun 27 01:03:07 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	495	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.201	0.000	28.681	23.656	636957	1	1	100000	tingxu20220626	6	100.24	100.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:03:00 2022	Mon Jun 27 01:03:02 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	494	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.725	23.660	638645	1	1	100000	tingxu20220626	6	100.25	100.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:02:55 2022	Mon Jun 27 01:02:57 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	493	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.719	23.685	639341	1	1	100000	tingxu20220626	6	100.27	100.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:02:50 2022	Mon Jun 27 01:02:53 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	492	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.754	0.000	636539	1	1	100000	tingxu20220626	6	100.28	100.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:02:45 2022	Mon Jun 27 01:02:48 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	491	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.706	23.677	640204	1	1	100000	tingxu20220626	6	100.30	100.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:02:41 2022	Mon Jun 27 01:02:43 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	490	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.719	23.661	640910	1	1	100000	tingxu20220626	6	100.31	100.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:02:36 2022	Mon Jun 27 01:02:38 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	489	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.196	-273.150	28.696	23.666	641471	1	1	100000	tingxu20220626	6	100.33	100.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:02:31 2022	Mon Jun 27 01:02:34 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	488	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	28.692	23.667	633911	1	1	100000	tingxu20220626	6	100.34	100.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:02:26 2022	Mon Jun 27 01:02:28 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	487	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.196	-273.150	28.711	23.666	640248	1	1	100000	tingxu20220626	6	100.36	100.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A364_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:02:21 2022	Mon Jun 27 01:02:23 2022	0.000	0.000	0.000	-0.700	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	486	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.197	-273.150	0.000	23.667	638684	1	1	100000	tingxu20220626	6	100.37	100.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:01:47 2022	Mon Jun 27 01:01:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	484	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.203	-273.150	28.710	0.000	638979	1	1	100000	tingxu20220626	6	100.49	100.48	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:01:42 2022	Mon Jun 27 01:01:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	483	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.204	-273.150	28.742	23.657	641993	1	1	100000	tingxu20220626	6	100.50	100.49	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:01:37 2022	Mon Jun 27 01:01:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	482	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.708	23.655	642259	1	1	100000	tingxu20220626	6	100.52	100.51	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:01:32 2022	Mon Jun 27 01:01:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	481	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.672	23.662	641603	1	1	100000	tingxu20220626	6	100.53	100.52	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:01:28 2022	Mon Jun 27 01:01:30 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	480	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.202	-273.150	28.722	23.666	642387	1	1	100000	tingxu20220626	6	100.55	100.54	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:01:22 2022	Mon Jun 27 01:01:24 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	479	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.201	-273.150	28.786	23.663	641848	1	1	100000	tingxu20220626	6	100.57	100.56	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A363_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:01:17 2022	Mon Jun 27 01:01:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	478	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.672	23.667	639044	1	1	100000	tingxu20220626	6	99.94	100.57	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:01:11 2022	Mon Jun 27 01:01:14 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	477	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.199	-273.150	28.684	23.659	635034	1	1	100000	tingxu20220626	6	99.96	99.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:01:07 2022	Mon Jun 27 01:01:09 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	476	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.200	-273.150	28.776	23.658	637754	1	1	100000	tingxu20220626	6	99.97	99.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:01:02 2022	Mon Jun 27 01:01:04 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	475	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.678	0.000	634723	1	1	100000	tingxu20220626	6	99.99	99.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:00:57 2022	Mon Jun 27 01:00:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	474	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.735	23.661	636334	1	1	100000	tingxu20220626	6	100.01	100.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 01:00:52 2022	Mon Jun 27 01:00:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	473	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.199	-273.150	28.691	23.660	642006	1	1	100000	tingxu20220626	6	100.02	100.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 01:00:46 2022	Mon Jun 27 01:00:48 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	472	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.198	-273.150	0.000	23.659	636479	1	1	100000	tingxu20220626	6	100.04	100.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 01:00:41 2022	Mon Jun 27 01:00:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	471	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.196	-273.150	28.669	23.660	638426	1	1	100000	tingxu20220626	6	100.06	100.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 01:00:37 2022	Mon Jun 27 01:00:39 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	470	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.195	-273.150	28.693	23.658	635658	1	1	100000	tingxu20220626	6	100.07	100.06	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 01:00:32 2022	Mon Jun 27 01:00:34 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	469	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.193	-273.150	0.000	23.664	638914	1	1	100000	tingxu20220626	6	100.09	100.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A362_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 01:00:22 2022	Mon Jun 27 01:00:24 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	468	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.194	-273.150	28.697	23.672	642736	1	1	100000	tingxu20220626	6	100.12	100.11	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 01:00:16 2022	Mon Jun 27 01:00:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	467	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.193	-273.150	28.705	23.664	634817	1	1	100000	tingxu20220626	6	100.13	100.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 01:00:11 2022	Mon Jun 27 01:00:14 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	466	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.193	-273.150	28.711	23.667	866326	1	1	100000	tingxu20220626	6	100.15	100.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 01:00:06 2022	Mon Jun 27 01:00:08 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	465	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.192	-273.150	28.674	23.673	636530	1	1	100000	tingxu20220626	6	100.17	100.16	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 01:00:01 2022	Mon Jun 27 01:00:03 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	464	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.191	-273.150	28.725	23.669	638835	1	1	100000	tingxu20220626	6	100.18	100.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:59:56 2022	Mon Jun 27 00:59:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	463	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.191	-273.150	28.717	23.667	639807	1	1	100000	tingxu20220626	6	100.20	100.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:59:52 2022	Mon Jun 27 00:59:54 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	462	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.191	-273.150	28.769	23.668	640777	1	1	100000	tingxu20220626	6	100.22	100.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:59:42 2022	Mon Jun 27 00:59:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	461	00	25.00	24.99	25.00	24.98	25.000	25.000	25.000	27.191	-273.150	28.726	23.677	640536	1	1	100000	tingxu20220626	6	100.24	100.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:59:37 2022	Mon Jun 27 00:59:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	460	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.192	-273.150	28.787	23.671	641116	1	1	100000	tingxu20220626	6	100.26	100.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:59:32 2022	Mon Jun 27 00:59:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	459	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.191	-273.150	28.718	23.672	640913	1	1	100000	tingxu20220626	6	100.28	100.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A361_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:59:28 2022	Mon Jun 27 00:59:30 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	458	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.190	-273.150	28.743	23.674	639100	1	1	100000	tingxu20220626	6	100.29	100.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:59:22 2022	Mon Jun 27 00:59:24 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	457	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.191	-273.150	28.705	23.669	644862	1	1	100000	tingxu20220626	6	100.31	100.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:59:17 2022	Mon Jun 27 00:59:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	456	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.190	-273.150	28.712	23.669	633829	1	1	100000	tingxu20220626	6	100.20	100.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:59:12 2022	Mon Jun 27 00:59:15 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	455	00	25.00	25.00	25.00	24.98	25.000	25.000	25.000	27.191	-273.150	28.766	0.000	636811	1	1	100000	tingxu20220626	6	99.69	99.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:59:08 2022	Mon Jun 27 00:59:10 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	454	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.191	-273.150	28.711	23.675	642827	1	1	100000	tingxu20220626	6	99.71	99.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:59:03 2022	Mon Jun 27 00:59:05 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	453	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.192	-273.150	28.697	23.674	637705	1	1	100000	tingxu20220626	6	99.72	99.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:58:58 2022	Mon Jun 27 00:59:00 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	452	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.192	-273.150	28.654	23.673	637698	1	1	100000	tingxu20220626	6	99.74	99.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:58:53 2022	Mon Jun 27 00:58:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	451	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.191	-273.150	28.722	23.669	636718	1	1	100000	tingxu20220626	6	99.75	99.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:58:48 2022	Mon Jun 27 00:58:51 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	450	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.191	-273.150	28.737	23.672	522336	1	1	100000	tingxu20220626	6	99.77	99.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:58:44 2022	Mon Jun 27 00:58:46 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	449	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.191	-273.150	28.721	23.666	638253	1	1	100000	tingxu20220626	6	99.78	99.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A360_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:58:39 2022	Mon Jun 27 00:58:41 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	448	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.190	-273.150	28.727	0.000	643133	1	1	100000	tingxu20220626	6	99.80	99.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:57:58 2022	Mon Jun 27 00:58:00 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	446	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.349	-273.150	28.707	23.659	641536	1	1	100000	tingxu20220626	6	99.93	99.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:57:53 2022	Mon Jun 27 00:57:55 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	445	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.350	-273.150	28.652	0.000	642216	1	1	100000	tingxu20220626	6	99.94	99.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:57:48 2022	Mon Jun 27 00:57:51 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	444	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.349	0.000	28.710	23.648	569409	1	1	100000	tingxu20220626	6	99.96	99.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:57:43 2022	Mon Jun 27 00:57:46 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	443	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.348	-273.150	28.666	23.645	646296	1	1	100000	tingxu20220626	6	99.97	99.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:57:39 2022	Mon Jun 27 00:57:41 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	442	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.348	-273.150	28.720	23.657	638261	1	1	100000	tingxu20220626	6	99.99	99.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:57:33 2022	Mon Jun 27 00:57:35 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	441	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.345	-273.150	28.662	0.000	632833	1	1	100000	tingxu20220626	6	100.00	100.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:57:28 2022	Mon Jun 27 00:57:30 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	440	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.346	-273.150	28.747	23.673	635599	1	1	100000	tingxu20220626	6	100.02	100.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:57:23 2022	Mon Jun 27 00:57:25 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	439	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.689	23.671	640310	1	1	100000	tingxu20220626	6	100.04	100.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A359_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:57:18 2022	Mon Jun 27 00:57:20 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	438	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.346	-273.150	28.700	23.667	640640	1	1	100000	tingxu20220626	6	100.05	100.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:57:12 2022	Mon Jun 27 00:57:15 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	437	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.349	-273.150	28.678	23.663	634666	1	1	100000	tingxu20220626	6	99.42	99.41	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:57:07 2022	Mon Jun 27 00:57:10 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	436	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.350	-273.150	28.716	23.669	639485	1	1	100000	tingxu20220626	6	99.44	99.43	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:56:59 2022	Mon Jun 27 00:57:02 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	435	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.350	-273.150	0.000	23.670	641527	1	1	100000	tingxu20220626	6	99.46	99.46	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:56:54 2022	Mon Jun 27 00:56:57 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	434	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.350	-273.150	28.707	23.674	583473	1	1	100000	tingxu20220626	6	99.48	99.47	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:56:50 2022	Mon Jun 27 00:56:52 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	433	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.351	-273.150	28.696	0.000	630662	1	1	100000	tingxu20220626	6	99.49	99.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:56:45 2022	Mon Jun 27 00:56:47 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	432	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.351	-273.150	28.743	23.677	639850	1	1	100000	tingxu20220626	6	99.51	99.50	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:56:40 2022	Mon Jun 27 00:56:42 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	431	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.351	-273.150	28.693	23.680	639221	1	1	100000	tingxu20220626	6	99.52	99.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:56:35 2022	Mon Jun 27 00:56:38 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	430	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.351	-273.150	28.755	23.673	639806	1	1	100000	tingxu20220626	6	99.54	99.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:56:30 2022	Mon Jun 27 00:56:32 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	429	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.352	-273.150	28.728	23.674	635780	1	1	100000	tingxu20220626	6	99.55	99.55	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A358_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:56:25 2022	Mon Jun 27 00:56:27 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	428	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.353	-273.150	28.685	23.675	635827	1	1	100000	tingxu20220626	6	99.57	99.56	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:56:18 2022	Mon Jun 27 00:56:21 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	427	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.353	-273.150	28.711	23.668	568298	1	1	100000	tingxu20220626	6	99.59	99.58	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:56:13 2022	Mon Jun 27 00:56:16 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	426	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.353	-273.150	28.741	23.667	639597	1	1	100000	tingxu20220626	6	99.60	99.60	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:56:08 2022	Mon Jun 27 00:56:11 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	425	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.353	-273.150	28.750	23.664	641130	1	1	100000	tingxu20220626	6	99.62	99.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:56:03 2022	Mon Jun 27 00:56:06 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	424	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.353	-273.150	28.720	23.658	640071	1	1	100000	tingxu20220626	6	99.64	99.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:55:59 2022	Mon Jun 27 00:56:01 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	423	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.354	0.000	28.676	23.673	641451	1	1	100000	tingxu20220626	6	99.65	99.64	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:55:53 2022	Mon Jun 27 00:55:56 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	422	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.356	0.000	28.740	23.675	639731	1	1	100000	tingxu20220626	6	99.66	99.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:55:49 2022	Mon Jun 27 00:55:51 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	421	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.690	23.673	637303	1	1	100000	tingxu20220626	6	99.69	99.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:55:44 2022	Mon Jun 27 00:55:46 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	420	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.356	-273.150	28.742	23.677	638337	1	1	100000	tingxu20220626	6	99.70	99.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:55:39 2022	Mon Jun 27 00:55:42 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	419	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.356	-273.150	28.723	23.679	583177	1	1	100000	tingxu20220626	6	99.71	99.70	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A357_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:55:34 2022	Mon Jun 27 00:55:37 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	418	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.356	-273.150	28.748	0.000	640001	1	1	100000	tingxu20220626	6	99.73	99.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:55:24 2022	Mon Jun 27 00:55:27 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	417	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.356	-273.150	28.689	23.682	549223	1	1	100000	tingxu20220626	6	99.76	99.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:55:19 2022	Mon Jun 27 00:55:21 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	416	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.358	-273.150	28.745	23.682	633142	1	1	100000	tingxu20220626	6	99.78	99.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:55:14 2022	Mon Jun 27 00:55:17 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	415	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.675	23.679	625770	1	1	100000	tingxu20220626	6	99.14	99.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:55:09 2022	Mon Jun 27 00:55:11 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	414	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.358	-273.150	28.815	23.673	633045	1	1	100000	tingxu20220626	6	99.15	99.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:55:04 2022	Mon Jun 27 00:55:07 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	413	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.699	23.672	635371	1	1	100000	tingxu20220626	6	99.17	99.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:54:59 2022	Mon Jun 27 00:55:02 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	412	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.356	-273.150	28.742	23.663	635561	1	1	100000	tingxu20220626	6	99.19	99.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:54:55 2022	Mon Jun 27 00:54:57 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	411	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.764	23.664	644472	1	1	100000	tingxu20220626	6	99.20	99.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:54:50 2022	Mon Jun 27 00:54:52 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	410	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.360	0.000	28.729	23.664	640428	1	1	100000	tingxu20220626	6	99.21	99.21	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:54:45 2022	Mon Jun 27 00:54:47 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	409	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.361	-273.150	28.728	23.669	651258	1	1	100000	tingxu20220626	6	99.23	99.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A356_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:54:40 2022	Mon Jun 27 00:54:43 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	408	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.361	-273.150	28.745	23.664	640547	1	1	100000	tingxu20220626	6	99.24	99.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:54:35 2022	Mon Jun 27 00:54:37 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	407	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.360	-273.150	28.702	23.664	655886	1	1	100000	tingxu20220626	6	99.26	99.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:54:30 2022	Mon Jun 27 00:54:32 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	406	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.767	23.656	636715	1	1	100000	tingxu20220626	6	99.28	99.27	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:54:25 2022	Mon Jun 27 00:54:27 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	405	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.361	0.000	28.754	23.671	638174	1	1	100000	tingxu20220626	6	99.29	99.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:54:18 2022	Mon Jun 27 00:54:21 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	404	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.785	23.674	574654	1	1	100000	tingxu20220626	6	99.31	99.30	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:54:14 2022	Mon Jun 27 00:54:16 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	403	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.766	23.679	633034	1	1	100000	tingxu20220626	6	99.33	99.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:54:09 2022	Mon Jun 27 00:54:11 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	402	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.707	23.674	638893	1	1	100000	tingxu20220626	6	99.34	99.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:54:04 2022	Mon Jun 27 00:54:06 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	401	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.718	23.679	638104	1	1	100000	tingxu20220626	6	99.36	99.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:53:59 2022	Mon Jun 27 00:54:02 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	400	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.786	23.678	636457	1	1	100000	tingxu20220626	6	99.37	99.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:53:54 2022	Mon Jun 27 00:53:57 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	399	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.361	-273.150	28.737	23.676	565533	1	1	100000	tingxu20220626	6	99.39	99.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A355_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:53:50 2022	Mon Jun 27 00:53:52 2022	0.000	0.000	0.000	-0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	398	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.362	-273.150	28.727	23.687	635723	1	1	100000	tingxu20220626	6	99.40	99.40	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A354_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:53:05 2022	Mon Jun 27 00:53:07 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	396	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.356	-273.150	28.706	23.669	634246	1	1	100000	tingxu20220626	6	98.90	98.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A354_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:53:01 2022	Mon Jun 27 00:53:03 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	395	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.708	0.000	629898	1	1	100000	tingxu20220626	6	98.91	98.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A354_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:52:58 2022	Mon Jun 27 00:53:00 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	394	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.719	0.000	634984	1	1	100000	tingxu20220626	6	98.93	98.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A354_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:52:53 2022	Mon Jun 27 00:52:55 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	393	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.359	-273.150	0.000	23.674	633244	1	1	100000	tingxu20220626	6	98.94	98.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A354_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:52:49 2022	Mon Jun 27 00:52:52 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	392	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	0.000	-273.150	28.716	23.672	633196	1	1	100000	tingxu20220626	6	98.95	98.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A354_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:52:46 2022	Mon Jun 27 00:52:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	391	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.360	-273.150	28.662	23.676	631044	1	1	100000	tingxu20220626	6	98.96	98.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:52:42 2022	Mon Jun 27 00:52:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	390	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.359	-273.150	28.714	23.673	630688	1	1	100000	tingxu20220626	6	98.98	98.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:52:37 2022	Mon Jun 27 00:52:39 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	389	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.687	23.663	631735	1	1	100000	tingxu20220626	6	98.99	98.98	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:52:32 2022	Mon Jun 27 00:52:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	388	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.359	-273.150	28.741	0.000	635077	1	1	100000	tingxu20220626	6	99.00	99.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:52:27 2022	Mon Jun 27 00:52:30 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	387	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.358	-273.150	28.723	23.661	628359	1	1	100000	tingxu20220626	6	99.02	99.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:52:22 2022	Mon Jun 27 00:52:25 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	386	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.357	-273.150	28.688	23.672	630571	1	1	100000	tingxu20220626	6	99.04	99.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:52:17 2022	Mon Jun 27 00:52:19 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	385	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.698	23.672	625413	1	1	100000	tingxu20220626	6	99.05	99.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:52:14 2022	Mon Jun 27 00:52:16 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	384	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.710	23.668	634491	1	1	100000	tingxu20220626	6	99.06	99.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:52:09 2022	Mon Jun 27 00:52:11 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	383	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.358	-273.150	28.772	23.676	632668	1	1	100000	tingxu20220626	6	99.08	99.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:52:04 2022	Mon Jun 27 00:52:07 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	382	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.358	0.000	28.719	23.689	632382	1	1	100000	tingxu20220626	6	99.09	99.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A353_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:52:00 2022	Mon Jun 27 00:52:02 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	381	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.725	23.686	636336	1	1	100000	tingxu20220626	6	99.11	99.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:51:54 2022	Mon Jun 27 00:51:56 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	380	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.360	-273.150	28.725	23.672	632530	1	1	100000	tingxu20220626	6	99.13	99.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:51:49 2022	Mon Jun 27 00:51:52 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	379	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.358	-273.150	28.708	23.669	632814	1	1	100000	tingxu20220626	6	99.14	99.13	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:51:44 2022	Mon Jun 27 00:51:47 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	378	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.358	-273.150	28.793	23.666	633057	1	1	100000	tingxu20220626	6	99.15	99.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:51:38 2022	Mon Jun 27 00:51:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	377	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.357	-273.150	28.733	23.666	635118	1	1	100000	tingxu20220626	6	99.18	99.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:51:33 2022	Mon Jun 27 00:51:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	376	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.687	0.000	618877	1	1	100000	tingxu20220626	6	99.19	99.18	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:51:28 2022	Mon Jun 27 00:51:31 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	375	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.697	23.678	632858	1	1	100000	tingxu20220626	6	99.20	99.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:51:23 2022	Mon Jun 27 00:51:26 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	374	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.720	0.000	633043	1	1	100000	tingxu20220626	6	99.22	99.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:51:18 2022	Mon Jun 27 00:51:21 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	373	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.358	-273.150	28.733	23.680	526902	1	1	100000	tingxu20220626	6	99.24	99.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:51:14 2022	Mon Jun 27 00:51:16 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	372	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.358	-273.150	28.726	23.676	625665	1	1	100000	tingxu20220626	6	98.60	98.59	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A352_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:51:07 2022	Mon Jun 27 00:51:09 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	371	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.358	-273.150	28.778	23.669	625457	1	1	100000	tingxu20220626	6	98.62	98.61	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:51:01 2022	Mon Jun 27 00:51:04 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	370	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.702	23.663	633541	1	1	100000	tingxu20220626	6	98.64	98.63	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:50:56 2022	Mon Jun 27 00:50:59 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	369	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.357	-273.150	28.736	23.668	633828	1	1	100000	tingxu20220626	6	98.66	98.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:50:52 2022	Mon Jun 27 00:50:54 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	368	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.709	23.665	630094	1	1	100000	tingxu20220626	6	98.67	98.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:50:47 2022	Mon Jun 27 00:50:49 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	367	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.357	-273.150	28.724	23.651	633445	1	1	100000	tingxu20220626	6	98.68	98.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:50:42 2022	Mon Jun 27 00:50:44 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	366	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.358	-273.150	28.741	23.650	630218	1	1	100000	tingxu20220626	6	98.70	98.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:50:37 2022	Mon Jun 27 00:50:40 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	365	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.358	-273.150	28.740	23.656	637091	1	1	100000	tingxu20220626	6	98.71	98.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:50:33 2022	Mon Jun 27 00:50:35 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	364	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.747	23.669	630115	1	1	100000	tingxu20220626	6	98.73	98.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:50:28 2022	Mon Jun 27 00:50:30 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	363	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.789	23.671	631144	1	1	100000	tingxu20220626	6	98.74	98.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:50:23 2022	Mon Jun 27 00:50:26 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	362	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.703	23.669	634831	1	1	100000	tingxu20220626	6	98.76	98.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A351_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:50:18 2022	Mon Jun 27 00:50:21 2022	0.000	0.000	0.000	-0.500	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	361	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.358	-273.150	0.000	23.677	535801	1	1	100000	tingxu20220626	6	98.77	98.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:49:36 2022	Mon Jun 27 00:49:39 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	360	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.357	-273.150	28.713	0.000	629557	1	1	100000	tingxu20220626	6	98.90	98.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:49:33 2022	Mon Jun 27 00:49:35 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	359	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.747	23.674	632006	1	1	100000	tingxu20220626	6	98.92	98.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:49:28 2022	Mon Jun 27 00:49:30 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	358	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.360	-273.150	28.787	23.670	631986	1	1	100000	tingxu20220626	6	98.93	98.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:49:23 2022	Mon Jun 27 00:49:26 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	357	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.695	23.662	640859	1	1	100000	tingxu20220626	6	98.95	98.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:49:18 2022	Mon Jun 27 00:49:21 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	356	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.359	-273.150	28.694	23.672	665535	1	1	100000	tingxu20220626	6	98.96	98.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:49:14 2022	Mon Jun 27 00:49:16 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	355	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.359	-273.150	28.737	23.679	630265	1	1	100000	tingxu20220626	6	98.33	98.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:49:09 2022	Mon Jun 27 00:49:11 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	354	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.358	-273.150	28.761	23.687	632285	1	1	100000	tingxu20220626	6	98.35	98.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:49:04 2022	Mon Jun 27 00:49:06 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	353	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.360	-273.150	28.722	0.000	630632	1	1	100000	tingxu20220626	6	98.36	98.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:48:58 2022	Mon Jun 27 00:49:00 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	352	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.360	-273.150	28.727	23.680	637685	1	1	100000	tingxu20220626	6	98.38	98.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A350_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:48:53 2022	Mon Jun 27 00:48:55 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	351	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.785	23.667	643788	1	1	100000	tingxu20220626	6	98.40	98.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:48:47 2022	Mon Jun 27 00:48:50 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	350	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.707	23.666	634177	1	1	100000	tingxu20220626	6	98.42	98.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:48:43 2022	Mon Jun 27 00:48:45 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	349	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.681	23.665	631382	1	1	100000	tingxu20220626	6	98.43	98.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:48:38 2022	Mon Jun 27 00:48:40 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	348	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.727	23.664	624766	1	1	100000	tingxu20220626	6	98.45	98.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:48:33 2022	Mon Jun 27 00:48:35 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	347	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.719	23.668	637313	1	1	100000	tingxu20220626	6	98.46	98.45	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:48:27 2022	Mon Jun 27 00:48:29 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	346	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.782	23.672	634026	1	1	100000	tingxu20220626	6	98.48	98.47	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:48:22 2022	Mon Jun 27 00:48:25 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	345	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.364	-273.150	28.728	23.669	627092	1	1	100000	tingxu20220626	6	98.49	98.48	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:48:17 2022	Mon Jun 27 00:48:20 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	344	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.363	-273.150	28.773	23.672	656355	1	1	100000	tingxu20220626	6	98.51	98.50	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:48:13 2022	Mon Jun 27 00:48:15 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	343	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.732	23.672	640254	1	1	100000	tingxu20220626	6	98.52	98.51	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:48:08 2022	Mon Jun 27 00:48:10 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	342	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.362	-273.150	28.786	23.671	634422	1	1	100000	tingxu20220626	6	98.54	98.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A349_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:48:03 2022	Mon Jun 27 00:48:06 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	341	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.362	-273.150	28.759	0.000	522587	1	1	100000	tingxu20220626	6	98.55	98.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:47:58 2022	Mon Jun 27 00:48:00 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	340	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.695	23.667	633495	1	1	100000	tingxu20220626	6	98.57	98.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:47:53 2022	Mon Jun 27 00:47:56 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	339	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.769	23.664	630871	1	1	100000	tingxu20220626	6	98.58	98.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:47:48 2022	Mon Jun 27 00:47:51 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	338	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.364	-273.150	28.719	23.658	650972	1	1	100000	tingxu20220626	6	98.60	98.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:47:44 2022	Mon Jun 27 00:47:46 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	337	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.713	23.661	640575	1	1	100000	tingxu20220626	6	98.61	98.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:47:39 2022	Mon Jun 27 00:47:41 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	336	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.756	23.651	635295	1	1	100000	tingxu20220626	6	98.63	98.62	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:47:34 2022	Mon Jun 27 00:47:37 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	335	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.708	0.000	642163	1	1	100000	tingxu20220626	6	98.65	98.64	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:47:29 2022	Mon Jun 27 00:47:32 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	334	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.729	23.655	643727	1	1	100000	tingxu20220626	6	98.66	98.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:47:25 2022	Mon Jun 27 00:47:27 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	333	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.719	23.662	642056	1	1	100000	tingxu20220626	6	98.68	98.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:47:20 2022	Mon Jun 27 00:47:22 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	332	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	0.000	28.725	23.673	630091	1	1	100000	tingxu20220626	6	98.69	98.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A348_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:47:14 2022	Mon Jun 27 00:47:16 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	331	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.670	23.680	624377	1	1	100000	tingxu20220626	6	98.05	98.05	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:47:08 2022	Mon Jun 27 00:47:10 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	330	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.689	23.671	647949	1	1	100000	tingxu20220626	6	98.07	98.06	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:47:03 2022	Mon Jun 27 00:47:06 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	329	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.722	23.669	549867	1	1	100000	tingxu20220626	6	98.08	98.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:46:58 2022	Mon Jun 27 00:47:01 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	328	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.365	-273.150	28.770	23.659	634243	1	1	100000	tingxu20220626	6	98.10	98.09	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:46:50 2022	Mon Jun 27 00:46:53 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	327	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.365	-273.150	28.721	23.669	635009	1	1	100000	tingxu20220626	6	98.13	98.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:46:46 2022	Mon Jun 27 00:46:48 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	326	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.727	23.661	630625	1	1	100000	tingxu20220626	6	98.14	98.14	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:46:41 2022	Mon Jun 27 00:46:43 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	325	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.365	-273.150	28.696	23.662	631715	1	1	100000	tingxu20220626	6	98.16	98.15	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:46:36 2022	Mon Jun 27 00:46:38 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	324	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.687	23.672	623897	1	1	100000	tingxu20220626	6	98.17	98.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:46:31 2022	Mon Jun 27 00:46:34 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	323	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.690	23.682	629824	1	1	100000	tingxu20220626	6	98.19	98.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:46:27 2022	Mon Jun 27 00:46:29 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	322	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.718	23.691	634926	1	1	100000	tingxu20220626	6	98.20	98.19	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A347_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:46:14 2022	Mon Jun 27 00:46:16 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	321	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	0.000	28.645	23.693	653051	1	1	100000	tingxu20220626	6	98.24	98.23	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:46:08 2022	Mon Jun 27 00:46:11 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	320	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	0.000	23.667	635714	1	1	100000	tingxu20220626	6	98.26	98.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:46:03 2022	Mon Jun 27 00:46:06 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	319	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.365	-273.150	28.765	23.668	675280	1	1	100000	tingxu20220626	6	98.27	98.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:45:59 2022	Mon Jun 27 00:46:01 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	318	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	0.000	28.799	23.685	638234	1	1	100000	tingxu20220626	6	98.28	98.28	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:45:54 2022	Mon Jun 27 00:45:56 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	317	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.737	23.690	637805	1	1	100000	tingxu20220626	6	98.30	98.29	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:45:48 2022	Mon Jun 27 00:45:51 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	316	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.743	23.682	550787	1	1	100000	tingxu20220626	6	98.32	98.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:45:44 2022	Mon Jun 27 00:45:46 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	315	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.731	0.000	630335	1	1	100000	tingxu20220626	6	98.33	98.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:45:38 2022	Mon Jun 27 00:45:41 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	314	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.366	-273.150	28.708	23.693	634074	1	1	100000	tingxu20220626	6	98.34	98.34	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:45:34 2022	Mon Jun 27 00:45:36 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	313	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	0.000	23.687	633432	1	1	100000	tingxu20220626	6	98.36	98.35	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:45:29 2022	Mon Jun 27 00:45:31 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	312	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.365	-273.150	28.709	23.677	632636	1	1	100000	tingxu20220626	6	98.37	98.37	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A346_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:45:24 2022	Mon Jun 27 00:45:26 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	311	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.680	0.000	636673	1	1	100000	tingxu20220626	6	98.39	98.38	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:45:16 2022	Mon Jun 27 00:45:19 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	310	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.716	23.661	640628	1	1	100000	tingxu20220626	6	97.77	98.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:45:11 2022	Mon Jun 27 00:45:14 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	309	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.705	23.673	631533	1	1	100000	tingxu20220626	6	97.79	97.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:45:07 2022	Mon Jun 27 00:45:09 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	308	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.723	0.000	630922	1	1	100000	tingxu20220626	6	97.80	97.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:45:02 2022	Mon Jun 27 00:45:04 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	307	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.369	-273.150	28.767	23.672	637202	1	1	100000	tingxu20220626	6	97.81	97.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:44:57 2022	Mon Jun 27 00:44:59 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	306	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.782	23.665	625723	1	1	100000	tingxu20220626	6	97.82	97.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:44:52 2022	Mon Jun 27 00:44:55 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	305	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.777	23.670	626484	1	1	100000	tingxu20220626	6	97.84	97.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:44:44 2022	Mon Jun 27 00:44:46 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	304	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.686	23.668	631583	1	1	100000	tingxu20220626	6	97.87	97.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:44:39 2022	Mon Jun 27 00:44:41 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	303	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.768	23.665	633860	1	1	100000	tingxu20220626	6	97.89	97.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:44:34 2022	Mon Jun 27 00:44:37 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	302	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.364	-273.150	28.730	23.665	634670	1	1	100000	tingxu20220626	6	97.90	97.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A345_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:44:29 2022	Mon Jun 27 00:44:32 2022	0.000	0.000	0.000	-0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	301	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.686	23.671	627410	1	1	100000	tingxu20220626	6	97.91	97.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:43:35 2022	Mon Jun 27 00:43:37 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	299	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.366	-273.150	28.750	23.695	630716	1	1	100000	tingxu20220626	6	98.07	98.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:43:30 2022	Mon Jun 27 00:43:32 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	298	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.753	23.696	627865	1	1	100000	tingxu20220626	6	98.09	98.08	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:43:25 2022	Mon Jun 27 00:43:28 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	297	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.365	-273.150	28.778	0.000	636111	1	1	100000	tingxu20220626	6	98.10	98.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:43:21 2022	Mon Jun 27 00:43:23 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	296	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	0.000	28.709	23.694	635381	1	1	100000	tingxu20220626	6	98.12	98.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:43:16 2022	Mon Jun 27 00:43:19 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	295	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	0.000	28.770	23.682	657254	1	1	100000	tingxu20220626	6	97.50	98.12	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:43:12 2022	Mon Jun 27 00:43:14 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	294	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.757	23.683	624482	1	1	100000	tingxu20220626	6	97.52	97.50	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:43:07 2022	Mon Jun 27 00:43:10 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	293	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.367	-273.150	28.757	23.681	628706	1	1	100000	tingxu20220626	6	97.53	97.52	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A344_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:43:02 2022	Mon Jun 27 00:43:05 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	292	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.743	23.679	640845	1	1	100000	tingxu20220626	6	97.55	97.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:42:57 2022	Mon Jun 27 00:42:59 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	291	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.366	-273.150	28.736	23.680	637303	1	1	100000	tingxu20220626	6	97.56	97.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:42:52 2022	Mon Jun 27 00:42:54 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	290	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.697	23.684	628592	1	1	100000	tingxu20220626	6	97.58	97.57	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:42:47 2022	Mon Jun 27 00:42:49 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	289	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.765	23.680	641081	1	1	100000	tingxu20220626	6	97.59	97.58	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:42:42 2022	Mon Jun 27 00:42:44 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	288	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.795	23.678	630207	1	1	100000	tingxu20220626	6	97.61	97.60	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:42:37 2022	Mon Jun 27 00:42:40 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	287	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.367	-273.150	28.766	23.670	627225	1	1	100000	tingxu20220626	6	97.62	97.61	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:42:32 2022	Mon Jun 27 00:42:35 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	286	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.804	23.681	630795	1	1	100000	tingxu20220626	6	97.64	97.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:42:28 2022	Mon Jun 27 00:42:30 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	285	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.803	0.000	631111	1	1	100000	tingxu20220626	6	97.65	97.64	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:42:23 2022	Mon Jun 27 00:42:26 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	284	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.764	23.661	627270	1	1	100000	tingxu20220626	6	97.66	97.65	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:42:18 2022	Mon Jun 27 00:42:20 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	283	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.750	23.685	597188	1	1	100000	tingxu20220626	6	97.68	97.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A343_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:42:12 2022	Mon Jun 27 00:42:14 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	282	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.743	23.674	627589	1	1	100000	tingxu20220626	6	97.70	97.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:42:03 2022	Mon Jun 27 00:42:06 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	281	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	0.000	28.783	23.671	550730	1	1	100000	tingxu20220626	6	97.72	97.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:41:58 2022	Mon Jun 27 00:42:01 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	280	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	0.000	28.716	23.678	628447	1	1	100000	tingxu20220626	6	97.74	97.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:41:53 2022	Mon Jun 27 00:41:56 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	279	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.769	23.673	629146	1	1	100000	tingxu20220626	6	97.75	97.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:41:49 2022	Mon Jun 27 00:41:51 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	278	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.754	23.664	625693	1	1	100000	tingxu20220626	6	97.77	97.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:41:44 2022	Mon Jun 27 00:41:46 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	277	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.695	23.657	631182	1	1	100000	tingxu20220626	6	97.78	97.78	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:41:39 2022	Mon Jun 27 00:41:41 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	276	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.777	23.660	628070	1	1	100000	tingxu20220626	6	97.80	97.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:41:31 2022	Mon Jun 27 00:41:33 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	275	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.369	-273.150	28.734	0.000	632224	1	1	100000	tingxu20220626	6	97.82	97.82	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:41:26 2022	Mon Jun 27 00:41:28 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	274	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.370	0.000	28.715	23.670	628699	1	1	100000	tingxu20220626	6	97.84	97.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:41:21 2022	Mon Jun 27 00:41:24 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	273	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	-273.150	28.777	0.000	653967	1	1	100000	tingxu20220626	6	97.85	97.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A342_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:41:16 2022	Mon Jun 27 00:41:19 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	272	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.709	0.000	627682	1	1	100000	tingxu20220626	6	97.22	97.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:41:11 2022	Mon Jun 27 00:41:13 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	271	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.370	0.000	28.774	23.695	636038	1	1	100000	tingxu20220626	6	97.24	97.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:41:06 2022	Mon Jun 27 00:41:08 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	270	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.370	-273.150	28.717	23.701	617269	1	1	100000	tingxu20220626	6	97.25	97.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:40:58 2022	Mon Jun 27 00:41:01 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	269	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.808	23.694	626683	1	1	100000	tingxu20220626	6	97.28	97.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:40:53 2022	Mon Jun 27 00:40:56 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	268	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.738	23.692	624494	1	1	100000	tingxu20220626	6	97.29	97.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:40:49 2022	Mon Jun 27 00:40:51 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	267	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.735	0.000	628491	1	1	100000	tingxu20220626	6	97.30	97.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:40:44 2022	Mon Jun 27 00:40:47 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	266	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.368	-273.150	28.767	23.680	623463	1	1	100000	tingxu20220626	6	97.32	97.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:40:39 2022	Mon Jun 27 00:40:42 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	265	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.369	-273.150	28.787	23.672	554625	1	1	100000	tingxu20220626	6	97.33	97.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:40:34 2022	Mon Jun 27 00:40:37 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	264	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.815	23.668	617944	1	1	100000	tingxu20220626	6	97.35	97.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:40:30 2022	Mon Jun 27 00:40:32 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	263	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.368	-273.150	28.796	23.665	625470	1	1	100000	tingxu20220626	6	97.36	97.36	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A341_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:40:25 2022	Mon Jun 27 00:40:27 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	262	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	0.000	28.793	23.666	629265	1	1	100000	tingxu20220626	6	97.38	97.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:40:19 2022	Mon Jun 27 00:40:22 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	261	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.793	23.677	627943	1	1	100000	tingxu20220626	6	97.40	97.39	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:40:12 2022	Mon Jun 27 00:40:15 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	260	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.371	-273.150	28.766	23.673	632152	1	1	100000	tingxu20220626	6	97.42	97.41	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:40:07 2022	Mon Jun 27 00:40:10 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	259	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.371	-273.150	28.798	23.682	630161	1	1	100000	tingxu20220626	6	97.43	97.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:40:02 2022	Mon Jun 27 00:40:05 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	258	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.786	23.680	623962	1	1	100000	tingxu20220626	6	97.45	97.44	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:39:58 2022	Mon Jun 27 00:40:00 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	257	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	-273.150	28.790	23.687	643021	1	1	100000	tingxu20220626	6	97.46	97.45	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:39:53 2022	Mon Jun 27 00:39:55 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	256	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	-273.150	28.812	23.683	626373	1	1	100000	tingxu20220626	6	97.48	97.46	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:39:48 2022	Mon Jun 27 00:39:50 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	255	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.369	0.000	28.760	23.684	628281	1	1	100000	tingxu20220626	6	97.49	97.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:39:43 2022	Mon Jun 27 00:39:45 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	254	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	-273.150	28.841	0.000	624638	1	1	100000	tingxu20220626	6	97.50	97.50	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:39:38 2022	Mon Jun 27 00:39:41 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	253	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	-273.150	28.771	23.687	646315	1	1	100000	tingxu20220626	6	97.52	97.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A340_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:39:33 2022	Mon Jun 27 00:39:35 2022	0.000	0.000	0.000	0.100	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	252	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.752	23.687	627842	1	1	100000	tingxu20220626	6	97.54	97.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:37:37 2022	Mon Jun 27 00:37:40 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	250	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.369	-273.150	28.766	0.000	624851	1	1	100000	tingxu20220626	6	97.24	97.24	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:37:33 2022	Mon Jun 27 00:37:35 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	249	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.799	23.669	628706	1	1	100000	tingxu20220626	6	97.26	97.25	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:37:28 2022	Mon Jun 27 00:37:30 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	248	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.809	23.671	646666	1	1	100000	tingxu20220626	6	97.27	97.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:37:23 2022	Mon Jun 27 00:37:25 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	247	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.807	23.660	628939	1	1	100000	tingxu20220626	6	97.28	97.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:37:18 2022	Mon Jun 27 00:37:21 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	246	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.804	23.682	575299	1	1	100000	tingxu20220626	6	97.30	97.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:37:10 2022	Mon Jun 27 00:37:12 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	245	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.758	23.683	624780	1	1	100000	tingxu20220626	6	96.69	96.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:37:05 2022	Mon Jun 27 00:37:07 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	244	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.369	-273.150	28.766	0.000	628402	1	1	100000	tingxu20220626	6	96.70	96.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:37:00 2022	Mon Jun 27 00:37:03 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	243	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.793	23.682	628878	1	1	100000	tingxu20220626	6	96.71	96.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:36:56 2022	Mon Jun 27 00:36:58 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	242	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.744	23.683	623360	1	1	100000	tingxu20220626	6	96.73	96.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A338_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:36:51 2022	Mon Jun 27 00:36:53 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	241	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	-273.150	28.794	23.683	639785	1	1	100000	tingxu20220626	6	96.74	96.74	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:36:44 2022	Mon Jun 27 00:36:47 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	240	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.367	-273.150	28.766	0.000	634409	1	1	100000	tingxu20220626	6	96.76	96.75	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:36:39 2022	Mon Jun 27 00:36:42 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	239	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.756	23.677	596619	1	1	100000	tingxu20220626	6	96.78	96.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:36:34 2022	Mon Jun 27 00:36:37 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	238	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.749	23.684	629906	1	1	100000	tingxu20220626	6	96.79	96.79	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:36:30 2022	Mon Jun 27 00:36:32 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	237	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.369	-273.150	28.765	23.674	626681	1	1	100000	tingxu20220626	6	96.81	96.80	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:36:25 2022	Mon Jun 27 00:36:27 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	236	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.367	-273.150	28.769	0.000	625254	1	1	100000	tingxu20220626	6	96.82	96.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:36:11 2022	Mon Jun 27 00:36:13 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	235	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.366	-273.150	28.792	23.678	638082	1	1	100000	tingxu20220626	6	96.86	96.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:36:06 2022	Mon Jun 27 00:36:08 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	234	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.366	-273.150	28.745	23.678	621366	1	1	100000	tingxu20220626	6	96.88	96.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:36:01 2022	Mon Jun 27 00:36:04 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	233	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.366	-273.150	28.785	23.691	637695	1	1	100000	tingxu20220626	6	96.89	96.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:35:56 2022	Mon Jun 27 00:35:59 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	232	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.720	23.679	625666	1	1	100000	tingxu20220626	6	96.91	96.90	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A337_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:35:52 2022	Mon Jun 27 00:35:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	231	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.819	23.675	639395	1	1	100000	tingxu20220626	6	96.92	96.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:35:46 2022	Mon Jun 27 00:35:48 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	230	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.366	-273.150	28.781	23.674	627700	1	1	100000	tingxu20220626	6	96.94	96.93	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:35:41 2022	Mon Jun 27 00:35:44 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	229	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.779	23.670	625325	1	1	100000	tingxu20220626	6	96.95	96.95	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:35:37 2022	Mon Jun 27 00:35:39 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	228	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.367	-273.150	28.822	23.677	628454	1	1	100000	tingxu20220626	6	96.97	96.96	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:35:32 2022	Mon Jun 27 00:35:34 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	227	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.368	-273.150	28.761	23.670	630560	1	1	100000	tingxu20220626	6	96.98	96.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:35:27 2022	Mon Jun 27 00:35:30 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	226	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.368	-273.150	28.794	23.676	629329	1	1	100000	tingxu20220626	6	97.00	96.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:35:22 2022	Mon Jun 27 00:35:25 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	225	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.367	-273.150	28.713	23.686	629181	1	1	100000	tingxu20220626	6	97.01	97.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:35:18 2022	Mon Jun 27 00:35:20 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	224	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.368	0.000	28.781	23.693	624687	1	1	100000	tingxu20220626	6	97.03	97.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:35:13 2022	Mon Jun 27 00:35:15 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	223	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.369	-273.150	28.822	23.686	626279	1	1	100000	tingxu20220626	6	96.61	96.60	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:35:07 2022	Mon Jun 27 00:35:09 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	222	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.368	-273.150	28.761	0.000	626622	1	1	100000	tingxu20220626	6	96.63	96.62	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A336_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:35:02 2022	Mon Jun 27 00:35:05 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	221	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.368	-273.150	28.816	23.690	618524	1	1	100000	tingxu20220626	6	96.64	96.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:34:57 2022	Mon Jun 27 00:34:59 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	220	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.368	-273.150	28.783	23.679	618954	1	1	100000	tingxu20220626	6	96.66	96.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:34:52 2022	Mon Jun 27 00:34:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	219	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.370	-273.150	28.775	23.680	646799	1	1	100000	tingxu20220626	6	96.67	96.66	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:34:47 2022	Mon Jun 27 00:34:49 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	218	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.370	-273.150	28.745	23.690	626828	1	1	100000	tingxu20220626	6	96.69	96.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:34:42 2022	Mon Jun 27 00:34:44 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	217	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.370	-273.150	0.000	23.699	610562	1	1	100000	tingxu20220626	6	96.70	96.69	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:34:37 2022	Mon Jun 27 00:34:40 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	216	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.369	-273.150	28.792	23.693	626024	1	1	100000	tingxu20220626	6	96.71	96.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:34:33 2022	Mon Jun 27 00:34:35 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	215	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.373	-273.150	28.852	0.000	626803	1	1	100000	tingxu20220626	6	96.73	96.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:34:28 2022	Mon Jun 27 00:34:30 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	214	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.373	0.000	28.806	23.687	624113	1	1	100000	tingxu20220626	6	96.74	96.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:34:23 2022	Mon Jun 27 00:34:25 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	213	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.373	-273.150	28.769	23.679	621909	1	1	100000	tingxu20220626	6	96.76	96.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:34:18 2022	Mon Jun 27 00:34:21 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	212	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.372	-273.150	28.788	23.682	501981	1	1	100000	tingxu20220626	6	96.77	96.76	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A335_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:34:04 2022	Mon Jun 27 00:34:06 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	211	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.372	-273.150	28.769	23.690	640683	1	1	100000	tingxu20220626	6	96.81	96.81	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:33:58 2022	Mon Jun 27 00:34:00 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	210	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.373	-273.150	28.767	23.675	627676	1	1	100000	tingxu20220626	6	96.83	96.83	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:33:53 2022	Mon Jun 27 00:33:55 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	209	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.372	0.000	28.763	23.664	626820	1	1	100000	tingxu20220626	6	96.85	96.84	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:33:48 2022	Mon Jun 27 00:33:51 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	208	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.372	0.000	28.817	23.676	556438	1	1	100000	tingxu20220626	6	96.86	96.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:33:44 2022	Mon Jun 27 00:33:46 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	207	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.372	-273.150	28.774	23.659	628045	1	1	100000	tingxu20220626	6	96.87	96.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:33:38 2022	Mon Jun 27 00:33:41 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	206	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.372	-273.150	28.832	23.671	624315	1	1	100000	tingxu20220626	6	96.89	96.88	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:33:30 2022	Mon Jun 27 00:33:33 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	205	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.375	-273.150	28.828	23.677	626504	1	1	100000	tingxu20220626	6	96.91	96.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:33:25 2022	Mon Jun 27 00:33:28 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	204	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	-273.150	28.813	23.679	630785	1	1	100000	tingxu20220626	6	96.93	96.92	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:33:21 2022	Mon Jun 27 00:33:23 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	203	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.791	23.685	633232	1	1	100000	tingxu20220626	6	96.94	96.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:33:16 2022	Mon Jun 27 00:33:18 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	202	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.805	23.684	630542	1	1	100000	tingxu20220626	6	96.96	96.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A334_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:33:11 2022	Mon Jun 27 00:33:14 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	201	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.375	-273.150	28.788	23.697	629345	1	1	100000	tingxu20220626	6	96.97	96.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:33:06 2022	Mon Jun 27 00:33:08 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	200	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.375	-273.150	28.762	23.704	627500	1	1	100000	tingxu20220626	6	96.99	96.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:33:01 2022	Mon Jun 27 00:33:03 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	199	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.374	-273.150	28.779	23.699	626920	1	1	100000	tingxu20220626	6	97.00	97.00	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:32:56 2022	Mon Jun 27 00:32:58 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	198	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.372	-273.150	28.725	23.698	641355	1	1	100000	tingxu20220626	6	97.02	97.01	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:32:51 2022	Mon Jun 27 00:32:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	197	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.373	-273.150	28.780	23.691	627807	1	1	100000	tingxu20220626	6	97.03	97.03	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:32:47 2022	Mon Jun 27 00:32:49 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	196	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.373	-273.150	28.728	23.685	625350	1	1	100000	tingxu20220626	6	97.04	97.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:32:42 2022	Mon Jun 27 00:32:44 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	195	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.373	-273.150	28.774	23.676	637493	1	1	100000	tingxu20220626	6	97.06	97.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:32:37 2022	Mon Jun 27 00:32:39 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	194	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.375	-273.150	28.759	23.671	626653	1	1	100000	tingxu20220626	6	97.08	97.07	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:32:32 2022	Mon Jun 27 00:32:35 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	193	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.375	-273.150	28.740	23.681	623377	1	1	100000	tingxu20220626	6	97.09	97.08	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:32:26 2022	Mon Jun 27 00:32:28 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	192	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.377	-273.150	28.748	23.684	629607	1	1	100000	tingxu20220626	6	97.11	97.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A333_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:32:21 2022	Mon Jun 27 00:32:23 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	191	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.376	-273.150	28.689	23.696	634895	1	1	100000	tingxu20220626	6	97.12	97.11	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:32:16 2022	Mon Jun 27 00:32:18 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	190	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.377	-273.150	28.808	23.690	625962	1	1	100000	tingxu20220626	6	97.14	97.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:32:11 2022	Mon Jun 27 00:32:13 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	189	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.789	23.688	619344	1	1	100000	tingxu20220626	6	97.15	97.14	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:32:06 2022	Mon Jun 27 00:32:08 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	188	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.375	-273.150	28.725	23.685	629271	1	1	100000	tingxu20220626	6	97.17	97.16	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:32:01 2022	Mon Jun 27 00:32:04 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	187	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.374	-273.150	28.762	23.695	625287	1	1	100000	tingxu20220626	6	97.18	97.17	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:31:57 2022	Mon Jun 27 00:31:59 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	186	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.374	-273.150	28.744	23.704	629415	1	1	100000	tingxu20220626	6	97.19	97.19	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:31:52 2022	Mon Jun 27 00:31:54 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	185	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.374	-273.150	28.761	23.704	639184	1	1	100000	tingxu20220626	6	97.21	97.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:31:47 2022	Mon Jun 27 00:31:49 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	184	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.375	-273.150	28.759	23.697	623563	1	1	100000	tingxu20220626	6	97.22	97.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:31:42 2022	Mon Jun 27 00:31:45 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	183	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.375	-273.150	28.769	23.684	631450	1	1	100000	tingxu20220626	6	97.24	97.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:31:37 2022	Mon Jun 27 00:31:40 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	182	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.375	-273.150	28.791	23.680	627051	1	1	100000	tingxu20220626	6	97.25	97.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A332_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:31:32 2022	Mon Jun 27 00:31:35 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	181	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.771	23.684	631994	1	1	100000	tingxu20220626	6	97.27	97.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A331_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:30:17 2022	Mon Jun 27 00:30:19 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	179	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.380	-273.150	28.757	23.689	647653	1	1	100000	tingxu20220626	6	97.49	97.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:30:09 2022	Mon Jun 27 00:30:11 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	178	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.384	-273.150	28.737	23.693	634793	1	1	100000	tingxu20220626	6	97.52	97.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:30:04 2022	Mon Jun 27 00:30:06 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	177	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.697	23.698	627942	1	1	100000	tingxu20220626	6	97.54	97.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:29:59 2022	Mon Jun 27 00:30:02 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	176	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.384	-273.150	28.747	23.692	631001	1	1	100000	tingxu20220626	6	97.55	97.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:29:54 2022	Mon Jun 27 00:29:57 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	175	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.384	-273.150	28.797	23.683	522432	1	1	100000	tingxu20220626	6	97.56	97.56	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:29:50 2022	Mon Jun 27 00:29:52 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	174	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.383	-273.150	28.775	23.678	629729	1	1	100000	tingxu20220626	6	97.58	97.57	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:29:44 2022	Mon Jun 27 00:29:46 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	173	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.382	0.000	28.713	23.683	630890	1	1	100000	tingxu20220626	6	97.59	97.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:29:39 2022	Mon Jun 27 00:29:41 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	172	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.705	0.000	621942	1	1	100000	tingxu20220626	6	97.61	97.60	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:29:34 2022	Mon Jun 27 00:29:37 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	171	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.383	-273.150	28.714	23.670	631177	1	1	100000	tingxu20220626	6	97.62	97.62	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:29:29 2022	Mon Jun 27 00:29:32 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	170	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.382	0.000	28.750	23.672	633961	1	1	100000	tingxu20220626	6	97.64	97.63	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A330_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:29:25 2022	Mon Jun 27 00:29:27 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	169	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.382	-273.150	28.749	23.679	642887	1	1	100000	tingxu20220626	6	97.65	97.64	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:29:19 2022	Mon Jun 27 00:29:22 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	168	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.741	23.685	627394	1	1	100000	tingxu20220626	6	97.67	97.66	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:29:08 2022	Mon Jun 27 00:29:10 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	167	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.718	23.684	630925	1	1	100000	tingxu20220626	6	97.70	97.70	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:29:03 2022	Mon Jun 27 00:29:06 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	166	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.754	0.000	576302	1	1	100000	tingxu20220626	6	97.72	97.71	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:28:58 2022	Mon Jun 27 00:29:01 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	165	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.758	23.693	630509	1	1	100000	tingxu20220626	6	97.73	97.73	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:28:53 2022	Mon Jun 27 00:28:56 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	164	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.379	-273.150	28.737	0.000	629621	1	1	100000	tingxu20220626	6	97.75	97.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:28:49 2022	Mon Jun 27 00:28:51 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	163	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	28.725	23.694	629058	1	1	100000	tingxu20220626	6	97.76	97.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:28:44 2022	Mon Jun 27 00:28:46 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	162	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.714	23.696	626513	1	1	100000	tingxu20220626	6	97.78	97.77	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:28:39 2022	Mon Jun 27 00:28:41 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	161	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.676	23.694	663614	1	1	100000	tingxu20220626	6	97.79	97.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:28:34 2022	Mon Jun 27 00:28:36 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	160	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.708	23.688	617969	1	1	100000	tingxu20220626	6	97.81	97.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A329_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:28:29 2022	Mon Jun 27 00:28:32 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	159	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.682	23.687	650132	1	1	100000	tingxu20220626	6	97.82	97.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:28:23 2022	Mon Jun 27 00:28:26 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	158	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.379	-273.150	28.706	23.687	629972	1	1	100000	tingxu20220626	6	97.84	97.83	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:28:08 2022	Mon Jun 27 00:28:11 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	157	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.714	23.683	651514	1	1	100000	tingxu20220626	6	97.89	97.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:28:04 2022	Mon Jun 27 00:28:06 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	156	00	25.00	25.00	25.00	25.02	25.000	25.000	25.000	0.000	-273.150	28.741	23.696	646516	1	1	100000	tingxu20220626	6	97.90	97.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:27:59 2022	Mon Jun 27 00:28:01 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	155	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	0.000	28.764	23.690	612190	1	1	100000	tingxu20220626	6	97.92	97.91	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:27:53 2022	Mon Jun 27 00:27:56 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	154	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.717	23.697	626002	1	1	100000	tingxu20220626	6	97.93	97.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:27:49 2022	Mon Jun 27 00:27:51 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	153	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.766	23.688	627004	1	1	100000	tingxu20220626	6	97.95	97.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:27:44 2022	Mon Jun 27 00:27:46 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	152	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.806	23.687	625658	1	1	100000	tingxu20220626	6	97.96	97.95	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:27:39 2022	Mon Jun 27 00:27:41 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	151	00	25.00	24.99	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.723	23.685	628648	1	1	100000	tingxu20220626	6	97.97	97.97	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:27:34 2022	Mon Jun 27 00:27:37 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	150	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	0.000	28.718	23.689	628492	1	1	100000	tingxu20220626	6	97.99	97.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A328_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:27:29 2022	Mon Jun 27 00:27:31 2022	0.000	0.000	0.000	0.000	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	149	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.711	23.689	637339	1	1	100000	tingxu20220626	6	98.01	98.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:26:22 2022	Mon Jun 27 00:26:24 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	147	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.781	23.702	631138	1	1	100000	tingxu20220626	6	98.21	98.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:26:18 2022	Mon Jun 27 00:26:20 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	146	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.383	-273.150	28.677	0.000	634117	1	1	100000	tingxu20220626	6	98.22	98.22	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:26:13 2022	Mon Jun 27 00:26:15 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	145	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	0.000	-273.150	28.750	23.691	626824	1	1	100000	tingxu20220626	6	98.24	98.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:26:08 2022	Mon Jun 27 00:26:11 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	144	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.727	23.695	629637	1	1	100000	tingxu20220626	6	98.25	98.25	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:26:03 2022	Mon Jun 27 00:26:06 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	143	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.769	23.691	522129	1	1	100000	tingxu20220626	6	98.27	98.26	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:25:59 2022	Mon Jun 27 00:26:01 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	142	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.728	23.687	632093	1	1	100000	tingxu20220626	6	98.28	98.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A327_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:25:54 2022	Mon Jun 27 00:25:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	141	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.799	0.000	629245	1	1	100000	tingxu20220626	6	98.30	98.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:25:48 2022	Mon Jun 27 00:25:51 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	140	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.744	23.695	574598	1	1	100000	tingxu20220626	6	98.32	98.31	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:25:43 2022	Mon Jun 27 00:25:46 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	139	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.761	23.697	656835	1	1	100000	tingxu20220626	6	98.33	98.32	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:25:39 2022	Mon Jun 27 00:25:41 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	138	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	0.000	23.697	631711	1	1	100000	tingxu20220626	6	98.35	98.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:25:30 2022	Mon Jun 27 00:25:32 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	137	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.793	0.000	634834	1	1	100000	tingxu20220626	6	98.37	98.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:25:25 2022	Mon Jun 27 00:25:27 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	136	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.787	23.686	623732	1	1	100000	tingxu20220626	6	98.39	98.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:25:20 2022	Mon Jun 27 00:25:23 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	135	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.764	23.691	644453	1	1	100000	tingxu20220626	6	98.40	98.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:25:16 2022	Mon Jun 27 00:25:18 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	134	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.744	23.691	632487	1	1	100000	tingxu20220626	6	98.42	98.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:25:11 2022	Mon Jun 27 00:25:13 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	133	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.764	23.691	650939	1	1	100000	tingxu20220626	6	98.43	98.42	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:25:04 2022	Mon Jun 27 00:25:07 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	132	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.735	0.000	648178	1	1	100000	tingxu20220626	6	98.45	98.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A326_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:25:00 2022	Mon Jun 27 00:25:02 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	131	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.703	23.687	640514	1	1	100000	tingxu20220626	6	98.47	98.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:24:54 2022	Mon Jun 27 00:24:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	130	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.802	23.683	632641	1	1	100000	tingxu20220626	6	98.48	98.48	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:24:49 2022	Mon Jun 27 00:24:52 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	129	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.724	23.686	631417	1	1	100000	tingxu20220626	6	98.50	98.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:24:44 2022	Mon Jun 27 00:24:47 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	128	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.749	0.000	651471	1	1	100000	tingxu20220626	6	98.51	98.51	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:24:40 2022	Mon Jun 27 00:24:42 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	127	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.379	0.000	28.687	23.684	633711	1	1	100000	tingxu20220626	6	98.53	98.52	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:24:35 2022	Mon Jun 27 00:24:37 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	126	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	28.743	23.688	630462	1	1	100000	tingxu20220626	6	98.54	98.54	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:24:26 2022	Mon Jun 27 00:24:28 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	125	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.799	23.691	633049	1	1	100000	tingxu20220626	6	98.57	98.57	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:24:21 2022	Mon Jun 27 00:24:23 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	124	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.752	0.000	643112	1	1	100000	tingxu20220626	6	98.59	98.58	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:24:16 2022	Mon Jun 27 00:24:19 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	123	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	28.703	23.685	631033	1	1	100000	tingxu20220626	6	98.60	98.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:24:11 2022	Mon Jun 27 00:24:14 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	122	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.743	23.690	632975	1	1	100000	tingxu20220626	6	98.62	98.61	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A325_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:24:06 2022	Mon Jun 27 00:24:09 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	121	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.384	-273.150	28.821	23.691	626387	1	1	100000	tingxu20220626	6	98.63	98.62	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:24:00 2022	Mon Jun 27 00:24:03 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	120	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.836	23.698	633753	1	1	100000	tingxu20220626	6	98.65	98.64	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:23:54 2022	Mon Jun 27 00:23:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	119	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.747	0.000	635942	1	1	100000	tingxu20220626	6	98.67	98.67	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:23:49 2022	Mon Jun 27 00:23:52 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	118	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.719	23.690	630839	1	1	100000	tingxu20220626	6	98.69	98.68	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:23:45 2022	Mon Jun 27 00:23:47 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	117	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.382	-273.150	28.816	23.684	631760	1	1	100000	tingxu20220626	6	98.70	98.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:23:40 2022	Mon Jun 27 00:23:42 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	116	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.741	23.689	634434	1	1	100000	tingxu20220626	6	98.72	98.71	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:23:35 2022	Mon Jun 27 00:23:38 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	115	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.382	0.000	28.759	23.702	637665	1	1	100000	tingxu20220626	6	98.73	98.72	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:23:30 2022	Mon Jun 27 00:23:33 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	114	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.697	23.702	631178	1	1	100000	tingxu20220626	6	98.75	98.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:23:26 2022	Mon Jun 27 00:23:28 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	113	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.760	23.694	629609	1	1	100000	tingxu20220626	6	98.76	98.75	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:23:20 2022	Mon Jun 27 00:23:22 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	112	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.788	23.696	634326	1	1	100000	tingxu20220626	6	98.78	98.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A324_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:23:15 2022	Mon Jun 27 00:23:18 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	111	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.712	0.000	630374	1	1	100000	tingxu20220626	6	98.79	98.78	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:23:09 2022	Mon Jun 27 00:23:12 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	110	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.787	23.687	554331	1	1	100000	tingxu20220626	6	98.81	98.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:23:04 2022	Mon Jun 27 00:23:06 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	109	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.381	-273.150	28.819	23.686	647749	1	1	100000	tingxu20220626	6	98.83	98.82	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:22:59 2022	Mon Jun 27 00:23:01 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	108	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.384	-273.150	28.760	23.693	634184	1	1	100000	tingxu20220626	6	98.84	98.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:22:50 2022	Mon Jun 27 00:22:52 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	107	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.384	-273.150	28.802	23.687	635374	1	1	100000	tingxu20220626	6	98.87	98.86	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:22:45 2022	Mon Jun 27 00:22:48 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	106	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.764	0.000	633821	1	1	100000	tingxu20220626	6	98.89	98.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:22:40 2022	Mon Jun 27 00:22:43 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	105	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.773	23.688	634146	1	1	100000	tingxu20220626	6	98.90	98.89	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:22:36 2022	Mon Jun 27 00:22:38 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	104	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	0.000	28.780	23.687	628823	1	1	100000	tingxu20220626	6	98.91	98.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:22:31 2022	Mon Jun 27 00:22:33 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	103	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.384	-273.150	28.788	23.687	636783	1	1	100000	tingxu20220626	6	98.93	98.92	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:22:26 2022	Mon Jun 27 00:22:29 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	102	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	0.000	28.769	23.691	631672	1	1	100000	tingxu20220626	6	98.95	98.94	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A323_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:22:17 2022	Mon Jun 27 00:22:19 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	101	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.791	23.691	634083	1	1	100000	tingxu20220626	6	98.98	98.97	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:22:11 2022	Mon Jun 27 00:22:14 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	100	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.761	0.000	657764	1	1	100000	tingxu20220626	6	98.99	98.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:22:07 2022	Mon Jun 27 00:22:09 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	99	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.826	23.686	636593	1	1	100000	tingxu20220626	6	99.01	99.00	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:22:02 2022	Mon Jun 27 00:22:04 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	98	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.803	0.000	637824	1	1	100000	tingxu20220626	6	99.02	99.02	0.001	0.001	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:21:57 2022	Mon Jun 27 00:21:59 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	97	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.382	-273.150	28.742	23.695	632627	1	1	100000	tingxu20220626	6	99.04	99.03	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:21:52 2022	Mon Jun 27 00:21:55 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	96	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	0.000	28.722	23.695	644447	1	1	100000	tingxu20220626	6	99.05	99.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:21:44 2022	Mon Jun 27 00:21:47 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	95	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.827	23.690	642934	1	1	100000	tingxu20220626	6	99.08	99.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:21:39 2022	Mon Jun 27 00:21:41 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	94	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.797	23.682	634051	1	1	100000	tingxu20220626	6	99.10	99.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:21:34 2022	Mon Jun 27 00:21:37 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	93	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	28.728	0.000	638461	1	1	100000	tingxu20220626	6	99.11	99.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:21:29 2022	Mon Jun 27 00:21:32 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	92	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.691	23.672	634347	1	1	100000	tingxu20220626	6	99.13	99.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A322_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:21:25 2022	Mon Jun 27 00:21:27 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	91	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.716	0.000	646488	1	1	100000	tingxu20220626	6	99.14	99.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:21:19 2022	Mon Jun 27 00:21:22 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	90	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.379	-273.150	28.714	23.682	637047	1	1	100000	tingxu20220626	6	99.16	99.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:21:14 2022	Mon Jun 27 00:21:17 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	89	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.750	23.693	655582	1	1	100000	tingxu20220626	6	99.17	99.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:21:10 2022	Mon Jun 27 00:21:12 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	88	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.379	-273.150	28.733	23.693	642729	1	1	100000	tingxu20220626	6	99.19	99.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:21:04 2022	Mon Jun 27 00:21:06 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	87	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	0.000	-273.150	28.724	23.696	636439	1	1	100000	tingxu20220626	6	99.20	99.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:20:59 2022	Mon Jun 27 00:21:01 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	86	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.379	0.000	28.664	23.711	636462	1	1	100000	tingxu20220626	6	99.22	99.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:20:54 2022	Mon Jun 27 00:20:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	85	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.741	23.709	636350	1	1	100000	tingxu20220626	6	99.23	99.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:20:49 2022	Mon Jun 27 00:20:52 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	84	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	0.000	28.743	23.706	634350	1	1	100000	tingxu20220626	6	99.25	99.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:20:40 2022	Mon Jun 27 00:20:43 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	83	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.744	0.000	634074	1	1	100000	tingxu20220626	6	99.28	99.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:20:35 2022	Mon Jun 27 00:20:38 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	82	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.731	23.685	639630	1	1	100000	tingxu20220626	6	99.29	99.28	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A321_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:20:31 2022	Mon Jun 27 00:20:33 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	81	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.378	-273.150	28.724	23.683	648662	1	1	100000	tingxu20220626	6	99.31	99.30	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:20:25 2022	Mon Jun 27 00:20:27 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	80	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.732	23.669	637140	1	1	100000	tingxu20220626	6	99.32	99.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:20:20 2022	Mon Jun 27 00:20:23 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	79	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.736	23.681	637328	1	1	100000	tingxu20220626	6	99.34	99.33	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:20:16 2022	Mon Jun 27 00:20:18 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	78	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.781	23.682	639144	1	1	100000	tingxu20220626	6	99.35	99.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:20:11 2022	Mon Jun 27 00:20:13 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	77	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.721	23.678	636627	1	1	100000	tingxu20220626	6	99.37	99.36	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:20:03 2022	Mon Jun 27 00:20:06 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	76	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.380	0.000	28.756	23.700	558101	1	1	100000	tingxu20220626	6	99.39	99.38	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:19:58 2022	Mon Jun 27 00:20:01 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	75	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.378	0.000	28.739	23.695	636963	1	1	100000	tingxu20220626	6	99.41	99.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:19:54 2022	Mon Jun 27 00:19:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	74	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.724	0.000	636967	1	1	100000	tingxu20220626	6	99.42	99.41	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:19:49 2022	Mon Jun 27 00:19:51 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	73	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	0.000	28.738	23.703	661081	1	1	100000	tingxu20220626	6	99.44	99.43	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:19:44 2022	Mon Jun 27 00:19:46 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	72	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.715	23.699	645628	1	1	100000	tingxu20220626	6	99.45	99.44	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A320_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:19:35 2022	Mon Jun 27 00:19:38 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	71	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	-273.150	28.726	23.697	637401	1	1	100000	tingxu20220626	6	99.48	99.47	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:19:30 2022	Mon Jun 27 00:19:32 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	70	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.826	23.698	647533	1	1	100000	tingxu20220626	6	99.49	99.49	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:19:25 2022	Mon Jun 27 00:19:27 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	69	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.782	23.696	634439	1	1	100000	tingxu20220626	6	99.51	99.50	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:19:20 2022	Mon Jun 27 00:19:23 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	68	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	0.000	28.718	23.699	638800	1	1	100000	tingxu20220626	6	99.53	99.52	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:19:15 2022	Mon Jun 27 00:19:18 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	67	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	28.730	23.687	640082	1	1	100000	tingxu20220626	6	99.54	99.53	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:19:11 2022	Mon Jun 27 00:19:13 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	66	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.794	23.707	658780	1	1	100000	tingxu20220626	6	99.55	99.55	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:19:02 2022	Mon Jun 27 00:19:05 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	65	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.747	23.708	638639	1	1	100000	tingxu20220626	6	99.58	99.57	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:18:57 2022	Mon Jun 27 00:19:00 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	64	00	25.00	24.99	25.00	24.99	25.000	25.000	25.000	27.381	-273.150	28.720	23.696	632343	1	1	100000	tingxu20220626	6	99.60	99.59	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:18:52 2022	Mon Jun 27 00:18:55 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	63	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.785	23.691	665088	1	1	100000	tingxu20220626	6	99.61	99.60	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:18:48 2022	Mon Jun 27 00:18:50 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	62	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.381	0.000	28.755	23.695	640608	1	1	100000	tingxu20220626	6	99.62	99.62	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A319_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:18:43 2022	Mon Jun 27 00:18:45 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	61	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.733	23.696	635485	1	1	100000	tingxu20220626	6	99.64	99.63	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:18:37 2022	Mon Jun 27 00:18:40 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	60	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.382	-273.150	28.763	23.687	647374	1	1	100000	tingxu20220626	6	99.66	99.65	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:18:32 2022	Mon Jun 27 00:18:35 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	59	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.743	23.682	640713	1	1	100000	tingxu20220626	6	99.67	99.67	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:18:27 2022	Mon Jun 27 00:18:30 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	58	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.757	23.701	637861	1	1	100000	tingxu20220626	6	99.69	99.68	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:18:22 2022	Mon Jun 27 00:18:25 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	57	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.699	0.000	886831	1	1	100000	tingxu20220626	6	99.71	99.69	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:18:17 2022	Mon Jun 27 00:18:19 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	56	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.751	23.691	654108	1	1	100000	tingxu20220626	6	99.72	99.72	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:18:12 2022	Mon Jun 27 00:18:14 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	55	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.740	23.682	636509	1	1	100000	tingxu20220626	6	99.74	99.73	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:18:07 2022	Mon Jun 27 00:18:10 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	54	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.382	-273.150	28.774	23.688	633444	1	1	100000	tingxu20220626	6	99.75	99.74	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:17:58 2022	Mon Jun 27 00:18:01 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	53	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.382	-273.150	28.726	23.691	637560	1	1	100000	tingxu20220626	6	99.78	99.77	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:17:54 2022	Mon Jun 27 00:17:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	52	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.746	23.700	638174	1	1	100000	tingxu20220626	6	99.79	99.79	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A318_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:17:49 2022	Mon Jun 27 00:17:51 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	51	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.706	23.681	635995	1	1	100000	tingxu20220626	6	99.81	99.80	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:17:43 2022	Mon Jun 27 00:17:46 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	50	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	0.000	28.728	23.678	634749	1	1	100000	tingxu20220626	6	99.82	99.81	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:17:38 2022	Mon Jun 27 00:17:41 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	49	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.383	-273.150	28.765	23.687	638710	1	1	100000	tingxu20220626	6	99.84	99.84	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:17:33 2022	Mon Jun 27 00:17:35 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	48	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.386	-273.150	28.739	0.000	610041	1	1	100000	tingxu20220626	6	99.86	99.85	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:17:28 2022	Mon Jun 27 00:17:31 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	47	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.385	0.000	0.000	23.684	635361	1	1	100000	tingxu20220626	6	99.87	99.87	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:17:23 2022	Mon Jun 27 00:17:26 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	46	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.384	-273.150	28.736	23.683	639916	1	1	100000	tingxu20220626	6	99.89	99.88	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:17:19 2022	Mon Jun 27 00:17:21 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	45	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.384	-273.150	28.774	23.685	641379	1	1	100000	tingxu20220626	6	99.90	99.90	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:17:14 2022	Mon Jun 27 00:17:16 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	44	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.384	-273.150	28.735	23.683	640150	1	1	100000	tingxu20220626	6	99.92	99.91	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:17:09 2022	Mon Jun 27 00:17:11 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	43	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.384	-273.150	28.769	23.683	637252	1	1	100000	tingxu20220626	6	99.93	99.93	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:17:04 2022	Mon Jun 27 00:17:07 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	42	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	0.000	28.825	23.692	634918	1	1	100000	tingxu20220626	6	99.95	99.94	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A317_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:16:59 2022	Mon Jun 27 00:17:02 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	41	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.382	-273.150	28.777	23.682	653363	1	1	100000	tingxu20220626	6	99.96	99.96	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:16:52 2022	Mon Jun 27 00:16:55 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	40	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.381	-273.150	28.750	23.685	646045	1	1	100000	tingxu20220626	6	99.98	99.98	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:16:47 2022	Mon Jun 27 00:16:50 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	39	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.380	-273.150	28.677	23.689	634207	1	1	100000	tingxu20220626	6	100.00	99.99	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:16:43 2022	Mon Jun 27 00:16:45 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	38	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	-273.150	28.680	23.685	636148	1	1	100000	tingxu20220626	6	100.02	100.01	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:16:38 2022	Mon Jun 27 00:16:40 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	37	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.380	0.000	28.700	23.689	674329	1	1	100000	tingxu20220626	6	100.03	100.02	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:16:33 2022	Mon Jun 27 00:16:35 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	36	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	28.731	23.682	626893	1	1	100000	tingxu20220626	6	100.05	100.04	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:16:28 2022	Mon Jun 27 00:16:31 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	35	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.379	-273.150	28.693	23.677	634935	1	1	100000	tingxu20220626	6	100.06	100.05	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:16:23 2022	Mon Jun 27 00:16:26 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	34	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.712	23.676	626644	1	1	100000	tingxu20220626	6	100.08	100.07	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:16:18 2022	Mon Jun 27 00:16:21 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	33	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	-273.150	28.788	23.694	661606	1	1	100000	tingxu20220626	6	100.09	100.09	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:16:14 2022	Mon Jun 27 00:16:16 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	32	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.379	-273.150	0.000	23.691	638106	1	1	100000	tingxu20220626	6	100.11	100.10	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A316_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:16:09 2022	Mon Jun 27 00:16:11 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	31	00	25.00	24.99	25.00	25.00	25.000	25.000	25.000	27.378	-273.150	28.734	23.687	631953	1	1	100000	tingxu20220626	6	100.12	100.12	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:16:03 2022	Mon Jun 27 00:16:06 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	30	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	-273.150	28.724	23.692	549837	1	1	100000	tingxu20220626	6	100.14	100.13	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:15:58 2022	Mon Jun 27 00:16:01 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	29	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	-273.150	28.715	23.704	638605	1	1	100000	tingxu20220626	6	100.16	100.15	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:15:54 2022	Mon Jun 27 00:15:56 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	28	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.376	-273.150	28.760	23.707	630304	1	1	100000	tingxu20220626	6	100.16	100.17	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:15:48 2022	Mon Jun 27 00:15:50 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	27	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.374	-273.150	28.687	23.699	645171	1	1	100000	tingxu20220626	6	100.19	100.18	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:15:43 2022	Mon Jun 27 00:15:45 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	26	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.377	-273.150	28.705	23.699	644878	1	1	100000	tingxu20220626	6	100.21	100.20	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:15:38 2022	Mon Jun 27 00:15:41 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	25	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.377	-273.150	28.792	23.703	638104	1	1	100000	tingxu20220626	6	100.22	100.21	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:15:33 2022	Mon Jun 27 00:15:36 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	24	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.666	23.699	553585	1	1	100000	tingxu20220626	6	100.24	100.23	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:15:28 2022	Mon Jun 27 00:15:31 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	23	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.375	0.000	28.755	23.699	645834	1	1	100000	tingxu20220626	6	100.25	100.24	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:15:23 2022	Mon Jun 27 00:15:26 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	22	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.374	-273.150	28.770	23.707	645436	1	1	100000	tingxu20220626	6	100.27	100.26	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A315_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:15:18 2022	Mon Jun 27 00:15:21 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	21	00	25.00	25.01	25.00	25.01	25.000	25.000	25.000	27.376	-273.150	28.742	23.704	665282	1	1	100000	tingxu20220626	6	100.28	100.27	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00010	Mon Jun 27 00:15:13 2022	Mon Jun 27 00:15:15 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	20	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.377	-273.150	28.740	0.000	634643	1	1	100000	tingxu20220626	6	100.30	100.29	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00009	Mon Jun 27 00:15:08 2022	Mon Jun 27 00:15:10 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	19	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	28.722	0.000	634084	1	1	100000	tingxu20220626	6	100.32	100.31	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00008	Mon Jun 27 00:15:03 2022	Mon Jun 27 00:15:05 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	18	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.376	-273.150	0.000	23.717	633667	1	1	100000	tingxu20220626	6	100.33	100.32	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00007	Mon Jun 27 00:14:58 2022	Mon Jun 27 00:15:00 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	17	00	25.00	25.01	25.00	25.00	25.000	25.000	25.000	27.379	0.000	28.735	23.711	644646	1	1	100000	tingxu20220626	6	100.35	100.34	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00006	Mon Jun 27 00:14:53 2022	Mon Jun 27 00:14:55 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	16	00	25.00	25.00	25.00	25.00	25.000	25.000	25.000	27.381	-273.150	28.704	23.706	633426	1	1	100000	tingxu20220626	6	100.36	100.35	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00005	Mon Jun 27 00:14:48 2022	Mon Jun 27 00:14:50 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	15	00	25.00	25.00	25.00	25.01	25.000	25.000	25.000	27.379	-273.150	28.709	23.702	607638	1	1	100000	tingxu20220626	6	100.38	100.37	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00004	Mon Jun 27 00:14:43 2022	Mon Jun 27 00:14:46 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	14	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.379	-273.150	28.682	0.000	625666	1	1	100000	tingxu20220626	6	100.40	100.39	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00003	Mon Jun 27 00:14:38 2022	Mon Jun 27 00:14:41 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	13	00	25.00	25.00	25.00	24.99	25.000	25.000	25.000	27.379	-273.150	28.741	23.694	635261	1	1	100000	tingxu20220626	6	100.41	100.40	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00002	Mon Jun 27 00:14:33 2022	Mon Jun 27 00:14:36 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	12	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.380	-273.150	0.000	23.690	668312	1	1	100000	tingxu20220626	6	100.43	100.42	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
batch_name	start_time	end_time	samx	flyz	samy	samz	sampit	samchi	samth	ti3_x	ti3_z	ccdx	ccdz	current_pos	Attenuation	QNW_Zone1_Set	QNW_Zone1_T	QNW_Zone2_set	QNW_Zone2_T	QNW_Zone3_Set	QNW_Zone3_T	LS_T_Set	LS_T_ChA	LS_T_ChB	LS_T_ChC	LS_T_ChD	I0Mon	Incident_flux	start_frame	end_frame	specfile	scan_num	current_begin	current_end	Vacuum_up	Vacuum_Dn	qmap_filename
A314_Le_20nm_fastdry_att00_Lq0_Rq0_00001	Mon Jun 27 00:14:21 2022	Mon Jun 27 00:14:24 2022	0.000	0.000	0.000	0.200	0.200	0.000	0.000	-10.300	-7.400	-186.995	8.500	11	00	25.00	25.01	25.00	24.99	25.000	25.000	25.000	27.382	-273.150	28.711	23.687	863305	1	1	100000	tingxu20220626	6	100.47	100.46	0.001	0.002	servis202206_Rq0_Log_D27_S270_2.h5
File: tingxu202206_DataLogs	Date: 2022-06-27 08:00:09